JPH064492B2 - Method for manufacturing base material for optical fiber - Google Patents
Method for manufacturing base material for optical fiberInfo
- Publication number
- JPH064492B2 JPH064492B2 JP62040906A JP4090687A JPH064492B2 JP H064492 B2 JPH064492 B2 JP H064492B2 JP 62040906 A JP62040906 A JP 62040906A JP 4090687 A JP4090687 A JP 4090687A JP H064492 B2 JPH064492 B2 JP H064492B2
- Authority
- JP
- Japan
- Prior art keywords
- porous glass
- glass body
- burner
- carrier
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Thermal Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は光ファイバ用母材の製造方法、特にはけい素化
合物の酸化、加水分解で発生させたシリカ微粒子を担体
上に堆積させて得た多孔質ガラス体を加熱溶融透明化し
て光ファイバ用の合成石英質母材を製造方法する方法に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is obtained by a method for producing a base material for an optical fiber, particularly by depositing silica fine particles generated by oxidation and hydrolysis of a silicon compound on a carrier. The present invention also relates to a method for producing a synthetic silica glass preform for an optical fiber by heating, melting, and transparentizing a porous glass body.
（従来の技術） 光通信用ファイバについては石英系、多成分ガラス系、
プラスチック系など種々のものが知られているが、現実
にはその軽量性、低損失性、無誘導性、耐熱性、耐候性
さらには伝送容量などの点から石英系のものが実用化さ
れている。(Prior Art) For optical fiber, quartz type, multi-component glass type,
Various types of plastics are known, but in reality, quartz type has been put into practical use because of its lightness, low loss, non-inductivity, heat resistance, weather resistance, and transmission capacity. There is.
しかして、この石英系のものは純度、価格などの点から
合成石英で作られたものとされているが、この合成石英
系のものは第２図に示したように石英ガラス、炭素、炭
化けい素などのような耐火性の担体１１の上に、四塩化
けい素などのけい素化合物を酸水素火炎バーナー１２か
らの火炎中で酸化、加水分解して発生させたシリカ微粒
子を堆積させ、この場合担体１１と酸水素バーナー１２
とを相対的に横方法に平行移動させることによって多孔
質ガラス体１３を作り、ついでこれを加熱中で加熱溶
融し透明化することによって作られる。Therefore, this quartz-based material is said to be made of synthetic quartz in terms of purity, price, etc., but this synthetic quartz-based material is made of quartz glass, carbon, carbonized carbon as shown in FIG. Silica fine particles generated by oxidizing and hydrolyzing a silicon compound such as silicon tetrachloride in a flame from an oxyhydrogen flame burner 12 are deposited on a refractory carrier 11 such as silicon, In this case, the carrier 11 and the oxyhydrogen burner 12
It is made by translating and in a transverse direction relatively to each other to form a porous glass body 13 and then heating and melting the same to make it transparent.
しかし、この場合にはこの多孔質ガラス体１３のシリカ
微粒子堆積部とシリカ微粒子を堆積させない担体１１と
の境界付近１４では担体１１に対して往復運動する酸水
素火炎バーナーによる加熱が及ばないためにバーナーの
火炎により焼きしめが充分行なわれず、したがってこの
部分の堆積物はその密度が中央部の密度よりも小さいも
のとなってこゝにひび割れ１５が発生し、このひび割れ
によって多孔質ガラス体が破壊されたり、多孔質ガラス
体の径変動が生じ、したがってこれを溶融透明化して光
ファイバ用母材を得ることが困難になったり、得られる
光ファイバ用母材が凹凸をもつものになるという不利が
ある。However, in this case, since heating is not performed by the oxyhydrogen flame burner reciprocating with respect to the carrier 11 in the vicinity 14 of the boundary between the silica fine particle deposition portion of the porous glass body 13 and the carrier 11 on which silica fine particles are not deposited, The burner flame does not sufficiently sinter, so that the density of the deposits in this part becomes lower than that in the central part, and cracks 15 are generated in the part, which destroys the porous glass body. Or the diameter of the porous glass body fluctuates, and thus it becomes difficult to melt and transparentize the porous glass body to obtain an optical fiber preform, and the obtained optical fiber preform has irregularities. is there.
