JPH0640006B2 - Measuring method of shape measuring machine - Google Patents

Description

The present invention relates to a measuring method of a shape measuring machine such as a contour measuring machine or a roughness measuring machine, and particularly to the shape of an object to be measured having an inclined area with a large angle. It can be used for measurement.

BACKGROUND ART Conventionally, a shape measuring machine such as a contour measuring machine or a roughness measuring machine for measuring the surface shape of an object to be measured has been widely used for measuring the shape of various members such as a press die and a screw. .

This conventional shape measuring machine urges the stylus so that a measuring force of 2 to 3 g is applied downward in the vertical Z-axis direction, and the stylus is moved in the X-axis direction parallel to the object to be measured. In this case, the stylus displacement that is displaced in the Z-axis direction following the surface shape of the object to be measured is detected and output to a recorder or the like.

[Problems to be Solved by the Invention]

By the way, in the shape measuring machine, a measurable angle of the stylus, that is, a follow-up angle is determined, and an inclined portion having a predetermined angle or more cannot be detected.

In particular, the stylus has poor followability when it moves upward, that is, when it moves in the counter-biasing direction, rather than when it moves downward, that is, when it moves in the biasing direction. However, there is a problem in that when it goes down, it can be detected, but when it goes up, it cannot be detected.

If there is an overhanging portion such as a hole in the object to be measured, the stylus cannot come into contact with the portion, and the portion becomes an unmeasurable region. When the stylus is moved in one direction on the object to be measured including such a region and the measurement is performed, the stylus once separates from the object to be measured and then collides with the object to be measured. Therefore, the data measured immediately after the unmeasurable area has a large error due to the influence of the collision, and there is a problem that accurate measurement cannot be performed.

Furthermore, due to the difference in trackability between the rising area and the falling area of the status, the accuracy of the measurement data in each area is also different, and the analysis processing as one measurement data is difficult.

Also, when the stylus is biased in the Y-axis direction by a spring or the like so that the stylus is displaced in the Y-axis direction that is vertical and horizontal to the X-axis, the stylus is also biased in the biasing direction. The accuracy of the measurement data is different between the first tilted area that moves in the direction of and the second tilted area that moves in the opposite biasing direction.
The analysis process as one measurement data was difficult.

The object of the present invention is to eliminate the influence of the difference in the followability of the stylus in the biasing direction and the stylus direction, obtain accurate measurement data, and analyze the measurement data as one measurement data. It is to provide a measuring method of a measuring machine.

[Means for Solving the Problems]

The measuring method of the shape measuring machine according to the present invention is urged toward the object to be measured and moved on the object to be measured in the X-axis direction which is a predetermined one direction, and the object to be measured is accompanied by the movement. Z, which is a direction that follows the surface shape and is orthogonal to the X-axis direction
A measuring method for a shape measuring machine, comprising: a stylus axially displaced; and an X-axis detector and a Z-axis detector that detect displacements of the stylus in the X-axis and Z-axis directions. Either the first tilted region in which the stylus moves in the biasing direction or the second tilted region in which the stylus moves in the counter biasing direction while measuring the object to be measured by moving in two directions opposite to each other in the X-axis direction. Is determined from the change direction of the measurement data, that is, the increase or decrease of the measurement data in the Z-axis direction, and the measurement data of only one of the first inclined region and the second inclined region is mutually complemented. , The stylus obtains the measurement data of the entire tilt region of the measured object in which the stylus is displaced in the Z-axis direction.

At this time, when the X axis is provided in the horizontal direction, the Z axis is provided in the vertical direction, and the stylus is biased toward the lower side in the vertical direction, the measurement data of the tilted region shows that the stylus is the first. It is preferable to obtain the measurement data of all the inclined regions of the object to be measured by selecting only the measurement data in the descending region, which is the inclined region, for each direction and complementing each other.

