JPH0644667B2 - Flexible printed circuit board with shield - Google Patents
Flexible printed circuit board with shieldInfo
- Publication number
- JPH0644667B2 JPH0644667B2 JP19713785A JP19713785A JPH0644667B2 JP H0644667 B2 JPH0644667 B2 JP H0644667B2 JP 19713785 A JP19713785 A JP 19713785A JP 19713785 A JP19713785 A JP 19713785A JP H0644667 B2 JPH0644667 B2 JP H0644667B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- shield
- vapor deposition
- tetrafluoroethylene resin
- resin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Structure Of Printed Boards (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明はシールド付可撓性プリント回路基板に係わる。TECHNICAL FIELD The present invention relates to a flexible printed circuit board with a shield.
[在来技術を問題点] 可撓性プリント回路基板(以下FPCという)として、ポ
リエステル、ポリイミドフィルムに接着剤を塗布して銅
箔と貼合せ、どの後銅箔をエッチングして回路形成した
ものが用いられるが、耐熱、難燃、半田付性が要求され
る基板としては、ほとんどポリイミドフィルムをベース
にしたもので、一部弗素系樹脂、例えばFEP,PFA,ETFE等
を押出しコーティングした基板が使用されている。[Problems with conventional technology] Flexible printed circuit boards (hereinafter referred to as "FPCs") that have polyester or polyimide film coated with an adhesive and bonded to a copper foil, after which the copper foil is etched to form a circuit. However, as a substrate that requires heat resistance, flame retardancy, and solderability, it is mostly based on a polyimide film, and a substrate that is extruded and coated with a part of fluorine resin, such as FEP, PFA, ETFE. It is used.
ところで、回路が1MHz以上の高周波回路として使用さ
れるものは、FPCにシールド層を必要とするが、ポリイ
ミドフィルムでは絶縁層の誘電率が3.5と高いため、優
れたシールド効果が得られなかった。By the way, a circuit used as a high frequency circuit of 1 MHz or more requires a shield layer for the FPC, but a polyimide film cannot obtain an excellent shield effect because the dielectric constant of the insulating layer is as high as 3.5.
このため、一部10GHz以上の高周波域では、硬質の四弗
化エチレン樹脂基板が使用され、金属板でシールドるす
方式がとられていた。Therefore, in a high frequency range of 10 GHz or more, a hard tetrafluoroethylene resin substrate is used, and a method of shielding with a metal plate is used.
静電シールド、電磁シールド効果を出すには、絶縁層の
容量を小さくする必要がある。ポリイミドフィルムや四
弗化樹脂フィルムでは層を厚くすると可撓性がなくな
り、又高価である。特に四弗化樹脂の場合、同樹脂と銅
箔やシールド層との接着が困難で、表面処理に多大な労
力とコストを要している。In order to obtain the electrostatic shield and electromagnetic shield effects, it is necessary to reduce the capacity of the insulating layer. A polyimide film or a tetrafluoride resin film becomes inflexible and expensive when the layer is thickened. In particular, in the case of a tetrafluoride resin, it is difficult to bond the resin to the copper foil or the shield layer, and the surface treatment requires a great deal of labor and cost.
[発明の目的] 本発明は耐熱、難燃、半田耐熱性があり、可撓性を保持
し、加工性に優れ、且つ高周波に対して十分シールド効
果を維持できるシールド付可撓性プリント回路基板を提
供することを目的とするものである。[Object of the Invention] The present invention is a flexible printed circuit board with a shield that has heat resistance, flame retardancy, solder heat resistance, retains flexibility, is excellent in processability, and can sufficiently maintain a high-frequency shielding effect. It is intended to provide.
[発明の構成] 本発明は、四弗化エチレン樹脂を100〜500%延伸し、延
伸によるフィルム中の気孔率を30〜80%とした多孔質四
弗化エチレン樹脂フィルムの片面に金属を物理蒸着し、
露光、現像、エッチング、銅メッキにより形成した電気
回路と、他の片面に金属を物理蒸着したシールド層を備
える多孔質四弗化エチレン樹脂フィルムと前記と同様に
片面に金属を物理蒸着し、露光、現像、エッチング、銅
メッキにより形成した電気回路と他の片面に金属を物理
蒸着したシールド層を備える多孔質四弗化エチレン樹脂
フィルム、または片面のみに金属を物理蒸着したシール
ド層を備える多孔質四弗化エチレン樹脂フィルムとを、
前記両フィルムのシールド層を表にして接合したことを
特徴とするシールド付可撓性プリント回路基板を提供す
るもである。なお、気孔率が30%以上であると誘電率は
低下せず、又接着力も低い。80%以上になると表面にお
ける金属層の物理蒸着に均一性を得ることができず、又
機械的強度が低く実用に耐えない。[Structure of the Invention] The present invention is a method in which a tetrafluoroethylene resin is stretched by 100 to 500%, and a metal is physically applied to one side of a porous tetrafluoroethylene resin film in which the porosity in the stretched film is 30 to 80% Vapor deposition,
A porous tetrafluoroethylene resin film with an electrical circuit formed by exposure, development, etching, copper plating, and a shield layer with physical vapor deposition of metal on the other side, and physical vapor deposition of metal on one side as described above, and exposure , A porous tetrafluoroethylene resin film provided with an electric circuit formed by development, etching and copper plating and a shield layer formed by physically vapor-depositing a metal on one side, or a porous layer formed by physically vapor-depositing a metal on one side only With a tetrafluoroethylene resin film,
Another object of the present invention is to provide a flexible printed circuit board with a shield, characterized in that the shield layers of both films are bonded to each other. When the porosity is 30% or more, the dielectric constant does not decrease and the adhesive strength is low. When it is 80% or more, the physical vapor deposition of the metal layer on the surface cannot be obtained uniformly, and the mechanical strength is low and it cannot be practically used.
上述のように、四弗化エチレン樹脂を延伸し、表面にも
微小孔を有する多孔質四弗化エチレン樹脂フィルムは、
表面微小孔による凹凸面に、銅その他の金属を物理蒸着
により均一に被覆することができ、蒸着した金属は微小
孔より多孔質内部に入り込み、機械的に強固に接合す
る。As described above, a porous tetrafluoroethylene resin film that is obtained by stretching a tetrafluoroethylene resin and also having micropores on the surface is
Copper and other metals can be uniformly coated by physical vapor deposition on the concavo-convex surface formed by the micropores on the surface, and the vapor-deposited metal enters the porous interior through the micropores and is mechanically and strongly bonded.
第2図に多孔質四弗化エチレンフィルムに金属を蒸着し
たものを拡大して示す。すでに知られているように、四
弗化エチレン樹脂は延伸(2軸延伸を含む)により多孔
質フィルムとなる。本発明においてしようされるものの
孔径は0.1〜5μ位、厚さは50〜500μが適当である。図
において1は多孔質四弗化エチレン樹脂フィルムを示
し、2は微小孔を示し、3は物理蒸着された金属層を示
す。回路構成用の銅の蒸着が行われ、この反対面に銅、
ニッケル、鉄等の金属の物理蒸着でシールド層が形成さ
れる。FIG. 2 shows an enlarged view of a metal vapor deposited on a porous tetrafluoroethylene film. As is already known, the tetrafluoroethylene resin is stretched (including biaxial stretching) into a porous film. What is used in the present invention, a pore diameter of about 0.1 to 5 μ and a thickness of 50 to 500 μ are suitable. In the figure, 1 indicates a porous tetrafluoroethylene resin film, 2 indicates micropores, and 3 indicates a physical vapor-deposited metal layer. Deposition of copper for circuit construction is performed, copper is on the opposite side,
The shield layer is formed by physical vapor deposition of a metal such as nickel or iron.
銅、ニッケル、鉄等の金属の物理蒸着手段として、真空
蒸着、スパッタリング、クラスターイオン蒸着法等が使
用され、その厚みは0.1〜5μ程度である。As a physical vapor deposition means for metals such as copper, nickel and iron, vacuum vapor deposition, sputtering, cluster ion vapor deposition and the like are used, and the thickness thereof is about 0.1 to 5 μm.
回路構成用の銅の蒸着面は、露光、現像、エッチングに
より所要回路を現出させ、その後回路上のみ電気メッキ
により厚み10μ程度までふとらせる。On the vapor-deposited surface of copper for circuit construction, the required circuit is exposed by exposure, development, and etching, and then only the circuit is electroplated to a thickness of approximately 10μ.
第1図(イ)、(ロ)は本発明の実施例を示す。(イ)図におい
て、1は多孔質四弗化エチレン樹脂フィルムであり、4
は金属蒸着によるシールド層を示す。図示のように2枚
の多孔質四弗化エチレン樹脂フィルム1のうち1枚の片
面にはすでに説明した方法で金属蒸着回路5およびその
表面への銅メッキによる電気回路6が形成され、両多孔
質四弗化エチレン樹脂フィルム1はシールド層4をそれ
ぞれ外側として、内側となる面に接着剤を貼って一体と
する。1 (a) and 1 (b) show an embodiment of the present invention. (A) In the figure, 1 is a porous tetrafluoroethylene resin film, and 4
Indicates a shield layer formed by metal deposition. As shown in the figure, a metal vapor deposition circuit 5 and an electric circuit 6 by copper plating on the surface thereof are formed on one surface of one of the two porous tetrafluoroethylene resin films 1 by the method already described. The polytetrafluoroethylene resin film 1 has the shield layer 4 as the outer side, and an adhesive is attached to the inner surface to be integrated.
(ロ)図において、2枚の多孔質四弗化エチレン樹脂フィ
ルム1には上下対称に、同一パターンの金属蒸着回路5
およびその表面への銅電気メッキによる電気回路が形成
され、それぞれの他の片面には金属蒸着によるシールド
層が形成され、2枚の多孔質四弗化エチレン樹脂フィル
ムは、対称的に形成された電気回路6を合わせ、半田層
7によって一体とする。In the figure (b), two porous tetrafluoroethylene resin films 1 are vertically symmetrically arranged on the two metal vapor deposition circuits 5 having the same pattern.
And an electric circuit was formed on the surface by copper electroplating, a shield layer was formed on the other side by metal deposition, and two porous tetrafluoroethylene resin films were formed symmetrically. The electric circuits 6 are combined and integrated by the solder layer 7.
以上は本発明の構成を励磁するものであるが、次に本発
明による試作例について説明する。The above is for exciting the configuration of the present invention. Next, a prototype example according to the present invention will be described.
気孔率40%、厚さ120μの多孔質四弗化エチレン樹脂フィ
ルム(孔径0.3〜2μ)にスパッタリング装置内で、銅
を0.5μ厚うらおもて蒸着した。その後、片面のみに電
気回路を露光、現像、エッチングにより現出させ、その
後回路上のみ電気メッキにより厚さ10μまでほとらせ
た。Copper was vapor-deposited on a porous tetrafluoroethylene resin film (pore size: 0.3 to 2 μm) having a porosity of 40% and a thickness of 120 μm by a thickness of 0.5 μm in a sputtering apparatus. After that, an electric circuit was exposed on only one side by exposure, development, and etching, and then only the circuit was electroplated to a thickness of 10 μm.
さらに、片面のみ銅スパッタリングした多孔質四弗化エ
チレンフィルムの裏面に、熱硬化性型のフィルム状接着
剤をラミネートし、前記回路面に重ね、150℃で加圧接
着させた。Further, a thermosetting film adhesive was laminated on the back surface of the porous tetrafluoroethylene film having only one surface sputtered with copper, and was laminated on the circuit surface and pressure-bonded at 150 ° C.
得られた回路及びシールド層の接着力は400g/cmの剥離
強度が得られ、前記多孔質フィルムが破断した。The adhesive strength of the obtained circuit and shield layer was 400 g / cm, and peel strength was obtained, and the porous film was broken.
またシールド効果を測定した結果、一般FPCと比較して
静電容量が1/4に低下して良好なシールド特性を示し
た。Moreover, as a result of measuring the shielding effect, the electrostatic capacity was reduced to 1/4 compared with the general FPC, and the good shielding property was shown.
本発明は高周波基板、シールド付FPCに適用することが
できる。The present invention can be applied to a high frequency substrate and a shielded FPC.
[効果] 以上説明したように、従来は四弗化樹脂を単にシートと
したものを使用していたのに対し、本発明では多孔質の
四弗化エチレン樹脂(厚さ50〜500μ)を用いているた
め、半田耐熱性、低誘電率(ε:1.4〜2.1)、柔軟性を
示すFPCが得られる。[Effect] As described above, in the past, a sheet made of tetrafluororesin was simply used, whereas in the present invention, a porous tetrafluoroethylene resin (thickness 50 to 500 μ) is used. Therefore, FPC exhibiting solder heat resistance, low dielectric constant (ε: 1.4 to 2.1) and flexibility can be obtained.
金属蒸着層が多孔質体表面の1〜10μ深さまで入り込み
投錨状態となり、多孔質の表面に接着剤なくして金属が
一体化しており、耐熱的であって、温湿度の影響を受け
ないプリント回路基板が得られる。The metal vapor deposition layer penetrates to the depth of 1 to 10μ on the surface of the porous body and is in an anchored state, the metal is integrated on the porous surface without an adhesive, it is heat resistant, and the printed circuit is not affected by temperature and humidity. A substrate is obtained.
第1図(イ)、(ロ)、はそれぞれ本発明の実施例であり、拡
大断面図である。 第2図は多孔質四弗化エチレン樹脂フィルムに対する金
属物理蒸着の説明図である。 1…多孔質四弗化エチレン樹脂フィルム、2…微小孔、
3…蒸着金属層、4…シールド層、5…金属蒸着回路、
6…電気回路、7…半田層。1 (a) and 1 (b) are each an embodiment of the present invention and are enlarged sectional views. FIG. 2 is an illustration of metal physical vapor deposition on a porous tetrafluoroethylene resin film. 1 ... Porous tetrafluoroethylene resin film, 2 ... Micropores,
3 ... vapor deposition metal layer, 4 ... shield layer, 5 ... metal vapor deposition circuit,
6 ... Electric circuit, 7 ... Solder layer.