（発明の構成） 本発明はこのような不利を解決した光ファイバ用母材の
製造方法に係わるものであり、これはけい素化合物を酸
水素火炎中で酸化、加水分解させて得たシリカ微粉末を
担体上に堆積して多孔質ガラス体を作り、ついでこのシ
リカ微粉末堆積部分とシリカ微粉末を堆積させない担体
部との境界付近をバーナーで加熱してこの境界付近に堆
積したシリカ微粉末を焼結させたのち、この多孔質ガラ
ス体を加熱溶融し透明化してなることを特徴とするもの
である。(Structure of the Invention) The present invention relates to a method for producing a base material for an optical fiber which solves such a disadvantage, and it is a silica fine particle obtained by oxidizing and hydrolyzing a silicon compound in an oxyhydrogen flame. Powder is deposited on a carrier to form a porous glass body, and then the vicinity of the boundary between this silica fine powder deposition part and the carrier part where silica fine powder is not deposited is heated by a burner to deposit silica fine powder near this boundary. After being sintered, the porous glass body is heated and melted to make it transparent.
すなわち、本発明者は前記したような不利を伴わない光
ファイバ用母材の製造方法について種々検討した結果、
多孔質ガラス体においてひび割れの発生する多孔質ガラ
ス体の端部をシリカ微粒子発生用に使用される酸水素火
炎バーナーとは別個の酸水素火炎バーナーで加熱する
と、この加熱によってこの端部付近に堆積されているシ
リカ微粉粒子が焼きしめられて焼結し、密度の高いもの
となるのでこの部分からひび割れの発生することがなく
なるということを見出すと共に、これによれば多孔質ガ
ラス体が破壊されることもまた径変動を起こすこともな
いので、この多孔質ガラスの加熱溶融透明化で容易に光
ファイバ用の合成石英質母材を得ることができることを
確認して本発明を完成させた。That is, the present inventor has variously studied the method for producing an optical fiber preform without the above disadvantages,
When the end of the porous glass body where cracks occur in the porous glass body is heated by an oxyhydrogen flame burner that is separate from the oxyhydrogen flame burner used to generate silica fine particles, this heating causes deposition near this end. It is found that the silica fine powder particles that have been sintered are sintered and become highly dense, so that cracks will not occur from this part, and this will destroy the porous glass body. The present invention has been completed by confirming that the synthetic silica preform for optical fibers can be easily obtained by heating, melting, and transparentizing the porous glass because the diameter does not fluctuate.
つぎに本発明の方法を添付の図面にもとづいて説明す
る。第１図は本発明の方法による光ファイバ用母材の製
造法に使用される前駆体としての多孔質ガラス体の製造
方法の縦断面図を示したものである。本発明の方法にお
ける多孔質ガラス体の製造自体は公知の方法で行なえば
よく、したがってこれは例えば石英ガラス、炭素、炭化
けい素などのような耐熱性材料で作られた担体棒１を回
転させ、こゝに四塩化けい素などのような加水分解性の
けい素化合物と酸素、水素を供給した酸水素火炎バーナ
ー２からの酸水素火炎を当てて、このけい素化合物の酸
化、加水分解で発生したシリカ微粒子を担体１の上に堆
積させればよく、この際担体１を横方向に進行させる
か、図示のように酸水素火炎バーナー２を担体１に対し
て平行移動させるように往復運動させれば担体１の上に
シリカ微粉末が均一に堆積されて多孔質ガラス体３を得
ることができる。Next, the method of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a longitudinal sectional view showing a method for producing a porous glass body as a precursor used in the method for producing an optical fiber preform according to the method of the present invention. The production of the porous glass body in the method according to the invention may itself be carried out in a known manner, which means for example by rotating a carrier rod 1 made of a heat-resistant material such as quartz glass, carbon, silicon carbide or the like. By applying a hydrolyzable silicon compound such as silicon tetrachloride to this, and an oxyhydrogen flame from an oxyhydrogen flame burner 2 supplied with oxygen and hydrogen, the silicon compound is oxidized and hydrolyzed. The generated silica fine particles may be deposited on the carrier 1. At this time, the carrier 1 may be moved laterally, or reciprocating motion may be performed so that the oxyhydrogen flame burner 2 is moved in parallel to the carrier 1 as illustrated. By doing so, fine silica powder is uniformly deposited on the carrier 1 to obtain the porous glass body 3.
