JPH0638287B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0638287B2 JPH0638287B2 JP5165987A JP5165987A JPH0638287B2 JP H0638287 B2 JPH0638287 B2 JP H0638287B2 JP 5165987 A JP5165987 A JP 5165987A JP 5165987 A JP5165987 A JP 5165987A JP H0638287 B2 JPH0638287 B2 JP H0638287B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- protective layer
- magnetic recording
- recording medium
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 32
- 239000010410 layer Substances 0.000 claims description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 21
- 239000011241 protective layer Substances 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 18
- 239000000314 lubricant Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000001050 lubricating effect Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 12
- 229910052804 chromium Inorganic materials 0.000 claims description 11
- 229910052748 manganese Inorganic materials 0.000 claims description 11
- 229910052758 niobium Inorganic materials 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 11
- 229910052720 vanadium Inorganic materials 0.000 claims description 11
- 229910052750 molybdenum Inorganic materials 0.000 claims description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 9
- 239000011737 fluorine Substances 0.000 claims description 9
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- -1 fluorine-substituted ethylene compound Chemical class 0.000 description 13
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229920001577 copolymer Polymers 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 235000021317 phosphate Nutrition 0.000 description 3
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- QMPFHXBJTOSIKB-UHFFFAOYSA-N 2,2,3-trifluoro-3-(1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctyl)oxirane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)OC1(F)F QMPFHXBJTOSIKB-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020710 Co—Sm Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910017110 Fe—Cr—Co Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 239000010775 animal oil Substances 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- WTSTWJMWBBUFJP-UHFFFAOYSA-N octadecyl 2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-pentadecafluorooctanoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F WTSTWJMWBBUFJP-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920005670 poly(ethylene-vinyl chloride) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
Landscapes
- Paints Or Removers (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 〔専業上の利用分野〕 本発明は金属薄膜型磁気記録媒体、特に走行耐久性が改
良された金属薄膜型磁気記録媒体に関する。Description: TECHNICAL FIELD The present invention relates to a metal thin film magnetic recording medium, and more particularly to a metal thin film magnetic recording medium having improved running durability.
近年、記録媒体の高密度化に伴い、従来の塗布型磁気記
録媒体に替わって、いわゆる金属薄膜型磁気記録媒体が
注目されるようになってきた。In recent years, with the increasing density of recording media, so-called metal thin film type magnetic recording media have been attracting attention in place of conventional coating type magnetic recording media.
しかし、金属薄膜型磁気記録媒体は、従来の塗布型磁気
記録媒体のように潤滑剤や研磨剤を磁性層中に混入させ
ることが困難なので、一般に走行耐久性が極めて悪く、
例えばCo−Cr合金膜を設けた垂直磁気記録ディスク
の場合100回程度の走行パスで表面の合金層とヘッド
との間で凝着等が生じて走行不能になることが多い。However, in the metal thin film magnetic recording medium, it is difficult to mix a lubricant or an abrasive into the magnetic layer like a conventional coating type magnetic recording medium, so that the running durability is generally extremely poor,
For example, in the case of a perpendicular magnetic recording disk provided with a Co—Cr alloy film, adhesion often occurs between the alloy layer on the surface and the head after about 100 travel passes, which makes traveling impossible.
そこで、このような問題を解決するために、液体潤滑剤
を磁気層表面に塗布したり、固体保護層を磁性層表面に
設けることが提案されている。この中では、固体潤滑剤
であるカーボンを主成分とする保護層を磁性層表面に設
けることが特に走行耐久性向上に効果があることが知ら
れている(特公昭54−33521号公報)。Therefore, in order to solve such a problem, it has been proposed to apply a liquid lubricant to the magnetic layer surface or to provide a solid protective layer on the magnetic layer surface. Among them, it is known that providing a protective layer containing carbon as a solid lubricant as a main component on the surface of the magnetic layer is particularly effective for improving running durability (Japanese Patent Publication No. 54-33521).
