JPH0648554B2 - Coating method for recording medium for optical recording disk - Google Patents
Coating method for recording medium for optical recording diskInfo
- Publication number
- JPH0648554B2 JPH0648554B2 JP59243703A JP24370384A JPH0648554B2 JP H0648554 B2 JPH0648554 B2 JP H0648554B2 JP 59243703 A JP59243703 A JP 59243703A JP 24370384 A JP24370384 A JP 24370384A JP H0648554 B2 JPH0648554 B2 JP H0648554B2
- Authority
- JP
- Japan
- Prior art keywords
- optical recording
- recording medium
- recording disk
- tellurium
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 11
- 238000000576 coating method Methods 0.000 title claims description 4
- 239000000463 material Substances 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 15
- 229910052714 tellurium Inorganic materials 0.000 claims description 14
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24318—Non-metallic elements
- G11B2007/2432—Oxygen
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は光記録ディスク用記録媒体のコーティング方法
に関するものである。TECHNICAL FIELD The present invention relates to a method for coating a recording medium for an optical recording disk.
従来例の構成とその問題点 近年高密度記録メディアとして光記録ディスクが注目さ
れてきた。我々は、特にその記録媒体について研究開発
を進めた結果、テルル（Ｔｅ）の低酸化物を主成分とし
た材料がＣ／Ｎ，熱安定性の点で優れており、書換え可
能なものも得られる事を見出した。しかしながらその特
性は、媒体の組成・膜質の影響を大きく受け、注意深く
作る必要があるものである事が分かった。Configuration of Conventional Example and Problems Thereof In recent years, an optical recording disk has attracted attention as a high density recording medium. As a result of research and development of the recording medium, in particular, a material containing a tellurium (Te) low oxide as a main component is superior in terms of C / N and thermal stability, and a rewritable one is also obtained. I found that However, it has been found that the characteristics are greatly influenced by the composition and film quality of the medium and need to be carefully prepared.
この光記録ディスクの記録媒体はテルル（Ｔｅ）と酸化
テルル（TeO2）及び酸化可能な金属の多成分系が用いら
れ、従来真空蒸着により成膜していた。しかしながら、
真空蒸着の場合には、同じパワーで加熱しても、その再
現性に問題があり、微妙な組成のコントロールが出来な
いため、歩留りが悪い。さらに真空蒸着では材料によっ
て蒸気圧に差があると事から、つまり低い温度で容易に
蒸発する材料と、蒸発し難い材料があり、一般的に蒸着
当初は蒸発し易い材料が多く含まれている組成で、次第
に蒸発し難い材料の組成が増加してくるという特徴があ
るため、実際に求める組成の膜が得られるのは、蒸発し
易い材料と、蒸発し難い材料の蒸気圧が特定の値くなる
極めて限られた期間という事になり、材料組成のコント
ロールが困難である事は勿論のこと、材料の利用効率や
作業性にも多くの問題があった。The recording medium of this optical recording disk uses a multi-component system of tellurium (Te), tellurium oxide (TeO 2 ) and an oxidizable metal, and has conventionally been formed into a film by vacuum vapor deposition. However,
In the case of vacuum vapor deposition, even if heated with the same power, there is a problem in its reproducibility, and it is not possible to delicately control the composition, so the yield is poor. Furthermore, since there is a difference in vapor pressure depending on the material in vacuum evaporation, there are materials that easily evaporate at low temperature and materials that do not evaporate easily. Generally, many materials that easily evaporate at the beginning of evaporation are included. Since the composition of the material that is difficult to evaporate gradually increases with the composition, the film of the actually desired composition can be obtained only when the vapor pressure of the material that is easy to evaporate and the vapor pressure of the material that is difficult to evaporate are specific values. Since it is a very limited period, it is difficult to control the material composition, and there are many problems in the utilization efficiency and workability of the material.
発明の目的 本発明は上記欠点に鑑み、光記録ディスク用記録媒体の
容易なコーティング法を提供することを目的とするもの
である。OBJECTS OF THE INVENTION The present invention has been made in view of the above drawbacks, and an object thereof is to provide an easy coating method for a recording medium for an optical recording disk.
発明の構成 本発明の方法は、テルルと酸化テルル及び酸化される金
属との多成分材料をターゲットに用い、ガスとしてＡｒ
とＯ2の混合気体を用い、ＲＦ電源よりマッチング回路
を通じて、カソードに電力を供給し、ターゲットに対向
したディスクを回転させながら、記録媒体をコーティン
グするもので、再現性、作業性及び組成のコントロール
が容易となるものである。According to the method of the present invention, a multi-component material of tellurium, tellurium oxide and a metal to be oxidized is used as a target, and Ar is used as a gas.
A mixture of O 2 and O 2 is used to coat the recording medium while supplying power to the cathode from the RF power supply through a matching circuit and rotating the disk facing the target. Control of reproducibility, workability and composition. Will be easier.
実施例の説明 以下、本発明の一実施例について図面を参照しながら説
明する。Description of Embodiments An embodiment of the present invention will be described below with reference to the drawings.
テルルと酸化テルル及び酸化される金属を含む多成分材
料をプレスで固め、銅のバッキングプレートに接着した
ターゲット１を、ＲＦ電源２よりマッチング回路３を通
して、電力を供給されるカソード４に取付け、真空ポン
プ８を持つチャンバ５にバリアブルリークバルブ６を介
してガスを導入し、ターゲット１に対向して回転可能な
光記録ディスク基板７を配したスパッタ装置のチャンバ
内を１０-6Torrまで排気し、次にＡr9とＯ210をその体
積比で１０対０．５〜１０対３の割合に混合したガスを
導入し、ＲＦ電源より５００Ｗの電力をカソードに供給
１０-1Torr台で放電を開始させた後５×１０-2から３×
10-3 Torrの範囲に圧力を調整してターゲットより材料
をスパッタさせ、１０〜２００rpw に回転させた光記録
ディスク基板に、約１２００Åの膜を打出させた後、Ｒ
Ｆパワーを切り、ガス供給を止め、チャンバを大気に戻
して、ディスクを取出す。A target 1 adhered to a copper backing plate is solidified by pressing a multi-component material containing tellurium, tellurium oxide and a metal to be oxidized, and is attached to a cathode 4 to which power is supplied from an RF power source 2 through a matching circuit 3 and a vacuum is applied. Gas is introduced into the chamber 5 having the pump 8 through the variable leak valve 6, and the inside of the chamber of the sputtering apparatus in which the rotatable optical recording disk substrate 7 is arranged facing the target 1 is exhausted to 10 −6 Torr, Next, a gas in which Ar 9 and O 210 were mixed in a volume ratio of 10: 0.5 to 10: 3 was introduced, and 500 W of electric power was supplied to the cathode from the RF power source to start discharge at the 10 -1 Torr level. After letting 5 × 10 -2 to 3 ×
After adjusting the pressure to the range of 10 -3 Torr, the material is sputtered from the target, and a film of about 1200 Å is formed on the optical recording disk substrate rotated at 10 to 200 rpw.
The F power is turned off, the gas supply is stopped, the chamber is returned to the atmosphere, and the disc is taken out.
以上のように本実施例によれば、テルルと酸化テルル及
び酸化可能な金属を主成分とする多成分材料をターゲッ
トにし、ＡrとＯ2の混合ガスで、ＲＦスパッタし、ター
ゲットに対向した光記録ディスク基板を回転しながら成
膜することにより、ディスク基板上に、均一で均質な記
録媒体を、その組成・膜質を所望の通り容易に得られる
ことができる。As described above, according to this embodiment, a multi-component material containing tellurium, tellurium oxide, and an oxidizable metal as a main component is used as a target, RF sputtering is performed with a mixed gas of Ar and O 2 , and light facing the target is emitted. By forming a film while rotating the recording disk substrate, it is possible to easily obtain a uniform and homogeneous recording medium on the disk substrate with desired composition and film quality.
ここでＡｒとＯ２の混合ガスを用いず、一般的に用いら
れるＡｒガスのみでスパッタすると、テルルと酸化テル
ルの膜組成比が、ターゲット材料の組成比と異なるとい
う問題があり、予め、ターゲット材料組成比を変えてお
いても、成膜時の組成再現性に問題がある事が判った。There is a problem that the film composition ratio of tellurium and tellurium oxide is different from the composition ratio of the target material when sputtering is performed only with a generally used Ar gas without using a mixed gas of Ar and O 2 here. It was found that there is a problem in composition reproducibility during film formation even if the material composition ratio is changed.
発明の効果 以上のように、テルルと酸化テルル及び酸化可能な金属
を主成分とする多成分材料をターゲットにし、ＡrとＯ2
の混合ガスで、ＲＦパワーにより陰極スパッタし、ター
ゲットに対向した光記録ディスク基板を回転しながら成
膜することにより、均一で均質な膜が、所望の組成で再
現性よく得られ、光記録ディスク生産の点からその実用
的効果は大なるものがある。Effects of the Invention As described above, targeting a multi-component material containing tellurium, tellurium oxide, and an oxidizable metal as a main component, Ar and O 2
The cathode is sputtered by RF power with the mixed gas of, and the film is formed while rotating the optical recording disk substrate facing the target, so that a uniform and uniform film can be obtained with a desired composition with good reproducibility. From a production point of view, its practical effect is great.
図は本発明の一実施例におけるスパッタ装置の構成概念
図である。 １……ターゲット、２……ＲＦ電源、７……光記録ディ
スク基板。FIG. 1 is a conceptual diagram of the structure of a sputtering apparatus according to an embodiment of the present invention. 1 ... Target, 2 ... RF power supply, 7 ... Optical recording disk substrate.
Claims (1)
主成分とする多成分材料をターゲットに、ＡｒとＯ２を
その体積比で１０対０．５〜１０対３の割合に混合した
混合ガスで、ＲＦパワーにより陰極スパッタし、ターゲ
ットに対向した光記録ディスク基板を１０〜２００rpm
で回転させながら成膜させる光記録ディスク用記録媒体
のコーティング方法。1. A mixture of a multi-component material containing tellurium, tellurium oxide and an oxidizable metal as a main component, and Ar and O 2 in a volume ratio of 10: 0.5 to 10: 3. Cathode sputtering with gas and RF power, optical recording disk substrate facing the target at 10-200 rpm
A method for coating a recording medium for an optical recording disk, in which a film is formed while being rotated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59243703A JPH0648554B2 (en) | 1984-11-19 | 1984-11-19 | Coating method for recording medium for optical recording disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59243703A JPH0648554B2 (en) | 1984-11-19 | 1984-11-19 | Coating method for recording medium for optical recording disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61122951A JPS61122951A (en) | 1986-06-10 |
| JPH0648554B2 true JPH0648554B2 (en) | 1994-06-22 |
Family
ID=17107726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59243703A Expired - Fee Related JPH0648554B2 (en) | 1984-11-19 | 1984-11-19 | Coating method for recording medium for optical recording disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648554B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752527B2 (en) * | 1986-08-18 | 1995-06-05 | 松下電器産業株式会社 | Optical information recording / reproducing disk manufacturing method |
| CN113666717B (en) * | 2021-06-29 | 2023-05-30 | 先导薄膜材料有限公司 | Conductive TeO X Rotary target material and preparation method thereof |
-
1984
- 1984-11-19 JP JP59243703A patent/JPH0648554B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61122951A (en) | 1986-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |