JPH0652241B2 - UV Fluorescence Analyzer - Google Patents
UV Fluorescence AnalyzerInfo
- Publication number
- JPH0652241B2 JPH0652241B2 JP5725087A JP5725087A JPH0652241B2 JP H0652241 B2 JPH0652241 B2 JP H0652241B2 JP 5725087 A JP5725087 A JP 5725087A JP 5725087 A JP5725087 A JP 5725087A JP H0652241 B2 JPH0652241 B2 JP H0652241B2
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- Japan
- Prior art keywords
- fluorescence
- light
- detector
- fluorescent
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば大気中のSO2(硫黄酸化物)の濃度を
測定するために用いられる紫外線螢光分析法による紫外
線螢光分析計の改良技術に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultraviolet fluorescence analyzer by an ultraviolet fluorescence analysis method used for measuring the concentration of SO 2 (sulfur oxide) in the atmosphere, for example. It relates to improved technology.
上記の紫外線螢光分析法による紫外線螢光分析計とし
て、螢光室を挟んで互いに相対応する位置のセル内部
に、紫外線螢照射光源と該光源の光量をモニターするた
めの光源光量検出器とを配置すると共に、更に、前記光
源から光源光量検出器に至る光路に直交する方向で且つ
前記螢光室を挟んで互いに相対応する位置に、螢光検出
器と迷光減衰用の凹入部とを設けて成るものがある。As an ultraviolet fluorescence analyzer by the above-mentioned ultraviolet fluorescence analysis method, inside the cells at positions corresponding to each other across the fluorescence chamber, an ultraviolet fluorescence irradiation light source and a light source light quantity detector for monitoring the light quantity of the light source, With the arrangement, further, in a direction orthogonal to the optical path from the light source to the light source light amount detector and at positions corresponding to each other across the fluorescent chamber, a fluorescent detector and a recess for stray light attenuation. Some are provided.
かかる紫外線螢光分析計において、前記セル内部の螢光
室に試料ガスを導入すると共に、例えば215nm付近の波
長の紫外線を前記螢光室に照射させるように前記紫外線
照射光源を点灯させると、前記試料ガス中のSO2分子が
励起されると共に、該励起されたSO2分子が紫外線螢光
を放出して基底状態に戻ることを繰り返す。In such an ultraviolet fluorescence analyzer, while introducing a sample gas into the fluorescence chamber inside the cell, for example, when the ultraviolet irradiation light source is turned on so as to irradiate the fluorescence chamber with ultraviolet rays having a wavelength of around 215 nm, the The SO 2 molecules in the sample gas are excited, and the excited SO 2 molecules emit ultraviolet fluorescent light and return to the ground state repeatedly.
このとき放出される紫外線螢光の強度は、励起したSO2
分子の数、即ち螢光室内に存在するSO2の濃度に比例す
ることから、前記螢光検出器による紫外線螢光の検出結
果を基にして試料ガス中のSO2濃度を測定することがで
きるのである。The intensity of the ultraviolet fluorescence emitted at this time depends on the excited SO 2
Since it is proportional to the number of molecules, that is, the concentration of SO 2 existing in the fluorescence chamber, it is possible to measure the concentration of SO 2 in the sample gas based on the detection result of the ultraviolet fluorescence by the fluorescence detector. Of.
ところで、上記の紫外線螢光は、螢光室の全方位にわた
って発生されるにもかかわらず、従来の紫外線螢光分析
計においては、この内の極く一部の紫外線螢光を螢光検
出器によって検出しているに過ぎず、このため、前記螢
光検出器に入射される螢光信号量が小さくて、SO2濃度
の測定精度面で問題があった。By the way, the above-mentioned ultraviolet fluorescence is generated in all directions of the fluorescence chamber, but in the conventional ultraviolet fluorescence analyzer, only a part of the ultraviolet fluorescence is detected by the fluorescence detector. However, the amount of the fluorescence signal incident on the fluorescence detector is small, and there is a problem in terms of measurement accuracy of the SO 2 concentration.
また、単純にミラー等で集光しても、感度の増大よりも
迷光の増大の方が桁違いに大きいため、実用化されてい
なかった。Further, even if the light is simply collected by a mirror or the like, the increase in stray light is orders of magnitude greater than the increase in sensitivity, and thus it has not been put to practical use.
本発明は、簡単な構造の付加によって螢光検出器に対す
る螢光信号の入射量を増大させ、SO2濃度を高感度で測
定できるようにすることを目的としている。It is an object of the present invention to increase the amount of fluorescence signal incident on a fluorescence detector by adding a simple structure, and to enable SO 2 concentration to be measured with high sensitivity.
上記の目的を達成するために本発明は、冒頭に記載した
紫外線螢光法による紫外線螢光分析計において、前記螢
光室で発する螢光を螢光検出器に向けて反射する凹面鏡
を前記凹入部に設けた点に特徴がある。In order to achieve the above object, the present invention is an ultraviolet fluorescence analyzer by the ultraviolet fluorescence method described at the beginning, in which the concave mirror that reflects the fluorescence emitted in the fluorescence chamber toward the fluorescence detector is concave. The feature is that it is provided in the entrance.
上記の特徴構成によれば、全方位にわたって発生される
紫外線螢光のうち、螢光検出器とは反対側の迷光減衰用
の凹入部に向かう螢光が前記螢光検出器に向けて反射さ
れ、螢光検出器に入射される螢光信号量が増大する。According to the above characteristic configuration, among the ultraviolet fluorescent light generated in all directions, the fluorescent light toward the concave portion for stray light attenuation on the side opposite to the fluorescent light detector is reflected toward the fluorescent light detector. , The amount of fluorescent signal incident on the fluorescent detector increases.
以下、本発明の実施例を図面に基づいて説明すると、第
1図は紫外線螢光分析計の断面を示し、図において、1
は電着塗装の手段で内面が黒色に塗装されたアルミニウ
ム製の鋳造セルであって、両端にフランジ2a,2bが連設
されたストレートの筒状部2に、軸心P2が前記筒状部2
の軸心P1に直交する互いに同芯状の第1及び第2筒体
3,4を一体連設して、量軸心P1,P2の交点Pの周部に
螢光室5を形成すると共に、前記交点Pの近くに焦点を
位置させる集光レンズ6のホルダー7を、前記筒状部2
の一端側で且つ前記螢光室5の近傍に連設してある。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a cross section of an ultraviolet fluorescence analyzer.
Is a cast cell made of aluminum whose inner surface is painted black by means of electro-deposition coating, and a straight cylindrical portion 2 having flanges 2a and 2b continuously provided at both ends, and an axial center P 2 of which is the cylindrical shape. Part 2
The first and second cylindrical bodies 3 and 4 which are concentric with each other and are orthogonal to the axis P 1 of the are integrally connected, and the fluorescence chamber 5 is provided around the intersection P of the quantity axes P 1 and P 2. The holder 7 of the condenser lens 6 which is formed and has its focal point located near the intersection P is formed into the cylindrical portion 2
On one end side and in the vicinity of the fluorescent chamber 5.
8は例えば215nm付近の波長の紫外線を照射する紫外線
照射光源で、該光源8を保持するホルダー9を前記筒状
部2の一端側のフランジ2aに取り付けると共に、該ホル
ダー9にシンクロナスモータMで回転されるチョッパー
10を保持させてあり、而して、前記チョッパー10の回転
によって、前記紫外線照射光源8より発せられる215nm
付近の波長の紫外線を前記螢光室5に導入された試料ガ
スに断続的に照射させることで、検出器からの出力を交
流化し、検出器のバックグラウンド補正を行い得るよう
になっている。Reference numeral 8 denotes, for example, an ultraviolet irradiation light source that irradiates ultraviolet rays having a wavelength of about 215 nm. Rotated chopper
215 nm emitted from the ultraviolet irradiation light source 8 by the rotation of the chopper 10.
By intermittently irradiating the sample gas introduced into the fluorescence chamber 5 with ultraviolet light having a wavelength in the vicinity, the output from the detector can be converted into an alternating current and the background of the detector can be corrected.
11は前記光源8の光量をモニターするためのフォトダイ
オードまたは光電管から成る光源光量検出器で、該光源
光量検出器11のホルダー12が前記筒状部2の他端側のフ
ランジ2bに取り付けられている。Reference numeral 11 denotes a light source light amount detector composed of a photodiode or a photoelectric tube for monitoring the light amount of the light source 8. The holder 12 of the light source light amount detector 11 is attached to the flange 2b on the other end side of the tubular portion 2. There is.