[Action]

In the present invention as described above, the stylus is moved in two directions opposite to each other in the X-axis direction to measure the object to be measured, so that in the measurement in one direction, the portion that becomes the first inclined region of the stylus is in the other direction. In the measurement, it is the second inclined region.

That is, the first inclined region and the second inclined region are opposite to each other, and it is possible to obtain only the measurement data of the first or second inclined region in all the inclined regions of the measured object.

For this reason, the influence of the difference in the followability in each inclined region of the stylus is eliminated, and the accuracy of the measurement data becomes the same, so that the analysis processing as one measurement data becomes possible.

In addition, the portion immediately after the unmeasurable area in the measurement in one direction is immediately before the unmeasurable area in the measurement in the other direction, and by selecting the measurement data immediately before this, the measurement data including the error due to the stylus collision can be obtained. Accurate measurement data is obtained without the need for use, which achieves the above objectives.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a contour measuring apparatus 1 which is a first embodiment of the present invention.
It is shown. The contour measuring device 1 includes a measuring main body 2,
The electronic component unit 3, the recorder 4, and the data processing unit 5 are provided.

As shown in FIG. 2, the measurement main body 2 includes a drive unit 20 that moves the measurement mechanism unit 10 in the horizontal X-axis direction.

The measurement mechanism unit 10 includes a measurement arm 12 having a stylus 11 on the left end side in FIG. 2, and a fixed arm 14 connected to the measurement arm 12 via an eccentric joint 13. The fixed arm 14 is supported by a fulcrum 15, which
A movable weight 16 is attached to the right side of 15, and the stylus
11 is urged downward in the Z-axis direction so that a measuring force of 2 to 3 g is applied.

Therefore, in this embodiment, the region where the stylus 11 descends following the surface shape of the workpiece (work) W is the first inclined region, and the ascending region is the second inclined region.

A core 18 of an operating transformer 17 is connected to the fixed arm 14 so that an output proportional to the movement of the stylus 11 in the vertical Z-axis direction is obtained from the differential transformer 17. Therefore, the Z-axis detection unit is operated by the operating transformer 17.
19 are composed.

On the other hand, the drive unit 20 includes a nut 21 fixed to the measurement mechanism unit 10.
And a feed screw 23 screwed into the nut 21 and rotated by a motor 22.

A rotary encoder 24 for detecting the feed amount of the stylus 11 is attached to one end side of the feed screw 23, and the measurement mechanism unit 10 is determined by the rotation angle detected by the rotary encoder 24 and the lead angle of the feed screw 23. The feed amount of the stylus 11 can be detected. Therefore, the rotary encoder 24 constitutes the X-axis detection unit 25. A linear scale or the like may be provided instead of the rotary encoder 24 to detect the feed amount of the stylus 11.

Returning to FIG. 1, the detection signals of the Z-axis detection unit 19 and the X-axis detection unit 25 are sent to the electrical equipment unit 3. The electrical unit 3 is configured to process a detection signal, control the operation of the measurement mechanism unit 10 and the drive unit 20, send an analog signal to the recorder 4, and send a digital signal to the data processing unit 5. The recorder 4 is operated by an analog signal processed by the electrical equipment unit 3 to draw a figure.

The data processing unit 5 includes a central processing unit (CPU) 30 and a main storage device 31, and the CPU 30 includes a cathode ray tube (CR).
A display device such as T) 32, a plotter 33, and an external storage device 34 such as a floppy disk are connected.

The main storage device 31 stores the measurement data when the stylus 11 moves in the right direction in FIG. 2, that is, the pulling direction, which is one direction of the X axis direction, and the stylus 11 stores the measurement data in the X axis direction. The second storage unit 36 stores the measurement data when moving in the left direction, which is the other direction, that is, in the pushing direction.

Next, using the contour measuring apparatus 1 having such a configuration, the second
An example of the procedure for measuring the work W having the V groove 40 as shown in the figure will be described with reference to the flowchart shown in FIG.

In this embodiment, when the stylus 11 is moved in the pulling direction, the measurement data of the X-axis detecting section 25 increases, and when the stylus 11 moves down, that is, in the urging direction, the Z-axis detecting section 18 is moved.
The measurement data is set to decrease, the first time is measured in the pulling direction up to a point slightly passing the lowest point of the V groove 40 of the object to be measured W, and the second time is measured in the pushing direction to measure the object W to be measured. It is assumed that the measurement is performed up to a point slightly passing the lowest point of the V groove 40.

First, the object to be measured W is set (step 51), and the measurement position, that is, the stylus 11 is positioned (step 52).

Next, the motor 22 is operated to move the stylus 11 in the pulling direction, and measurement is performed (step 53). At this time, since the feeding direction of the stylus 11 is the pulling direction, the measured data is CP
It is stored in the first storage unit 35 via U30 (steps 54, 5).
Five). This measurement data is stored in the storage unit 35 as A1 (X = 1, Z = 50) to A as values shown in FIG. 4 (A), for example.
Up to 2 (X = 104, Z = 20) are sequentially stored.

Further, this measurement data is sequentially displayed on the CRT 32 as shown by the solid line 71 in FIG. 5 (step 56).

Next, it is determined whether or not the measurement is completed by detecting from the measurement data whether the stylus 11 has measured to the lowest point of the V groove 40 (step 57). In particular, when the lowest point is detected from the measurement data, it is detected by a method such as differentiating the data whether the data is in the decreasing direction or the increasing direction, and when the data changes from the decreasing direction to the increasing direction, that is, the stylus. When 11 drops to the lowest point and starts to rise, the measurement can be ended.

If the measurement is not finished, the measurement is continued, and if the measurement is finished, it is determined whether or not the measurement is the first time (step 5
8).

If the measurement is the first time, the stylus 11 is manually or automatically moved to the right of the V groove 40 to perform measurement positioning (step 52), and steps 53 to 56 are repeated. However, since the second measurement is in the pushing direction, the measurement data is the second value as shown in FIG. 4 (B), for example.
The storage unit 36 stores B1 (X = 200, Z = 50) to B2 (X = 101, Z).
= 21) are sequentially stored (step 59).

Also at this time, the measurement data are sequentially displayed on the CRT 32 as shown by the dotted line 72 in FIG. 5 (step 56). The solid line 71, which is the measurement data in the pulling direction, remains displayed.

When the second measurement is completed, among the data in the second storage unit 36 which is the second measurement data, B3 (X
= 104, Z = 20) to B2, if there is a portion that overlaps the first measurement data, that portion is deleted (step 60), and as shown in FIG. The measurement data of the first time is inverted and connected to the data of the first time to form one data 73 (step 61).

That is, in the present embodiment, when connecting the measurement data 73, the first measurement data is used as a reference, and the data that overlaps with the first measurement data of the second measurement data is deleted to connect the respective data. Set.

Then decide whether to continue the measurement (step 6
2) Repeat steps 52 to 60 to continue.

On the other hand, when the measurement is finished, the obtained data 73 is output to the CRT 32 again, the plotter 33 or the external storage device 34 is used.
Alternatively, send it to another processing device for operation (step 6).
3).

In addition, when setting the measurement direction of the measurement data 73 obtained in this way, 1
If the second measurement is in the pulling direction, the measurement data is in the pulling direction, and if it is in the pushing direction, the measurement data is in the pushing direction.

According to this embodiment, the following effects can be obtained.

That is, since the stylus 11 is moved in two directions opposite to each other in the X-axis direction of the pulling direction and the pushing direction, the measurement is performed.
As the measurement data of the inclined region of the V groove 40, only the measurement data of the region where the stylus 11 descends can be obtained. For this reason, since the data when the stylus 11 moves up is not included, the influence of the difference in tracking characteristics is eliminated, the accuracy of the measurement data becomes the same, and the measurement data obtained in each direction can be combined into one. All the data of the V groove 40 portion can be obtained and the data can be analyzed.

In addition, by obtaining only the data when the stylus 11 descends, it is possible to measure even in a tilted area where the angle is large that cannot be detected due to the followability when the stylus 11 rises, and the accuracy of the measured data is also improved. It can be expensive.

Further, since the measurement data is sequentially stored in the storage units 35 and 36 and displayed on the CRT 32, the shape of the work W can be immediately recognized. Also, since the measurement is completed when the measured data changes from the decreasing direction to the increasing direction, that is, it is determined to continue the measurement while the measured data is decreasing, the measurement can be easily automated. At the same time, it is possible to reliably measure only the data of the region where the stylus 11 is descending, even if the unevenness is invisible.

Next, a second embodiment for measuring the work W1 having the hole 42 at the lower end of the V groove 41 as shown in FIG. 6 will be described.

Also in the case of measuring this work W1, first in the same way as in the first embodiment, the pulling direction is first measured, and the measured data is set to the seventh value.
As shown in FIG. 8A, C1 to C2 are sequentially stored in the first storage unit 35, and as shown by the solid line 81 in FIG.
Display on RT32.

Next, the pushing direction is measured, and the measured data are sequentially stored in the second storage section 36 from D1 to D2 as shown in FIG. 7 (B), and as shown by the dotted line 82 in FIG. CR
Display at T32.

Then, each of these data may be connected to form one data 83 as shown in FIG. 7 (C).

In this embodiment as well, the same effect as in the first embodiment can be obtained, and even if there is an unmeasurable region such as the hole 42 where the stylus 11 cannot come into contact, the measurement should be performed from both directions of this region. And stylus 11 is in the hole at the time of measurement.
It is possible to obtain accurate data without leaving the work W1 and colliding with the work W1 again at the 42nd portion.

It should be noted that the present invention is not limited to the configurations of the above-described embodiments and the like, and modifications within a range where the object of the present invention can be achieved are included in the present invention.

For example, in each of the above embodiments, the data is displayed on the CRT 32 sequentially from the first measurement, but the data may be connected and then displayed on the CRT 32.

Further, in each of the above-described embodiments, the case of measuring one V groove 40, 41 has been described, but the present invention can be applied to the case of measuring an object to be measured having a plurality of irregularities.
In this case, the pulling and pushing directions may be measured for each concave or convex portion, or a plurality of concave and convex portions may be collectively measured and measured in the first storage unit 35 and the second storage unit 36. May be stored and only the data of the region where the stylus 11 descends may be selected and connected from this measurement data.

Further, as shown in FIG. 9, the stylus 11 is located between the X-axis detecting unit 25 and the Z-axis detecting unit 19 and the data processing unit 5 in the ascending region or the descending region by differentiating the measurement data. Inclination determining means 91 for determining whether or not, and data selecting means 92 for sending only the measurement data in the descending region from the measurement data to the data processing part 5 based on this determination are provided to select the measurement data in advance, and the data processing part 5 Then, the sent measurement data may be sequentially stored. At this time, as the measurement data of the horizontal portion having no inclination, data in one of the pulling direction and the pushing direction may be adopted.

Further, in each of the above-described embodiments, the first storage section 35 and the second storage section 36 are provided, and the measurement data in the pulling direction and the measurement data in the pushing direction are stored separately, but as shown in FIG. ,
An area for storing the measurement data of the entire measurement range may be reserved in advance and the Z-axis data 93 corresponding to each X-axis data 92 may be directly stored.

Furthermore, in each of the above-described embodiments, only the measurement data when the stylus 11 is in the descending region is selected as the measurement data of the inclined region, but for example, a hole or the like is formed at the top of the convex portion and the measurement is impossible. When measuring an object to be measured, it is possible to select only the measurement data in the ascending region and use it as the measurement data in the inclined region.

In addition, when measuring the side surface of the DUT,
If the stylus 11 is biased laterally, select and use either the measurement data when the stylus 11 moves in the bias direction or the measurement data when the stylus 11 moves in the counter bias direction. Good.

That is, according to the present invention, only the measurement data in one of the first inclined region in which the stylus 11 moves in the biasing direction and the second inclined region in which the stylus 11 moves in the anti-biasing direction is selected. Good.

Further, particularly when performing automatic measurement, a threshold value is appropriately set for the tilt angle or the amount of displacement of the Z axis, and the gently tilted portion or the small uneven portion can be set in either one of the pulling direction and the pushing direction as in the conventional case. You may make it measure only and measure only a large inclination angle part or a large uneven part using this invention.

Further, the present invention is not limited to the contour measuring machine 1, but can be applied to a roughness measuring machine or the like. Further, the configuration of the contour measuring machine 1 is not limited to the above-described embodiment, but may be another configuration, in short, the stylus 11
Need only have a function of being able to move in directions opposite to each other in the X-axis direction and selecting only measurement data in either one of the first inclined region and the second inclined region.

〔The invention's effect〕

According to the present invention as described above, it is possible to eliminate the influence of the difference in the followability between the stylus biasing direction and the stylus biasing direction,
Further, there is an effect that accurate measurement data can be obtained and the measurement data can be analyzed as one measurement data.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a contour measuring machine according to a first embodiment of the present invention, FIG. 2 is a schematic diagram showing a measuring body of the first embodiment, and FIG. 3 is a measuring method of the first embodiment. FIG. 4 is a flow chart showing the procedure, FIG. 4 is a schematic diagram showing the storage unit of the first embodiment,
FIG. 5 is a schematic view showing the display of the CRT in the first embodiment, FIG. 6 is a sectional view showing the object to be measured in the second embodiment, and FIG.
FIG. 8 is a schematic diagram showing a storage unit of the second embodiment, FIG. 8 is a schematic diagram showing a CRT display in the second embodiment, FIG. 9 is a block diagram showing a modification of the present invention, and FIG. The schematic diagram which shows the modification of the memory | storage part of invention. 1 ... contour measuring machine, 2 ... measuring body, 5 ... data processing section, 10 ... measuring mechanism section, 11 ... stylus, 19 ... Z axis detecting section, 20 ... driving section, 25 ... X Axis detector, 30 ... CP
U, 31 ... Main storage device, 35 ... First storage unit, 36 ... Second
Storage unit, 91 ... inclination determination means, 92 ... data selection means,
W, W1 ... DUT.

Claims (2)

[Claims] 1. An object is biased toward an object to be measured and is moved on the object to be measured in an X-axis direction, which is a predetermined direction, and the surface shape of the object to be measured is followed along with the movement. Shape measurement including a stylus that is displaced in the Z-axis direction that is a direction orthogonal to the X-axis direction, and an X-axis detection unit and a Z-axis detection unit that detect the amount of displacement of the stylus in the X-axis direction and the Z-axis direction. A measuring method of a machine, wherein the stylus is moved in two directions opposite to each other in the X-axis direction to measure an object to be measured, and the stylus moves in a biasing direction in a first inclined region or a stylus is a biasing direction. Which region of the second inclined region moving to the position is being measured is determined from the direction of change of the measured data, and only the measured data of one region selected from the first inclined region or the second inclined region is mutually complemented. Then styling Vinegar Z
A measuring method of a shape measuring machine, characterized by obtaining measurement data of an entire tilt region of a measured object which is displaced in an axial direction. 2. The stylus urging direction is vertically downward, the X-axis is horizontal and the Z-axis is vertical, and the selected measurement data is as set forth in claim 1. As a measurement method of the shape measuring machine, the measurement data is obtained when the stylus is in the descending region which is the first inclined region.