JPH0652209B2 - Multi-axis force sensor - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a multi-axis force sensor that detects a force generated in a ring portion by a gauge bonded to an inner surface and an outer surface of a ring portion of the multi-axis force sensor. It is about.

[Conventional technology]

A multi-axis force sensor is generally composed of upper and lower disc-shaped plate parts and a plurality of ring parts that connect them, and the force acting between the upper and lower plate parts by sensing the "strain" generated in each ring part. Is to detect. Then, in order to detect the strain of each ring portion, an appropriate number of the same strain gauges are attached to the inner surface of the ring portion, and the same strain gauge is attached to the outer surface as well. The strain gauges must be located exactly where they are needed.

That is, the strain gauge (21) as shown in FIG. 8 has all the inner wall surfaces (24) of the ring portion (23) of the multiaxial force sensor (22) as shown in FIGS. 9 to 11. The strain gauges (21) must be aligned along the same circumference on the inner wall surface (24), and the respective strain gauges (21) must be arranged at predetermined positions and at predetermined intervals. The same applies to the outer surface. If the attachment positions of these strain gauges (21) are not accurate, the accuracy of the output of the force sensor (22) will decrease.

Conventionally, the strain gauges (21) have been attached to each one by hand with an adhesive by hand with strict tolerances. For this reason, skilled technique and many man-hours are required,
Furthermore, the work requires a great deal of caution, but nevertheless it was not possible to eliminate the variation in the position of the attached strain gauge (21). Therefore, as shown in FIG. 9, the horizontal axis passing through the center of the inner wall surface (24) of the ring part (23) and the straight line connecting the center and the lower end edge of the strain gauge (21) at the center on the left side. Angle (α ₁ ), the angle between the horizontal axis of the straight line connecting the lower edge of the strain gauge (21) on the upper left side and the center above (α ₂ ), the upper edge of the strain gauge (21) on the lower left side The angle (α ₃ ) formed by the straight line connecting the axis and the center with the horizontal axis is not correct, or the angles α ₁ , α ₂ , α _{3 of} the left and right strain gauges (21) are different. was there.

As shown in FIG. 10, the distance (A) between the outer edge of each strain gauge (21) and the end surface (25) of the ring portion (23) does not match, or the outer edge and end surface ( The angle (β) formed by 25) was sometimes generated.

Furthermore, the work of connecting the lead wire to the terminal of each strain gauge (21) is performed by soldering, but this also requires skilled technology and a lot of man-hours, and also connects to each strain gauge (21). When collecting the lead wires and guiding them to a device outside the force sensor (22), there is a possibility that disconnection or wiring error may occur.

[Problems to be solved by the invention]

Therefore, it is an object of the present invention to provide a multi-axis force sensor that can reduce the error in the sticking position of the gauge to a very small extent, and further that the sticking work of the gauge is simple and the working time is short. To do.

Another object of the present invention is to provide a multi-axis force sensor in which the work of connecting lead wires can be easily performed and disconnection and wiring mistakes are less likely to occur.

[Means for solving problems]

In order to achieve the above object, the multi-axis force sensor (1) of the present invention has a flexible substrate (11) in which a gauge (7) fixed to an inner surface (5) of a ring (4) is a long and narrow sheet.
An appropriate number of force detectors (12) arranged on the substrate (11) at appropriate intervals along the long axis direction thereof, and the substrate (1
1) and a lead wire (13) formed on the above, and one end of which is connected to each force detection part (12) and the other end of which is connected to a terminal (15) formed in a terminal part (14), respectively. Furthermore, the force detection unit (12) is accurately positioned on the major axis of the substrate (11), its orientation is aligned along the major axis, and is fixed to the outer surface (6). The flexible gauge (8) has a long and narrow flexible substrate (11), a force detecting section (12) arranged on the substrate (11) along the longitudinal direction thereof, and the substrate (11).
The lead wire (13) is formed on the upper side and has one end connected to the force detecting section (12) and the other end connected to the terminal (15).

[Action]

According to the above configuration, since each force detection unit (12) is accurately arranged in advance on the substrate (11) at a predetermined position, the substrate (11) can be simply attached to the ring unit (4). Well, this also allows the force detector (12) to be accurately positioned.

In addition, since the lead wire (13) leading to each force detection part (12) is already connected and the terminal part (14) is provided in one place, there is also a disconnection of the lead wire (13) and a wiring mistake. Absent.

〔Example〕

The configuration of the present invention will be described below with reference to the drawings shown as an embodiment.

FIG. 1 is a perspective view showing the entire multi-axis force sensor of the present invention. The multi-axis force sensor (1) includes upper and lower disc-shaped plate portions (2) and (3), a plurality of ring portions (4) connecting them, and an inner surface (5) of each ring portion (4). It is composed of gauges (7) and (8) bonded to the outer surface (6).

Each ring portion (4) has a circular or regular polygonal shape, and plate portions (2) and (3) are joined to the plate portions (2) and (3) at both end portions (9) and (10) thereof, respectively. 2)
It is formed integrally with (3). Each gauge (7) (8)
As shown in FIG. 3 and FIG. 4, an appropriate number of force detection parts (12) are formed on the film-like flexible substrate (11) by photolithography.
Is formed. Each force detector (12) is
It is arranged at a predetermined position of 1) so as to be parallel to the long axis of the substrate (11), and the gauge (7) bonded to the inner side surface (5) has 6 pieces. The force detectors (12) are arranged in a line in the long axis direction. Two lead wires (13) are wired to each force detection part (12), and one end of each lead wire (13) is connected to the terminal (15) gathered at one place in the terminal part (14). ing. Further, one force detection portion (12) is arranged in the major axis direction on the gauge (8) adhered to the outer side surface (6).
Further, like the gauge (7) adhered to the inner surface (5), the lead wire (13) and the terminal (15) are arranged.

As shown in FIGS. 5 and 6, the gauge (7) is provided on the back surface of the substrate (11) along the inner surface (5) of the ring portion (4) of the multi-axis force sensor (1). The side edge (16) of (11) is spaced a predetermined distance (A) from the side wall (17) of the ring portion (4),
It is placed so that it is parallel to (17). Also, the substrate (1
There is a gap between the two edges (18) and (19) of 1)
As shown in the figure, the center of the ring (4) and each edge (18) (19)
The two straight lines connecting the two make an angle (γ). further,
The substrate (11) is moved in the circumferential direction along the inner side surface (5) so as to maintain this angle (γ), and any one of the force detection units (1
If 2) matches the predetermined position, the other force detection unit (12) is automatically placed at the correct position. If the substrate (11) is adhered to the ring (4) after the position is set in this way, the force detection parts (12) can be attached easily and extremely accurately. Similarly, as shown in FIG. 7, the gauge (8) is arranged so that the side edge (16) of the substrate (11) extends along the outer surface (6) of the ring portion (4) and the side wall (17) of the ring portion (4). ) Is arranged so as to be parallel to the side wall (17) with a predetermined space (B), and the force detection part (12) is arranged and adhered so as to match a predetermined position.

The lead wire (13) and the terminal (15) can also be formed by photolithography. Therefore, it is preferable to simultaneously form the force detecting portion (12), the lead wire (13) and the terminal (15) by photolithography.

Further, the force detection unit (12) can be created as the same as a conventional strain gauge.

In the embodiment, it is shown that the multi-axis force sensor (1) has six or one force detection part (12) formed on the substrate (11), but if necessary, it is possible to use six It is possible to form an appropriate number or more of the force detection units (12).

〔The invention's effect〕

Since the present invention has the above-mentioned structure, the work of attaching the gauges (7) and (8) to the ring (4) can be easily completed in a short time, and the gauge (7)
(8) It is possible to easily make the sticking position of each force detection part (12) accurate without any error, and it is possible to obtain a highly accurate multi-axis force sensor (1). In addition, connect to the lead wire (13) leading to the external device by the terminal
Since the lead wire (13) of each force detection part (12) is gathered in (14), it can be easily performed, and further, there is an advantage that the disconnection of the lead wire (13) and the wiring mistake are unlikely to occur, It eliminates the need for skilled technology and shortens the work time.

[Brief description of drawings]

FIG. 1 is a perspective view showing the entire multi-axis force sensor of the present invention,
FIG. 2 is an enlarged perspective view of the ring portion, and FIGS. 3 and 4 are
FIG. 5 is a plan view showing the entire gauge, FIG. 5 is an enlarged front view of a ring portion, FIG. 6 is a partial cross-sectional side view taken along line AA of FIG. 5, and FIG. 7 is a portion of FIG. Cross-sectional side view, FIGS.
Fig. 11 shows a conventional multi-axis force sensor, and Fig. 8 shows
FIG. 9 is an enlarged plan view of the strain gauge, FIG. 9 is an enlarged front view of the state in which the gauge is attached to the ring portion, and FIG. 10 is a partial cross-sectional side view taken along the line BB of FIG. FIG. 10 is an overall perspective view of the same state as FIG. 9. (1) ... multi-axis force sensor, (2) (3) ... plate part, (4) ... ring part, (5) ... inner side surface, (6) ...
… Outside surface, (7) (8) …… Gauge, (11) …… Substrate, (1
2) …… force detection part, (13) …… lead wire, (14) …… terminal part,
(15) …… Terminal

Claims (1)

[Claims] 1. A pair of substantially parallel plate portions (2) (3).
And a plurality of rings (4) connecting both plate portions (2) and (3), and gauges (7) and (8) fixed to both inner and outer side surfaces (5) and (6) of each ring (4). In the multi-axis force sensor (1), of the gauges (7) and (8), the gauge (7) fixed to the inner surface (5) of the ring (4) is
One elongated flexible substrate (11) and the substrate (11)
An appropriate number of force detectors (12) arranged at appropriate intervals along the major axis direction thereof, and formed on the substrate (11),
And a lead wire (13) having one end connected to the force detection section (12) and the other end connected to a terminal (15) formed in the terminal section (14), respectively, and the force detection section (12) is the substrate (1
1) A flexible substrate which is precisely located on the major axis of 1), has its orientation aligned along the major axis, and has a gauge (8) fixed to the outer surface (6) which is an elongated slender substrate. (1
1), a force detection part (12) arranged on the substrate (11) along the long axis direction thereof, and one end of the force detection part (12) formed on the substrate (11). Is connected and the other end is connected to the terminal (1
A multi-axis force sensor comprising a lead wire (13) connected to 5).