JPH0637320B2 - Substrate material for magnetic head - Google Patents
Substrate material for magnetic headInfo
- Publication number
- JPH0637320B2 JPH0637320B2 JP63220937A JP22093788A JPH0637320B2 JP H0637320 B2 JPH0637320 B2 JP H0637320B2 JP 63220937 A JP63220937 A JP 63220937A JP 22093788 A JP22093788 A JP 22093788A JP H0637320 B2 JPH0637320 B2 JP H0637320B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- head
- magnetic head
- substrate material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 23
- 239000000463 material Substances 0.000 title claims description 13
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000000696 magnetic material Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000011162 core material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 この発明は軟磁性金属膜を蒸着して磁気ヘッドを構成す
るための非磁性の磁気ヘッド用基板材料に関するもので
ある。Description: TECHNICAL FIELD The present invention relates to a non-magnetic magnetic head substrate material for forming a magnetic head by depositing a soft magnetic metal film.
従来の技術 従来より磁気ヘッド用コア材として加工性，耐摩耗性が
良いという特長からフェライトが広く使用されている
が、飽和磁束密度Bsが合金材料に比べて３０〜５０％低
い。従って近年登場してきた高抗磁力の高密度記録媒体
に使用した場合、ヘッドコア材料の磁気飽和が問題とな
り、このような観点から高密度記録媒体の対応ヘッドと
してセンダストや非晶質の合金材料がヘッド用コア材料
に供されている。この様な合金材料用基板材料としてチ
タン酸バリウムBaTiO3，やチタン酸カルシウムCaTiO3等
のセラミック材料が提案されていた。2. Description of the Related Art Ferrite has been widely used as a core material for a magnetic head because of its good workability and wear resistance, but the saturation magnetic flux density Bs is 30 to 50% lower than that of alloy materials. Therefore, when it is used in a high-density recording medium with a high coercive force that has recently appeared, magnetic saturation of the head core material becomes a problem. From such a viewpoint, sendust or an amorphous alloy material is used as a head compatible with the high-density recording medium. Is used as a core material for Ceramic materials such as barium titanate BaTiO 3 and calcium titanate CaTiO 3 have been proposed as such substrate materials for alloy materials.
発明が解決しようとする課題 ところが、この様な材料で構成されたセラミック基板で
は、金属磁性材料であるセンダストや非晶質の合金膜
を、蒸着もしくはスパッタリング等により膜形成する時
に、熱膨張係数の違いにより金属膜が剥離するという難
点があった。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in a ceramic substrate composed of such a material, when a sendust or amorphous alloy film which is a metal magnetic material is formed by vapor deposition or sputtering, the thermal expansion coefficient of The difference is that the metal film peels off.
この様な基板材料に対して、熱膨張係数がほぼ合金膜と
等しく、かつ非磁性の基板材料として、露光により結晶
化するLiO,SiO2を主成分とする感光性結晶化ガラスが用
いられている。他方、結晶化ガラスを基板材料として磁
気ヘッドを作製し、市販の塗布型メタルテープによる各
種環境下におけるテープ走行試験をした所、特に低湿環
境でヘッド出力の大きな低下が見られた。出力が低下し
たヘッドのテープしゅう動面を観察したところ、ガラス
基板部に選択的にテープ媒体中の磁性材料の付着物があ
り、その付着物の盛り上りのためにヘッドとテープ間の
ペーシングロスによりヘッド出力が低下したことがわか
った。また高湿環境においては付着物は見られなかった
が、金属磁性材料と基板との摩耗性の違いにより、特に
基板の摩耗量が金属磁性材料に比べ著しく少ない場合に
起る偏摩耗が見られ、同様にヘッド出力の低下があっ
た。For such a substrate material, a photosensitive crystallized glass whose main component is LiO, SiO 2 which crystallizes by exposure is used as a non-magnetic substrate material having a thermal expansion coefficient almost equal to that of an alloy film. There is. On the other hand, when a magnetic head was manufactured using crystallized glass as a substrate material and a tape running test was carried out under various environments using a commercially available coating type metal tape, a large reduction in head output was found especially in a low humidity environment. When observing the tape sliding surface of the head where the output has decreased, there is a deposit of magnetic material in the tape medium selectively on the glass substrate part, and the pacing loss between the head and the tape due to the rise of the deposit. It was found that the head output decreased due to. No deposits were observed in a high-humidity environment, but due to the difference in abradability between the metallic magnetic material and the substrate, uneven wear was observed, especially when the amount of abrasion of the substrate was significantly smaller than that of the metallic magnetic material. Similarly, there was a drop in head output.
以上を総合して磁気ヘッド用基板材料として以下の点が
望まる。Overall, the following points are desired as a magnetic head substrate material.
(1) 金属磁性材料と熱膨張係数が等しいか近いこと。(1) The coefficient of thermal expansion is equal to or close to that of the metallic magnetic material.
(2) 金属磁性材料と等しいか、少し摩耗が少ない程度
の適当な摩耗特性を持っていること。(2) Appropriate wear characteristics equal to or slightly less than the magnetic metal material.
(3) 機械加工性が良いこと。(3) Good machinability.
(4) 非磁性であること。(4) Be non-magnetic.
(5) テープ媒体より付着がないこと。(5) No adhesion from the tape medium.
(6) 熱的安定性が良いこと。(6) Good thermal stability.
以上の全項目を満足する材料が望まれている。Materials that satisfy all the above items are desired.
課題を解決するための手段 ６５〜９０モル％のMnO と、１０〜３５モル％のMO2と
からなる事を特徴とする磁気ヘッド用基板材料とする
（但しＭはTi，Zr及びHfから選ばれた少なくとも一
種）。Means for Solving the Problems A magnetic head substrate material comprising 65 to 90 mol% MnO and 10 to 35 mol% MO 2 (where M is selected from Ti, Zr and Hf). At least one).
作 用 基板と金属磁性材料の熱膨張係数が一致しているので薄
膜作製装置を用いて磁性膜が作製でき、金属磁性材料と
ほぼ等しい摩耗特性が得られ、ヘッド化し磁気テープを
長時間走行させた時に金属磁性材料と基板の摩耗特性の
違いから発生する偏摩耗の心配がない。また低湿環境に
おいても基板表面に付着物は見られなかった。この基板
を用いて作製した磁気ヘッドにおいては安定した出力が
得られる。Since the thermal expansion coefficient of the work substrate and that of the metal magnetic material are the same, a magnetic film can be produced using a thin-film production equipment, wear characteristics almost equal to those of the metal magnetic material can be obtained, and a magnetic tape can be made into a head and run for a long time. There is no concern about uneven wear caused by the difference in wear characteristics between the metallic magnetic material and the substrate. No deposit was found on the substrate surface even in a low humidity environment. A stable output can be obtained in a magnetic head manufactured using this substrate.
実施例 実施例１ 第１表に示した組成になる様にMnCO3,TiO2を秤量しボー
ルミルで16時間混合した後、乾燥し水をバインダーとし
て加え、静水圧プレス 2 ton／cm2で成形した後、窒素
ガス雰囲気中で1300℃，４時間保持し炉冷した。この焼
結体を熱間静水圧プレスで1150℃２時間，1000kg／cm2
の圧力を施した後炉冷した。Examples Example 1 MnCO 3 and TiO 2 were weighed so as to have the composition shown in Table 1, mixed in a ball mill for 16 hours, dried, and water was added as a binder, followed by isostatic pressing 2 ton / cm 2 . After that, the furnace was cooled by holding it at 1300 ° C. for 4 hours in a nitrogen gas atmosphere. This sintered body was hot isostatically pressed at 1150 ° C for 2 hours and 1000 kg / cm 2
After applying the pressure of 1, the furnace was cooled.
こうして得られた焼結体の熱膨張係数を第１表に、同時
に各々の組成の基板にスパッターで非晶質合金（Co-Nb-
Zr）をスパッター装置により形成した後、ヘッドを作製
し、これらのヘッドをビデオテープレコーダに取り付け
市販の塗布型メタルテープを用いて、例えば２３℃，７
０％相対湿度での、第１図に示されるような偏摩耗量δ
やヘッド出力を合わせて示した。偏摩耗量δは、基板１
の先端から、金属磁性材料２が凹んだ量である。ヘッド
出力はテープ走行後１時間後の出力をＯdBとし各々５０
０時間テープ走行後の出力を示している。また比較例し
て結晶化ガラスの例も示した。第１表より明らかなよう
にTiO2量を調整することにより望む熱膨張係数が得られ
る。また偏摩耗量もTiO2の量によらず、ほとんどなくヘ
ッド出力の低下も無視できる程度であった。結晶化ガラ
スは偏摩耗の為、実用上問題となる大きな出力低下が見
られた。また、低湿環境においても第１表に示すMn-Ti
系の組成においては、結晶化ガラス基板で見られた付着
現象は全く見られなかった。またその他、基板に求めら
れる条件も全て満たすものである。 The coefficient of thermal expansion of the sintered body thus obtained is shown in Table 1, and at the same time, the amorphous alloy (Co-Nb-
Zr) is formed by a sputtering device, heads are manufactured, these heads are attached to a video tape recorder, and commercially available coating type metal tapes are used.
Unbalanced wear amount δ as shown in FIG. 1 at 0% relative humidity
The head output is also shown. The uneven wear amount δ is the substrate 1
The amount of the metallic magnetic material 2 recessed from the tip of the. The head output is 50 dB for each one hour after the tape has run for OdB.
The output is shown after running the tape for 0 hours. As a comparative example, an example of crystallized glass is also shown. As is clear from Table 1, the desired coefficient of thermal expansion can be obtained by adjusting the amount of TiO 2 . The uneven wear amount was almost independent of the amount of TiO 2 , and the decrease in head output was negligible. Due to uneven wear of the crystallized glass, a large reduction in output was observed, which is a problem in practical use. Even in a low humidity environment, Mn-Ti shown in Table 1
In the composition of the system, the adhesion phenomenon seen on the crystallized glass substrate was not seen at all. In addition, it also satisfies all the conditions required for the substrate.
実施例２ 組成をMnO ７３モル％，MO2２７モル％とし、Ｍとして
第２表に示した元素を用いる実施例１と同様に作製し評
価した。なお表には示さなかったが熱膨張係数は全て１
００〜125×10-7／℃の範囲にあり、実施例１と同様に
比較例として結晶化ガラスについても示した。Example 2 A composition was prepared and evaluated in the same manner as in Example 1 in which the composition was 73 mol% of MnO and 27 mol% of MO 2 and M was an element shown in Table 2. Although not shown in the table, the coefficients of thermal expansion are all 1
It is in the range of 0 to 125 × 10 −7 / ° C., and similarly to Example 1, a crystallized glass is also shown as a comparative example.
第２表より明らかなように偏摩耗量はいずれも少なく結
晶化ガラス以下である。実施例のTiO2の場合と同様，低
湿時の付着もなかった。MO2を１０〜３５モル％と限定
したものは１０以下もしくは３５以上では熱膨張係数が
100〜125×10-7／℃の範囲外になるため非晶質合金をス
パッター装置等により蒸着すると合金膜が剥離する恐れ
がある為である。また本発明ではMnO-MO2を主成分とし
（但しＭはTi,Zr,Hfから選ばれた少なくとも一種）、数
％内のレベルでの他の元素の混入は熱膨張係数及び摩耗
特性が損なわれなければ許されるものである。As is clear from Table 2, the amount of uneven wear is less than that of crystallized glass. Similar to the case of TiO 2 in the example, there was no adhesion at low humidity. When the MO 2 content is limited to 10 to 35 mol%, the thermal expansion coefficient is 10 or less or 35 or more.
This is because the range of 100 to 125 × 10 −7 / ° C. is not reached, and if the amorphous alloy is vapor-deposited by a sputtering device or the like, the alloy film may peel off. Further, in the present invention, MnO-MO 2 is the main component (provided that M is at least one selected from Ti, Zr, and Hf), and the incorporation of other elements at a level within a few percent impairs the thermal expansion coefficient and wear characteristics. If not, it is allowed.
又、非晶質合金膜としてはメタル−メタル系であるCo-M
(ＭはNb,Ti,Ta,Zr,W等の金属元素）やCo-M1-M2（M1,M2
は上記Ｍで示された金属元素）はもとよりSi,B,C,Pを含
むメタル−メタロイド系等についても特に不都合はな
い。 In addition, Co-M, which is a metal-metal type, is used as the amorphous alloy film.
(M is a metal element such as Nb, Ti, Ta, Zr, W) or Co-M 1 -M 2 (M 1 , M 2
Is not particularly inconvenient not only for the metal element represented by M above) but also for a metal-metalloid system containing Si, B, C, P and the like.
発明の効果 本発明による基板材料は、従来の結晶化ガラスに比べて
非晶質合金に摩耗性が近いなどから偏摩耗の心配がな
い。また磁気テープからの付着現象も起らず、そのため
ヘッド出力が安定して得られる。他方、熱膨張係数も非
晶質合金とほぼ同じであるのでスパッター装置等により
蒸着しても合金膜が剥離する心配がない。EFFECTS OF THE INVENTION The substrate material according to the present invention has a wear property closer to that of an amorphous alloy than that of a conventional crystallized glass, so that there is no fear of uneven wear. Further, the sticking phenomenon from the magnetic tape does not occur, so that the head output can be stably obtained. On the other hand, since the coefficient of thermal expansion is almost the same as that of the amorphous alloy, there is no fear that the alloy film will be peeled off even if it is vapor-deposited by a sputtering device or the like.
図は磁気ヘッドにおける偏摩耗量を示すための磁気ヘッ
ドのテープ摺動面の断面図である。 １……基板、２……金属磁性材料。The figure is a cross-sectional view of the tape sliding surface of the magnetic head for showing the amount of uneven wear in the magnetic head. 1 ... Substrate, 2 ... Metal magnetic material.
Claims (2)
ル％のMO2とからなることを特徴とする磁気ヘッド用基
板材料（但しＭはTi，Zr及びHfから選ばれた少なくとも
一種）。1. A magnetic head substrate material comprising 65 to 90 mol% MnO and 10 to 35 mol% MO 2 , wherein M is at least one selected from Ti, Zr and Hf. ).
とを特徴とする特許請求の範囲第１項記載の磁気ヘッド
用基板材料。2. The magnetic head substrate material according to claim 1, wherein the thermal expansion coefficient is 100 to 125 × 10 −7 / ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63220937A JPH0637320B2 (en) | 1988-09-02 | 1988-09-02 | Substrate material for magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63220937A JPH0637320B2 (en) | 1988-09-02 | 1988-09-02 | Substrate material for magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0269345A JPH0269345A (en) | 1990-03-08 |
| JPH0637320B2 true JPH0637320B2 (en) | 1994-05-18 |
Family
ID=16758896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63220937A Expired - Lifetime JPH0637320B2 (en) | 1988-09-02 | 1988-09-02 | Substrate material for magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0637320B2 (en) |
-
1988
- 1988-09-02 JP JP63220937A patent/JPH0637320B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0269345A (en) | 1990-03-08 |
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