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JPH0646305B2 - Laser light beam exposure system - Google Patents
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JPH0646305B2 - Laser light beam exposure system - Google Patents

Laser light beam exposure system

Info

Publication number
JPH0646305B2
JPH0646305B2 JP59027339A JP2733984A JPH0646305B2 JP H0646305 B2 JPH0646305 B2 JP H0646305B2 JP 59027339 A JP59027339 A JP 59027339A JP 2733984 A JP2733984 A JP 2733984A JP H0646305 B2 JPH0646305 B2 JP H0646305B2
Authority
JP
Japan
Prior art keywords
laser light
lens
light beam
pitch
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59027339A
Other languages
Japanese (ja)
Other versions
JPS60172022A (en
Inventor
泰忠 根津
裕 田村
雄次 水野
弘 岩本
晃博 横田
潔 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP59027339A priority Critical patent/JPH0646305B2/en
Priority to US06/699,159 priority patent/US4617578A/en
Priority to GB08503278A priority patent/GB2156624B/en
Priority to DE19853504516 priority patent/DE3504516A1/en
Publication of JPS60172022A publication Critical patent/JPS60172022A/en
Priority to GB08604198A priority patent/GB2170074B/en
Publication of JPH0646305B2 publication Critical patent/JPH0646305B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/19Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
    • H04N1/191Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional [1D] array
    • H04N1/1911Simultaneously or substantially simultaneously scanning picture elements on more than one main scanning line, e.g. scanning in swaths
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024Details of scanning heads ; Means for illuminating the original
    • H04N1/032Details of scanning heads ; Means for illuminating the original for picture information reproduction
    • H04N1/036Details of scanning heads ; Means for illuminating the original for picture information reproduction for optical reproduction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/0402Scanning different formats; Scanning with different densities of dots per unit length, e.g. different numbers of dots per inch (dpi); Conversion of scanning standards
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/06Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、カラースキヤナ等、画像信号により光変調さ
れた複数本の平行レーザ光ビームにより、所望の複製画
像を記録するレーザ光ビーム露光装置に関する。
Description: TECHNICAL FIELD The present invention relates to a laser light beam exposure apparatus for recording a desired duplicated image by a plurality of parallel laser light beams optically modulated by an image signal, such as a color scanner. .

(従来技術) 従来、カラースキヤナ等のレーザ光ビーム露光装置で
は、所望の複製画像を記録するために、複数本の平行レ
ーザ光ビームを、同時に記録面上に投影して、微小光点
を形成し、それらレーザ光ビームの1本1本を、画像信
号に基づいて、それぞれ独立にオン・オフ制御すること
により、所望の複製画像、例えば網目版画像が形成され
るようになつている。
(Prior Art) Conventionally, in a laser light beam exposure apparatus such as a color scanner, in order to record a desired duplicate image, a plurality of parallel laser light beams are simultaneously projected onto a recording surface to form a minute light spot. A desired duplicate image, for example, a halftone plate image is formed by independently controlling ON / OFF of each of the laser light beams based on the image signal.

しかし、この場合、隣接するレーザ光ビーム間の間隔
が、元来ビーム径に比して大きいため、従来の方式の1
つにおいては、オプチカルフアイバーを利用して、その
間隔を詰めているが、装置が大がかりになつて、コスト
高になる難点があつた。
However, in this case, since the distance between the adjacent laser light beams is originally larger than the beam diameter, the conventional method 1
The optical fiber is used to close the gap, but there is a problem that the device becomes large and the cost becomes high.

また、別の方式においては、例えば特開昭52-123701号
公報に開示されている如き、複数本のレーザ光ビームに
対応したアパーチヤーを有するマスク板を使用し、該マ
スク板のアパーチヤーから、平行に放射された1列状の
レーザ光ビームを、ドーベプリズム等の歪像手段をもつ
て、ビーム掃引方向と直交する方向、すなわち、副走査
方向に対して傾斜させて、ビーム間のピツチを調整する
ようにしている。
In another method, for example, as disclosed in JP-A-52-123701, a mask plate having apertures corresponding to a plurality of laser light beams is used, and the apertures of the mask plate are parallel to each other. A row of laser light beams radiated to the laser beam is tilted with respect to a direction orthogonal to the beam sweep direction, that is, the sub-scanning direction by using a distortion image means such as a Dove prism to adjust the pitch between the beams. I am trying.

