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JPH0641081B2 - Machine Tools - Google Patents
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JPH0641081B2 - Machine Tools - Google Patents

Machine Tools

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Publication number
JPH0641081B2
JPH0641081B2 JP14689487A JP14689487A JPH0641081B2 JP H0641081 B2 JPH0641081 B2 JP H0641081B2 JP 14689487 A JP14689487 A JP 14689487A JP 14689487 A JP14689487 A JP 14689487A JP H0641081 B2 JPH0641081 B2 JP H0641081B2
Authority
JP
Japan
Prior art keywords
spindle
gear
main shaft
rotational position
position detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14689487A
Other languages
Japanese (ja)
Other versions
JPS63312039A (en
Inventor
和男 陣野
武 倉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP14689487A priority Critical patent/JPH0641081B2/en
Publication of JPS63312039A publication Critical patent/JPS63312039A/en
Publication of JPH0641081B2 publication Critical patent/JPH0641081B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は、単一の駆動電動機により主軸の回転速度制御
と回転位置制御とを切換えて行い得るようにした工作機
械に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool capable of switching between rotation speed control and rotation position control of a spindle by a single drive motor.

<従来の技術> 一例として第3図に示すような回転工具による切削を行
うマシニングセンタ10においては、例えばATCによ
る工具の自動変換時に主軸頭11の主軸12を所定の回
転位置に向ける必要がある。従来、この主軸の回転位置
を主軸駆動電動機を数値制御して行うものはなく、主軸
の回転位置制御には第4図に示すようなアタッチメント
型の特別の主軸回転位置制御装置が提案されている。す
なわち、第4図において、11は主軸頭、12は主軸、
13は主軸回転位置制御用アタッチメント、14はその
専用電動機、15は切削工具であり、主軸駆動電動機と
は別の専用電動機14により主軸12の回転位置を制御
するものである。
<Prior Art> As an example, in a machining center 10 for cutting with a rotary tool as shown in FIG. 3, it is necessary to direct the spindle 12 of the spindle head 11 to a predetermined rotational position during automatic tool conversion by ATC, for example. Conventionally, there is no one that numerically controls the rotational position of the spindle by controlling the spindle drive motor, and a special spindle rotational position control device of attachment type as shown in FIG. 4 has been proposed for the rotational position control of the spindle. . That is, in FIG. 4, 11 is the spindle head, 12 is the spindle,
Reference numeral 13 is a spindle rotational position control attachment, 14 is its dedicated electric motor, 15 is a cutting tool, and the rotational position of the spindle 12 is controlled by a dedicated electric motor 14 different from the spindle driving electric motor.

<発明が解決しようとする問題点> 主軸の回転速度を制御する主軸駆動電動機を数値制御し
て主軸回転位置制御にも兼用できれば有利であるが、主
軸の回転位置を制御するにはその回転位置検出器を設け
る必要がある。いま、主軸回転位置検出器を主軸に取付
けた歯車構成例を第5図に示す。第5図において、主軸
駆動電動機16の駆動側軸17に駆動ギヤ18を取付
け、その駆動ピニオン18を中間軸19に軸方向摺動自
在に軸支された中間ギヤ20の高速域ギヤ部20aに噛
み合わせる。中間ギヤ20は、歯数の多い前記高速段ギ
ヤ部20aと、それと一体回転する歯数の少ない低速段
ギヤ部20bとを有しており、それらは主軸21に固定
された高速従動ギヤ22と低速従動ギヤ23とに各々択
一的に噛み合うようになっている。すなわち、中間ギヤ
20が、第5図で実線で示すように、その低速段ギヤ部
20bと主軸21の低速従動ギヤ23とが噛み合った状
態においては、低速段歯車が構成されて主軸21が低速
回転する一方、想像線で示すように、中間ギヤ20がシ
フトしてその高速段ギヤ部20aと主軸21の高速従動
ギヤ22とが噛み合った状態においては、高速段歯車が
構成されて主軸21が高速回転するようになっている。
このような主軸21に、その主軸21の回転位置を検出
すべく、1対1の歯車比をもつギヤ24、25を介して
主軸回転位置検出器26を連結する。
<Problems to be Solved by the Invention> It would be advantageous if the spindle drive motor for controlling the rotation speed of the spindle could be numerically controlled and used for spindle rotation position control as well, but in order to control the rotation position of the spindle, its rotation position should be controlled. It is necessary to provide a detector. Now, FIG. 5 shows an example of a gear configuration in which a spindle rotational position detector is attached to the spindle. In FIG. 5, a drive gear 18 is attached to a drive side shaft 17 of a main shaft drive electric motor 16, and the drive pinion 18 is attached to a high speed range gear portion 20a of an intermediate gear 20 axially slidably supported by an intermediate shaft 19. Engage. The intermediate gear 20 has the high speed step gear portion 20a having a large number of teeth and the low speed step gear portion 20b having a small number of teeth that rotates integrally with the high speed step gear portion 20a, which are a high speed driven gear 22 fixed to a main shaft 21 and a high speed driven gear 22. The low speed driven gear 23 is selectively meshed with each other. That is, as shown by the solid line in FIG. 5, in the intermediate gear 20, when the low speed stage gear portion 20b and the low speed driven gear 23 of the main shaft 21 mesh with each other, the low speed stage gear is configured and the main shaft 21 moves at a low speed. While rotating, as shown by the imaginary line, in the state where the intermediate gear 20 shifts and the high speed stage gear portion 20a and the high speed driven gear 22 of the main shaft 21 mesh with each other, the high speed stage gear is configured and the main shaft 21 moves. It is designed to rotate at high speed.
In order to detect the rotational position of the main shaft 21, a main shaft rotational position detector 26 is connected to the main shaft 21 via gears 24 and 25 having a gear ratio of 1: 1.

而して、主軸回転位置検出器26は常に主軸21と同じ
回転速度で回転し、主軸21の回転位置を検出して位置
信号をフィードバックすることが可能となる。尚、図中
括弧書きにて各歯車の歯数の一例を示している。
Thus, the spindle rotational position detector 26 always rotates at the same rotational speed as the spindle 21, and it becomes possible to detect the rotational position of the spindle 21 and feed back the position signal. In the figure, an example of the number of teeth of each gear is shown in parentheses.

ところが、上述したように主軸回転位置検出器26を主
軸21に直接取付けて、主軸回転位置検出器26を常に
主軸21と同じ回転をさせようとすると、次のような問
題点が生じる。すなわち、上述のように主軸21の駆動
歯車系に歯車変換機構(ギヤシフト機構)を備え、主軸
21が低速、高速の複数の変速段を有する場合、主軸2
1が高速回転するときに主軸回転位置検出器26の許容
回転数を越えてしまうことがあり、対応できない。つま
り、主軸回転位置検出器26に例えばロータリエンコー
ダを用いるとすると、その許容回転数は一般に6,00
0〜7,000rpm程度であるのに対し、主軸21の回
転数は最大8,000〜10,000rpm以上であり、
主軸21の高速域ではロータリエンコーダを使用できな
い。さらに、回転工具を使用する主軸駆動歯車系におい
ては、歯車のバックラッシが大きいため、主軸回転位置
検出器26を主軸21に直接取付けると、位置ループゲ
インを高くとれず、高速、高精度な位置制御を行うこと
ができない。
However, as described above, when the spindle rotational position detector 26 is directly attached to the spindle 21 and the spindle rotational position detector 26 is always rotated in the same manner as the spindle 21, the following problems occur. That is, as described above, when the drive gear system of the main shaft 21 is provided with the gear conversion mechanism (gear shift mechanism) and the main shaft 21 has a plurality of low-speed and high-speed gear stages, the main shaft 2
When 1 rotates at a high speed, the allowable rotational speed of the spindle rotational position detector 26 may be exceeded, which is not possible. That is, if a rotary encoder is used for the spindle rotational position detector 26, the allowable rotational speed is generally 6,000.
The rotation speed of the main shaft 21 is 8,000 to 10,000 rpm or more, while the rotation speed is 0 to 7,000 rpm.
The rotary encoder cannot be used in the high speed range of the spindle 21. Further, in a spindle drive gear system using a rotary tool, since the backlash of the gear is large, if the spindle rotation position detector 26 is directly attached to the spindle 21, a high position loop gain cannot be obtained, and high-speed, high-accuracy position control is possible. Can't do.

一方、主軸の低速段のみで主軸回転位置制御を行えばよ
い場合でも、主軸以外の所に主軸回転位置検出器を取付
けると、高速段に切換えた際に主軸の回転原点と主軸回
転位置検出器の原点が必ずしも一致せず、再び低速段に
切換えた時に主軸の原点が狂ってしまい、自動工具交換
ができなくなったり、工具の刃先の向きが一定にならな
い等の問題が生じる。
On the other hand, even if it is sufficient to control the spindle rotational position only at the low speed stage of the spindle, if the spindle rotational position detector is attached to a place other than the spindle, the spindle rotation origin and the spindle rotational position detector will change when switching to the high speed stage. Does not always coincide with each other, and when switching to the low speed stage again, the origin of the main spindle goes wrong, which makes it impossible to perform automatic tool change, and causes a problem that the orientation of the cutting edge of the tool is not constant.

本発明は、主軸駆動電動機で主軸速度制御と数値制御に
よる主軸回転位置制御とを切換えて行おうとするに当り
発生する上述したような諸問題を解決するものであり、
単一の駆動電動機により主軸の回転速度制御及び数値制
御による回転位置制御とを有効に行い得る工作機械を提
供することを目的としている。
The present invention is to solve the above-mentioned problems that occur when switching between spindle speed control and spindle rotational position control by numerical control in a spindle drive motor.
An object of the present invention is to provide a machine tool capable of effectively controlling the rotational speed of a spindle and the rotational position control by numerical control with a single drive motor.

<問題点を解決するための手段> 上述の問題点を解決する本発明にかかる工作機械は、主
軸と、前記主軸の回転速度制御及び数値制御による回転
位置制御可能な主軸駆動電動機と、前記主軸と前記主軸
駆動電動機との間に介在し複数の変速段を有すると共に
その各変速段間における変速比が整数とされた歯車変換
機構と、前記主軸駆動電動機と前記歯車変換機構の間に
設けられると共に該歯車変換機構の低速段における前記
主軸と同じ減速比で回転するよう動力伝達手段を介して
該主軸駆動電動機に連結された主軸回転位置検出器と、
前記主軸の1回転内の所定の回転位置を検出する主軸定
位値検出器と、前記主軸定位値検出器の信号と前記主軸
回転位置検出器の原点位置信号が一致した時に前記歯車
変換機構の歯車変換を行わせる変速制御装置とを具えた
ことを特徴とする。
<Means for Solving the Problems> A machine tool according to the present invention for solving the above problems includes a spindle, a spindle drive motor capable of controlling a rotational position of the spindle by rotational speed control and numerical control, and the spindle. Is provided between the main shaft drive motor and the gear conversion mechanism, and a gear conversion mechanism that is interposed between the main shaft drive motor and the main shaft drive motor and that has a plurality of shift speeds and has an integer gear ratio between the shift speeds. A spindle rotation position detector connected to the spindle drive motor via a power transmission means so as to rotate at the same speed reduction ratio as the spindle in the low speed stage of the gear conversion mechanism,
A spindle localization value detector that detects a predetermined rotational position within one revolution of the spindle, and a gear of the gear conversion mechanism when a signal of the spindle localization value detector and an origin position signal of the spindle rotation position detector match. And a shift control device for performing conversion.

<作用> 主軸回転位置検出器は、歯車変換機構の変速段に関係な
く常に低速域で回転し、その許容回転数を越えることが
防止される。また、主軸回転位置検出器を主軸駆動電動
機に連結する動力伝達手段は主軸の駆動系とは独立して
設けられ、高精度な機構とすることができる。一方、変
速制御装置は変速段の切換えによって主軸回転位置検出
器の主軸に対する原点位置が狂うのを防止する。
<Operation> The spindle rotational position detector always rotates in the low speed range regardless of the gear stage of the gear conversion mechanism, and is prevented from exceeding its permissible rotational speed. Further, the power transmission means for connecting the main shaft rotational position detector to the main shaft drive electric motor is provided independently of the main shaft drive system, and a highly accurate mechanism can be provided. On the other hand, the shift control device prevents the origin position of the spindle rotational position detector from being displaced with respect to the spindle due to the shift of the shift stage.

<実施例> 以下、本発明の一実施例を図面により具体的に説明す
る。
<Example> Hereinafter, one example of the present invention will be specifically described with reference to the drawings.

第1図は本発明の一実施例にかかる主軸駆動歯車構成図
である。尚、第1図において、前述の第5図と同一部分
には同一符号を付して重複する説明は省略する。
FIG. 1 is a configuration diagram of a spindle drive gear according to an embodiment of the present invention. Note that, in FIG. 1, the same parts as those in FIG. 5 described above are denoted by the same reference numerals, and overlapping description will be omitted.

第1図において、中間ギヤ20を中間軸19に軸方向に
摺動自在に取付け、その高速段ギヤ部20aと低速段ギ
ヤ部20bとを主軸21側の高速従動ギヤ22と低速従
動ギヤ23とに各々択一的に噛み合うようにして歯車変
換機構27が構成される。この歯車変換機構27は高速
段と低速段の間における変速比が整数となるようにその
歯数比が決定されている。因に、図示例のものにおい
て、高速段ギヤ部20aと高速従動ギヤ22とが噛み合
う高速段の低速比をNとすると、 一方、低速段ギヤ部20bと低速従動ギヤ23とが噛み
合う低速段の減速比をNとすると、 従って、これらの変速比Rは、 となり、高速段では低速段に対して同一の主軸駆動電動
機16の回転速度において主軸21は4倍の回転速度と
なる。
In FIG. 1, an intermediate gear 20 is attached to an intermediate shaft 19 slidably in an axial direction, and a high speed gear portion 20a and a low speed gear portion 20b thereof are connected to a high speed driven gear 22 and a low speed driven gear 23 on a main shaft 21 side. The gear converting mechanism 27 is configured so as to selectively engage with each other. The gear ratio of the gear converting mechanism 27 is determined so that the gear ratio between the high speed stage and the low speed stage is an integer. Incidentally, in the illustrated example, if the low speed ratio of the high speed stage where the high speed stage gear portion 20a and the high speed driven gear 22 mesh is N H , On the other hand, if the reduction ratio of the low speed stage in which the low speed stage gear portion 20b and the low speed driven gear 23 mesh is N L , Therefore, these gear ratios R are Therefore, in the high speed stage, the main shaft 21 has a rotational speed four times that of the low speed stage at the same rotational speed of the main shaft drive motor 16.

一方、歯車変換機構27と主軸駆動電動機16の間、つ
まり主軸駆動電動機16の駆動側軸17には動力伝達手
段にあるギヤ28、29を介して主軸回転位置検出器2
6が連結されている。ギヤ28、29の歯数比は前記歯
車変換機構27の低速段における減速比Nと同じ減速
比となるように選定されていて、それによって主軸回転
位置検出器26は低速段における主軸21の回転速度と
同じ速度で回転駆動されるようになっている。ここで、
ギヤ28、29は歯車変換機構27等の主軸駆動系歯車
とは別系列であり、高負荷が作用することがないから、
歯車のバックラッシを最小に設定することが可能であ
る。また、主軸回転位置検出器26には、例えばエンコ
ーダ、レゾルバ等を用いることができ、その1回転内の
所定の一点を原点位置とし、そこで電気信号を発する機
能を有している。
On the other hand, between the gear conversion mechanism 27 and the spindle drive motor 16, that is, on the drive side shaft 17 of the spindle drive motor 16, the spindle rotation position detector 2 is provided via gears 28 and 29 which are power transmission means.
6 are connected. The gear ratio of the gears 28, 29 is selected so as to have the same reduction ratio as the reduction ratio N L in the low speed stage of the gear conversion mechanism 27, so that the main shaft rotational position detector 26 detects the main shaft 21 in the low speed stage. It is designed to be rotationally driven at the same speed as the rotational speed. here,
Since the gears 28 and 29 are separate from the main shaft drive system gears such as the gear conversion mechanism 27, a high load does not act,
It is possible to set the backlash of the gear to a minimum. An encoder, a resolver, or the like can be used as the spindle rotational position detector 26, and has a function of emitting an electric signal at a predetermined one point within one rotation thereof as an origin position.

また、主軸21には検出板30が固定され、その外周部
に近接して主軸21の1回転内の所定の回転位置を検出
する例えば近接スイッチ等の主軸定位値検出器31が設
けられている。
Further, a detection plate 30 is fixed to the main shaft 21, and a main shaft localization value detector 31 such as a proximity switch for detecting a predetermined rotational position within one rotation of the main shaft 21 is provided near the outer peripheral portion of the detection plate 30. .

さらに、本装置では図示しない変速制御装置が設けられ
ており、この変速制御装置によって前記主軸回転位置検
出器26の原点位置信号と前記主軸定位値検出器31の
信号が一致した時に前記歯車変換機構27の歯車変換
(ギヤシフト)を行うようにしている。すなわち、それ
らのタイミングチャートを表わす第2図に示すように、
歯車変換機構27が低速段を選択しているときは、主軸
21と主軸回転位置検出器26とは同じ回転速度で回転
しているため、主軸定位値検出器31の信号と主軸回転
位置検出器26の原点信号とは常に同じタイミングで発
せられる。従って、この場合はそれらの信号が発せられ
る毎に高速段への歯車変換が可能となる。一方、歯車変
換機構27が高速段を選択しているときは、主軸21は
主軸回転位置検出器26の4倍の速さで回転しており、
従ってこのときは主軸21の4回転に1回の割合いで主
軸定位値検出器31の信号と主軸回転位置検出器26の
原点信号とが一致した所で低速段への歯車変換が可能と
なる。このようにすることで、低速段で主軸21の原点
(主軸定位値停止位置)と主軸回転位置検出器26の原
点位置とを常に一致させておくことができ、従って、ギ
ヤシフトを何回行っても低速段において主軸駆動モータ
16を数値制御で原点復帰すれば主軸21の停止位置を
常に一定に保つことができる。
Further, the present device is provided with a gear shift control device (not shown), and when the gear shift control device causes the origin position signal of the spindle rotational position detector 26 and the signal of the spindle localization value detector 31 to coincide with each other, the gear conversion mechanism. 27 gear conversion (gear shift) is performed. That is, as shown in FIG. 2 showing those timing charts,
When the gear converting mechanism 27 selects the low speed stage, the spindle 21 and the spindle rotational position detector 26 are rotating at the same rotational speed, so the signal of the spindle localization value detector 31 and the spindle rotational position detector The origin signal of 26 is always emitted at the same timing. Therefore, in this case, gear conversion to a high speed stage is possible each time these signals are issued. On the other hand, when the gear converting mechanism 27 selects the high speed stage, the spindle 21 rotates at a speed four times as fast as the spindle rotational position detector 26,
Therefore, at this time, once every four rotations of the spindle 21, the gear conversion to the low speed stage becomes possible when the signal of the spindle localization value detector 31 and the origin signal of the spindle rotation position detector 26 match. By doing so, the origin of the spindle 21 (spinning position stop position) and the origin position of the spindle rotational position detector 26 can always be made to coincide with each other at the low speed stage. Therefore, the gear shift can be performed many times. Also, if the spindle drive motor 16 is returned to the origin by numerical control in the low speed stage, the stop position of the spindle 21 can always be kept constant.

<発明の効果> 以上、実施例を挙げて詳細に説明したように本発明によ
れば、高速回転を行う主軸に対しても単一の主軸駆動電
動機により主軸の回転速度制御と数値制御による回転位
置制御とを有効に実施することが可能となる。
<Effects of the Invention> As described above in detail with reference to the embodiments, according to the present invention, a single spindle drive motor rotates a spindle by high-speed rotation by controlling the rotation speed of the spindle and performing numerical control. It is possible to effectively carry out the position control.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例にかかる主軸駆動歯車構成
図、第2図は各信号のタイミングチャート、第3図は工
作機械の外観構成図、第4図は従来例にかかる主軸回転
位置制御装置の斜視図、第5図は従来例にかかる主軸駆
動歯車構成図である。 図面中、 16は主軸駆動電動機、 21は主軸、 26は主軸回転位置検出器、 27は歯車変換機構、 31は主軸定位置検出器である。
FIG. 1 is a configuration diagram of a spindle drive gear according to an embodiment of the present invention, FIG. 2 is a timing chart of each signal, FIG. 3 is an external configuration diagram of a machine tool, and FIG. 4 is a spindle rotation position according to a conventional example. FIG. 5 is a perspective view of the control device, and FIG. 5 is a configuration diagram of a spindle drive gear according to a conventional example. In the drawings, 16 is a spindle drive motor, 21 is a spindle, 26 is a spindle rotation position detector, 27 is a gear conversion mechanism, and 31 is a spindle fixed position detector.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】主軸と、前記主軸の回転速度制御及び数値
制御による回転位置制御可能な主軸駆動電動機と、前記
主軸と前記主軸駆動電動機との間に介在し複数の変速段
を有すると共にその各変速段間における変速比が整数と
された歯車変換機構と、前記主軸駆動電動機と前記歯車
変換機構の間に設けられると共に該歯車変換機構の低速
段における前記主軸と同じ減速比で回転するよう動力伝
達手段を介して該主軸駆動電動機に連結された主軸回転
位置検出器と、前記主軸の1回転内の所定の回転位置を
検出する主軸定位置検出器と、前記主軸定位置検出器の
信号と前記主軸回転位置検出器の原点位置信号が一致し
た時に前記歯車変換機構の歯車変換を行わせる変速制御
装置とを具えたことを特徴とする工作機械。
1. A main shaft, a main shaft drive electric motor capable of controlling a rotational position of the main shaft by rotational speed control and numerical control, and a plurality of gear stages interposed between the main shaft and the main shaft drive electric motor, and each of them. A gear conversion mechanism in which the gear ratio between the gears is an integer, and a power provided between the main shaft drive motor and the gear conversion mechanism so as to rotate at the same speed reduction ratio as the main shaft in the low gear of the gear conversion mechanism. A spindle rotational position detector connected to the spindle driving motor via a transmission means; a spindle fixed position detector for detecting a predetermined rotational position within one rotation of the spindle; and a signal from the spindle fixed position detector. A machine tool, comprising: a gear shift control device that performs gear conversion of the gear conversion mechanism when the origin position signals of the spindle rotational position detector match.
JP14689487A 1987-06-15 1987-06-15 Machine Tools Expired - Lifetime JPH0641081B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14689487A JPH0641081B2 (en) 1987-06-15 1987-06-15 Machine Tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14689487A JPH0641081B2 (en) 1987-06-15 1987-06-15 Machine Tools

Publications (2)

Publication Number Publication Date
JPS63312039A JPS63312039A (en) 1988-12-20
JPH0641081B2 true JPH0641081B2 (en) 1994-06-01

Family

ID=15417979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14689487A Expired - Lifetime JPH0641081B2 (en) 1987-06-15 1987-06-15 Machine Tools

Country Status (1)

Country Link
JP (1) JPH0641081B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5848295B2 (en) 2012-12-11 2016-01-27 エルジー ディスプレイ カンパニー リミテッド Touch sensor integrated display device and manufacturing method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5848295B2 (en) 2012-12-11 2016-01-27 エルジー ディスプレイ カンパニー リミテッド Touch sensor integrated display device and manufacturing method thereof

Also Published As

Publication number Publication date
JPS63312039A (en) 1988-12-20

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