JPH0638441B2 - Semiconductor pellet transfer device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor pellet transfer device used in a pellet bonding device, a pellet jig filling device, or the like.

[Background of the Invention] A conventional semiconductor pellet transfer device uses a pellet transfer arm provided with a suction collector at its tip to align a semiconductor pellet vertically and horizontally from an alignment jig or a wafer ring fixed on a wafer sheet. The semiconductor pellets are adsorbed one by one and transferred to a predetermined position by turning or linear movement of the pellet transfer arm.

FIGS. 1 and 2 show a conventional pellet transfer arm swivel type semiconductor pellet transfer apparatus. A pellet transfer arm 4 is fixed to a rotation center shaft 3 which is rotatably supported by a bracket 1 by a bearing 2. An alignment jig 6 is fixed by a suction collet 5 fixed to the tip of the pellet transfer arm 4. Adsorb the semiconductor pellets 7 that are aligned and stored vertically and horizontally,
The pellet transfer arm 4 transfers the semiconductor pellet 7 to the lead frame 8 by pellet-bonding to the lead frame 8 by raising and lowering the center axis of rotation 3 as a fulcrum.

However, in such a transfer device, the semiconductor pellet 7
Since the attitude of the semiconductor pellets 7 after the transfer is rotated by the turning angle of the pellet transfer arm 4 before the transfer, the attitude of loading the semiconductor pellets 7 on the alignment jig 6 must be kept constant, which is troublesome. It was Also, the attachment of the alignment jig must be rotated by a certain angle, and the reading with the detection of the semiconductor pellet 7 is performed in the vertical and horizontal XY directions of the semiconductor pellet 7.
However, there is a drawback that the direction must be changed (see, for example, Japanese Patent Publication No. 57-46651).

Also, even in a semiconductor pellet transfer device having a linear movement type pellet transfer arm, the posture after transfer is fixed,
Similarly, it lacked flexibility.

In particular, with such a conventional transfer device, it is extremely difficult to transfer the semiconductor pellets so that the attitude of the semiconductor pellets after the transfer is tilted by the instructed angle. Not only it has to be loaded, but also the position detection means of the semiconductor pellet is very difficult to read obliquely, so there is a drawback in that it has a complicated configuration.

[Object of the Invention] An object of the present invention is to provide a semiconductor pellet transfer device in which the attitude of the semiconductor pellet after transfer can be freely controlled.

[Embodiment of the Invention] An embodiment of the present invention will be described below with reference to FIGS. 3 and 4. Reference numeral 6 denotes a semiconductor pellet 7 which is a wafer ring to which an aligning jig or a wafer sheet for aligning and storing vertically and horizontally is mounted, which is placed on an XY table (not shown).
Can be sequentially positioned at the supply position. 10 is a support base, 11 is an elevating guide member fixed to the support base 1, 1
2 is a lift table that can be slid by being guided by a lift guide member 11,
Reference numeral 13 is a lifting cam rotated by a drive device (not shown), 14 is a cam follower attached to the lifting base 12 so as to come into contact with the lifting cam 13, and 15 is such that the cam follower 14 is pressed against the lifting cam 13. A coil spring that constantly urges downward is engaged with the support base 10 and the lifting base 12. Reference numeral 16 is a bracket provided with a hollow cylindrical portion 16a held on the lifting table 12, and 17 is a turning central shaft rotatably supported by a hollow cylindrical portion 16a of the bracket 16 via a bearing 18.

Reference numeral 20 denotes a pellet transfer arm fixed to the center axis 17 of rotation. A lever 21 driven by a driving means (not shown) is connected to one end of the pellet transfer arm, and a suction collect 23 is rotated via a bearing 22 at the other end. It is supported freely. Reference numeral 24 is a pipe connected to the suction collector 23 for drawing the suction collector 23 to a vacuum.

A timing pulley 2 is attached to the outer cylinder portion of the suction collector 23.
5, a timing pulley 26 having the same diameter as the timing pulley 25 is rotatably provided on the outer cylindrical portion of the hollow cylindrical portion 16a of the bracket 16. The timing pulley 26 has two pulley grooves 26a, 26b
Is formed, the timing pulley 25 and the first pulley groove 2 are formed.
A timing belt 27 is laid between 6a. Further, stoppers 28a and 28b for preventing the timing pulley 26 from coming off are disposed at the upper and lower ends of the timing pulley 26, and these stoppers 28a and 28b are provided in the hollow cylindrical portion 16
It is fixed to a. A timing belt 31 is laid between the second pulley groove 26b of the timing pulley 26 and a timing pulley 30 fixed to the output shaft of a pulse motor or DC motor 29 supported by the bracket 16.

Next, the operation of the semiconductor pellet transfer device having such a configuration will be described. When the semiconductor pellet 7 is positioned at a predetermined position, the ascending / descending cam 13 rotates, the cam follower 14 is driven by the ascending / descending cam 13, the elevating table 12 descends, and this operation descends the suction collect 23. Adsorb the semiconductor pellet 7. When the elevating cam 13 further rotates, the elevating table 12 rises, and the suction collect 23 also rises while holding the semiconductor pellet 7 by suction.
After that, the lever 21 is operated by a driving means (not shown), and the pellet transfer arm 20 is rotated to a predetermined semiconductor pellet 7 transfer position on the lead frame 8.

During this turning, the posture of the semiconductor pellet 7 after transfer is determined. That is, when the pulse motor etc. 29 does not rotate now, and accordingly the timing transfer pulley 26 does not rotate and the pellet transfer arm 20 turns, the timing transfer pulley 25 interlocks with this at a speed ratio of 1: 1. 20
The rotation angle is relative to the pellet transfer arm 20. Therefore, the posture of the semiconductor pellet 7 does not change before and after the transfer, despite the rotation of the pellet transfer arm 20.

Further, as shown in the figure, if it is desired to make the posture of the semiconductor pellet 7 after the transfer the posture before the transfer and to incline it by .theta.
When 6 is rotated to give a rotation of θ degrees,
As a result, the timing pulley 25, that is, the suction collet 23 is rotated by θ degrees and the attitude of the semiconductor pellet 7 can be determined. Since the rotation angle of the pulse motor or the like 29 can be arbitrarily and freely determined by the encoder provided in the pulse motor or the like 29, the posture of the semiconductor pellet 7 after the transfer can be decided freely.

The semiconductor pellet 7 whose posture is determined in this way is lowered by the rotation of the lifting cam 13, and the suction pellet 23
And is placed in a predetermined position on the lead frame 8. Thereafter, the suction collect 23 again rises, the pellet transfer arm 20 is reversed, and when the suction collect 23 is returned to its original posture, the pulse motor 29 and the timing pulley 2 are simultaneously moved.
6 is rotated by giving the reversal of θ degree, and the suction collect 23
To the original position. After that, this series of operations is repeated. Of course, when it is not necessary to return the suction collect 23 to the original posture, it is not necessary to drive the timing pulley 26 to invert the θ degree.

[Effect of the Invention] According to the semiconductor pellet transfer device of the present invention, a revolving swivel arm, a means for swiveling the swivel arm,
In a semiconductor pellet transfer device comprising a holding means for holding a semiconductor pellet provided at one end of the turning arm, the holding means is rotatably supported by the turning arm, and the holding means is rotated by a predetermined rotation angle. Since the driving means for performing the operation is provided, the following effects can be obtained.

When the holding means sucks and moves the semiconductor pellet and places it on the bonding position, the posture of the semiconductor pellet can be maintained in a desired posture by the action of the driving means. When it is desired to correct the posture of the semiconductor pellet, it can be freely controlled by the driving means.

The drive means is a first pulley concentrically and rotatably provided with respect to the center axis of rotation of the swing arm, a second pulley fixed to the holding means, the first pulley, and the second pulley. By having a belt that is engaged with the pulley and a motor that rotates the first pulley by a predetermined rotation angle, the motor can be attached to a member other than the swing arm, and at the time of bonding. The swing arm does not receive an excessive load and is lightweight and rotatable.

[Brief description of drawings]

FIG. 1 is a front view of a conventional semiconductor pellet transfer device, and FIG.
1 is a plan view of FIG. 1, FIG. 3 is a front sectional view showing an embodiment of a semiconductor pellet transfer device according to the present invention, and FIG. 4 is a plan view of FIG. 7 ... semiconductor pellet, 17 ... swivel center axis, 20 ... pellet transfer arm, 23 ... adsorption collet, 25,26 ... timing pulley, 27 ... timing belt, 28 ... timing pulley, 29 ... pulse Motor 31 Timing belt.

Claims (1)

[Claims] 1. A semiconductor pellet transfer apparatus comprising: a revolving swivel arm; a means for swiveling the swivel arm; and a semiconductor pellet holding means provided at one end of the swivel arm. A drive means for rotatably supporting the swivel arm and for rotating the holding means by a predetermined rotation angle is provided, and the drive means is concentrically and rotatably provided with respect to a swivel center axis of the swivel arm. The first pulley, the second pulley fixed to the holding means, the belt wound on the first pulley and the second pulley, and the first pulley at a predetermined rotation angle. A semiconductor pellet transfer device having a motor for rotating.