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JPH0640593B2 - Superconducting quantum interferometer gate - Google Patents
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JPH0640593B2 - Superconducting quantum interferometer gate - Google Patents

Superconducting quantum interferometer gate

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Publication number
JPH0640593B2
JPH0640593B2 JP60096210A JP9621085A JPH0640593B2 JP H0640593 B2 JPH0640593 B2 JP H0640593B2 JP 60096210 A JP60096210 A JP 60096210A JP 9621085 A JP9621085 A JP 9621085A JP H0640593 B2 JPH0640593 B2 JP H0640593B2
Authority
JP
Japan
Prior art keywords
superconducting
gate
interferometer
magnetic field
magnetic flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60096210A
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Japanese (ja)
Other versions
JPS61255077A (en
Inventor
兆申 蔡
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NEC Corp
Original Assignee
NEC Corp
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Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60096210A priority Critical patent/JPH0640593B2/en
Publication of JPS61255077A publication Critical patent/JPS61255077A/en
Publication of JPH0640593B2 publication Critical patent/JPH0640593B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は超伝導量子干渉計ゲートに関する。The present invention relates to a superconducting quantum interferometer gate.

(従来の技術) 従来、ジョセフソン接合デジタル回路では、超伝導ルー
プにジョセフソン接合を含んだ超伝導量子干渉計ゲート
が論理回路あるいは記憶回路として使用されている。
(Prior Art) Conventionally, in a Josephson junction digital circuit, a superconducting quantum interferometer gate including a Josephson junction in a superconducting loop is used as a logic circuit or a memory circuit.

第2図は従来の超伝導量子干渉計ゲートの第1の例の斜
視図である。
FIG. 2 is a perspective view of a first example of a conventional superconducting quantum interferometer gate.

第2図中、1は下部電極、2は上部電極、3は絶縁膜、
4は制御膜、5はジョセフソン接合、6は超伝導ルー
プ、7は互いに垂直な単位ベクトル 8はダンピング抵抗である。
In FIG. 2, 1 is a lower electrode, 2 is an upper electrode, 3 is an insulating film,
4 is a control film, 5 is a Josephson junction, 6 is a superconducting loop, and 7 are unit vectors perpendicular to each other. 8 is a damping resistor.

このような超伝導量子干渉計ゲートは、ゲート電流I
によりバイアスされ、制御線4に流れる電流Iinによっ
て電圧状態にスイッチする。干渉計ゲートの共振モード
を取除くためのダンピング抵抗8のインダクタンスは、
超伝導ループ6のインダクタンスよりも十分小さく設計
されている。この超伝導ループ6の下には絶縁膜10を
介して超伝導薄膜よりなる接地面9が設けられている。
干渉計型の回路の外部磁場及び制御電流Iinの依存性
は、次の式によって表わされる: (1)式において、Δθは超伝導ループ中のジョセフソン
接合5を介した超伝導オーダーパラメーターの位相の
差,Φは磁束量子、Φexは外部磁束,Φは超伝導ル
ープに流れる遮蔽電流によって生成される磁束,Iin
ゲートへの入力信号電流,Mは超伝導ループ6と入力コ
イル間の相互インダクタンスである。
Such a superconducting quantum interferometer gate has a gate current I g
It is biased by and is switched to a voltage state by the current I in flowing through the control line 4. The inductance of the damping resistor 8 for removing the resonance mode of the interferometer gate is
It is designed to be sufficiently smaller than the inductance of the superconducting loop 6. Below the superconducting loop 6, a ground plane 9 made of a superconducting thin film is provided via an insulating film 10.
The dependence of the external magnetic field and the control current I in of an interferometer type circuit is represented by the following equation: In equation (1), Δθ is the phase difference of the superconducting order parameter through the Josephson junction 5 in the superconducting loop, Φ o is the flux quantum, Φ ex is the external magnetic flux, and Φ s is the shield that flows in the superconducting loop. The magnetic flux generated by the current, I in is the input signal current to the gate, and M is the mutual inductance between the superconducting loop 6 and the input coil.

第(1)式で明らかなように、入力信号により発生し回路
を動作させる磁束IinMと外部磁束Φexは完全に等価で
あり、干渉計回路は両者に対し同様に反応する。従っ
て、外部磁束Φexの存在或いはΦexの変動は干渉計型ゲ
ートの誤動作を引起す原因となる。外部磁束Φexは次の
式によって表わされる: (2)式中右側の最初の項はバックグランドにある磁場に
よるもので は超伝導ループ6に垂直な単位ベクトル、 は干渉計を貫く磁場であり、これは空間の関数である、
積分∫dA1は超伝導ループ内部の に垂直な平面につき行なう。(2)式の右側第2項は超伝
導接地面9にトラップされた磁束によるもので、Nは干
渉計を貫いてトラップされている磁束の数、Kは超伝導
接地面9と超伝導ループ6との間の結合係数である。A
の大きさは、通常約100μm程である。三重磁気
遮蔽、超伝導接地面などを使った実験環境下での外部磁
場B1μGとすると、(2)式の第1項は5×10-6Φ
程であるが、第2項はN=1,K=0.5とすると
0.5Φoである。従って、もし超伝導接地面9にトラ
ップされた磁束がある場合、外部磁場による影響はほと
んどがこのトラップ磁束によるものである。実際に量子
干渉計ゲートの動作においては、この磁束トラッピング
現象は非常に頻繁に起り、超伝導量子干渉計ゲートの誤
動作を引起し、超伝導量子干渉計ゲートの正常動作の大
きな障害の一つであると考えられている。また、トラッ
プ以外のほぼ均等な分布をしたバックグランド磁場によ
る影響も、前記の磁気遮蔽を使わぬ場合、または不用意
に磁性物が装置環境内に混入している場合などでは、や
はり大きく超伝導量子干渉計ゲートの誤動作を引起す場
合がある。
As is clear from the equation (1), the magnetic flux I in M generated by the input signal and operating the circuit is completely equivalent to the external magnetic flux Φ ex , and the interferometer circuit similarly reacts to both. Therefore, variations in the presence or [Phi ex external magnetic flux [Phi ex becomes to cause cause malfunction of the interferometric type gate. The external magnetic flux Φ ex is represented by the formula: The first term on the right side of Eq. (2) is due to the magnetic field in the background. Is a unit vector perpendicular to the superconducting loop 6, Is the magnetic field that penetrates the interferometer, which is a function of space,
The integral ∫ dA 1 is inside the superconducting loop On a plane perpendicular to. The second term on the right side of equation (2) is due to the magnetic flux trapped in the superconducting ground plane 9, where N is the number of magnetic flux trapped through the interferometer, and K is the superconducting ground plane 9 and the superconducting loop. Is a coupling coefficient between 6 and 6. A
The size of 1 is usually about 100 μm 2 . Assuming an external magnetic field B1μG in an experimental environment using a triple magnetic shield, a superconducting ground plane, etc., the first term in equation (2) is 5 × 10 -6 Φ
Although it is about o , the second term is 0.5Φ o when N = 1 and K = 0.5. Therefore, if there is a magnetic flux trapped in the superconducting ground plane 9, most of the influence of the external magnetic field is due to this trapped magnetic flux. In actual operation of the quantum interferometer gate, this magnetic flux trapping phenomenon occurs very frequently, causing malfunction of the superconducting quantum interferometer gate, which is one of the major obstacles to normal operation of the superconducting quantum interferometer gate. Is believed to be. In addition, the influence of the background magnetic field that has an almost even distribution other than traps is also greatly affected by superconductivity when the above magnetic shielding is not used or when magnetic substances are inadvertently mixed into the environment of the device. This may cause malfunction of the quantum interferometer gate.

第3図は従来の超伝導量子干渉計ゲートの第2の例の斜
視図である。
FIG. 3 is a perspective view of a second example of a conventional superconducting quantum interferometer gate.

この超伝導量子干渉計ゲートは、超伝導接地面9にトラ
ップされた磁束の影響を受けないように立体型に作られ
たものである。第3図において、1は下部電極、2は上
部電極、3は絶縁膜、4は制御線、5はジョセフソン接
合、6は超伝導ループ、7は単位ベクトル 9は干渉計の下に絶縁膜10を介して設置している超伝
導接地面である。
This superconducting quantum interferometer gate is formed in a three-dimensional shape so as not to be affected by the magnetic flux trapped in the superconducting ground plane 9. In FIG. 3, 1 is a lower electrode, 2 is an upper electrode, 3 is an insulating film, 4 is a control line, 5 is a Josephson junction, 6 is a superconducting loop, and 7 is a unit vector. Reference numeral 9 is a superconducting ground plane installed below the interferometer via an insulating film 10.

このような干渉計ゲートに対して、接地面にトラップさ
れている磁束はその方向が干渉計ループと平行している
ので、干渉計と結合されず影響は及ぼさない。しかし、
この干渉計ゲートは超伝導接地面9に水平な方向の磁場
の影響を受け、外部磁束は となる。
For such an interferometer gate, the magnetic flux trapped on the ground plane is parallel to the interferometer loop, so that it is not coupled to the interferometer and has no effect. But,
This interferometer gate is affected by the magnetic field in the direction horizontal to the superconducting ground plane 9, and the external magnetic flux is Becomes

は超伝導ループ6に垂直な単位ベクトルであり、∫dA
2に垂直な超伝導ループの内部につき積分される。またこ
のような干渉計ゲートでは、共振モードを取除くための
干渉計インダクタンスよりも十分小さいインダクタンス
を持つ抵抗で干渉計ゲートをシャントする事が出来ない
という欠点があった。
Is a unit vector perpendicular to the superconducting loop 6 and ∫dA
2 is Is integrated about the inside of the superconducting loop perpendicular to. Further, in such an interferometer gate, there is a drawback that the interferometer gate cannot be shunted with a resistor having an inductance sufficiently smaller than the interferometer inductance for removing the resonance mode.

以上の従来例を要約すると、第2図に示すような平面型
干渉計ゲートでは、シャント抵抗を備える事が出来た
が、接地面にトラップした磁束の影響、接地面に垂直な
方向に分布するバックグランド磁場の影響を受ける欠点
があった。一方第3図に示すような立体型の干渉計ゲー
トでは、トラップ磁束に対しては影響を受けないが、接
地面に水平なバックグランド磁場の影響を受け、同時に
シャント抵抗を設置出来ないという欠点があった。
To summarize the above conventional example, the planar interferometer gate as shown in FIG. 2 could be provided with a shunt resistance, but the influence of the magnetic flux trapped on the ground plane and the distribution in the direction perpendicular to the ground plane. It had the drawback of being affected by the background magnetic field. On the other hand, the three-dimensional interferometer gate as shown in FIG. 3 is not affected by the trap magnetic flux, but is affected by the background magnetic field horizontal to the ground plane, and at the same time, the shunt resistor cannot be installed. was there.

(発明の目的) 本発明の目的は、上記のような接地面にトラップされた
磁束の影響、またはトラップ磁束以外で干渉計に結合し
ている外部磁界の影響を受けない超伝導量子干渉計ゲー
トを提供することにある。
(Object of the Invention) An object of the present invention is to prevent a superconducting quantum interferometer gate from being affected by the magnetic flux trapped in the ground plane as described above, or by an external magnetic field coupled to the interferometer other than the trap magnetic flux. To provide.

(発明の構成) 本発明の超伝導量子干渉計ゲートは、U字型の平面形状
をもつ第1及び第2の超伝導薄膜を絶縁物を介して互い
に重ね2個以上のジョセフソン接合により電気的に接続
して、平面形状がU字型でこのU字型のそれぞれの辺を
含み前記U字型平面に垂直な面内に外部の磁場に対する
結合面を持つ超伝導ループを構成し、前記U字型平面に
平行で分布が一様な磁場が加わったとき、前記磁場が前
記U字型超伝導ループの互いに向い合う二辺のそれぞれ
に与える影響が互いに打ち消し合うようにしたことを特
徴とする。
(Structure of the Invention) The superconducting quantum interferometer gate of the present invention is characterized in that the first and second superconducting thin films having a U-shaped planar shape are superposed on each other with an insulator interposed therebetween and are electrically connected by two or more Josephson junctions. To form a superconducting loop having a coupling surface for an external magnetic field in a plane perpendicular to the U-shaped plane, the superconducting loop having a U-shaped plane shape and each side of the U-shaped plane, When a magnetic field parallel to the U-shaped plane and having a uniform distribution is applied, the effects of the magnetic field on the two facing sides of the U-shaped superconducting loop are canceled each other. To do.

(実施例) 次に、本発明の実施例について図面を用いて詳細に説明
する。
(Example) Next, the Example of this invention is described in detail using drawing.

第1図は本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.

第1図中、1は下部電極、2は上部電極、3は絶縁膜、
5はジョセフソン接合、6は超伝導ループ、7は互いに
垂直な単位ベクトル 8はダンピング抵抗である。なお本図では図面が複雑に
なるので制御線は画かれていないが第2図同様、上部電
極上に絶縁物を介して制御線を設ける事が出来る。本実
施例の特徴は、二重のU字型をした超伝導膜によって超
伝導ループ6が型成されている事である。
In FIG. 1, 1 is a lower electrode, 2 is an upper electrode, 3 is an insulating film,
5 is a Josephson junction, 6 is a superconducting loop, 7 is a unit vector perpendicular to each other 8 is a damping resistor. Note that the control line is not drawn in this figure because the drawing is complicated, but as in FIG. 2, the control line can be provided on the upper electrode via an insulator. The feature of this embodiment is that the superconducting loop 6 is formed by a double U-shaped superconducting film.

このような構造を持つ干渉計ゲートの外部磁場に対する
効果を以下に説明する。この実施例において、超伝導接
地面のいずれの個所に磁束がトラップされていたとして
もこの磁束の方向は干渉計ループに平行なので、超伝導
ループ6にはこの磁束は接合されず、超伝導ループが受
ける外部磁場は、 である。
The effect of the interferometer gate having such a structure on the external magnetic field will be described below. In this embodiment, no matter where the magnetic flux is trapped in the superconducting ground plane, the direction of this magnetic flux is parallel to the interferometer loop, so this magnetic flux is not joined to the superconducting loop 6 and the superconducting loop 6 is not joined. The external magnetic field received by Is.

は第1図に示してある と反対の方向を持つ単位ベクトル、積分∫dA2,∫d
3,∫dA4はそれぞれ に垂直な超伝導ループの内部平面に亘っている。(4)式
から得られる値は(2)式の第1項とほぼ同じ程度の磁束
であり、磁束量子Φよりも十分小さい。超伝導ループ
よりも十分大きな広がりを持つ超伝導接地面9が存在す
る場合、干渉計ループ近辺での外部磁場の局所的な分布
はほぼ一様で 面内に存在する。また、∫dA2=∫dA4≫∫dA3
すると、(3)式は となる。しかし、 は反対向きなので、局所的に磁場Bの分布が前記のよう
にほぼ一様であれば、Φex0となる。従って、本実施
例の超伝導干渉計ゲートはトラップ磁束のみならず、ト
ラップによらない接地面に垂直,水平両方向のバックグ
ランド磁場が存在しても該量子干渉計ゲートの動作には
何ら影響を受けないという特性を持っている。更に加え
て、本発明のような二重のU字型ループを使用する事に
よって、超伝導ループのインダクタンスよりも十分小さ
いインダクタンスを持ったダンピング抵抗により第1図
のように干渉計をシャントする事が出来る。
Is shown in FIG. Unit vector with the opposite direction to, integration ∫dA 2 , ∫d
A 3 and ∫ dA 4 are respectively Over the inner plane of the superconducting loop perpendicular to. The value obtained from the equation (4) is a magnetic flux which is almost the same as that of the first term of the equation (2), and is sufficiently smaller than the magnetic flux quantum Φ o . When there is a superconducting ground plane 9 that has a sufficiently larger spread than the superconducting loop, the local distribution of the external magnetic field near the interferometer loop is almost uniform. Exists in the plane. If ∫dA 2 = ∫dA 4 >> ∫dA 3 , then equation (3) becomes Becomes But, Is in the opposite direction, and if the distribution of the magnetic field B is locally almost uniform as described above, then Φ ex 0. Therefore, the superconducting interferometer gate of the present embodiment has no effect on the operation of the quantum interferometer gate even if there is a background magnetic field in both vertical and horizontal directions on the ground plane not depending on the trap, as well as the trap magnetic flux. It has the characteristic of not receiving. In addition, by using a double U-shaped loop as in the present invention, the interferometer is shunted as shown in FIG. 1 by a damping resistor having an inductance sufficiently smaller than that of the superconducting loop. Can be done.

なお、本実施例では量子干渉計ゲートの下に接地面を設
けたが、この接地面はなくてもよい。
Although the ground plane is provided below the quantum interferometer gate in this embodiment, this ground plane may be omitted.

(発明の効果) 以上説明したように、本発明によれば、バックグランド
の磁場や接地面にトラップされた磁束などの影響を受け
ず、同時に十分小さなインダクタンスを持ったダンピン
グ抵抗によって干渉計をシャントする事も出来る超伝導
量子干渉計ゲートが得られる。
(Effects of the Invention) As described above, according to the present invention, the interferometer is shunted by the damping resistor having a sufficiently small inductance without being affected by the magnetic field of the background or the magnetic flux trapped in the ground plane. A superconducting quantum interferometer gate that can also be obtained is obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例の斜視図、第2図は従来の超
伝導量子干渉計ゲートの第1の例の斜視図、第3図は従
来の超伝導量子干渉計ゲートの第2の例の斜視図であ
る。 1……下部電極、2……上部電極、3……絶縁膜、4…
…制御線、5……ジョセフソン接合、6……超伝導ルー
プ、7……単位ベクトル、8……ダンピング抵抗、9…
…超伝導接地面、10……絶縁膜。
FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a perspective view of a first example of a conventional superconducting quantum interferometer gate, and FIG. 3 is a second view of a conventional superconducting quantum interferometer gate. 3 is a perspective view of an example of FIG. 1 ... lower electrode, 2 ... upper electrode, 3 ... insulating film, 4 ...
… Control line, 5 ... Josephson junction, 6 ... Superconducting loop, 7 ... Unit vector, 8 ... Damping resistance, 9 ...
… Superconducting ground plane, 10… Insulating film.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】U字型の平面形状をもつ第1及び第2の超
伝導薄膜を絶縁物を介して互いに重ね2個以上のジョセ
フソン接合により電気的に接続して、平面形状がU字型
でこのU字型のそれぞれの辺を含み前記U字型平面に垂
直な面内に外部の磁場に対する結合面を持つ超伝導ルー
プを構成し、 前記U字型平面に平行で分布が一様な磁場が加わったと
き、前記磁場が前記U字型超伝導ループの互いに向い合
う二辺のそれぞれに与える影響が互いに打ち消し合うよ
うにしたことを特徴とする超伝導量子干渉計ゲート。
Claim: What is claimed is: 1. A first and a second superconducting thin films having a U-shaped planar shape are superposed on each other with an insulator interposed therebetween and electrically connected by two or more Josephson junctions so that the planar shape is U-shaped. Form a superconducting loop having a coupling surface for an external magnetic field in a plane that includes each side of the U-shape and is perpendicular to the U-shape plane, and is parallel to the U-shape plane and has a uniform distribution. A superconducting quantum interferometer gate, characterized in that, when a strong magnetic field is applied, the effects of the magnetic field on the two opposite sides of the U-shaped superconducting loop cancel each other out.
JP60096210A 1985-05-07 1985-05-07 Superconducting quantum interferometer gate Expired - Lifetime JPH0640593B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60096210A JPH0640593B2 (en) 1985-05-07 1985-05-07 Superconducting quantum interferometer gate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60096210A JPH0640593B2 (en) 1985-05-07 1985-05-07 Superconducting quantum interferometer gate

Publications (2)

Publication Number Publication Date
JPS61255077A JPS61255077A (en) 1986-11-12
JPH0640593B2 true JPH0640593B2 (en) 1994-05-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP60096210A Expired - Lifetime JPH0640593B2 (en) 1985-05-07 1985-05-07 Superconducting quantum interferometer gate

Country Status (1)

Country Link
JP (1) JPH0640593B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719920B2 (en) * 1986-11-14 1995-03-06 富士通株式会社 Magnetic field coupling type Josephson integrated circuit
JP2656485B2 (en) * 1987-04-20 1997-09-24 株式会社日立製作所 Magnetic head

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117503A (en) * 1977-06-30 1978-09-26 International Business Machines Corporation Josephson interferometer structure which suppresses resonances

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Appl.Phys.Lett.38[9(1.May1981)pp.723−725

Also Published As

Publication number Publication date
JPS61255077A (en) 1986-11-12

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