しかしながら、このようなカーボンを主成分とする保護
層を磁性金属薄膜表面に設けてもなお走行耐久性は充分
でない。このことは主にヘッドに生じた付着物が保護層
との摩擦係数を増大させることに起因する。However, even if such a protective layer containing carbon as a main component is provided on the surface of the magnetic metal thin film, the running durability is still insufficient. This is mainly because the deposits on the head increase the coefficient of friction with the protective layer.
本発明の目的はヘッドに付着物が生ぜず、なおかつ潤滑
性に優れ、従って走行耐久性が著しく改良された金属薄
膜型磁気記録媒体を提供することにある。An object of the present invention is to provide a metal thin film type magnetic recording medium in which deposits are not formed on the head and which is excellent in lubricity and therefore has significantly improved running durability.
前記問題点は、磁性金属薄膜表面にCr、Mn、Mo、
Nb、Ta、Ti、V、およびWから選ばれる少なくと
も一種を含有するグラファイト状カーボンを主成分とす
る保護層を設け、さらにその上に、フッ素潤滑剤を含有
する潤滑層を設けることによって すなわち、グラファイト状カーボンを主成分とする保護
層では潤滑性には優れるものの、ヘッドに付着物を生じ
やすく、一旦付着物を生じると一気に摩擦係数が増大
し、走行停止してしまう。そこで、グラファイト状カー
ボン保護層中にCr、Mn、Mo、Nb、Ta、Ti、
VおよびWから選ばれる少なくとも一種を含有し、さら
にその上にフッ素系潤滑剤を含有する潤滑層を設けるこ
とで、潤滑性は損なうことなく、ヘッドに生じた付着物
を削り取り、結果的に極めてヘッドに付着物を生じにく
く、従って走行耐久性が著しく改良される。The problem is that Cr, Mn, Mo,
By providing a protective layer containing graphite-like carbon as a main component and containing at least one selected from Nb, Ta, Ti, V, and W, and further providing a lubricating layer containing a fluorine lubricant thereon, The protective layer containing graphite-like carbon as a main component has excellent lubricity, but easily deposits on the head. Once the deposits occur, the coefficient of friction increases at once and the vehicle stops running. Therefore, in the graphite-like carbon protective layer, Cr, Mn, Mo, Nb, Ta, Ti,
By providing a lubricating layer containing at least one selected from V and W and further containing a fluorine-based lubricant thereon, the deposits produced on the head can be scraped off without impairing the lubricity, and as a result, The head is less likely to have deposits, and therefore the running durability is significantly improved.
本発明は、非磁性基板上に金属薄膜型磁性層を設け、さ
らにその上層にCr、Mn、Mo、Nb、Ta、Ti、
V、およびWから選ばれる少なくとも一種を含有するグ
ラファイト状カーボンを主成分とする保護層を設け、さ
らにその上層にフッ素系潤滑剤を含有する潤滑層を設け
た磁気記録媒体に関する。According to the present invention, a metal thin film type magnetic layer is provided on a non-magnetic substrate, and Cr, Mn, Mo, Nb, Ta, Ti, and
The present invention relates to a magnetic recording medium in which a protective layer containing graphite-like carbon as a main component containing at least one selected from V and W is provided, and a lubricating layer containing a fluorine-based lubricant is further provided thereon.
本発明において使用されるフッ素系潤滑剤としては、パ
ーフルオロアルキル基またはパーフルオロアルケニル基
を持つ化合物、パーフルオロアルキレンオキサイド重合
物およびその誘導体、およびエチレンのフッ素置換体の
重合物または共重合物が好ましい。The fluorine-based lubricant used in the present invention includes a compound having a perfluoroalkyl group or a perfluoroalkenyl group, a perfluoroalkylene oxide polymer and its derivative, and a polymer or copolymer of a fluorine-substituted ethylene compound. preferable.
パーフルオロアルキル基またはパーフルオロアルケニル
基を持つ化合物の具体例としては、パーフルオロアルキ
ル基またはパーフルオロアルケニル基をもつカルボン
酸、パーフルオロアルキル基またはパーフルオロアルケ
ニル基をもつアルコール、パーフルオロアルキル基また
はパーフルオロアルケニル基をもつエステル化合物、パ
ーフルオロアルキル基またはパーフルオロアルケニル基
をもつメルカプタン、パーフルオロアルキル基またはパ
ーフルオロアルケニル基をもつ非イオン性界面活性剤、
パーフルオロアルキル基またはパーフルオロアルケニル
基をもつカチオン系界面活性剤、パーフルオロアルキル
基またはパーフルオロアルケニル基をもつアニオン系界
面活性剤、パーフルオロアルキル基またはパーフルオロ
アルケニル基をもつ両性界面活性剤等が挙げられる。Specific examples of the compound having a perfluoroalkyl group or a perfluoroalkenyl group include a carboxylic acid having a perfluoroalkyl group or a perfluoroalkenyl group, an alcohol having a perfluoroalkyl group or a perfluoroalkenyl group, a perfluoroalkyl group or An ester compound having a perfluoroalkenyl group, a mercaptan having a perfluoroalkyl group or a perfluoroalkenyl group, a nonionic surfactant having a perfluoroalkyl group or a perfluoroalkenyl group,
Cationic surfactants having a perfluoroalkyl group or perfluoroalkenyl group, anionic surfactants having a perfluoroalkyl group or perfluoroalkenyl group, amphoteric surfactants having a perfluoroalkyl group or perfluoroalkenyl group, etc. Is mentioned.
またパーフルオロアルキレンオキサイド重合物およびそ
の誘導体の具体例としては、パーフルオロプロピレン重
合体、パーフルオロエチレン・パーフルオロメチレン共
重合体、パーフルオロプロピレン・パーフルオロメチレ
ン共重合体、およびこれらの分子の末端に極性基を結合
させたもの等が挙げられる。Specific examples of perfluoroalkylene oxide polymers and derivatives thereof include perfluoropropylene polymers, perfluoroethylene / perfluoromethylene copolymers, perfluoropropylene / perfluoromethylene copolymers, and the ends of these molecules. And the like in which a polar group is bonded.
またエチレンのフッ素置換体の重合物または共重合物の
具体例としては、ポリテトラフルオロエチレン、ポリト
リフルオロエチレン、ポリ1,1−ジフルオロエチレン
(ポリフッ化ビニリデン)、トリフルオロエチレン−
1,1−ジフルオロエチレン共重合体等が挙げられる。In addition, specific examples of the polymer or copolymer of a fluorine-substituted product of ethylene include polytetrafluoroethylene, polytrifluoroethylene, poly1,1-difluoroethylene (polyvinylidene fluoride), trifluoroethylene-
1,1-difluoroethylene copolymer etc. are mentioned.
本発明における潤滑層には上記の例示にあるフッ素系潤
滑剤の1種または2種以上のもの以外の潤滑剤を0〜9
0wt%、好ましくは0〜50wt%混在させてもよい。In the lubricating layer in the present invention, a lubricant other than one or two or more of the above-exemplified fluorine-based lubricants is used.
0 wt%, preferably 0 to 50 wt% may be mixed.
フッ素系潤滑剤のほかに混入できる潤滑剤としては、脂
肪酸、金属石鹸、脂肪酸アミド、脂肪酸エステル、高級
脂肪族アルコール、モノアルキルフォスフェート、ジア
ルキルフォスフェート、トリアルキルフォスフェート、
パラフィン類、シリコーンオイル、動植物油、鉱油、高
級脂肪族アミン;ポリエチレン、ポリプロピレン、ポリ
塩化ビニル、エチレン−塩化ビニル共重合体等の樹脂微
粉末等があげられる。Lubricants that can be mixed in addition to fluorine-based lubricants include fatty acids, metal soaps, fatty acid amides, fatty acid esters, higher aliphatic alcohols, monoalkyl phosphates, dialkyl phosphates, trialkyl phosphates,
Examples thereof include paraffins, silicone oils, animal and vegetable oils, mineral oils, higher aliphatic amines, and fine resin powders of polyethylene, polypropylene, polyvinyl chloride, ethylene-vinyl chloride copolymers and the like.
潤滑層を形成する方法としては、上記潤滑剤を有機溶剤
に溶解して基板に塗布あるいは噴霧したのち乾燥する方
法、熔融して基板に塗着させる方法、有機溶剤に溶解し
た溶液に基板を浸漬して基板表面に吸着させる方法、ラ
ングミユアープロジェット法などにより基板表面に単分
子膜を形成する方法等が挙げられる。As a method of forming a lubricating layer, a method of dissolving the above lubricant in an organic solvent and coating or spraying on the substrate and then drying, a method of melting and coating on the substrate, and a method of immersing the substrate in a solution dissolved in the organic solvent And a method of adsorbing it on the surface of the substrate, a method of forming a monomolecular film on the surface of the substrate by the Langmuir-Projet method, and the like.
本発明に使用するグラファイト状のカーボンを主成分と
する保護層とは、真空蒸着、スパッタリング等で作成さ
れるグラファイト基調のアモルファス膜である。分析的
には、X線回析では明確なピークがみられずアモルファ
スであることを示し、X線光電子分光法(XPS)での
炭素のプラズモン損失エネルギーはグラファイトである
ことを示す膜である。The protective layer containing graphite-like carbon as a main component used in the present invention is a graphite-based amorphous film formed by vacuum vapor deposition, sputtering or the like. Analytically, it is a film that shows no clear peak in X-ray diffraction and is amorphous, and that the plasmon loss energy of carbon in X-ray photoelectron spectroscopy (XPS) is graphite.
Cr、Mn、Mo、Nb、Ta、i、VおよびWから選
ばれる少なくとも一種の含有量は、10%以下が適当で
ある。0.5%以上で且つ5%以下であれば好ましい。The content of at least one selected from Cr, Mn, Mo, Nb, Ta, i, V and W is appropriately 10% or less. It is preferable if it is 0.5% or more and 5% or less.
金属薄膜型磁性層としてはFe、Co、Ni等の強磁性
金属、あるいはFe−Co、Fe−Ni、Co−Ni、
Fe−Si、Co−Cr、Co−V、Co−Sm、Co
−Pt、Co−P、Co−Ni−P、Fe−Cr−Co
等の強磁性合金、あるいはこれらに添加物を加えたも
の、あるいはこれらを重層にしたもの等が挙げられる。As the metal thin film type magnetic layer, ferromagnetic metals such as Fe, Co and Ni, or Fe-Co, Fe-Ni, Co-Ni,
Fe-Si, Co-Cr, Co-V, Co-Sm, Co
-Pt, Co-P, Co-Ni-P, Fe-Cr-Co
Ferromagnetic alloys such as the above, those added with additives, those laminated in layers, and the like.
非磁性基板としてはポリエチレンテレフタレート、ポリ
イミド、ポリアミド等のフィルム状の高分子材料、ポリ
カーボネイト、ポリメチルメタクリレート等のディスク
状の高分子材料、ガラス等のセラミック、アルミニウム
等の金属等が使用可能である。基板の形状はシート、カ
ード、ディスク、ドラム、テープ等のいずれでも良い。As the non-magnetic substrate, a film-shaped polymer material such as polyethylene terephthalate, polyimide or polyamide, a disk-shaped polymer material such as polycarbonate or polymethylmethacrylate, a ceramic such as glass or a metal such as aluminum can be used. The shape of the substrate may be any of sheet, card, disk, drum, tape and the like.
本発明の磁気記録媒体を作成するには、まず非磁性基板
上に金属磁性層を真空蒸着、スパッタリング、イオンプ
レーティング、メッキ等の方法で被着せしめて磁性層を
形成し、更にその上にCr、Mn、Mo、Nb、Ta、
Ti、VおよびWから選ばれる少なくとも一種の含有す
るグラファイト状カーボンを主成分とする保護層を真空
蒸着、スパッタリング等で形成し、さらにその上にフッ
素系潤滑剤を含有する潤滑層を設ければ良い。To prepare the magnetic recording medium of the present invention, first, a magnetic metal layer is deposited on a non-magnetic substrate by a method such as vacuum deposition, sputtering, ion plating, plating, etc. to form a magnetic layer, and further on that. Cr, Mn, Mo, Nb, Ta,
By forming a protective layer containing, as a main component, at least one type of graphite-like carbon selected from Ti, V and W by vacuum vapor deposition, sputtering or the like, and further providing a lubricating layer containing a fluorine-based lubricant thereon. good.
この場合、磁性層は2種の異なる磁性体を用いて積層型
にしても良いし、下地層を設けた単層型にしても良い
し、中間層を設けた積層型にしても良い。なお磁性層の
厚さはいずれの場合でも0.1〜2μm程度が適当であ
る。In this case, the magnetic layer may be a laminated type using two different kinds of magnetic materials, a single layer type provided with an underlayer, or a laminated type provided with an intermediate layer. In any case, the thickness of the magnetic layer is preferably about 0.1 to 2 μm.
また、保護層、潤滑層の厚さは厚すぎるとヘッドと媒体
間のスペーシング損失のため電磁変換特性が劣化し、一
方薄すぎると走行耐久性の向上が見られないので、保護
層の厚さとしては10〜1000Å、好ましくは50〜
200Å程度が良く、また潤滑層の厚さ(存在量のこと
をここでは厚さと呼ぶことにする)は、0.5mg/m2〜1
00mg/m2が好ましく、より好ましくは2mg/m2〜20
mg/m2である。If the thickness of the protective layer and the lubricating layer is too thick, the electromagnetic conversion characteristics deteriorate due to spacing loss between the head and the medium, while if it is too thin, the running durability cannot be improved. It is 10-1000Å, preferably 50-
About 200Å is good, and the thickness of the lubrication layer (abundance is referred to as thickness here) is 0.5 mg / m 2 -1.
00 mg / m 2 is preferable, and more preferably 2 mg / m 2 to 20.
It is mg / m 2 .
以下、本発明の実施例について説明するが、本発明はこ
れらに限定されるものではない。非磁性基板として厚さ
50μmのポリイミドフィルムを用いた。Examples of the present invention will be described below, but the present invention is not limited thereto. A 50 μm thick polyimide film was used as the non-magnetic substrate.
まず、この基板上にCoCrをターゲットとしたArガ
ス中のスパッタリングにより厚さ2500ÅのCoCr
薄膜を形成した。First, on this substrate, CoCr having a thickness of 2500 Å was sputtered in Ar gas with CoCr as a target.
A thin film was formed.
次に、グラファイトターゲット上にCr、Mn、Mo、
Nb、Ta、i、V、およびWからなるペレットを置い
てArガス中でスパッタリングを行い、上記CoCr薄
膜上にCr、Mn、Mo、Nb、Ta、Ti、V、Wの
うち少なくとも一種を含有するグラファイト状カーボン
を主成分とする厚さ200Åの保護層を形成した。Next, on the graphite target, Cr, Mn, Mo,
A pellet made of Nb, Ta, i, V, and W is placed and sputtered in Ar gas to contain at least one of Cr, Mn, Mo, Nb, Ta, Ti, V, and W on the CoCr thin film. A 200 Å-thick protective layer containing graphite-like carbon as a main component was formed.
次に、下記の各種潤滑剤(a)〜(e)をメチルエテルケトン
に溶解して塗布、乾燥し、厚さ15mg/m2の潤滑層を形
成した。Next, the following various lubricants (a) to (e) were dissolved in methyl ether ketone and applied and dried to form a lubricating layer having a thickness of 15 mg / m 2 .