Claims (1)
ッチング、銅メッキにより形成した電気回路と、他の片
面に金属を物理蒸着したシールド層を備える多孔質四弗
化エチレン樹脂フィルムと前記と同様に片面に金属を物
理蒸着し、露光、現像、エッチング、銅メッキにより形
成した電気回路と、他の片面に金属を物理蒸着したシー
ルド層を備える多孔質四弗化エチレン樹脂フィルム、ま
たは、片面のみに金属を物理蒸着したシールド層を備え
る多孔質四弗化エチレン樹脂フィルムと、前記両フィル
ムのシールド層を表にして接合したことを特徴とするシ
ールド付可撓性プリント回路基板。1. A porous tetrafluoroethylene resin film having an electric circuit formed by physical vapor deposition of metal on one side and exposing, developing, etching, and copper plating, and a shield layer having physical vapor deposition of metal on the other side. Similarly to the above, physical vapor deposition of metal on one side, exposure, development, etching, a porous tetrafluoroethylene resin film provided with an electrical circuit formed by copper plating, and a shield layer on the other side of which physical vapor deposited metal, or A flexible printed circuit board with a shield, characterized in that a porous tetrafluoroethylene resin film having a shield layer in which metal is physically vapor-deposited on only one surface is joined to the shield layers of both films with the shield layers facing up.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19713785A JPH0644667B2 (en) | 1985-09-05 | 1985-09-05 | Flexible printed circuit board with shield |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19713785A JPH0644667B2 (en) | 1985-09-05 | 1985-09-05 | Flexible printed circuit board with shield |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255991A JPS6255991A (en) | 1987-03-11 |
| JPH0644667B2 true JPH0644667B2 (en) | 1994-06-08 |
Family
ID=16369369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19713785A Expired - Lifetime JPH0644667B2 (en) | 1985-09-05 | 1985-09-05 | Flexible printed circuit board with shield |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644667B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6442890A (en) * | 1987-08-11 | 1989-02-15 | Japan Gore Tex Inc | Printed substrate |
| JPH01287999A (en) * | 1988-05-16 | 1989-11-20 | Fujikura Ltd | Printed wiring board |
| JPH04267597A (en) * | 1991-02-22 | 1992-09-24 | Sumitomo Electric Ind Ltd | Manufacturing method of flexible printed wiring board |
| JP3080453B2 (en) * | 1991-12-10 | 2000-08-28 | 三菱電機株式会社 | Moisture proof structure of module circuit |
| JP2007180371A (en) * | 2005-12-28 | 2007-07-12 | Hitachi Cable Ltd | Substrate and electronic module |
| JP5098794B2 (en) * | 2008-05-14 | 2012-12-12 | 日立化成工業株式会社 | High frequency circuit board |
-
1985
- 1985-09-05 JP JP19713785A patent/JPH0644667B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6255991A (en) | 1987-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5473120A (en) | Multilayer board and fabrication method thereof | |
| JPS60225750A (en) | Printed substrate | |
| US5079065A (en) | Printed-circuit substrate and method of making thereof | |
| JP3570802B2 (en) | Copper thin film substrate and printed wiring board | |
| KR20180037914A (en) | Multilayer Flexible Printed Wiring Board and Method for Producing Same | |
| GB2066583A (en) | Thick film conductor | |
| JPH08125342A (en) | Flexible multilayered wiring board and its manufacture | |
| US3589004A (en) | Process of making reinforced flat cable terminations | |
| JPH0644667B2 (en) | Flexible printed circuit board with shield | |
| CN1976556B (en) | Wiring circuit board | |
| JPS6227558B2 (en) | ||
| CN204674123U (en) | The copper-clad plate of a kind of two-layered medium non-gel flexible | |
| USH650H (en) | Double sided circuit board and a method for its manufacture | |
| US6586687B2 (en) | Printed wiring board with high density inner layer structure | |
| CN1929715B (en) | Wiring circuit board | |
| JP2004014975A (en) | Flexible circuit board with metal foil | |
| JP2002124415A (en) | Printed circuit board for high frequency and its manufacturing method | |
| JPH0429584Y2 (en) | ||
| JPH05243738A (en) | Flexible rigid printed wiring board | |
| JPH11177192A (en) | Flexible printed circuit board | |
| JPS608592B2 (en) | Connector manufacturing method | |
| KR20170071205A (en) | Flexible copper clad laminate fim and method of manufacturing the same | |
| TWI232718B (en) | Circuit manufacturing method of flexible printed circuit board | |
| JP2571960B2 (en) | Double-sided flexible circuit board and manufacturing method thereof | |
| KR930000639B1 (en) | Manufacturing method of high density multilayer printed circuit board |