本発明の方法はこのようにして得られた多孔質ガラス体
３の端部４をバーナーで加熱するのであるが、このバー
ナー５は例えば上記の酸水素火炎バーナーと同様のもの
としてもよく、これは加熱を目的とするものでけい素化
合物を供給しない酸水素火炎バーナーとしても、さらに
は全く別種のバーナーであってもよい。このバーナー５
による多孔質ガラス体の端部４加熱はバーナー５からの
火炎を直接この端部に当てればよいが、この火炎は端部
４の直下からとしても図示したように斜め方向から当て
るようにしてもよい。しかし、このバーナー５による加
熱は多孔質ガラス体３の端部４における比較的薄層のシ
リカ微粉末積層体部を焼きしめ焼結させてこの部分を密
度の高いものとするためのものであるので５００〜１，
０００℃程度までは加熱することが必要とされ、これに
よればこの端部４におけるシリカ堆積体はその密度が例
えば０．３ｇ／m3から０．６ｇ／m3に上昇するので強度
の大きいものとなり、したがってひび割れが生じないも
のとなるし、この部分で多孔質ガラス体の径が変動する
こともなくなるという有利性が与えられる。In the method of the present invention, the end 4 of the porous glass body 3 thus obtained is heated by a burner, but the burner 5 may be the same as the above-mentioned oxyhydrogen flame burner, for example. May be an oxyhydrogen flame burner for the purpose of heating and does not supply a silicon compound, or may be a completely different kind of burner. This burner 5
To heat the end 4 of the porous glass body by the above, the flame from the burner 5 may be directly applied to this end. However, even if the flame is directly below the end 4, the flame may be applied obliquely as shown in the figure. Good. However, the heating by the burner 5 is for burning and sintering the relatively fine silica fine powder laminate portion at the end portion 4 of the porous glass body 3 to increase the density of this portion. So 500-1,
It is necessary to heat up to about 000 ° C. According to this, since the density of the silica deposit at the end 4 increases from 0.3 g / m 3 to 0.6 g / m 3 , the strength is high. Therefore, there is an advantage that cracking does not occur and the diameter of the porous glass body does not fluctuate in this portion.
本発明の方法における光ファイバ用母材の製造方法はこ
のようにして得られた多孔質ガラス体を加熱溶融透明化
してこれを合成石英化することによって得られるが、こ
の溶融透明化は公知の方法でおこなえばよく、したがっ
て、これはこの多孔質ガラス体をそのまゝあるいはこれ
らから担体１を引き抜いてからこれを加熱炉に入れ、
１，２００〜１，６００℃に加熱して溶融透明化させれ
ばよいのであるが、この際必要に応じてこれをＣｌ２、
ＣＣｌ４、ＳＯＣｌ２などのガス存在下として脱水化処
理を施すことは任意とされる。なお、本発明の方法では
こゝに使用される多孔質ガラス体３が前記したようにそ
の末端部４がバーナー５によって焼きしめられ密度の高
いものに焼結されているので多孔質ガラス体製造装置か
らの取外し、電気炉への搬送中にこの端部から型くずれ
するようなことがなく、容易に溶融透明化することがで
き、得られる合成石英化された光フアイバ用母材も均質
なものとして得ることができるという有利性を与えられ
る。The method for producing a base material for an optical fiber in the method of the present invention is obtained by heating, melting, and transparentizing the porous glass body thus obtained and converting it into synthetic quartz, which is known in the art. It can be carried out by a method, and therefore, this is the porous glass body as it is or the carrier 1 is pulled out from them and then placed in a heating furnace.
1,200～1,600 Although ℃ is of it is sufficient to melt the transparent by heating to, Cl 2 it as necessary during this,
It is optional to perform the dehydration treatment in the presence of a gas such as CCl 4 and SOCl 2 . In the method of the present invention, since the end portion 4 of the porous glass body 3 used here is burned by the burner 5 and sintered to have a high density as described above, a porous glass body is manufactured. It can be easily melted and transparent without being deformed from this end during removal from the equipment and transportation to an electric furnace, and the obtained synthetic quartz base material for optical fibers is also homogeneous. It is given the advantage that it can be obtained as
つぎに本発明の実施例をあげる。Next, examples of the present invention will be given.
実施例 直径１０mm、長さ８００mmの石英製の担体棒を４０rpm
で回転させ、四塩化けい素を０．０７m3／ｈ、酸素を
１．２m3／ｈ、水素を１．３m3／ｈで供給した酸水素火
炎バーナーからの酸水素火炎を当てて、この四塩化けい
素の酸化、加水分解で発生したシリカ微粉末を担体棒に
堆積させるようにし、この酸水素火炎バーナーを担体棒
に対して６００mmの範囲で６ｍ／ｈの速度で往復運動さ
せることとし、この作業を２０時間続けて、直径８０mm
に成長した多孔質ガラス体を作った。Example A carrier rod made of quartz having a diameter of 10 mm and a length of 800 mm is 40 rpm.