潤滑剤 (a)パーフルオロオクタン酸オクタデシル (b)パーフルオロノニルアルコール (c)パーフルオロオクチルエチレンオキシド付加物 (エチレンオキシドの連鎖数=平均7) (d)パーフルオロエチレン・パーフルオロメチレン共重
合体Montefluos社製フォンブリンZ4000 (e)トリフルオロエチレン−1,1−ジフルオロエチレ
ン共重合体 これらを直径3.5インチのディスクの形状に加工し、市
販のディスクジャケットに組み込み、サンプルとした。Lubricant (a) Octadecyl perfluorooctanoate (b) Perfluorononyl alcohol (c) Perfluorooctyl ethylene oxide adduct (Number of chains of ethylene oxide = 7 on average) (d) Perfluoroethylene / perfluoromethylene copolymer Montefluos Fomblin Z4000 (e) trifluoroethylene-1,1-difluoroethylene copolymer produced by the above was processed into a disc shape having a diameter of 3.5 inches and incorporated into a commercially available disc jacket to prepare a sample.
市販のフロッピーディスクドライブにより記録を行った
後、再生信号と摩擦係数をモニターしながら600r.
p.m.で回転させ、摩擦係数が急激に大きくなるまで
のパス数を測定することにより走行耐久性のテスト(環
境条件:25±2℃、30±5%PH)を行った。ま
た、同時に保護膜の剥離状態とヘッド付着物の程度を光
学顕微鏡で調べた。After recording with a commercially available floppy disk drive, 600 r.
p. m. A running durability test (environmental conditions: 25 ± 2 ° C., 30 ± 5% PH) was performed by rotating the test piece at a temperature of 10 ° C. and measuring the number of passes until the friction coefficient suddenly increased. At the same time, the state of peeling of the protective film and the extent of head deposits were examined with an optical microscope.
Cr、Mn、Mo、Nb、Ta、Ti、V、およびWの
含有量はオージェ電子分光法を用いて測定した各々の元
素と炭素との微分スペクトルのピーク比より求めた。な
お、膜厚方向で保護層の構成元素の組成に変化がないこ
とも同様にして確認した。The contents of Cr, Mn, Mo, Nb, Ta, Ti, V, and W were obtained from the peak ratio of the differential spectrum of each element and carbon measured by Auger electron spectroscopy. In addition, it was similarly confirmed that there was no change in the composition of the constituent elements of the protective layer in the film thickness direction.
比較の為、Cr、Mn、Mo、Nb、Ta、Ti、V、
およびWを含有しないグラファイト状カーボンを主成分
とする厚さ200Åの保護層を設け、潤滑層を設けない
サンプルも作成し、これを比較例1とした。また、他の
比較例としてグラファイト状カーボンを主成分とする保
護層を設けず潤滑層のみを設けた媒体を比較例2とし、
金属を少なくとも一種含有するグラファイト状カーボン
を主成分とする200Åの保護層のみを設け、潤滑層を
設けない媒体を比較例3とし、金属を含有しないグラフ
ァイト状カーボンを主成分とする200Åの保護層を設
け、その上層に潤滑層を設けたサンプルも作成し、比較
例4とした。For comparison, Cr, Mn, Mo, Nb, Ta, Ti, V,
A comparative example 1 was also prepared, in which a protective layer having a thickness of 200Å containing graphite-like carbon containing no W and W was provided and a lubricating layer was not provided. Further, as another comparative example, a medium provided with only a lubricating layer without providing a protective layer containing graphite-like carbon as a main component is referred to as Comparative Example 2,
A 200 Å protective layer containing only a 200 Å protective layer containing graphite-like carbon as a main component containing at least one metal and no lubricating layer was used as Comparative Example 3, and a graphite-like carbon containing no metal as a main component. Was also provided, and a sample having a lubricating layer as an upper layer was also prepared, which was referred to as Comparative Example 4.
保護層添加物種、量、潤滑剤種、および得られた結果を
第1表〜第8表に示した。表から明らかなように、C
r、Mn、Mo、Nb、Ta、Ti、V、およびWを適
量含有したグラファイト状カーボンを主成分とする保護
層を設け、さらにその上層にフッ素系潤滑剤を含有する
潤滑層を設けたサンプルは、これらの金属を含有しない
グラファイト状カーボンを主成分とする保護層を設けた
もの、あるいは潤滑層を設けないもの比較して走行耐久
性に優れている。ヘッドおよび膜面を顕微鏡観察した結
果、走行耐久性の優れたサンププルには付着物も傷もな
いことを確認した。The protective layer additive species, amount, lubricant species, and the obtained results are shown in Tables 1 to 8. As is clear from the table, C
Sample in which a protective layer containing graphite-like carbon as a main component containing a proper amount of r, Mn, Mo, Nb, Ta, Ti, V, and W was provided, and a lubricating layer containing a fluorine-based lubricant was further provided thereon. Is superior in running durability as compared with one provided with a protective layer containing graphite-like carbon as a main component containing no such metal, or one provided with no lubricating layer. As a result of observing the head and the film surface with a microscope, it was confirmed that the sample having excellent running durability had neither an attached matter nor a scratch.
なお、ヘッド付着物は光学顕微鏡(×20)により観察
した。The head deposit was observed with an optical microscope (× 20).
○は付着物ほとんどなし、△は若干あり、×は多いこと
を示す。◯ indicates that there is almost no deposit, Δ indicates that there is some, and x indicates that there are many.
膜面キズは光学顕微鏡(×160)により観察した。The scratches on the film surface were observed with an optical microscope (× 160).
○はほとんどなし、△は若干あり、×は多いことを示
す。○ means almost nothing, △ means a little, and × means a lot.
以上のように、本発明による磁気記録媒体を用いれば、
磁気ヘッドとの摩擦係数を極めて小さくし、且つヘッド
に付着物を生じさせず、媒体に傷も発生せず、走行耐久
性を大幅に向上することができる。As described above, by using the magnetic recording medium according to the present invention,
The coefficient of friction with the magnetic head can be made extremely small, and no deposits are produced on the head, no scratches are generated on the medium, and running durability can be greatly improved.
Claims (1)
上にCr、Mn、Mo、Nb、Ta、Ti、V、Wから
選ばれる少なくとも一種を含有するグラファイト状カー
ボンを主成分とする保護層を設け、さらにその上にフッ
素系潤滑剤を含有する潤滑層を設けたことを特徴とする
磁気記録媒体。1. A magnetic metal conductive film is provided on a non-magnetic substrate, and a graphite-like carbon containing at least one selected from Cr, Mn, Mo, Nb, Ta, Ti, V, and W as a main component is formed on the magnetic metal conductive film. The magnetic recording medium is characterized in that a protective layer is provided, and a lubricating layer containing a fluorine-based lubricant is further provided thereon.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165987A JPH0638287B2 (en) | 1987-03-06 | 1987-03-06 | Magnetic recording medium |
| US07/109,377 US4840843A (en) | 1986-10-17 | 1987-10-19 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165987A JPH0638287B2 (en) | 1987-03-06 | 1987-03-06 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63217519A JPS63217519A (en) | 1988-09-09 |
| JPH0638287B2 true JPH0638287B2 (en) | 1994-05-18 |
Family
ID=12893004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5165987A Expired - Fee Related JPH0638287B2 (en) | 1986-10-17 | 1987-03-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638287B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2774149B2 (en) * | 1989-06-22 | 1998-07-09 | 株式会社日立製作所 | Magnetic recording medium and method of manufacturing the same |
-
1987
- 1987-03-06 JP JP5165987A patent/JPH0638287B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63217519A (en) | 1988-09-09 |
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