13は螢光検出器で、そのホルダー14が前記第1筒体3の
フランジ3aに取り付けられ、かつ、前記螢光室5から該
螢光検出器13に至る径路の途中には、Oリング15によっ
て保持された色ガラスフィルター16と集光レンズ17とが
設けられており、前記螢光室5において、SO2分子から
放出された紫外線螢光の光量を検出して、その検出螢光
量を基にして前記試料ガス中のSO2濃度を測定する。Reference numeral 13 denotes a fluorescence detector, the holder 14 of which is attached to the flange 3a of the first cylindrical body 3, and an O-ring 15 is provided in the path from the fluorescence chamber 5 to the fluorescence detector 13. Is provided with a colored glass filter 16 and a condenser lens 17, and detects the amount of ultraviolet fluorescent light emitted from SO 2 molecules in the fluorescent chamber 5, and based on the detected fluorescent amount. Then, the SO 2 concentration in the sample gas is measured.
18は前記第2筒体4の開口を閉じる蓋体であって、該蓋
体13と第2筒体4とで迷光減衰用の凹入部Aが形成され
ており、かつ、該蓋体18には凹面鏡19が付設されてい
て、前記螢光室5において全方位にわたって発生される
螢光のうち、前記螢光検出器13とは反対側の迷光減衰用
の凹入部Aに向かう螢光を前記螢光検出器13に向けて反
射させ、該螢光検出器に入射される螢光信号量を増大さ
せるように図られている。Reference numeral 18 denotes a lid that closes the opening of the second tubular body 4. The lid 13 and the second tubular body 4 form a concave portion A for attenuating stray light, and the lid 18 has Is provided with a concave mirror 19, and among the fluorescence generated in all directions in the fluorescence chamber 5, the fluorescence directed toward the concave portion A for stray light attenuation on the side opposite to the fluorescence detector 13 is It is designed so as to increase the amount of fluorescent signal which is reflected toward the fluorescent detector 13 and is incident on the fluorescent detector.
20は前記螢光検出器13への迷光の侵入を防止するための
遮光体で、その遊端が前記紫外線照射光源8から照射さ
れて集光レンズ6を透過した光束を遮らないように、前
記螢光室5の螢光検出器13に対する螢光の入口部bに連
設してある。Reference numeral 20 denotes a light shield for preventing stray light from entering the fluorescence detector 13. The light shield 20 does not block the light beam emitted from the ultraviolet light irradiation source 8 and transmitted through the condenser lens 6 so as to prevent the light flux from being blocked. It is connected to the fluorescent light inlet 13b of the fluorescent chamber 5 to the fluorescent light detector 13.
21は前記螢光室5を加熱するヒーター、22は試料ガス導
入孔、23は試料ガスの導出孔である。Reference numeral 21 is a heater for heating the fluorescent chamber 5, 22 is a sample gas introduction hole, and 23 is a sample gas outlet hole.
尚、前記集光レンズ6と光源光量検出器11及び色ガラス
フィルター16と凹面鏡19を除き、前記各種ホルダー9,
12,14や蓋体18、遮光体20など、試料ガスの接する分析
計構成部品の全てを、前記セル1と同様に電着塗装の手
段などによって黒色に塗装されている。In addition, except for the condenser lens 6, the light source light amount detector 11, the colored glass filter 16 and the concave mirror 19, the various holders 9,
Similar to the cell 1, all of the analyzer components such as 12, 14 and the lid 18 and the light shield 20, which are in contact with the sample gas, are painted black by means of electrodeposition coating.
上記構成の紫外線螢光分析計によれば、光源スリットa
を通して前記紫外線照射光源8から紫外線が螢光室5に
向けて照射されると共に、その光源8の光量が前記検出
器11でモニターされて光源光量が校正される。According to the ultraviolet fluorescence analyzer having the above configuration, the light source slit a
Through the ultraviolet irradiation light source 8, ultraviolet rays are irradiated toward the fluorescence chamber 5, and the light amount of the light source 8 is monitored by the detector 11 to calibrate the light source light amount.
そして、前記紫外線の照射によって励起された試料ガス
中のSO2分子が基底状態に戻り、この際SO2分子から螢光
が発せられ、その螢光の一部が直接的に前記螢光検出器
13に入射されると共に、前記迷光減衰用の凹入部Aに向
かう螢光が凹面鏡19によって螢光検出器13側に反射さ
れ、即ち、螢光信号量が増大されて螢光検出器13に入射
されるもので、当該螢光検出器13において高感度でSO2
濃度が測定される。Then, the SO 2 molecule in the sample gas excited by the irradiation of the ultraviolet rays returns to the ground state, at this time, the fluorescence is emitted from the SO 2 molecule, and a part of the fluorescence is directly detected by the fluorescence detector.
The fluorescent light which is incident on the stray light 13 and is directed to the concave portion A for attenuating the stray light is reflected by the concave mirror 19 toward the fluorescent detector 13 side, that is, the amount of the fluorescent signal is increased and the fluorescent light is incident on the fluorescent detector 13. The fluorescent detector 13 is highly sensitive to SO 2
The concentration is measured.
ところで、上述のように、前記凹面鏡9によって螢光の
一部を螢光検出器13側に反射させると螢光信号量が増大
する一方、螢光検出器13への迷光の侵入量も増大する。By the way, as described above, when a part of the fluorescent light is reflected by the concave mirror 9 toward the fluorescent detector 13, the amount of fluorescent signal increases, while the amount of stray light entering the fluorescent detector 13 also increases. .
しかし、前記凹面鏡19の焦点距離と直径、更には、前記
集光レンズ6の光軸までの前記凹面鏡19からの距離等を
最適に設定して、前記迷光の増大比よりも大きな比で螢
光信号量を増大させるようにすることで、SO2濃度を高
精度で測定することができる。However, the focal length and diameter of the concave mirror 19 and further the distance from the concave mirror 19 to the optical axis of the condenser lens 6 are optimally set, and the fluorescence is increased at a ratio larger than the increase ratio of the stray light. The SO 2 concentration can be measured with high accuracy by increasing the signal amount.
因に、焦点距離が25mmで直径がΦ60mmの凹面鏡19を前記
迷光減衰用の凹入部Aに付設して、SO2濃度を測定した
とこ、第2図に示す結果が得られたのである。Incidentally, when a concave mirror 19 having a focal length of 25 mm and a diameter of Φ60 mm was attached to the recess A for stray light attenuation and the SO 2 concentration was measured, the results shown in FIG. 2 were obtained.
ここで、lは前記集光レンズ6に光軸から凹面鏡19まで
の寸法であって、実験では10mm単位でl寸法を変更して
いる。また、Zはセル1にゼロガスを導入したときの迷
光(バックグランド)を基にした螢光検出器13からの出
力であり、SはSO2成分を含む試料ガスを前記セル1に
導入したときの入射光を基にした螢光検出器13からの出
力であって、この実験に用いた紫外線螢光分析計におい
ては、前記凹面鏡19を集光レンズ6の光軸から40mm離す
ことが測定面で好ましい状態であることが判る。Here, 1 is the dimension of the condenser lens 6 from the optical axis to the concave mirror 19, and in the experiment, the dimension l is changed in units of 10 mm. Further, Z is an output from the fluorescence detector 13 based on stray light (background) when zero gas is introduced into the cell 1, and S is when sample gas containing SO 2 component is introduced into the cell 1. The output from the fluorescence detector 13 based on the incident light of, and in the ultraviolet fluorescence analyzer used in this experiment, it is possible to separate the concave mirror 19 from the optical axis of the condenser lens 6 by 40 mm. It can be seen that the condition is favorable.
ところで、この実験に用いた紫外線螢光分析計から前記
凹面鏡19を取り外して上記の実験と同一の条件下で行っ
たSO2濃度の測定結果を、上記凹面鏡19を付設したとき
の実験結果と比較してみると、凹面鏡19を付設しないと
きの前記ZとS−Z及び(S−Z)/Zの夫々を1.00と
すると、前記凹面鏡19を付設したときのそれは、Zが0.
88、S−Zが2.49、そして、(S−Z)/Zが2.83であ
り、凹面鏡19を付設することが如何に測定面で優れてい
るかが良く判る。By the way, the measurement result of SO 2 concentration performed under the same conditions as the above experiment by removing the concave mirror 19 from the ultraviolet fluorescence analyzer used in this experiment, was compared with the experimental result when the concave mirror 19 was attached. Then, assuming that each of Z and S-Z and (S-Z) / Z when the concave mirror 19 is not attached is 1.00, when the concave mirror 19 is attached, Z is 0.
88, S-Z is 2.49, and (S-Z) / Z is 2.83, and it is easy to see how the attachment of the concave mirror 19 is excellent in terms of measurement.
尚、前記Zが0.88と言う結果から見て、凹面鏡19を付設
することが迷光の入射量の減少に繋がっているかのよう
であるが、これは、前記紫外線照射光源8からの光が直
接的に迷光として螢光検出器13に侵入することを防止す
るために、従来は、前記螢光検出器13への螢光の入口部
で且つ螢光室5に対して光源8側にL字板状の遮光体を
設けていたのに対して、本発明の構成において、これを
筒状の遮光体20として前記螢光検出器13への螢光入口部
bに設けたことに起因するものである。From the result that Z is 0.88, it seems that the addition of the concave mirror 19 leads to the reduction of the incident amount of stray light. This is because the light from the ultraviolet irradiation light source 8 is directly In order to prevent the fluorescent detector 13 from entering the fluorescent detector 13 as stray light, conventionally, the L-shaped plate is the entrance of the fluorescent light to the fluorescent detector 13 and the light source 8 side with respect to the fluorescent chamber 5. In contrast to the conventional light-shielding member, it is provided in the configuration of the present invention as the cylindrical light-shielding member 20 at the fluorescence inlet portion b to the fluorescence detector 13. is there.
即ち、前記凹面鏡19を付設する前の階段において、従来
がL字状であった遮光体20を筒状のものに変更して、SO
2濃度の測定実験を行ったところ、前記Zの出力が減少
した結果を得ており、このときのZの出力に比べて凹面
鏡19を付設したときのZの出力の方が大きくなっている
ことから、上記の実験に用いる凹面鏡付のの紫外線螢光
分析計において、それの筒状遮光体20を従来通りのL字
板状の遮光体にすると、凹面鏡19を付設しない場合より
もZの出力が1.00以上になるものと推測されるのであ
る。That is, in the stairs before the concave mirror 19 is attached, the light shield 20 which has been L-shaped in the past is changed to a cylindrical one, and SO
2 When the concentration measurement experiment was conducted, the result that the output of Z decreased was obtained, and the output of Z when the concave mirror 19 was attached was larger than the output of Z at this time. Therefore, in the ultraviolet fluorescence analyzer with a concave mirror used in the above experiment, if the cylindrical light shield 20 is an L-shaped light shield as in the conventional case, the output of Z is larger than that without the concave mirror 19. Is supposed to be 1.00 or more.
しかし、凹面鏡19を付設すると、迷光の増大比よりも大
きな比で螢光信号量が増大されるので、遮光体20を筒状
にするかL字板状にするかはともかくとして、付設すべ
き前記凹面鏡19の焦点距離や直径等を勘案して、前記
(S−Z)/Zの出力値が最大になる付近に当該凹面鏡
19を設けることで、SO2濃度の測定精度を大幅に向上さ
せ得るのである。However, when the concave mirror 19 is attached, the amount of fluorescent signal is increased at a ratio larger than the increase ratio of stray light, so it should be attached regardless of whether the light shield 20 is cylindrical or L-shaped. Considering the focal length, diameter, etc. of the concave mirror 19, the concave mirror is located near the maximum output value of (S−Z) / Z.
By providing 19, it is possible to greatly improve the measurement accuracy of the SO 2 concentration.
以上説明したように本発明は、螢光室においてSO2分子
が発する螢光を螢光検出器に向けて反射する凹面鏡を、
前記螢光室を挟んで螢光検出器と相対応する位置にある
迷光減衰用の凹入部に設けたことで、全方位にわたって
発生される紫外線螢光のうち、従来は無駄であったとこ
ろの、螢光検出器とは反対側の迷光減衰用の凹入部に向
かう螢光をも前記螢光検出器に入射させることができる
ようになり、而して、該螢光検出器に入射される螢光信
号量が増大することによって、SO2濃度の測定を高精度
で行わせられるに至ったのである。As described above, the present invention is a concave mirror that reflects the fluorescence emitted by SO 2 molecules toward the fluorescence detector in the fluorescence chamber,
By providing in the recess for stray light attenuation at a position corresponding to the fluorescence detector across the fluorescence chamber, among the ultraviolet fluorescence generated in all directions, conventionally it was wasted. , Fluorescence directed toward the recess for stray light attenuation on the side opposite to the fluorescence detector can also be made incident on the fluorescence detector, and is then made incident on the fluorescence detector. The increase in the amount of fluorescent signal has made it possible to measure the SO 2 concentration with high accuracy.
第1図は本発明の一実施例を示す紫外線螢光分析計の断
面図、第2図は実験結果のグラフである。 1…セル、5…螢光室、8…紫外線照射光源、11…光源
光量検出器、13…螢光検出器、19…凹面鏡、A…迷光減
衰用の凹入部。FIG. 1 is a sectional view of an ultraviolet fluorescence analyzer showing an embodiment of the present invention, and FIG. 2 is a graph of experimental results. DESCRIPTION OF SYMBOLS 1 ... Cell, 5 ... Fluorescence chamber, 8 ... Ultraviolet irradiation light source, 11 ... Light source light intensity detector, 13 ... Fluorescence detector, 19 ... Concave mirror, A ... Recessed part for attenuating stray light.
Claims (1)
ル内部に、紫外線照射光源と該光源の光量をモニターす
るための光源光量検出器とを配置すると共に、更に、前
記光源から光源光量検出器に至る光路に直交する方向で
且つ前記螢光室を挟んで互いに相対応する位置に、螢光
検出器と迷光減衰用の凹入部とを設けて成る紫外線螢光
分析計において、前記螢光室で発する螢光を螢光検出器
に向けて反射する凹面鏡を前記凹入部に設けてあること
を特徴とする紫外線螢光分析計。1. An ultraviolet irradiation light source and a light source light amount detector for monitoring the light amount of the light source are arranged inside the cells at positions corresponding to each other across the fluorescent chamber, and further, from the light source to the light source. In a UV fluorescence analyzer comprising a fluorescence detector and a recessed portion for stray light attenuation, provided at positions corresponding to each other across the fluorescence chamber in a direction orthogonal to the optical path leading to the light amount detector, An ultraviolet fluorescence analyzer, characterized in that a concave mirror for reflecting fluorescence emitted from a fluorescence chamber toward a fluorescence detector is provided in the concave portion.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5725087A JPH0652241B2 (en) | 1987-03-11 | 1987-03-11 | UV Fluorescence Analyzer |
| EP19880103389 EP0281963B1 (en) | 1987-03-11 | 1988-03-04 | Ultraviolet fluorescent analyzer |
| DE19883881722 DE3881722T2 (en) | 1987-03-11 | 1988-03-04 | Analyzer for UV fluorescence. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5725087A JPH0652241B2 (en) | 1987-03-11 | 1987-03-11 | UV Fluorescence Analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63222242A JPS63222242A (en) | 1988-09-16 |
| JPH0652241B2 true JPH0652241B2 (en) | 1994-07-06 |
Family
ID=13050279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5725087A Expired - Lifetime JPH0652241B2 (en) | 1987-03-11 | 1987-03-11 | UV Fluorescence Analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0652241B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3301049B2 (en) * | 1995-05-29 | 2002-07-15 | 株式会社堀場製作所 | Gas analyzer using ultraviolet fluorescence analysis |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4260890A (en) | 1979-06-25 | 1981-04-07 | Monitor Labs, Incorporated | Fluorescent gas analyzer |
-
1987
- 1987-03-11 JP JP5725087A patent/JPH0652241B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4260890A (en) | 1979-06-25 | 1981-04-07 | Monitor Labs, Incorporated | Fluorescent gas analyzer |
| US4260890B1 (en) | 1979-06-25 | 1989-06-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63222242A (en) | 1988-09-16 |
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