Rotate at, and apply an oxyhydrogen flame from an oxyhydrogen flame burner supplied with silicon tetrachloride of 0.07 m 3 / h, oxygen of 1.2 m 3 / h and hydrogen of 1.3 m 3 / h. Silica fine powder generated by oxidation and hydrolysis of silicon tetrachloride was deposited on a carrier rod, and this oxyhydrogen flame burner was reciprocated at a speed of 6 m / h within a range of 600 mm with respect to the carrier rod. , This work is continued for 20 hours and the diameter is 80mm
A porous glass body that has grown to
このようにして得られた多孔質ガラス体の堆積体は０．
４m3／ｇの密度を示したが、この多孔質ガラス体につい
てはその両端部を酸素０．６m3／ｈ、水素０．３m3／ｈ
で供給した酸水素火炎バーナーからの酸水素火炎で８０
０℃まで加熱したところ、この部分は焼きしめられて密
度０．５〜０．６ｇ／m3のものとなったので、このもの
はひび割れすることなく、また多孔質ガラス体の系の変
動が起ることもなかった。The thus obtained porous glass body has a deposit of 0.
It showed a density of 4 m 3 / g, but this porous glass body had oxygen 0.6 m 3 / h and hydrogen 0.3 m 3 / h at both ends.
80 with oxyhydrogen flame from oxyhydrogen flame burner supplied in
When heated to 0 ° C., this part was baked and had a density of 0.5 to 0.6 g / m 3 , so this part did not crack and the system of the porous glass body fluctuated. It never happened.
つぎにこのようにして得た多孔質ガラス体を電気炉内に
設置して１，５００℃に加熱して溶融透明化したとこ
ろ、直径４５mm、長さ４００mmの合成石英棒が得られ、
これは光ファイバ用母材として有用とされるものとなっ
た。Next, when the porous glass body thus obtained was placed in an electric furnace and heated to 1,500 ° C. to be melted and transparent, a synthetic quartz rod having a diameter of 45 mm and a length of 400 mm was obtained.
This has become useful as a base material for optical fibers.
第１図は本発明の方法による多孔質ガラス体製造方法の
縦断面図、第２図は公知の方法による多孔質ガラス体製
造方法の縦断面図を示したものである。 １、１１…担体棒、 ２、１２…酸水素火炎バーナー、 ３、１３…多孔質ガラス体、 ４、１４…多孔質ガラス体端部、 ５…………バーナー、 １５………ひび割れ。FIG. 1 is a vertical sectional view of a method for producing a porous glass body by the method of the present invention, and FIG. 2 is a vertical sectional view of a method for producing a porous glass body by a known method. 1, 11 ... Carrier rod, 2, 12 ... Oxyhydrogen flame burner, 3, 13 ... Porous glass body, 4, 14 ... Porous glass body end, 5 ... Burner, 15 ... Crack.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 神屋 和雄 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社シリコーン電子材料技術研 究所内 (56)参考文献 特開 昭62−162640（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuo Kamiya 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Chemical Co., Ltd. Silicone Electronic Materials Research Laboratory (56) Reference JP-A-62-162640 (JP, A)
Claims (1)
分解させて得たシリカ微粉末を担体上に堆積させて多孔
質ガラス体を作り、ついでこのシリカ微粉末堆積部分と
シリカ微粉末を堆積させない担体部との境界付近をバー
ナーで加熱してこの境界付近に堆積したシリカ微粉末を
焼結させたのち、この多孔質ガラス体を加熱溶融し透明
化してなることを特徴とする光ファイバ用母材の製造方
法。1. A fine silica powder obtained by oxidizing and hydrolyzing a silicon compound in an oxyhydrogen flame is deposited on a carrier to form a porous glass body, and then the silica fine powder deposition portion and the fine silica powder are formed. Is heated by a burner in the vicinity of the boundary with the carrier that does not deposit to sinter the silica fine powder deposited near this boundary, and then the porous glass body is heated and melted to make it transparent. Manufacturing method of fiber preform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040906A JPH064492B2 (en) | 1987-02-24 | 1987-02-24 | Method for manufacturing base material for optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040906A JPH064492B2 (en) | 1987-02-24 | 1987-02-24 | Method for manufacturing base material for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63206324A JPS63206324A (en) | 1988-08-25 |
| JPH064492B2 true JPH064492B2 (en) | 1994-01-19 |
Family
ID=12593551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62040906A Expired - Fee Related JPH064492B2 (en) | 1987-02-24 | 1987-02-24 | Method for manufacturing base material for optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064492B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5281248A (en) * | 1993-02-22 | 1994-01-25 | Litespec, Inc. | VAd process improvements |
| WO2011136324A1 (en) * | 2010-04-30 | 2011-11-03 | 住友電気工業株式会社 | Manufacturing method for glass base material |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62207734A (en) * | 1986-03-07 | 1987-09-12 | Furukawa Electric Co Ltd:The | Method for depositing fine glass particle |
-
1987
- 1987-02-24 JP JP62040906A patent/JPH064492B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63206324A (en) | 1988-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |