JPH0650241B2 - Contact detection device - Google Patents

Description

The present invention relates to a contact detection device which is used for automatic measurement and centering of a machine tool and which generates an electrical signal by contact with an object to be measured.

Conventionally, various types of contact detection devices have been devised and used as automatic contact detection devices used for automatic measurement and centering of machine tools. However, in any of the conventional devices, there is a problem that the measurement error increases remarkably when adhering matter such as cutting oil, chips or dust is present on the measured surface of the measured object in any method. . In particular, in the method that detects the contact between the object to be measured by the electrical continuity between the contact detection unit and the object to be measured, if an adhering matter is present, a short circuit will occur when the contact detecting section contacts the adhering matter, resulting in a large measurement error. Often occurs. Further, in the contact detection device having a contact inside the device, a measurement error is caused by the size of the attached matter.

For this reason, recently, a contact detection device has been proposed in which air having a constant pressure is discharged from the contact detection unit and the air is used to remove the attached matter. However, this apparatus can remove the adhered substances only by air ejection in the case of dry cutting, but there is a problem that in wet cutting using cutting oil, only air ejection is insufficient. . That is, chips and dust floating in the cutting oil can be removed together with the cutting oil by air, but chips and dust adhering to the object to be measured are mutually adsorbed by the cutting oil. In addition to the generation of force, the removal pressure of air that acts on the chips and dust under the oil surface is lowered by the oil surface, so the removal rate of deposits is reduced. Therefore, in order to eliminate such a decrease in the removal rate of deposits due to cutting oil, the inventor uses air containing mist-like oil at a constant pressure (hereinafter referred to as mist) on the surface to be measured of the object to be measured. Thinking of spraying,
A comparative experiment with a case of simply blowing air was performed. First
The figure shows the experimental results when measuring the inner diameter of multiple holes to be processed in a wet hole. The measurement error in the case of measurement is much smaller than the error in the case of simply blowing air.

The present invention has been made in view of the above circumstances, and by spraying a mist from the contact detection unit onto the measured surface of the measured object, the oil in the mist acts on the oil on the measured surface of the measured object. Therefore, it is an object of the present invention to provide a contact detection device that can make them into a fluid state and can remove deposits together with oil content and that has extremely high measurement accuracy even in wet processing.

Hereinafter, the present invention will be described in detail with reference to the drawings.

2 to 8 show an embodiment of the present invention.
A contact detection unit 1 which is brought into contact with an object to be measured and emits a contact signal, an inheritance bracket 3 which delivers a mist to the contact detection unit 1 and which transmits the contact signal to a reception signal processing device 2, and this inheritance bracket. 3 and a blower 4 for supplying mist.

The contact detection unit 1 includes a contact body 5 which is brought into contact with the object to be measured and displaced from the equilibrium position, a movable body 6 which is displaced in the axial direction by the displacement of the contact body 5, and the movable body 6
Switch (sensor) that detects the movement of the robot and issues a contact signal
7 and a position restoring mechanism 8 that restores the contact body 5 and the moving body 6 to the original equilibrium position when the contact body 5 is separated from the object to be measured.

The contact body 5 has a contact head having outer peripheral surfaces 9a and 9b formed in contact with an object to be measured at a tip portion thereof, and a probe 9 having a collar portion 9c at an intermediate portion thereof is a locator 10
The fitting hole 10a is fitted with the flange portion 9c by engaging the tip 10b of the locator 10 and is fixed to the locator 10 by the set screw 10c. The probe 9 has a through hole 9d for the mist sprayed on the measured surface of the measured object.
Is provided. The flow hole 9d is formed along the axial direction of the probe 9, and one end of the flow hole 9d branches in the axial direction and the radial direction at the tip portion of the probe 9 so that each outer peripheral surface 9 is formed.
a and 9b, and the other end is opened to the outer peripheral surface of the probe 9 by a communication hole 9e opened in the radial direction. The locator 10 has a large-diameter portion 10d on the tip 10b side and a smaller diameter than the large-diameter portion 10d.
Has a taper portion (small diameter portion) 10e that is gently tapered so as to be narrowed toward the tip of the taper portion, and has a diameter smaller than the taper portion 10e on the rear end 10f side and is tapered in the opposite direction. A member having a tapered portion 10g,
An annular holder 12 attached to the housing 11.
, 13f through the six true spheres 13a, ..., 13f. In addition, two round holes 10i are formed on the rear end surface 10h of the large diameter portion 10d of the locator 10 so that the locator 10 is
Are formed at symmetrical positions in the diametrical direction of the locator 10 (equal-interval positions on a circle centered on the center of the locator 10), and one end of the large-diameter portion 10d has one end inside the through hole 9d of the probe 9.
Through the communication hole 9e, and the other end communicates with the round hole 10e.
A through hole 10j communicating with i is provided in the diameter direction.

The housing 11 is a hollow cylindrical member having a fitting hole 11a at the front end and a flange portion 11b at the rear end, and is fixed to the body 14 via a bolt 15 and at the front end thereof. Is provided with one push screw hole 11c penetrating in the radial direction and a plurality of set screw holes 11d.
Are provided so as to be displaced from the positions of the push screw holes 11c and to penetrate in the radial direction at equal intervals in the circumferential direction. A push screw hole 11e and an adjusting screw 11f are screwed into the screw holes 11c and 11d, respectively. Also,
The flange portion 11b of the housing 11 is provided with a through hole 11g having one end opened to the inner peripheral surface of the housing 11 and the other end opened to the rear end surface of the flange portion 11b. The holder 12 has the fitting hole 1 of the housing 11.
1a and a plurality of mounting bolts 1
It is attached to the housing 11 by means of 6, and its axial center position can be finely adjusted by the plurality of adjusting screws 11f. The holder 12 has a through hole (groove) 1
2a is provided coaxially with the screw hole 11c of the housing 11 so as to penetrate therethrough in the radial direction, and five V grooves 12b, ..., 12f are formed on the inner peripheral surface of the through hole 12a.
And are formed at equal intervals in the circumferential direction. Further, the true spheres 13a, ..., 13f are fitted in the through holes 12a and the V-grooves 12b, ..., 12f, and the front end face 10 of the large diameter portion 10d of the locator 10 is fitted.
rear end face 12 of the holder 12 facing the front end face 10k
g and the outer peripheral surface of the tapered portion 10e are brought into contact with each other to restrain their movement.

A compression coil spring 18 having one end fitted to a washer 17 is fitted into the through hole 12a of the holder 12 while the other end is brought into contact with the true sphere 13a and the washer 17 is brought into contact with a push screw 11e. By adjusting the screwing amount of the push screw 11e, the pushing force of the true sphere 13a in the through hole 12a against the locator 10 can be adjusted from the outside. Furthermore, each of the above V
Of the grooves 12b, ..., 12f, the V grooves 12d and 12f arranged on both sides of the through hole 12a and the V groove 12 arranged to face the through hole 12a in the diameter direction of the holder 12.
e is formed slightly deeper than the other two V-grooves 12b and 12c, and these deep V-grooves 12d, 12e and 12f are formed.
A gap n can be formed between the sphere 10 and the true spheres 13d, 13e, 13f fitted in the locator 10. Due to this gap n and the pressing force of the true sphere 13a in the through hole 12a against the locator 10 by the compression coil spring 18, the locator 10 always has three true spheres 13a, 13b for alignment,
The structure is in contact with 13c and positioned by them.

On the other hand, the moving body 6 has a rear end 10f of the locator 10.
A rod provided with a steel ball 19 in between and a shaft center aligned with the shaft center of the locator 10. A linear ball is attached to a substantially hollow cylindrical inner body 21 fixed to the rear end of the housing 11 by a bolt 20. It is attached via a bearing 22 so as to be movable in the axial direction. A groove 6a having a conical inclined surface forming an angle of 45 ° with the axis of the moving body 6 is formed at the tip of the moving body 6, and the rear end 10f of the locator 10 is also aligned with the axis of the locator 10. To 4
Grooves 10 having a conical slope with an angle of 5 ° are formed, and the steel balls 19 are fitted into these grooves 6a, 10. Further, the rear end portion of the moving body 6 is made to project into the shaft hole 21a of the inner body 21, the projecting portion 6b is formed on the end surface thereof, and the spring receiving portion having the shaft hole 23a at the entire rear end portion. The gold 23 is fitted in the shaft hole 23a by inserting the protrusion 6b. In addition, two round holes 21b are provided at the tip of the inner body 21 and the round holes of the locator 10 are opposed to the round holes 10i and are provided at symmetrical positions in the diameter direction of the inner body 21. , The through hole 1 of the housing 11
A groove (circulation hole) 21c communicating with 1g is formed along the circumferential direction, and the round hole 21b and the groove 21c are communicated with each other by an L-shaped circulation hole 21d. Further, the inner body 21 and the locator 1 are
Between the large diameter portion 10d of 0, two pipes 24 inserted into the two round holes 21b and the two round holes 10i provided at the both ends with O-rings interposed respectively. It is located in. Each of the pipes 24 is adapted to follow the axial movement of the locator 10 and the swinging movement about the true spheres 13a, 13b, 13c. The housing 11, the body 14, and the inner body 2
1 constitutes the main body.

The switch 7 has a detector 7a at the front end and two output lines 7b and 7c at the rear end. The axis of the switch 7 is aligned with the axis of the moving body 6 to form a cylindrical switch. It is attached to the holder 25 and attached to the inner body 21. The switch holder 25 is used for the inner body 2
Since it is cut to the rear end side of the first shaft hole 21a, it is screwed into the screw portion and is fixed to the inner body 21 by the set screw 26. By adjusting the screwing amount, the detector 7a and the moving body 6 are The clearance between the protrusion 6b and the protrusion 6b is appropriately maintained. Further, the main body of the switch 7 is fitted almost completely into the switch holder 25, and even if the detector 7a is pushed by the protrusion 6b of the moving body 6 beyond the allowable stroke, the end face of the spring retainer 23 is Contacts the tip of the switch holder 25, prevents the moving body 6 from moving further in the direction of arrow A, and prevents the switch 7 from being damaged. Further, a compression coil spring 27 is provided between the shoulder portion 25 a of the switch holder 25 and the washer 23.
Is compressed, and the moving body 26 is pressed against the contact body 5 with an appropriate pressure by the urging force of the compression coil spring 27.

When the outer peripheral surfaces 9a and 9b of the tip portion of the probe 9 come into contact with the object to be measured and the probe 9 is displaced, the steel ball 1
The moving body 6 is moved in the direction of arrow A against the biasing force of the compression coil spring 27 via the switch 9, and the switch 7 detects this movement. Further, when the object to be measured is separated from the tip of the contact body 5, the moving body 6 is returned to the original equilibrium position by the urging force of the compression coil spring 27,
Further, the contact body 5 also returns to the original equilibrium position via the steel ball 19, but at this time, the true spheres 13a, 13b, 1 for alignment are provided.
The contact body 5 is accurately positioned by 3c. In this way, the compression coil spring 27 and the steel ball 19 constitute the position restoring mechanism 8 that restores the moving body 5 to the original position.

In addition, the body 14 has a protruding portion 1 that protrudes in the radial direction.
4 ', and a through hole 14a is axially formed through this protruding portion 14'. A joint 30 is attached to the through hole 14a via a front bush 28 and a rear bush 29. The front bush 28 has a shaft hole 28a at its axial center position, and is fitted into the fitting hole 14b on the tip end side of the through hole 14a and bolted to the projecting portion 14 'of the body 14 by the cap 31. It is fixed by. Also, the shaft hole 28
A plug 32 is tightened and attached to a by a nut 33. The joint 30 has a collar portion 3 in the middle portion.
0a, which is a substantially cylindrical member, has a side hole 30b, one end of which opens into the internal space of the member and the other end of which opens into the through hole 14a.
8 is slidably fitted into the body 8, and its rear end side is a body 14
The rear bush 2 is bolted to the protruding portion 14 'of the
9 is slidably fitted. Further, one end of the compression coil spring 34 is brought into contact with the end face of the plug 32 in the compressed state of the compression coil spring 34, and the other end is brought into contact with the shoulder portion 30c of the inside of the joint 30 to be fitted therein. Due to the biasing force of the compression coil spring 34, the connection between the contact detection unit 1 and the inheritance bracket 3 has flexibility. In addition, the Join 3
Since the movement of the collar portion 30a of 0 in the axial direction is restricted by the end faces 28b and 29a of the front bush 28 and the rear bush 29, the sliding stroke of the joint 30 is limited to a certain range. Furthermore, one of the two output lines 7b and 7c of the switch 7 is the output line 7b.
Is connected to the bolt 20 for fixing the inner body 21 to the housing 11 with a crimp terminal sandwiched therebetween and is grounded inside the apparatus, and the other output line 7c is guided while being insulated in the passage 14c in the body 14. Then, the crimp terminal is sandwiched between the plugs 32 and connected. The cap 31, the front bush 28, and the rear bush 29 are made of an insulating material, and are connected to the switch 7 to the output line 7c.
The contact detection signal transmitted to the plug 32 is guided to the joint 30 via the compression coil spring 34.

One end of the body 14 is the housing 11
11g of the through hole and the other end of the protruding portion 1 of the body 14.
A substantially L-shaped through hole 14d is provided so as to be communicated with each of the 4'through holes 14a. Also, reference numeral 3 in the drawing
Reference numeral 5 denotes a rubber cover for preventing dust, oil, chips, etc. from entering the inside of the device, and 36 holds the rubber cover 35 and at the same time makes the device strong against external force. Is the lid. Reference numeral 37 is a shank 37. By attaching this portion to the main shaft 38 of the machine tool, the contact detection unit 1 is mounted on the machine tool, and the joint 30 is mounted on the inheritance bracket 3 as shown in FIG. It has become. Furthermore, 39 is an O-ring, 40 is a breathing hole, and 41 is a buried metal.

Next, the inheritable bracket 3 will be described. Fifth
Figures 7 to 7 show this inheritance bracket 3, and 50 in the figures is the first bracket. The first bracket 50 has a substantially L-shape, and inside thereof, one end has a front end face and the other end has a flow hole 50a such as a mist opening to the rear end face, and one end has the same front end face with the other end. It is provided with through holes 50b for conducting wires which are opened on the side surfaces,
The rear end of the main shaft 38 is fastened with a mounting bolt 51.
Is attached to the lower surface of the spindle head H having a. Further, on the front surface of the first bracket 50, the second bracket 52 is provided with the passage 5 for the conducting wire which communicates with the through hole 50b.
2a is formed and attached. The second bracket 52 is provided with a shaft hole 52b that opens forward in the upper part, and the slot 53 arranged in the shaft hole 52b and the mounting bolt 5
It is fixed to the first bracket 50 by 4, and
Inside thereof, one end is opened to the inner peripheral surface of the shaft hole 52b, and the other end is the flow hole 50a of the first bracket 50.
A communication hole 52c is provided for communicating with the. Further, a fitting hole 52d is formed in the shaft hole 52b of the second bracket 52, and a liner 55, an adjusting plate 56 and a pad 57 are fitted in the fitting hole 52d, and a pan head screw 58 is used. It is fixed to the second bracket 52, and an annular joint 60 is fitted into this pad 57 via an O-ring 59. The front end side of the inner peripheral surface of the joint 60 is connected to a taper portion 60a which is tapered so as to expand as it approaches the front end. The taper portion 60a is provided after the joint 30 of the contact detection unit 1. The taper portion 30d at the end is fitted.

The second bracket 52 is made of an insulating material, whereas the liner 55, the adjusting plate 56, the pad 57 and the joint 60 are made of metal. Therefore, the contact detection signal from the joint 30 is the joint 60,
The path to the pad 57 and the pan screw 58 is guided without being grounded to the machine body, and is transmitted to the crimp terminal 61 attached to the pan screw 58.
The signal is transmitted to the signal processing device 2 by a conductor (not shown) that is passed through the passage 52a of the first and second brackets 50 and the through hole 50b. The outer end of the flow hole 50a of the first bracket 50 is connected to the blow device 4 by a pipe 4a, and the mist from the blow device 4 is the flow hole of the pipe 4a, the flow hole 50a, and the second bracket 52. It reaches through the shaft 52c to the shaft hole 52b, where it is diffused by the slot 53 and sent into the joint 30.

On the other hand, the blower 4 adds a predetermined amount of oil to air from an air generator such as a compressor (not shown) to create a mist and supplies the mist to the inheritable bracket 3, as shown in FIG. A filter 70 for removing water and impurities contained in the air from the air generator, and a pressure detector 71 for detecting the pressure of the air from the filter 70 and transmitting the signal to an external control device (not shown).
A solenoid valve 72 that opens and closes the valve according to a signal output from an external control device to adjust the air supply amount.
A joint 73 for branching the air from the solenoid valve 72 in two directions; a low pressure regulator 74 for adjusting the pressure of the air flowing in one of the pipes branched by the joint 73 to a constant low pressure; and a low pressure regulator for this. A speed control 75 for adjusting the flow rate of air whose pressure is adjusted by 74, and a high pressure regulator 7 for adjusting the pressure of the air flowing through the other pipe branched by the joint 73 to a constant high pressure.
6, a charge tank 77 in which oil is stored, and a lubricating device 78 for generating mist by dropping the oil in the charge tank 77 to the air discharged from the speed control 75. When the air from the high-pressure regulator 76 flows into the charge tank 77 and pressure is applied to the oil surface, the oil flows out from the discharge port 77a of the charge tank 77. It is becoming mixed. Reference numeral 78a in the figure is a valve for adjusting the amount of oil dropped.

Next, the operation of the contact detection device of the present invention will be described.
In the state shown in FIG. 2, the spindle head H is actuated to move the contact detection unit 1 mounted on the spindle 38 toward the object to be measured, and the object to be measured is detected. In addition, or during the measurement, deposits such as chips remaining on the surface to be measured of the object to be measured are removed with a mist. That is, air is sent from the air generator (not shown) to the blower 4. In the blower 4, moisture and impurities in the air are removed by the filter 70, and the air is adjusted to a predetermined amount by the solenoid valve 72. Next, the lubrication device 78 is branched at the joint 73, one of which is pressure-adjusted by the low pressure regulator 74 and the flow rate is adjusted by the speed control 75.
to go into. Further, the other air branched at the joint 73 is pressure-controlled by the high-pressure regulator 76 and flows into the charge tank 77 to supply the oil in the charge tank 77 to the lubrication device 78. Then, the air and oil are mixed in the lubrication device 78 to form a mist, which then enters the inheritance bracket 3 via the conduit 4a. The mist that has entered the inheritance bracket 3
From the flow hole 50a of the first bracket 50 to the shaft hole 52b through the flow hole 52c of the second bracket 52, the shaft 53a is diffused by the slot 53, and the joint 3 of the contact detector 1 is detected.
Enter within 0. Further, this mist passes through the side hole 30b of the joint 30 and enters the flow hole 14d of the body 14 to reach the flow hole 11g of the housing 11, and also the groove 21c, the flow hole 21d and the round hole 21b of the inner body 21.
After entering the pipe 24 through the
to go into. Then, the communication hole 9e and the flow hole 9d of the probe 9
Then, it is ejected from the tip of the probe 9 to remove the deposits on the measured surface of the measured object.

In this way, when the contact detection unit 1 is further moved after completely removing the deposits on the measured surface of the measured object, the measured object comes into contact with the tip of the probe 9. For example, when the object to be measured comes into contact with the outer peripheral surface 9a above the tip of the probe 9, the contact body 5 swings around the true sphere 13a as a fulcrum, and the rear end 10f of the locator 10 moves upward as shown by an arrow B. . At this time, the steel ball 19 rolls in the groove 10 and tries to come out from the conical surface, and as a result, the moving body 6 moves in the direction of arrow A against the biasing force of the compression coil spring 27. Alternatively, when the object to be measured comes into contact with the outer peripheral surface 9b at the tip of the probe 9, the entire contact body 5 is moved in the direction of arrow A, and the moving body 6 is also moved in the direction of arrow A. In this way, the moving body 6 moves in the direction of arrow A against the urging force of the compression coil spring 27 regardless of which of the outer peripheral surfaces 9a and 9b at the tip of the probe 9 is in contact with the object to be measured. Then, the projection 6b at the rear end of the moving body 6 hits the detector 7a of the switch 7,
The contact inside the switch 7 is closed to detect the contact. This contact detection signal is transmitted to the joint 30 through the output line 7c and enters the inheriting bracket 3. Then, it is transmitted to the crimp terminal 61 through the joint 60, the pad 57 and the pan screw 58, and is guided to the signal processing device 2 by a conductor (not shown) and processed, and the object to be measured is detected.

On the other hand, when the object to be measured is separated from the contact body 5, the contact body 5 and the moving body 6 are restored to their original equilibrium positions by the position restoring mechanism 8. That is, the moving body 6 moves in the direction of arrow C by the biasing force of the compression coil spring 27, and returns to the original equilibrium position. When the moving body 6 returns to the original equilibrium position, the contact body 5 moves in the arrow C direction via the steel ball 19 or moves in the arrow D direction to restore the original equilibrium position. Here, when a force acts on the contact body 5 in the radial direction, the force is exerted on the contact body 5 in the axial direction by the compression coil spring 27, so that each true sphere 13a, ... A moment force acts in a direction to cancel the radial force with the contact point of the diameter portion 10d with the front end surface 10k as a fulcrum, and the contact body 5 returns to the original equilibrium position. At this time, the true spheres 13a, ..., 13f are pressed against the outer peripheral surface of the tapered portion 10e of the locator 10, but the true spheres 13a ,. Only the axial force acts effectively on the body 5 and the restoration of the position is not blocked. Further, the flow holes 9d, 10j of the contact body 5,
When the mist flows through the communication hole 9e, a force acts on the contact body 5 by the flow of the mist. The force is greater in the radial direction in the axial direction and the radial direction of the contact body 5, but the true spheres 13a, ..., 13f are tapered portions 10e of the locator 10.
Since the contact body 5 is guided while rolling on the outer peripheral surface of, the restoration of its position is accurate. In this way, no matter what direction the force is applied to the contact body 5, or even if the mist flows through the flow holes 9d and 10j communication hole 9e in the contact body 5,
The contact body 5 is accurately restored to the original equilibrium position by the position restoring mechanism 8. Therefore, the object to be measured can always be detected with high accuracy.

In the above embodiment, the shape and mounting structure of the inheritance bracket 3 are not limited to those described above. Further, in the above, the mist is sprayed on the measured surface of the measured object to remove the adhered matter, but the pressure applied to the oil surface of the charge tank 77 is set to zero by setting the set pressure of the high pressure regulator 76 of the blowing device 4. Zero or
The valve 78a of the lubrication device 78 may be operated to set the amount of oil dropped to zero so that only the air is blown onto the surface to be measured, which is sufficient especially for dry machining.
Furthermore, the joint 73 of the blower 4 and the high pressure regulator 7
It is also easy to insert a solenoid valve 79 between 6 and 6 so that the mist and air can be automatically switched from the outside.

As described above, in the contact detection device of the present invention, the first circulation hole is formed inside, and the plurality of first holes are annularly communicated with the first circulation hole at substantially equal intervals in the inner depth of the front surface. And a shank attached to the main body and detachably attached to the main spindle of the main spindle head, and the main body is attached to the first communication hole of the main body in communication with the main shaft. The hollow joint that is detachably mounted to the inheritance bracket provided on the spindle head in the closed state, and has the second circulation hole inside and the first joint of the main body on the rear surface.
The same number of second holes as the holes communicate with the second flow holes and are formed in an annular shape at substantially equal intervals, and the front end face is opposed to the rear end face of the holder fixed to the main body, and the second hole is formed. Having a locator that is fitted into the main body with the first opening facing the first hole of the main body, and a third circulation hole that is open to the outer peripheral surface of the front end and that projects outward from the main body, and that has the third circulation hole. And a probe whose rear end is fixed to the locator in a state of being communicated with the second circulation hole of the holder, and the probe is individually fitted into three or more grooves formed at substantially equal intervals on the inner circumference of the holder. Between the rear end surface and the front end surface of the locator, the groove is inserted in contact with the front end surface and the outer peripheral surface of the front conical taper portion formed on the locator and the rear end surface of the holder, The same number of spheres for alignment are installed inside the main unit, and the In the case where the moving body is moved via the locator when the position is displaced in the axial direction or the direction orthogonal to the axial direction, and the probe is brought into contact with the DUT by connecting the second hole to the first hole. A pipe that is liquid-tightly provided in the main body by allowing the locator to move freely, a sensor that is provided in the main body and that detects the movement of the moving body and issues a contact signal, and the equilibrium position of the moving body, the locator, and the probe. A position restoring mechanism that restores the mist, a blower for supplying mist or the like to the third through hole of the probe through the inheriting bracket, joint, first through hole of the main body, second through hole of the pipe and locator, Since the configuration is provided with the signal processing device that receives the contact signal of the sensor through the joint and the inheritance bracket, the following effects are obtained.

A mist or air can be blown onto the surface of the object to be measured to completely remove the adhering substances from the chips and the like on the surface to be measured.
Moreover, it is possible to spray mist or air, whichever is appropriate, depending on the situation of cutting such as wet cutting and dry cutting, and always achieve highly accurate measurement.

Since a pipe is provided in the housing of the main body so that the first hole of the main body and the second hole of the locator communicate with each other and fluid such as oil mist is supplied to the probe through the inside of the main body, Unlike the case where the air flow passage is formed between the probe and the bellows, there is no problem that mist or the like leaks to the outside due to damage to the bellows due to a contact accident or the like.

When the shank is attached to the main shaft, the inheritance bracket ensures that the fluid flow hole such as mist and the sensor that detects contact are securely connected to the blow device such as mist and the signal processing device at the same time. Easy to handle.

The centering spheres are individually fitted into three or more grooves formed on the inner circumference of the holder at substantially equal intervals, and the front end surface is formed between the rear end surface of the holder and the front end surface of the locator. It is configured to be inserted into contact with the outer peripheral surface of the front conical taper portion formed on the locator and the rear end surface of the holder, and even when the locator is largely displaced during measurement, after the measurement, Since the relationship between the holder, the sphere, and the locator is not lost and the state is immediately restored to a predetermined state, the accuracy does not decrease due to repeated measurement, and a high measurement accuracy can always be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a graph of experimental results showing a difference in effect between removal of deposits by a mist and removal of deposits simply by air, and FIGS. 2 to 8 are contact detection of the present invention. 2 shows an embodiment of the apparatus, FIG. 2 is an overall schematic view, FIG. 3 is a sectional view of a contact detecting portion, and FIG. 4 is a sectional view taken along the line IV-IV in FIG.
Further, FIG. 5 is a side view in which a part of the transfer bracket is cut away, FIG. 6 is a bottom view of the same, FIG. 7 is an enlarged cross-sectional view of a circle VII of FIG. 5, and FIG. 8 is the entire blower device. It is a schematic diagram. 1 ... Contact detection part, 2 ... Signal processing device, 3 ... Transfer bracket, 4 ... Blow device, 5 ... Contact body, 6 ...
Mobile unit, 7 ... Switch, 8 ... Position restoration mechanism, 9 ...
Probe, 9d ... Circulation hole, 10 ... Locator, 10j
...... Flow hole, 11 …… Housing, 11g …… Flow hole,
13a, ..., 13f ... True sphere, 14d ... Flow hole, 19
...... Steel ball, 21 ...... Inner body, 21d ...... Flow hole, 7a ...... Detector, 7b, 7c ...... Output line, 25 ......
Switch holder, 27 ... Compression coil spring, 30 ... Joint, 34 ... Compression coil spring, 37 ... Shank, 50 ... First bracket, 50a ... Circulation hole, 52
...... Second bracket, 52c ...... Flow hole, 53 ...... Slottle, 57 ...... Grip, 60 ...... Coupling, 72 ...... Solenoid valve, 74 ...... Low pressure regulator, 75 ...... Speed control, 76 ...... High pressure Regulator, 77
... Charge tank, 78 ... Lubrication device.

Claims (1)

[Claims] 1. A first circulation hole (11g, 14d, 21) inside.
c, 21d) are formed, and a plurality of first holes (21b) are annularly formed in the inner depth of the front surface at substantially equal intervals.
g, 14d, 21c, 21d), the main body (11, 14, 21) formed in communication with the main body (11, 14, 2)
1) attached to the spindle head (H) spindle (38)
The shank (37) detachably attached to the main body (11, 14, 21) communicates with the first circulation hole (11g, 14d, 21c, 21d) of the main body (11, 14, 21). A hollow joint (30) which is attached and detachably mounted on the inheritance bracket (3) provided on the spindle head (H) in a state where the shank (37) is mounted on the spindle (38); The second through hole (10
j), and the second holes (10i) of the same number as the first holes (21b) of the main body (11, 14, 21) communicate with the second circulation holes (10j) on the rear surface, and are approximately equal to a ring. The front end face (10k) faces the rear end face (12g) of the holder (12) fixed to the main body (11, 14, 21) and formed at intervals, and the second hole (10i) is formed in the main body. (11,
14 (21) facing the first hole (21b) of the body (1
Locator (10) fitted in 1, 14, 21)
And the third circulation hole (9) opened to the outer peripheral surface (9a, 9b) at the front end protruding outward from the body (11, 14, 21).
a probe (9) having a rear end fixed to the locator (10) with the third communication hole (9d) communicating with the second communication hole (10j) of the locator (10). , Respectively fitted into three or more grooves (12a, 12b, 12c) formed in the inner periphery of the holder (12) at substantially equal intervals, and the rear end surface (12g) of the holder (12) is formed. The front end surface (10k) between the front end surface (10k) of the locator (10) and the outer peripheral surface of the front conical taper portion (10e) formed in the locator (10) and the holder (12). The groove (12) inserted into contact with the rear end face (12g).
a, 12b, 12c) and the same number of alignment balls (13a, 1)
3b, 13c) and the main body (11, 14, 21) and the probe (9) comes into contact with the object to be measured and is displaced from the equilibrium position in the axial direction or in the direction orthogonal to the axial direction. A moving body (6) which is moved through the locator (10), and a second hole (10) in the first hole (21b).
i) through which the locator (10) moves freely when the probe (9) comes into contact with the object to be measured.
1, 24, 21) Liquid-tightly installed pipe (24)
And a sensor (7) provided on the main body (11, 14, 21), which detects the movement of the moving body (6) and issues a contact signal.
And a position restoring mechanism (8) for restoring the moving body (6), the locator (10) and the probe (9) to the equilibrium position.
And the above inherited bracket (3), joint (3
0), the first flow hole (11) of the body (11, 14, 21)
g, 14d, 21c, 21d), a pipe (24), and a blower () for supplying mist or the like to the third circulation hole (9d) of the probe (9) via the second circulation hole (10j) of the locator (10). 4) and a signal processing device (2) which receives the contact signal of the sensor (7) via the joint (30) and the inheritance bracket (3).