したがつて、ビーム間ピツチを所望値に可変設定するた
めには、マスク板やドーベプリズムが必要となり、光学
系が複雑となるという難点があつた。
Therefore, in order to variably set the inter-beam pitch to a desired value, a mask plate and a Dove prism are required, which makes the optical system complicated.

さらに、ビーム掃引方向に対して、各光ビームの並び方
向を傾斜させるようにした場合は、副走査方向に対し
て、各光ビームの露光位置が整列せず、そのため、各光
ビームを変調するための画像信号に時間差が生じ、その
時間差を補償するには、各光ビームに対応する信号チヤ
ンネルに、遅延手段を必要とするという難点がある。
Further, when the arrangement direction of each light beam is inclined with respect to the beam sweep direction, the exposure position of each light beam is not aligned with respect to the sub-scanning direction, and therefore each light beam is modulated. However, there is a problem that a delay means is required in the signal channel corresponding to each light beam to compensate for the time difference in the image signal.

(発明の目的) 本発明は、記録面上に露光される複数本のレーザ光ビー
ムのビーム間ピツチを、容易に調整して露光し得る新規
な光学系を提供することを目的としている。
(Object of the Invention) An object of the present invention is to provide a novel optical system capable of easily adjusting the inter-beam pitch of a plurality of laser light beams to be exposed on a recording surface for exposure.

(発明の構成) 上記の目的を達成するための本発明のレーザ光ビーム露
光装置は、 複数本の平行レーザ光ビームを放射する放射手段と、 前記平行レーザ光ビームをビーム間ピッチを縮小した縮
小平行レーザ光ビームに変換するため、焦点の位置が固
定で主点の位置が変更できるズームレンズと、このズー
ムレンズと焦点を共有する凸レンズとで構成されるビー
ム圧縮光学系と、 前記縮小平行レーザ光ビームを、記録面に結像する結像
レンズと、から構成され、 前記記録面は、前記結像レンズの焦点位置よりずれた位
置で、かつ、レーザ光ビームのビームウエスト位置に配
置されている。
(Structure of the Invention) A laser light beam exposure apparatus according to the present invention for achieving the above object includes a radiation means for radiating a plurality of parallel laser light beams, and a reduction in which the pitch between the parallel laser light beams is reduced. A beam compression optical system including a zoom lens having a fixed focus position and a changeable position of the principal point for converting into a parallel laser light beam, and a convex lens sharing the focus with the zoom lens; An image forming lens for forming an image of a light beam on a recording surface, wherein the recording surface is arranged at a position deviated from a focal position of the image forming lens and at a beam waist position of the laser light beam. There is.

(実施例) まず、本発明の原理を第3図を用いて説明する。(Example) First, the principle of the present invention will be described with reference to FIG.

一般に半導体レーザやガスレーザから出射され、ビーム
径が次第に広がるレーザ光ビーム(B1)を、そのレーザ光
ビーム(B1)の出射方向と平行な光軸を有する1枚のレン
ズ(L)を介して変換すると、レンズ(L)を通過することに
よって再びビーム径が小さくなり、ある箇所でビーム径
が最も小さくなるビームウエストを有するレーザ光ビー
ム(B2)を形成することが知られている。ここで、このビ
ームウエストの位置(レンズ(L)の主点位置とレーザ光
ビーム(B2)のビームウエスト位置との距離)Zは、次
式で求められることが知られている。
Generally, a laser light beam (B 1 ) emitted from a semiconductor laser or a gas laser and having a gradually increasing beam diameter is passed through a single lens (L) having an optical axis parallel to the emission direction of the laser light beam (B 1 ). It is known that the laser beam (B 2 ) having a beam waist having the smallest beam diameter at a certain position is formed again by passing through the lens (L) after conversion. Here, it is known that the position of the beam waist (distance between the principal point position of the lens (L) and the beam waist position of the laser light beam (B 2 )) Z 2 is obtained by the following equation.

