JPH0640075B2 - End face inspection device for cylindrical objects - Google Patents
End face inspection device for cylindrical objectsInfo
- Publication number
- JPH0640075B2 JPH0640075B2 JP60063595A JP6359585A JPH0640075B2 JP H0640075 B2 JPH0640075 B2 JP H0640075B2 JP 60063595 A JP60063595 A JP 60063595A JP 6359585 A JP6359585 A JP 6359585A JP H0640075 B2 JPH0640075 B2 JP H0640075B2
- Authority
- JP
- Japan
- Prior art keywords
- face
- binarization
- circumferential contour
- projection distribution
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Monitoring And Testing Of Nuclear Reactors (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は核燃料用ペレットなどの円筒形状を有する物体
の端面を検査する円筒物体の端面検査装置に関するもの
である。Description: TECHNICAL FIELD The present invention relates to an end face inspection device for a cylindrical object that inspects the end face of an object having a cylindrical shape such as a nuclear fuel pellet.
従来より円筒物体の端面のクラックを検査するには特開
昭55−154442号、及び特開昭56−160645号に記載されて
いるように散乱光を端面に照射し、その反射光をTVカメ
ラ等の撮像装置で検出し、2値化した映像信号より端面
に相当する部分のみを取り出した2次元2値パターンに
対し、欠陥判定を行なっている。円筒物体の端面にクラ
ック欠陥がある場合を第2図(a)に示し、円筒面から端
面まで及ぶ欠け欠陥がある場合を第2図(b)に示す。更
に第3図(a)は第2図(a)に示す円筒物体の端面を撮像
装置で撮像して得られる画像信号を2値化画像信号に変
換して検出されるクラック欠陥を示す2値化パターン信
号を示し、第3図(b)は第2図(b)に示す円筒物体の端
面を撮像装置で撮像して得られる画像信号を2値化画像
信号に変換して検出される欠け欠陥を示す2値化パター
ン信号を示す。一方、核燃料用ウランペレットなどの円
筒形状を有する物体の端面を検査する場合、クラック欠
陥と円筒面から端面まで及ぶ欠け欠陥との良否の判定基
準が異なることかしてクラック欠陥と欠け欠陥とを識別
する必要があった。しかしながら、第2図(b)に示すよ
うに円筒面から端面まで及ぶ欠け欠陥があると第3図
(b)に示すような2値化パターン信号が検出され、該欠
け欠陥から検出される2値化パターン信号は第2図(a)
に示す端面に存在するクラック欠陥から検出される第3
図(a)に示す2値化パターン信号と同様になって欠け欠
陥をクラック欠陥と同様に誤判定してしまい、欠け欠陥
を除外してクラック欠陥のみを検査することができない
という課題を有していた。Conventionally, in order to inspect a crack on the end face of a cylindrical object, scattered light is applied to the end face as described in JP-A-55-154442 and JP-A-56-160645, and the reflected light is reflected by a TV camera. Defect determination is performed on a two-dimensional binary pattern in which only a portion corresponding to an end face is extracted from a binarized video signal detected by an imaging device such as the above. The case where there is a crack defect on the end surface of the cylindrical object is shown in FIG. 2 (a), and the case where there is a chip defect extending from the cylindrical surface to the end surface is shown in FIG. 2 (b). Further, FIG. 3 (a) is a binary value showing a crack defect detected by converting an image signal obtained by imaging the end surface of the cylindrical object shown in FIG. 2 (a) with an image pickup device into a binary image signal. 3B shows a binarized pattern signal, and FIG. 3B shows a chip detected by converting an image signal obtained by imaging the end surface of the cylindrical object shown in FIG. 2B with an image pickup device into a binarized image signal. The binary pattern signal which shows a defect is shown. On the other hand, when inspecting the end surface of an object having a cylindrical shape such as uranium pellets for nuclear fuel, crack defects and chip defects are determined by the fact that the judgment criteria of the quality of crack defects and the chip defects extending from the cylindrical surface to the end surface are different. I needed to identify. However, if there is a chip defect extending from the cylindrical surface to the end surface as shown in FIG.
The binarized pattern signal as shown in (b) is detected, and the binarized pattern signal detected from the chip defect is shown in FIG. 2 (a).
The third detected from the crack defect existing on the end face shown in
As in the case of the binarized pattern signal shown in FIG. 3A, there is a problem that a chip defect is erroneously determined like a crack defect, and the chip defect cannot be excluded to inspect only the crack defect. Was there.
本発明の目的は、上記従来技術の課題を解決すべく、核
燃料用ウランペレットなどの円筒物体の端面の欠陥検査
において、円筒面から端面まで及ぶ欠け欠陥とクラック
欠陥とを識別できるようにして欠け欠陥を除外してクラ
ック欠陥のみについて検査できるようにした円筒物体の
端面検査装置を提供することにある。The object of the present invention is to solve the above-mentioned problems of the prior art, in the defect inspection of the end surface of a cylindrical object such as uranium pellets for nuclear fuel, it is possible to identify a crack defect and a crack defect extending from the cylindrical surface to the end surface. An object of the present invention is to provide an end face inspection device for a cylindrical object, which is capable of inspecting only crack defects by excluding defects.
本発明は、上記目的を達成するために、円筒物体の円形
形状の端面を撮像する撮像装置と、該撮像装置で撮像し
て得られる円形形状の端面からの2次元画像信号を2値
化2次元画像信号に変換する2値化手段と、前記端面の
全体の円形形状を示す円形2値化パターンと前記端面の
円周輪郭のみを示す円周2値化パターンとを記憶する記
憶手段と、該2値化手段で得られた2値化2次元画像信
号に同期させて前記記憶手段から円形形状2値化パター
ンと円周輪郭2値化パターンを読出して前記2値化手段
で得られた2値化2次元画像信号に対して前記円形形状
2値化パターンと円周輪郭2値化パターンとの各々でゲ
ートさせて円形形状の端面における欠陥部分の全体を示
す2値化パターン信号と欠陥部分の円周輪郭のみを示す
2値化パターン信号との各々を抽出する抽出手段と、該
抽出手段により抽出された欠陥部分の全体を示す2値化
パターン信号について水平方向および垂直方向に射影し
た全体射影分布と前記抽出手段により抽出された欠陥部
分の円周輪郭のみを示す2値化パターン信号について前
記水平方向および垂直方向に射影した円周輪郭射影分布
とを作成する射影分布作成手段と、該射影分布作成手段
で作成された水平方向の全体射影分布と円周輪郭射影分
布との両者の垂直方向の幅がほぼ等しいと共に前記射影
分布作成手段で作成された垂直方向の全体射影分布と円
周輪郭射影分布との両者の水平方向の幅がほぼ等しいと
き円形形状の端面に存在する欠陥を円筒面から端面まで
及ぶ欠け欠陥と判定する判定手段とを備えたことを特徴
とする円筒物体の端面検査装置である。In order to achieve the above object, the present invention binarizes a two-dimensional image signal from an imaging device for imaging a circular end surface of a cylindrical object and a circular end surface obtained by imaging with the imaging device. Binarizing means for converting into a three-dimensional image signal; storage means for storing a circular binarizing pattern showing the entire circular shape of the end face and a circumferential binarizing pattern showing only the circumferential contour of the end face; The circular shape binarization pattern and the circumferential contour binarization pattern are read from the storage means in synchronization with the binarized two-dimensional image signal obtained by the binarization means and obtained by the binarization means. A binarized pattern signal and a defect indicating the entire defective portion on the end face of the circular shape by gated on the binarized two-dimensional image signal with each of the circular binarized pattern and the circumferential contour binarized pattern. Binary pattern signal showing only the circumferential contour of the part And an overall projection distribution projected in the horizontal and vertical directions on the binarized pattern signal indicating the entire defective portion extracted by the extracting means and the defective portion extracted by the extracting means. Projection distribution creating means for creating the circumferential contour projection distribution projected in the horizontal direction and the vertical direction with respect to the binarized pattern signal indicating only the circumferential contour of the above, and the entire horizontal direction created by the projection distribution creating means. The vertical widths of both the projection distribution and the circumferential contour projection distribution are substantially equal, and the horizontal widths of both the vertical overall projection distribution and the circumferential contour projection distribution created by the projection distribution creating means are An end face inspection apparatus for a cylindrical object, comprising: a determination unit for determining a defect existing on a circular end face when they are substantially equal as a defect defect extending from the cylindrical face to the end face. .
