JPH064022B2 - Method for removing tetraalkylammonium salt and / or amines having methyl group - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention removes a tetraalkylammonium salt or / and an amine having a methyl group from a liquid containing an amine having a methyl group. On how to do.

[Prior Art] In recent years, tetraalkylammonium salts such as tetramethylammonium hydroxide and trimethylamine are often used as developers in the integrated circuit (IC) manufacturing process. The developing waste liquid containing these tetraalkylammonium salts and trimethylamine after use is toxic and cannot be discharged as it is because of the problem of water pollution.

At present, as a means for removing these substances from a liquid containing such a tetraalkylammonium salt, a treatment with a reverse osmosis membrane (for example, JP-A-60-118282) or a treatment with an ion exchange resin is performed. Although the added treatment is generally performed, each method has a problem that a concentrated liquid is produced and a large running cost is generated, resulting in high cost.

[Problems to be Solved by the Invention] As described above, a treatment method conventionally used for removing these substances from a liquid containing a tetraalkylammonium salt or trimethylamines causes a large running cost. There is a problem, and it has been desired to reduce this running cost. The present invention has solved this problem.

[Means for solving problems]

The present inventors focused their attention on utilizing microorganisms as a means for removing these substances from a liquid containing a tetraalkylammonium salt, trimethylamine, etc. at a low running cost, and conducted research. However, tetraalkylammonium salts, trimethylamine, and the like are generally very biodegradable compounds that cannot be easily removed by ordinary so-called microbiological treatment methods.

Therefore, the present inventor conducted a study on finding bacteria degrading tetraalkylammonium salt, trimethylamine, etc. from the natural world, and finally, from the activated sludge sample on hand, tetraalkylammonium salt and amines having a methyl group were isolated. Nocardia sp. S-255 (Nocardia sp. S-255), which can be used as a carbon source for the above, was separated to complete the present invention.

That is, in the present invention, a solution containing a tetraalkylammonium salt or / and an amine having a methyl group is added to Nocardia sp. S-255 (Nocardia sp. S-255).
Or a mutant strain thereof, which is inoculated and cultured to decompose and remove tetraalkylammonium salt or / and amines having a methyl group. is there.

The mycological properties of Nocardia sp. S-255 used in the present invention are as follows.

(a) Morphology Cell shape and size: Short bacilli, 0.75 × 1.5μ Cell polymorphism: Micelle → bacillus Motility: − Flagella: − Presence of spores: − Gram stain: + Anti-acidity: + (b) Growth state on each medium Meat agar plate medium: dot-like on the second day of culture, diameter 1 to 1.5 mm, all edges, cloudy color, dull, medium growth.

Broth agar slope medium: Warts, dull, medium growth.

Broth broth: Warts, small to medium growth.

Meat juice gelatin medium: Not liquefied at 30 ° C. in 6 days and not liquefied in 14 days.

Litmus milk: Alcohol on the 1st day, coagulation on the 1st day, and peptone conversion on the 2nd day by shaking culture at 30 ° C.

Sucrose / nitrate agar medium: No growth.

Glycerin / asparagine agar medium: No growth.

Peptone-Yeast Iron Agar Slope Medium: Warts, pale yellow cloudiness, large growth.

Saccharified broth agar Slope medium: Spread, wrinkled, clouded ocher, large growth.

(c) Physiological properties Nitrate reduction: + MR test: + Indole formation:-Starch hydrolysis:-Urease: + Catalase + Oxygen attitude: Aerobic Growth pH range: 5.5-10.0 Temperature range: 15-40 ° C Sugar utilization and gas generation: Sugar utilization Gas generation D-Fructose + -D-Glucose + -Maltose-Mannose-Rhamnose-Glycerol-Mannitol + -D-Galactose- -Inositol + -Lactose --- Syucrose --- Adonitol --- L-Arabinose --- Ribose + -Sorbitol + -Trehalose --- Serbiose --- Xylose --- Dextrin --- (d) Other properties Quaternary amines and other amines Resolution: Tetramethylammoniu According bacteriological properties of hydroxide + tetramethylammonium chloride + trimethylamine + dimethylamine + methylamine + above, Bajiezu-Maniyuaru Of de Itami Natick Te Yves bacteriophage Logistics Lee (Be
When the above-mentioned bacterium is identified by rgey's Manual of Determinaive Bacteriology) 8th edition (1974), the bacterium is a bacterium belonging to the genus Nocardia. ) Was not found, and it was judged to be a new species.

In addition, this Nocardia SP S-255 (Nocardia
sp. S-255) has been deposited with the Institute of Microbial Science and Technology of the Agency of Industrial Science and Technology as Microindustrial Research Institute No. 8471 (FERMP-8471).

In the present invention, not only Nocardia sp. S-255 but also a mutant strain obtained by mutating the bacterium by a conventional mutagenesis method can be used.

Specific examples of the tetraalkylammonium salt that can be removed by the present invention include, for example, tetramethylammonium hydroxide, tetramethylammonium chloride,
Tetra-n-propylammonium hydroxide,
Tetra-n-propylammonium chloride, tetrabutylammonium hydroxide, tetrabutylammonium chloride and the like can be mentioned, and specific examples of amines having a methyl group include, for example, methylamine, dimethylamine, trimethylamine and the like.

In carrying out the present invention, a solution containing tetraalkylammonium salt or / and amines having a methyl group (for example, a developing waste solution in the above-mentioned IC production) is treated with Nocardia SP S. -255 or a mutant strain thereof may be inoculated and cultured. Since the bacterium utilizes tetraalkylammonium salt and amines having a methyl group as a carbon source, if necessary, a nitrogen source (such as corn steep liquor, pupethone, yeast extract, etc.), an inorganic salt, a buffer solution is used. It can be cultured by adding such as.

For culturing, the bacterium was precultured for a suitable time or separated from a suitable medium, for example, a medium prepared by adding an appropriate amount of tetraalkylammonium salt or / and amine having a methyl group to a sugar broth. It is preferred to inoculate the body.

When the bacterium is cultured in a solution containing a tetraalkylammonium salt or / and an amine having a methyl group, the pH is 6
Appropriately, the temperature is about 20 to 40 ° C, and the culture time is about 1 to 3 days. The culture is preferably aerobic culture such as shaking culture and aeration culture.

The liquid after completion of the culture can be discharged as it is or, preferably, after separating the bacterial cells, it can be discharged.

〔The invention's effect〕

According to the present invention, it is possible to easily remove these substances in a liquid containing a tetraalkylammonium salt or / and an amine having a methyl group, which has been difficult to remove by a conventional microbiological treatment, at a low running cost. You can

〔Example〕

 Examples of the present invention will be shown below.

Tetramethylammonium hydroxide 1000
mg / sweetened broth (glucose 1%, meat extract 1
%, Peptone 1%, NaCl 0.5%), pH 7.0
Nocardia SP S-255 in the medium adjusted to
(FERM P-8471) was inoculated, shake-cultured at 30 ° C. for 2 days, and the culture was centrifuged and washed to obtain tetramethylammonium hydroxide as a carbon source so that the dry weight of the cells was 1000 mg /. (TMAH),
Tetramethylammonium chloride (TMAC), Tetra n-propylammonium hydroxide (T
PAH), tetra-n-propylammonium chloride (TPAC), tetrabutylammonium hydroxide (TBAH), tetrabutylammonium chloride (TBAC), trimethylamine (TMA), dimethylamine (DMA) methylamine (MA), respectively. 200 ml of the liquid having the composition

Carbon source (mg /) 1000 Corn Steep Liquor (mg /) 500 M / 15 Phosphate buffer (ml) 20 Total volume (ml) 200 Adjusted to pH 7.0 After inoculation of the bacteria, shake culture at 30 ° C for 72 hours, 24 hours later,
After 48 hours and 72 hours later, the amount (mg /) of the compound as the carbon source in the liquid was measured by a high performance liquid chromatography method (HPLC method). The results are shown in Table 1.

From the above results, it can be seen that according to the present invention, these substances are decomposed and removed from the liquid containing the tetraalkylammonium salt or / and the amine having a methyl group.

Claims (1)

[Claims] 1. A liquid containing a tetraalkylammonium salt or / and an amine having a methyl group,
SP-255 (Nocardia sp. S-255) or its mutant strain is inoculated and cultured to decompose and remove tetraalkylammonium salt or / and amines having a methyl group, or /
And a method for removing amines having a methyl group.