ただし、Z:レンズ(L)の主点位置とレーザ光ビーム
(B2)のビームウエスト位置との距離 ω:レーザ光ビーム(B2)のビームウエスト径 λ:レーザ光ビームの波長 f:レンズ(L)の焦点距離 したがって、レーザ光ビーム(B2)のビームウエスト位置
は、必ずしもレンズ(L)の焦点位置にできるものではな
く、ビームウエストの位置をレンズの焦点位置から離す
ことも可能になる。
However, Z 1 : the principal point position of the lens (L) and the laser light beam
Distance from beam waist position of (B 2 ) ω 0 : Beam waist diameter of laser light beam (B 2 ) λ: Wavelength of laser light beam f 1 : Focal length of lens (L) Therefore, laser light beam (B 2 The beam waist position in) is not necessarily the focal position of the lens (L), and the beam waist position can be separated from the focal position of the lens.

さらに、互いに平行な複数のレーザ光ビームがレンズ
(L)に入射した場合、各レーザ光ビームは、レンズ(L)の
焦点位置で交差する。この場合も第3図と同様に考えれ
ば、レンズ(L)の焦点位置から離れた位置に、ビームウ
エスト位置を形成することが可能になる。このビームウ
エスト位置に記録面を配置すると、その記録面上では、
複数のレーザ光ビームは、ビーム間ピッチが短く、ビー
ムスポット径が最小で、かつ、各レーザ光ビームのビー
ムスポットは、光干渉することなく互いに独立している
ので、高速かつ高解像度の記録が可能になる。さらに、
レンズ(L)に入射する複数のレーザ光ビームのビーム間
ピッチを変更することにより、記録面上でのビーム間ピ
ッチを調整することができる。
In addition, multiple parallel laser light beams
When incident on (L), the laser light beams intersect at the focal position of the lens (L). Also in this case, if it is considered in the same manner as in FIG. 3, it becomes possible to form the beam waist position at a position away from the focal position of the lens (L). When the recording surface is placed at this beam waist position, on the recording surface,
The plurality of laser light beams have a short inter-beam pitch, a minimum beam spot diameter, and the beam spots of the respective laser light beams are independent of each other without optical interference, which enables high-speed and high-resolution recording. It will be possible. further,
The pitch between the beams on the recording surface can be adjusted by changing the pitch between the plurality of laser light beams incident on the lens (L).

以下に、図面に基いて、本発明を具体的に説明する。Hereinafter, the present invention will be specifically described with reference to the drawings.

第1図の(1)はズームレンズで、露光用レーザ光ビーム
の送り方向(副走査方向)に並列した、複数本の平行レ
ーザ光ビーム(2)が入射している。
(1) in FIG. 1 is a zoom lens, and a plurality of parallel laser light beams (2) are arranged in parallel in the sending direction (sub-scanning direction) of the exposure laser light beam.

(3)は凸レンズで、ズームレンズ(1)の射出側ビーム焦点
(F1)を、その凸レンズ(3)の入射側ビーム焦点(F2)に共
有して、ズームレンズ式のビーム圧縮用光学系を構成し
ており、該凸レンズ(3)は、ズームレンズ(1)に入射する
平行レーザ光ビーム(2)を、そのビーム間ピッチが縮小
された平行レーザ光ビーム(4)として出力する。
(3) is a convex lens, the exit side beam focus of the zoom lens (1)
(F 1 ) is shared with the incident side beam focus (F 2 ) of the convex lens (3) to form a zoom lens type beam compression optical system, and the convex lens (3) is a zoom lens (3). The parallel laser light beam (2) incident on 1) is output as a parallel laser light beam (4) having a reduced pitch between the beams.

(5)は、第3図で説明したレンズ(L)に相当するもので、
対物用の凸レンズ(以下、結像レンズと称する)で構成
され、前記凸レンズ(3)と光軸(C)を一致させて設けられ
ている。該結像レンズ(5)には、凸レンズ(3)が射出する
平行レーザ光ビーム(4)が入射し、所要感光材料の記録
面(Z−Z)(6)上に、平行レーザ光ビーム(4)の各ビー
ムを結像して、所要の間隔の微小光点を形成している。
(5) corresponds to the lens (L) described in FIG. 3,
It is composed of an objective convex lens (hereinafter referred to as an image forming lens), and is provided with the optical axis (C) aligned with the convex lens (3). The parallel laser light beam (4) emitted from the convex lens (3) enters the imaging lens (5), and the parallel laser light beam (4) is projected onto the recording surface (ZZ) (6) of the required photosensitive material. Each beam in 4) is imaged to form minute light spots at required intervals.

第2図は、第1図に示す各レンズ構成の光学系を模式的
に示すもので、この第2図により、ビーム間ピツチを変
化させる要領を説明する。
FIG. 2 schematically shows the optical system of each lens configuration shown in FIG. 1, and the procedure for changing the pitch between beams will be described with reference to FIG.

図中、(7)は、複数本のレーザ光ビーム(4)のビーム間ピ
ツチを可変制御するためのビーム圧縮用光学系で、第2
図に示す如く、レンズ系の主点が(8a)で示されたズーム
レンズ(1)と凸レンズ(3)とによつて構成されている。
In the figure, (7) is a beam compression optical system for variably controlling the inter-beam pitch of a plurality of laser light beams (4).
As shown in the figure, the principal point of the lens system is composed of the zoom lens (1) and the convex lens (3) indicated by (8a).

ズームレンズ(1)に入射した複数本の平行レーザ光ビー
ム(2a),(2b),…は、凸レンズ(3)との間の光軸上で集光
され、両レンズ(1),(3)の焦点(F1),(F2)が共通になるよ
うに配置された凸レンズ(3)から、所要のビーム間ピッ
チおよびビーム径で、再び平行に放射される。
The plurality of parallel laser light beams (2a), (2b), ... Entering the zoom lens (1) are condensed on the optical axis between the convex lens (3) and both lenses (1), (3). From the convex lens (3) arranged so that the focal points (F 1 ) and (F 2 ) of) are common, the beams are again radiated in parallel at the required beam pitch and beam diameter.

ここで、ズームレンズ(1)の主点を(8a)から(8a′)に移
動することによつて、各レーザ光ビーム(4)のビーム間
ピツチ、およびビーム径は変更される。例えば、ズーム
レンズ(1)のレンズ系の主点が(8a)にある場合の焦点距
離(r1)が、レンズ系の主点が(8a′)にある場合の焦点
距離(r2)より長い時には、実線で示す如く、ビーム圧縮
用光学系(7)から出射される各レーザ光ビームの断面寸
法、すなわちビーム径が小さくなり、ビーム間ピツチも
小さくなつている。
Here, by moving the principal point of the zoom lens (1) from (8a) to (8a '), the inter-beam pitch of each laser light beam (4) and the beam diameter are changed. For example, the focal length (r 1 ) when the principal point of the lens system of the zoom lens (1) is at (8a) is greater than the focal length (r 2 ) when the principal point of the lens system is at (8a ′). When it is long, as shown by the solid line, the cross-sectional dimension of each laser light beam emitted from the beam compression optical system (7), that is, the beam diameter, becomes smaller, and the inter-beam pitch also becomes smaller.

(5)は、結像レンズであり、ビーム圧縮用光学系(7)で、
そのビーム間ピッチが調整された各レーザ光ビームが、
この結像レンズ(5)により、記録面(6)上に微小光点とし
て収束させられる。この結像レンズ(5)に対する記録面
(6)の位置は、図2に示すように、結像レンズ(5)の焦点
位置(F3)よりわずかにずれた位置で、かつ、レーザ光ビ
ームの径が最も小さくなるビームウエスト位置に設定さ
れる。従って、記録面(6)上でのレーザ光ビームは、ビ
ーム径が最も小さくなり、また、隣接するレーザ光ビー
ムが光干渉せずに、ビーム間ピツチを縮小することがで
きる。
(5) is an imaging lens, a beam compression optical system (7),
Each laser light beam whose pitch between the beams is adjusted,
By this imaging lens (5), it is converged as a minute light spot on the recording surface (6). Recording surface for this imaging lens (5)
As shown in FIG. 2, the position of (6) is a position slightly deviated from the focus position (F 3 ) of the imaging lens (5), and at the beam waist position where the diameter of the laser light beam is the smallest. Is set. Therefore, the laser light beam on the recording surface (6) has the smallest beam diameter, and the inter-beam pitch can be reduced without optical interference between adjacent laser light beams.

このように構成された光学系では、ビーム圧縮用光学系
(7)と結像レンズ(5)から成る光学系の、各レーザ光ビー
ムに対する実効F値が大きいため、記録面(6)上の結像
ビームスポツトサイズ(光点径)は、あまり小さくなら
ず、この系の縮小倍率に縮小されるビーム間ピツチに比
して、相対的に大きくなり、隣接光点間の間隔が詰まる
ことになる。
In the optical system configured in this way, the beam compression optical system
Since the effective F value for each laser light beam of the optical system consisting of (7) and the imaging lens (5) is large, if the imaging beam spot size (light spot diameter) on the recording surface (6) is too small. Instead, it becomes relatively larger than the pitch between the beams reduced to the reduction ratio of this system, and the interval between adjacent light spots is narrowed.

要するに、本発明は、画像信号に応じて、それぞれ独立
に変調された複数本のレーザ光ビームを記録面上に投射
することにより、所要の複製画像を記録する際に、複数
本の離間した平行レーザ光ビームが、一括して入射する
ズームレンズ式のビーム圧縮用光学系により、各レーザ
光ビームのビーム間ピツチを、所要の走査線数記録密度
に応じたビーム間ピツチの近接した平行レーザ光ビーム
に調整し、このビーム間ピツチの平行レーザ光ビーム
を、結像レンズで、該結像レンズの焦点位置付近に配置
された記録面に収束することにより、所要の複製画像を
記録するようにしたものである。
In short, according to the present invention, a plurality of laser light beams, which are independently modulated, are projected onto a recording surface according to an image signal, so that a plurality of separated parallel light beams are recorded when a desired duplicate image is recorded. The beam compression optics of the zoom lens type, into which the laser light beams are incident all at once, determines the inter-beam pitch of each laser light beam to be parallel laser light with a close inter-beam pitch according to the required scanning line recording density. The beam is adjusted into a beam, and the parallel laser light beam of the inter-beam pitch is converged by the imaging lens on the recording surface arranged near the focal point of the imaging lens, so that a desired duplicate image is recorded. It was done.

(発明の効果) 本発明は、複数本の第1の平行レーザ光ビームのビーム
間ピツチを変更する際に、従来のように、マスク板のア
パーチヤー像を、プリズム等の光学的手段で傾けて調整
する必要がなく、複数本のレーザ光ビームが一括して入
射されるビーム圧縮光学系のズームレンズの主点位置を
調整するだけで、走査線数の異なる複製画像を容易に記
録することができ、また、レーザ光ビームのビームウエ
スト位置で、かつ、結像レンズの焦点位置からわずかに
ずれた位置に、記録面を配置したので、隣接するレーザ
光ビームが記録面上で干渉することなく、記録ピッチの
小さい画像を記録することができる。
(Advantages of the Invention) According to the present invention, when changing the inter-beam pitch of a plurality of first parallel laser light beams, the aperture image of the mask plate is tilted by an optical means such as a prism as in the conventional case. There is no need to make adjustments, and by simply adjusting the position of the principal point of the zoom lens of the beam compression optical system where multiple laser light beams are incident at once, it is possible to easily record duplicate images with different numbers of scanning lines. Also, since the recording surface is arranged at the beam waist position of the laser light beam and at a position slightly deviated from the focus position of the imaging lens, the adjacent laser light beams do not interfere with each other on the recording surface. It is possible to record an image with a small recording pitch.

【図面の簡単な説明】[Brief description of drawings]

図は、本発明の実施要領を示すもので、 第1図は、本発明に使用される装置の一例を示すレンズ
構成の平面図、 第2図は、第1図のレンズ構成を模式的に示す光学図で
ある。 第3図は、本発明の原理を説明するための光学系図であ
る。 (1)……ズームレンズ、(2)(4)……レーザ光ビーム (3)……凸レンズ、(5)……結像レンズ (6)……記録面
FIG. 1 shows an embodiment of the present invention. FIG. 1 is a plan view of a lens structure showing an example of an apparatus used in the present invention, and FIG. 2 is a schematic view of the lens structure of FIG. It is an optical diagram shown. FIG. 3 is an optical system diagram for explaining the principle of the present invention. (1) …… Zoom lens, (2) (4) …… Laser light beam (3) …… Convex lens, (5) …… Image forming lens (6) …… Recording surface

───────────────────────────────────────────────────── フロントページの続き (72)発明者 岩本 弘 京都府京都市山科区西野阿芸沢町25―1 (72)発明者 横田 晃博 京都府京都市山科区小野荘司町6―83 (72)発明者 前田 潔 大阪府高槻市奥天神1丁目13番23号 (56)参考文献 特開 昭52−123701(JP,A) 特開 昭53−132361(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Iwamoto 25-1 Nishino-Agezawacho, Yamashina-ku, Kyoto-shi, Kyoto (72) (72) Inventor Akihiro Yokota 6-83 Ono-Sojiji, Yamashina-ku, Kyoto-shi, Kyoto (72) Inventor Kiyoshi Maeda 1-13-23 Okutenjin, Takatsuki-shi, Osaka (56) References JP-A-52-123701 (JP, A) JP-A-53-132361 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】画像信号により、それぞれ独立に変調され
た複数本の平行レーザ光ビームを放射する放射手段と、 前記平行レーザ光ビームをビーム間ピッチを縮小した縮
小平行レーザ光ビームに変換するため、収束点の位置が
固定で主点の位置が変更できるズームレンズと、このズ
ームレンズと収束点を共有する凸レンズとで構成される
ビーム圧縮光学系と、 前記縮小平行レーザ光ビームを、記録面に結像する結像
レンズと、から構成され、 前記記録面は、前記結像レンズの焦点位置よりずれた位
置で、かつ、レーザ光ビームのビームウエスト位置に配
置されてなるレーザ光ビーム露光装置。
1. A radiating means for radiating a plurality of parallel laser light beams, each of which is independently modulated by an image signal, and for converting the parallel laser light beams into a reduced parallel laser light beam in which a pitch between the beams is reduced. A beam compression optical system composed of a zoom lens in which the position of the convergence point is fixed and the position of the principal point can be changed, and a convex lens which shares the convergence point with this zoom lens; An image forming lens for forming an image on the laser light beam exposure apparatus, wherein the recording surface is arranged at a position deviated from a focus position of the image forming lens and at a beam waist position of the laser light beam. .
JP59027339A 1984-02-15 1984-02-17 Laser light beam exposure system Expired - Lifetime JPH0646305B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP59027339A JPH0646305B2 (en) 1984-02-17 1984-02-17 Laser light beam exposure system
US06/699,159 US4617578A (en) 1984-02-15 1985-02-07 Multi-beam zoom and focusing lens scan pitch-adjusting recorder
GB08503278A GB2156624B (en) 1984-02-15 1985-02-08 A scanning image reproduction system including a plurality of modulated laser beams
DE19853504516 DE3504516A1 (en) 1984-02-15 1985-02-09 METHOD AND DEVICE FOR EXPOSURE A PHOTOGRAPHIC FILM BY SEVERAL MODULATED LASER BEAMS IN A SCAN IMAGE REPRODUCTION SYSTEM
GB08604198A GB2170074B (en) 1984-02-15 1986-02-20 A method and an apparatus for exposing a photographic film by a plurality of modulated laser beams in a scanning image reproduction system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59027339A JPH0646305B2 (en) 1984-02-17 1984-02-17 Laser light beam exposure system

Publications (2)

Publication Number Publication Date
JPS60172022A JPS60172022A (en) 1985-09-05
JPH0646305B2 true JPH0646305B2 (en) 1994-06-15

Family

ID=12218296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59027339A Expired - Lifetime JPH0646305B2 (en) 1984-02-15 1984-02-17 Laser light beam exposure system

Country Status (1)

Country Link
JP (1) JPH0646305B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0315018A (en) * 1989-01-13 1991-01-23 Dainippon Screen Mfg Co Ltd Laser exposure device for image scanning and recording device
JP2002023379A (en) * 2000-07-10 2002-01-23 Sony Corp Optical disc, exposure apparatus and exposure method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1523032A (en) * 1976-03-03 1978-08-31 Crosfield Electronics Ltd Image reproducing apparatus
JPS5935003B2 (en) * 1977-04-25 1984-08-25 株式会社日立製作所 optical equipment

Also Published As

Publication number Publication date
JPS60172022A (en) 1985-09-05

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