本発明の一実施例を第1図に示す。円筒物体の端面を撮
像装置1で操作撮像して得られる2次元画像信号は2値
化回路2で2値化2次元画像信号に変換して欠陥を
“1”で示す2値化パターン信号に変換する。メモリ3
は、ゲート信号である円形形状2値化パターン(円形形
状端面全体を示すゲート信号に相当)を記憶するもので
ある。メモリ4は、ゲート信号である円周輪郭2値化パ
ターン(端面の円周輪郭のみを示すゲート信号に相当)
を記憶するものである。メモリ3および4からは、撮像
装置1の走査に同期して円形形状2値化パターンおよび
円周輪郭2値化パターンのゲート信号が読出され、各々
のゲート回路5,6において2値化回路2で変換された
欠陥を“1”で示す2値化パターン信号をゲートし、ゲ
ート回路5からは第5図に示すような端面における欠陥
を“1”で示す2値化パターン信号が抽出され、ゲート
回路6からは端面の円周輪郭における欠陥を“1”で示
す2値化パターン信号が抽出される。7,8は水平走査
方向に射影した水平方向周辺分布作成回路であり、9,
10は垂直走査方向に射影した垂直方向周辺分布作成回路
である。11は水平方向周辺分布作成回路7,8から得ら
れる水平方向周辺分布入力し、欠陥を判定する判定回路
であり、12は垂直方向周辺分布作成回路9,10から得ら
れる垂直方向周辺分布を入力し、欠陥を判定する判定回
路である。One embodiment of the present invention is shown in FIG. The two-dimensional image signal obtained by operating and imaging the end surface of the cylindrical object with the image pickup device 1 is converted into a binarized two-dimensional image signal by the binarization circuit 2 to convert the defect into a binarized pattern signal indicated by "1". Convert. Memory 3
Stores a circular binarization pattern (corresponding to a gate signal indicating the entire circular end face) which is a gate signal. The memory 4 is a circular contour binarization pattern which is a gate signal (corresponding to a gate signal indicating only the circumferential contour of the end face).
Is to remember. Gate signals of the circular binarization pattern and the circumferential contour binarization pattern are read from the memories 3 and 4 in synchronization with the scanning of the image pickup apparatus 1, and the binarization circuit 2 in each of the gate circuits 5 and 6. The binarization pattern signal indicating the defect converted by 1 is gated, and the binarization pattern signal indicating the defect on the end face as shown in FIG. 5 is extracted from the gate circuit 5. The gate circuit 6 extracts a binarized pattern signal indicating a defect in the circumferential contour of the end face by "1". Reference numerals 7 and 8 denote horizontal direction peripheral distribution creation circuits projected in the horizontal scanning direction.
Reference numeral 10 is a vertical direction peripheral distribution generation circuit projected in the vertical scanning direction. Reference numeral 11 is a judgment circuit for inputting the horizontal marginal distributions obtained from the horizontal marginal distribution generating circuits 7 and 8 and determining a defect, and 12 is inputting the vertical marginal distributions obtained from the vertical marginal distribution generating circuits 9 and 10. Then, it is a judgment circuit for judging a defect.
次に水平方向周辺分布作成回路7,8及び垂直方向周辺
分布作成回路9,10の具体的構成を第4図に示す。第4
図において13は2値信号であり、14は水平走査クロック
であり、15は水平走査クロック14のパルス数を計数し、
水平走査位置を抽出する水平走査座標生成回路である。
16は垂直走査クロックであり、17は垂直走査クロック16
のパルス数を計数し、垂直走査位置を抽出する垂直走査
座標生成回路である。18,19はメモリであり、各々水平
走査座標生成回路15,垂直走査座標生成回路17の出力を
アドレスとして読出し、書込みが行なわれる。20,21は
加算回路であり、各々メモリ18,19の内容と2値信号13
を加算し、再びメモリ18,19へ加算結果を書込む。この
ようにすると1画面の走査終了時において、メモリ18,1
9には各々垂直方向周辺分布,水平方向周辺分布が作成
させることになる。Next, FIG. 4 shows a specific configuration of the horizontal direction peripheral distribution generation circuits 7 and 8 and the vertical direction peripheral distribution generation circuits 9 and 10. Fourth
In the figure, 13 is a binary signal, 14 is a horizontal scanning clock, 15 is the number of pulses of the horizontal scanning clock 14,
It is a horizontal scanning coordinate generation circuit that extracts a horizontal scanning position.
16 is the vertical scanning clock, 17 is the vertical scanning clock 16
This is a vertical scanning coordinate generation circuit that counts the number of pulses of and scans the vertical scanning position. Reference numerals 18 and 19 denote memories for reading and writing with the outputs of the horizontal scanning coordinate generation circuit 15 and the vertical scanning coordinate generation circuit 17 as addresses. Reference numerals 20 and 21 denote adder circuits, which respectively include the contents of the memories 18 and 19 and the binary signal 13
Is added, and the addition result is written in the memories 18 and 19 again. In this way, at the end of scanning one screen, the memory 18,1
In Fig. 9, vertical marginal distribution and horizontal marginal distribution are created respectively.
第5図にこのようにして得られる4つの周辺分布を円筒
面欠け,端面クラックについて示す。第5図において、
(a),(b)は円筒面欠けの例であり、(d),(e)がクラック
であり、X,Yと示すのは端面に相当する2値パターン
の水平方向周辺分布,垂直方向周辺分布であり、X接,
Y接と示すのは端面の円周に相当する2値パターンの水
平方向周辺分布,垂直方向周辺分布である。これらの周
辺分布において、面積S,幅L,ピークPを第6図
(a),(b)に示すように定義する。S,L,Pは周辺分布
上、分離しているものについて求め、Sは分布の面積、
Lは分布の長さ、Pは分布のピークである。このように
周辺分布から3つのパラメータを抽出すると、第5図
(a)(b)の場合、XとX接あるいはYとY接において幅L
がほぼ等しくなる((a),(b)の場合)。一方(d),(e)に
おいては(d)のYとY接の場合が上記の条件を満たす
(幅Lがほぼ等しくなる。)が、他の場合は条件を満た
さない。また(d)の場合には、Xよりクラックの情報が
抽出されるので、Yの分布が上記のように無視されても
問題とはならない。これは核燃料ペレットなどでは、ク
ラックの判定基準がクラック幅にあるため、LまたはP
を設定値と比較することにより判定できるからである。FIG. 5 shows the four peripheral distributions thus obtained for the cylindrical surface chip and the end surface crack. In FIG.
(a) and (b) are examples of cylindrical surface chipping, (d) and (e) are cracks, and X and Y indicate horizontal peripheral distribution of binary pattern corresponding to end face, vertical direction Marginal distribution, X contact,
The Y contact indicates the horizontal and vertical peripheral distributions of the binary pattern corresponding to the circumference of the end face. In these peripheral distributions, area S, width L, and peak P are shown in FIG.
Define as shown in (a) and (b). S, L, and P are obtained for those separated in the peripheral distribution, S is the area of the distribution,
L is the length of the distribution and P is the peak of the distribution. When three parameters are extracted from the marginal distribution in this way, FIG.
In case of (a) and (b), the width L at X-to-X contact or Y-to-Y contact
Are almost equal (for (a) and (b)). On the other hand, in (d) and (e), the above condition is satisfied in the case of Y and Y contact in (d) (width L becomes almost equal), but the condition is not satisfied in other cases. In the case of (d), since the crack information is extracted from X, it does not matter if the Y distribution is ignored as described above. This is because the criterion for cracks in nuclear fuel pellets is the crack width.
This is because it can be determined by comparing with the set value.
以上述べた判定を11,12の判定回路で行う例を第7図に
示す。ここで11,12はマイクロコンピュータ等で構成さ
れるとし、そのプログラムフローを示す。第7図におい
て、S,P,Lは端面に相当する部分の周辺分布の面
積,ピーク,幅であり、S接,L接は端面の円周に相当
する部分の周辺分布の面積,幅である。また、分布は前
者の分布,接分布は後者の分布を意味する。ε1,ε2,ε
3は設定値である。FIG. 7 shows an example in which the above-described judgments are made by the judgment circuits 11 and 12. Here, 11 and 12 are assumed to be configured by a microcomputer or the like, and the program flow thereof is shown. In FIG. 7, S, P, and L are the area, peak, and width of the peripheral distribution of the portion corresponding to the end face, and S contact and L contact are the area and width of the peripheral distribution of the portion corresponding to the circumference of the end face. is there. The distribution means the former distribution, and the tangential distribution means the latter distribution. ε 1 , ε 2 ,, ε
3 is a set value.
本発明によれば、核燃料用ウランペレットなどの円筒物
体の端面の欠陥検査において、円筒面から端面まで及ぶ
欠け欠陥とクラック欠陥とを識別できるようにして欠け
欠陥を除外してクラック欠陥のみについて検査すること
ができる効果を奏する。According to the present invention, in the defect inspection of the end surface of a cylindrical object such as uranium pellets for nuclear fuel, it is possible to distinguish between the chip defect and the crack defect extending from the cylinder surface to the end surface, and the chip defect is excluded to inspect only the crack defect. There is an effect that can be.
第1図は本発明の円筒物体の端面検査方式の一実施例を
示す全体構成図である。第2図及び第3図は本発明に係
る欠陥例を示す図、第4図は第1図に示す周辺分布作成
回路の具体例を示す図、第5図は各欠陥の周辺分布の例
を示す図第6図は周辺分布より抽出するパラメータを示
す図、第7図は判定回路の処理の流れを説明するための
図である。 1……撮像装置 2……2値化回路 3,4……メモリ 7,8……水平方向周辺分布作成回路 9,10……垂直方向周辺分布作成回路 11,12……判定回路FIG. 1 is an overall configuration diagram showing an embodiment of an end face inspection method for a cylindrical object of the present invention. 2 and 3 are diagrams showing examples of defects according to the present invention, FIG. 4 is a diagram showing a specific example of the marginal distribution creating circuit shown in FIG. 1, and FIG. 5 is an example of marginal distribution of each defect. FIG. 6 is a diagram showing parameters extracted from the marginal distribution, and FIG. 7 is a diagram for explaining the processing flow of the determination circuit. 1 ... Imaging device 2 ... Binarization circuit 3,4 ... Memory 7,8 ... Horizontal peripheral distribution creation circuit 9,10 ... Vertical peripheral distribution creation circuit 11,12 ... Judgment circuit
フロントページの続き (72)発明者 中川 泰夫 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 牧平 坦 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 中村 敏路 神奈川県足柄上郡中井町久所300 日立電 子エンジニアリング株式会社内 (72)発明者 宇高 信 神奈川県横須賀市内川2丁目3番1号 日 本ニユクリア・フユエル株式会社内 (56)参考文献 特開 昭55−154442(JP,A)Front Page Continuation (72) Inventor Yasuo Nakagawa 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Pref., Institute of Industrial Science, Hitachi, Ltd. (72) Inventor Makihira, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Stock Company Hitachi, Ltd. Production Technology Research Laboratory (72) Inventor Toshiji Nakamura 300 Hisasho, Nakai-cho, Ashigarashami-gun, Kanagawa Hitachi Electronics Engineering Co., Ltd. (72) Nobu Udaka, 2-3-1, Kawasawa, Yokosuka, Kanagawa・ Fuel Co., Ltd. (56) Reference JP-A-55-154442 (JP, A)
Claims (1)
装置と、該撮像装置で撮像して得られる円形形状の端面
からの2次元画像信号を2値化2次元画像信号に変換す
る2値化手段と、前記端面の全体の円形形状を示す円形
2値化パターンと前記端面の円周輪郭のみを示す円周2
値化パターンとを記憶する記憶手段と、該2値化手段で
得られた2値化2次元画像信号に同期させて前記記憶手
段から円形形状2値化パターンと円周輪郭2値化パター
ンを読出して前記2値化手段で得られた2値化2次元画
像信号に対して前記円形形状2値化パターンと円周輪郭
2値化パターンとの各々でゲートさせて円形形状の端面
における欠陥部分の全体を示す2値化パターン信号と欠
陥部分の円周輪郭のみを示す2値化パターン信号との各
々を抽出する抽出手段と、該抽出手段により抽出された
欠陥部分の全体を示す2値化パターン信号について水平
方向および垂直方向に射影した全体射影分布と前記抽出
手段により抽出された欠陥部分の円周輪郭のみを示す2
値化パターン信号について前記水平方向および垂直方向
に射影した円周輪郭射影分布とを作成する射影分布作成
手段と、該射影分布作成手段で作成された水平方向の全
体射影分布と円周輪郭射影分布との両者の垂直方向の幅
がほぼ等しいと共に前記射影分布作成手段で作成された
垂直方向の全体射影分布と円周輪郭射影分布との両者の
水平方向の幅がほぼ等しいとき円形形状の端面に存在す
る欠陥を円筒面から端面まで及ぶ欠け欠陥と判定する判
定手段とを備えたことを特徴とする円筒物体の端面検査
装置。1. An image pickup device for picking up a circular end face of a cylindrical object, and a two-dimensional image signal for converting a two-dimensional image signal from the circular end face picked up by the image pickup device into a binary two-dimensional image signal. A digitizing means, a circular binarization pattern showing the entire circular shape of the end face, and a circle 2 showing only the circumferential contour of the end face.
Storage means for storing the binarization pattern and a circular shape binarization pattern and a circumferential contour binarization pattern from the storage means in synchronization with the binarization two-dimensional image signal obtained by the binarization means. Defective portions on the end face of the circular shape are obtained by gated on the binarized two-dimensional image signal read out and obtained by the binarizing means with each of the circular binarization pattern and the circumferential contour binarization pattern. And a binarization pattern signal indicating only the circumferential contour of the defective portion, and a binarization indicating the entire defective portion extracted by the extracting means. Only the overall projection distribution of the pattern signal projected in the horizontal direction and the vertical direction and the circumferential contour of the defective portion extracted by the extracting means are shown. 2
Projection distribution creating means for creating the circumferential contour projection distribution projected in the horizontal direction and the vertical direction for the binarized pattern signal, and the horizontal overall projection distribution and the circumferential contour projection distribution created by the projection distribution creating means And the vertical widths of both are substantially equal to each other, and the vertical overall projection distribution created by the projection distribution creating means and the circumferential contour projection distribution are substantially equal to each other in the horizontal direction, a circular end face is formed. An end face inspection apparatus for a cylindrical object, comprising: a determining unit that determines an existing defect as a defect defect extending from a cylindrical surface to an end surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60063595A JPH0640075B2 (en) | 1985-03-29 | 1985-03-29 | End face inspection device for cylindrical objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60063595A JPH0640075B2 (en) | 1985-03-29 | 1985-03-29 | End face inspection device for cylindrical objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61223587A JPS61223587A (en) | 1986-10-04 |
| JPH0640075B2 true JPH0640075B2 (en) | 1994-05-25 |
Family
ID=13233777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60063595A Expired - Lifetime JPH0640075B2 (en) | 1985-03-29 | 1985-03-29 | End face inspection device for cylindrical objects |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640075B2 (en) |
-
1985
- 1985-03-29 JP JP60063595A patent/JPH0640075B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61223587A (en) | 1986-10-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0209077B1 (en) | Apparatus for detecting defects on a bottle mouth with a screw thread | |
| US4758782A (en) | Method and apparatus for inspecting printed circuit board | |
| JP3132565B2 (en) | Defect inspection method and apparatus | |
| JPH0160767B2 (en) | ||
| JP2597370B2 (en) | Method for detecting significant differences in sheet-like test materials | |
| JPH11160247A (en) | Appearance inspection method and apparatus | |
| JPS60200141A (en) | Detecting method of surface form of specular object | |
| JPH0640075B2 (en) | End face inspection device for cylindrical objects | |
| JP2846052B2 (en) | Cylindrical inspection equipment | |
| JP3187252B2 (en) | Pattern outline inspection device | |
| JP3919505B2 (en) | Pattern inspection apparatus and method | |
| JP2710685B2 (en) | Defect detection method by visual inspection | |
| JPH1114317A (en) | Appearance inspection method and apparatus | |
| JPS6026973B2 (en) | Object surface inspection method and device | |
| JPH0137789B2 (en) | ||
| JPH11344319A (en) | Pattern inspection apparatus, method and system | |
| JPS5821107A (en) | pattern inspection equipment | |
| JPH06174659A (en) | Scratch inspection method by image processing | |
| JPS6014165Y2 (en) | Line symmetric pattern recognition device | |
| JPS642992B2 (en) | ||
| JPH11185037A (en) | Defect information processing apparatus and method | |
| JPH0337229B2 (en) | ||
| JPH07104137B2 (en) | Method of detecting the rotation angle of the target pattern | |
| JPH02853B2 (en) | ||
| JPS5821109A (en) | Pattern defect inspection equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |