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JPH0643953B2 - Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction - Google Patents
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JPH0643953B2 - Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction - Google Patents

Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction

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Publication number
JPH0643953B2
JPH0643953B2 JP61145070A JP14507086A JPH0643953B2 JP H0643953 B2 JPH0643953 B2 JP H0643953B2 JP 61145070 A JP61145070 A JP 61145070A JP 14507086 A JP14507086 A JP 14507086A JP H0643953 B2 JPH0643953 B2 JP H0643953B2
Authority
JP
Japan
Prior art keywords
sample
solid
measuring
jig
resonance frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61145070A
Other languages
Japanese (ja)
Other versions
JPS631955A (en
Inventor
平 岡本
健一 松下
修 小村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
University of Osaka NUC
Original Assignee
Osaka University NUC
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC, Sumitomo Electric Industries Ltd filed Critical Osaka University NUC
Priority to JP61145070A priority Critical patent/JPH0643953B2/en
Publication of JPS631955A publication Critical patent/JPS631955A/en
Publication of JPH0643953B2 publication Critical patent/JPH0643953B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 (イ)技術分野 本発明はセラミックス、金属、プラスチック、木材等の
ヤング率、内部摩擦を導出するためにそれらを共振させ
てその場合の共振周波数を測定する方法及び装置に関す
るもので測定試料に導電性が無くても広い温度範囲(−
250℃〜1500℃)で測定し得るものである。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field The present invention relates to a method and apparatus for resonating ceramics, metal, plastic, wood, etc. to derive Young's modulus and internal friction, and measuring the resonance frequency in that case. It is related to a wide temperature range (-
It can be measured at 250 ° C to 1500 ° C).

(ロ)従来技術の問題点 従来固体のヤング率および内部摩擦を導出のための固体
の共振周波数を測定する方法として第2図に示すような
試料1を2本の白金線7によって吊下げて共振させる方
法がある。10は加熱用炉体、8がシェイカー、9が検出
器である。この方法では吊下用白金線の共振が生じ、測
定試料の共振周波数が見つけがたく、白金線が太いため
そこで生ずる振動のロスが大きい。又吊下げている点が
振動の節となっているため試料を共振させる効率が悪く
共振周波数の測定値の誤差が大きい。又この方法では、
炉体上部に孔(10′)が開いているため雰囲気の調整
がむつかしい。
(B) Problems of the prior art As a method of measuring the Young's modulus of a conventional solid and the resonance frequency of the solid for deriving the internal friction, a sample 1 as shown in FIG. 2 is suspended by two platinum wires 7. There is a method of making it resonate. 10 is a heating furnace body, 8 is a shaker, and 9 is a detector. In this method, the suspension platinum wire resonates, the resonance frequency of the measurement sample is difficult to find, and the platinum wire is thick, so the vibration loss generated there is large. Further, since the hanging point is a node of vibration, the efficiency of resonating the sample is poor and the error of the measured value of the resonance frequency is large. Moreover, in this method,
Since the hole (10 ') is opened in the upper part of the furnace body, it is difficult to adjust the atmosphere.

(ハ)発明の開示 固体材料のヤング率及び内部摩擦を共振法によって導出
するための同材料の共振周波数を測定する場合、いかに
試料を効率よく振動させるかが重要であり上記従来法の
問題を解決すべく種々検討した結果本発明に到った。
(C) Disclosure of the Invention When measuring the resonant frequency of a solid material for deriving the Young's modulus and internal friction of the material by the resonance method, it is important how to vibrate the sample efficiently. As a result of various studies to solve the problems, the present invention has been achieved.

本発明の特徴は、板状測定試料のいずれかの側面に導電
性かつ耐熱性を有するペースト塗布等によって電極を付
与することにある。これによって非導電性のセラミック
ス、木材、プラスチック等を各種雰囲気・広い温度域で
それらの共振周波数を精度よく測定することが可能にな
った。
The feature of the present invention resides in that an electrode is provided on either side surface of the plate-shaped measurement sample by applying a paste having conductivity and heat resistance. This has made it possible to accurately measure the resonance frequency of non-conductive ceramics, wood, plastics, etc. in various atmospheres and wide temperature ranges.

ただし、この場合該電極の厚みは、好ましくは試料厚み
の0.1%以下が測定中に生じる誤差を考慮した場合適当
である。
However, in this case, the thickness of the electrode is preferably 0.1% or less of the thickness of the sample in consideration of an error generated during the measurement.

第3図は本発明の測定に用いる試料1の斜視図であり、
その一方の側面に電極11を付与する。この試料を第4図
に示すようにその電極を下面として2つの支持部を有す
る治具2上に載せる。治具には各々Mo,Ta,Ni等
の耐熱性を有する導線7Aおよび7Bが設けられ、試料
の電極12の部分が治具の支持部に配設された導線7Aお
よび7Bの上に載るようにする。13はアース側の線が接
触し、接地される箇所である。尚、第4図は測定試料が
治具の上に載った状態の上面図であり、これを第1図に
示す如く、加熱及び冷却の手段を有し、真空排出口又は
雰囲気ガス導入口4を有する容器3内に設置する。尚、
熱電対6は試料の温度を測るためのものであるが、試料
の振動を妨げない程度に試料から僅かに離した状態でそ
の先端を配置するようにする。その位置は例えば第4図
のようにしてもよいが、温度が平衡になった状態で測定
するので試料の中央付近であれば、限定されない。試料
が図4中に示される治具の支持部に配設された導線7A
および7Bの2本の導線に乗った場合、試料上の電極11
がこの2本の導線と接触し電気的に接続されると共に、
図4中に示されるアース側の導線7Aと図3中の13で接
触するようにし、かつ、該電極11が図1中の駆動電極8
の上にくるようにセットされる。駆動電極8と測定試料
上に設けた電極11の間に導線7Bを通じ交番電圧を交番
電圧源5によって印加し試料を振動させる。この時、駆
動用電極を試料の中央に位置させる事によって非常に効
率よい振動が生じる。
FIG. 3 is a perspective view of Sample 1 used in the measurement of the present invention,
An electrode 11 is provided on one side surface thereof. As shown in FIG. 4, this sample is placed on a jig 2 having two supporting parts with its electrode as the lower surface. The jigs are provided with heat-resistant conductive wires 7A and 7B such as Mo, Ta, and Ni, and the electrode 12 of the sample is placed on the conductive wires 7A and 7B arranged on the supporting portion of the jig. To Reference numeral 13 is a place where the wire on the ground side contacts and is grounded. Incidentally, FIG. 4 is a top view of the state in which the measurement sample is placed on the jig. As shown in FIG. 1, it has heating and cooling means, and the vacuum outlet or the atmospheric gas inlet 4 is provided. It is installed in the container 3 having. still,
The thermocouple 6 is for measuring the temperature of the sample, and the tip of the thermocouple 6 is arranged so as to be slightly separated from the sample so as not to disturb the vibration of the sample. The position may be set, for example, as shown in FIG. 4, but since it is measured in the state where the temperature is in equilibrium, it is not limited as long as it is near the center of the sample. The sample is a conducting wire 7A arranged on the supporting portion of the jig shown in FIG.
And 2B of 7B, the electrode on the sample 11
Comes into contact with these two conductors and is electrically connected,
The conductor 7A on the ground side shown in FIG. 4 is brought into contact with 13 in FIG. 3, and the electrode 11 is the drive electrode 8 in FIG.
It is set to come on top of. An alternating voltage is applied by an alternating voltage source 5 through a conductor 7B between the drive electrode 8 and the electrode 11 provided on the measurement sample to vibrate the sample. At this time, by arranging the driving electrode at the center of the sample, very efficient vibration occurs.

尚、測定周波数はとくに制限はないが、測定対象材料の
固有共振周波数および振動検出器の測定感度を考慮して
50〜50000Hzが好ましい。
The measurement frequency is not particularly limited, but take into consideration the natural resonance frequency of the material to be measured and the measurement sensitivity of the vibration detector.
50 to 50,000 Hz is preferable.

一方、本振動は容器3内に通じて設けた検出器、例えば
高感度、高指向性のマイクロフォン14を通じて検出す
る。検出した振動はその共振波形により内部摩擦を算定
する。一方ヤング率については本振動より求まる固有横
振動の共振周波数を検出して次式より算出する。
On the other hand, this vibration is detected by a detector provided in the container 3, for example, a microphone 14 having high sensitivity and high directivity. For the detected vibration, internal friction is calculated from its resonance waveform. On the other hand, Young's modulus is calculated from the following equation by detecting the resonance frequency of the natural lateral vibration obtained from the main vibration.

E=0.9468×(L3×g)×o2/(t3×w) ここで、E:ヤング率、L:試料長さ、w:試料幅、
t:試料厚み、g:試料質量、o:共振周波数。
E = 0.9468 × (L 3 × g) × o 2 / (t 3 × w) where E: Young's modulus, L: sample length, w: sample width,
t: sample thickness, g: sample mass, o: resonance frequency.

容器3内は外部加熱により特定温度に維持することによ
り1500℃まで測定することができる。低温の場合は液体
ヘリウムを使用し、−250℃まで可能である。
It is possible to measure up to 1500 ° C. by maintaining the inside of the container 3 at a specific temperature by external heating. At low temperatures, liquid helium is used, and temperatures up to -250 ° C are possible.

熱電対に関しては、上記の温度領域を測定するためのも
のであれば、とくに本発明で限定するものではなく例え
ば、〜1400℃は一般的なクロメル−アロメル製やタング
ステン−レニウム製などがある。
The thermocouple is not particularly limited in the present invention as long as it is for measuring the above-mentioned temperature range, and for example, -1400 ° C. includes general chromel-alomer and tungsten-rhenium.

本温度は第1、3図中の熱電対6を前述のように試料の
表面付近の適当な位置に配置して測定する。
This temperature is measured by placing the thermocouple 6 shown in FIGS. 1 and 3 at an appropriate position near the surface of the sample as described above.

又、測定雰囲気としては真空、並びにAr,N2などの
非酸化性雰囲気にすることができる。治具2は高温に耐
えられるようにAl23やBN製等とする。試料1の大
きさは、通常1mm×5mm×20mm〜3mm×15mm×150mmの
範囲内であるが治具の寸法を変えることのよって他の任
意の大きさにすることができる。
The measurement atmosphere may be a vacuum or a non-oxidizing atmosphere such as Ar or N 2 . The jig 2 is made of Al 2 O 3 or BN so that it can withstand high temperatures. The size of the sample 1 is usually in the range of 1 mm × 5 mm × 20 mm to 3 mm × 15 mm × 150 mm, but it can be set to any other size by changing the dimensions of the jig.

次に実施例によって説明する。Next, examples will be described.

(ニ)実施例 Al23及びSi34焼結体を測定試料とし、これを1.
5mm×10mm×60mmの大きさに加工し、その一側面にMo
ペーストを塗布焼付け第1図に示す装置を用いて常温及
び、高温で同試料を共振させその共振周波数並びにその
波形を確認し、これよりヤング率、内部摩擦を算定し
た。その結果を第5図に示す。白丸(E1)、黒丸(E
2)は各々Al23,Si34のヤング率算定値、白角
(Q2)、黒角(Q1)は各々Al23,Si34の内
部摩擦算定値である。
(D) Example An Al 2 O 3 and Si 3 N 4 sintered body was used as a measurement sample.
Processed to a size of 5 mm × 10 mm × 60 mm, and Mo
The paste was applied and baked. Using the apparatus shown in FIG. 1, the sample was resonated at room temperature and high temperature to confirm its resonance frequency and its waveform, and Young's modulus and internal friction were calculated from this. The result is shown in FIG. White circle (E1), black circle (E
2) is Young's modulus calculation value of Al 2 O 3 and Si 3 N 4 , respectively, and white corner (Q2) and black corner (Q1) are internal friction calculation value of Al 2 O 3 and Si 3 N 4 , respectively.

尚、図5中にはAl23,Si34の各室温のヤング率
の算定値をE1(RT)、E2(RT)で示した。本測定値
をJISで定められた超音波法による弾性率の算定値と
比較したところ、その測定値は10回の繰り返しの測定結
果の平均値として、その差は±0.5%以内という良い一
致を得、本発明の効果が明らかとなった。
In FIG. 5, calculated values of Young's modulus of Al 2 O 3 and Si 3 N 4 at room temperature are shown by E1 (RT) and E2 (RT). Comparing this measured value with the calculated value of elastic modulus by the ultrasonic method defined by JIS, the measured value is the average value of the measurement results of 10 times repeated, and the difference is within ± 0.5%, showing a good agreement. As a result, the effect of the present invention has been clarified.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の測定装置の正面断面図、第2図は従来
の測定法の説明図、第3図は本発明の測定に用いる試料
の斜視図、第4図は本発明の試料のセット状態を示す上
面図及び第5図は本発明の測定法及び装置による実施例
のヤング率、内部摩擦の算定結果である。 1:試料、2:治具、3:容器、4:排気口又は導入
口、5:交番電圧源、6:熱電対、7:白金、7,7
C:交番電圧印加用導線、7A,7B:試料導線、8:
駆動電極、9:検出器、10:炉体、10′:空孔、11:電
極、12:電極(試料)、13:アース側線重箇所、14:振
動検出器、15:治具の試料支持部、E1:Al23ヤン
グ率、E2:Si34ヤング率、Q1:Si34内部摩
擦、Q2:Al23内部摩擦。
FIG. 1 is a front sectional view of a measuring apparatus of the present invention, FIG. 2 is an explanatory view of a conventional measuring method, FIG. 3 is a perspective view of a sample used in the measurement of the present invention, and FIG. 4 is a sample of the present invention. The top view showing the set state and FIG. 5 are the calculation results of the Young's modulus and the internal friction of the embodiment by the measuring method and apparatus of the present invention. 1: sample, 2: jig, 3: container, 4: exhaust port or inlet port, 5: alternating voltage source, 6: thermocouple, 7: platinum, 7, 7
C: conductor for applying alternating voltage, 7A, 7B: sample conductor, 8:
Drive electrode, 9: Detector, 10: Furnace body, 10 ': Hole, 11: Electrode, 12: Electrode (sample), 13: Earth side wire overlap point, 14: Vibration detector, 15: Jig sample support Part, E1: Al 2 O 3 Young's modulus, E2: Si 3 N 4 Young's modulus, Q1: Si 3 N 4 internal friction, Q2: Al 2 O 3 internal friction.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小村 修 兵庫県伊丹市昆陽北1丁目1番1号 住友 電気工業株式会社伊丹製作所内 (56)参考文献 特開 昭58−148954(JP,A) 特公 昭29−2697(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Osamu Omura 1-1-1 Kunyokita, Itami City, Hyogo Prefecture Sumitomo Electric Industries, Ltd. Itami Works (56) Reference JP-A-58-148954 (JP, A) Japanese Patent Publication Sho 29-2697 (JP, B1)

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】固体のヤング率と内部摩擦を導出するため
の固体の共振周波数を測定する方法であって、そのいず
れかの側面に導電性かつ耐熱性を有する電極を付した板
状固体試料を準備し、この試料を特定間隔でこれを支持
するとともに、当該支持部に該試料の電極部と接触する
導線が装着された耐熱性を有する治具上に載せ、該板状
試料の電極とこれに対向し該治具上に設けた駆動用電極
との間に交番電圧を印加して当該試料を共振動させると
ともに、周囲温度を変化せしめて測定することを特徴と
する該周囲温度に対応する固体の共振周波数の測定方
法。
1. A method for measuring a resonant frequency of a solid for deriving a Young's modulus and an internal friction of the solid, which is a plate-like solid sample having an electrode having a conductive and heat resistant property on either side thereof. And supporting this sample at a specific interval, and mounting it on a jig having heat resistance in which a conductive wire that comes into contact with the electrode part of the sample is attached to the supporting part, and Corresponding to the ambient temperature, which is characterized in that an alternating voltage is applied between it and a driving electrode provided on the jig so as to co-vibrate the sample, and the ambient temperature is changed for measurement. Measuring method of resonance frequency of solid.
【請求項2】試料を共振させる際の周波数が50Hz〜5000
0Hzの範囲であることを特徴とする特許請求の範囲第(1)
項記載の固体の共振周波数の測定方法。
2. The frequency at which the sample resonates is 50 Hz to 5000.
Claim (1) characterized in that it is in the range of 0 Hz
Item 7. A method for measuring the resonance frequency of a solid according to the item.
【請求項3】測定温度範囲が−250℃〜1500℃の範囲で
あることを特徴とする特許請求の範囲第(1)項記載の固
体の共振周波数の測定方法。
3. The method for measuring the resonance frequency of a solid according to claim 1, wherein the measurement temperature range is −250 ° C. to 1500 ° C.
【請求項4】加熱及び冷却手段を具備する容器3内に耐
熱性を有する治具2が設置され、該治具2の導電性を有
する部分8には交番電圧源5から電圧を印加する導線の
一方7Cが装着されており、この導電性を有する部分8
を一方の駆動電極とし、さらに該治具2には測定対象の
板状固体試料1を支持するための上面に導電性かつ耐熱
性を有する導線7A,7Bが装着された非導電性かつ耐
熱性を有する突起状支持部15が一対設けられ、該治具2
上に該導線7A,7Bと接続する導線7と上記導線7C
を通じ交番電圧が供給されるように導電性かつ耐熱性を
有する電極11が側面に設けられた板状試料1をセット
し、対向させた当該板状試料1上の電極11と前記治具2
上の駆動電極8との間に交番電圧を印加することによっ
て生ずる当該板状試料1の共振動を検出する為の検出器
14と該試料の周囲温度測定用の熱電対6とが装着されて
いることを特徴とする固体のヤング率及び内部摩擦を導
出するための固体の共振周波数の測定装置。
4. A jig 2 having heat resistance is installed in a container 3 equipped with heating and cooling means, and a conductive wire for applying a voltage from an alternating voltage source 5 to a conductive portion 8 of the jig 2. One side 7C is attached, and this conductive portion 8
Is used as one of the drive electrodes, and the jig 2 has non-conductive and heat-resistant wires 7A and 7B having conductive and heat-resistant properties mounted on the upper surface for supporting the plate-shaped solid sample 1 to be measured. A pair of projecting support portions 15 having
Conductor 7 connected to the conductors 7A and 7B and the conductor 7C
The plate-shaped sample 1 having the conductive and heat-resistant electrodes 11 provided on the side surfaces is set so that an alternating voltage is supplied through the electrodes, and the electrodes 11 and the jig 2 on the plate-shaped sample 1 facing each other are set.
Detector for detecting the co-vibration of the plate-shaped sample 1 caused by applying an alternating voltage to the upper drive electrode 8.
An apparatus for measuring the resonance frequency of a solid for deriving the Young's modulus and internal friction of the solid, which is equipped with a thermocouple 6 for measuring the ambient temperature of the sample.
JP61145070A 1986-06-20 1986-06-20 Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction Expired - Fee Related JPH0643953B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61145070A JPH0643953B2 (en) 1986-06-20 1986-06-20 Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61145070A JPH0643953B2 (en) 1986-06-20 1986-06-20 Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction

Publications (2)

Publication Number Publication Date
JPS631955A JPS631955A (en) 1988-01-06
JPH0643953B2 true JPH0643953B2 (en) 1994-06-08

Family

ID=15376683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61145070A Expired - Fee Related JPH0643953B2 (en) 1986-06-20 1986-06-20 Method and apparatus for measuring solid resonance frequency for deriving Young's modulus and internal friction

Country Status (1)

Country Link
JP (1) JPH0643953B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2976574B2 (en) * 1991-04-16 1999-11-10 住友電気工業株式会社 Evaluation method of ceramics

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148954A (en) * 1982-03-01 1983-09-05 Shinagawa Refract Co Ltd Measuring device of elastic modulus in hot environment

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