JPH0653780U - Vacuum exhaust pipe - Google Patents
Vacuum exhaust pipeInfo
- Publication number
- JPH0653780U JPH0653780U JP9322592U JP9322592U JPH0653780U JP H0653780 U JPH0653780 U JP H0653780U JP 9322592 U JP9322592 U JP 9322592U JP 9322592 U JP9322592 U JP 9322592U JP H0653780 U JPH0653780 U JP H0653780U
- Authority
- JP
- Japan
- Prior art keywords
- turbo molecular
- vacuum
- molecular pump
- pump
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】
【目的】 真空チャンバーにターボ分子ポンプと油回転
ポンプを接続して構成した真空排気装置の、排気能力の
維持を図ることを目的としている。
【構成】 真空チャンバー１にターボ分子ポンプ５と油
回転ポンプ７を順次接続してなる真空排気配管２、３に
おいて、ターボ分子ポンプ５の上流および下流にバルブ
４、６が介設してあり、これらのバルブ間の配管８に、
不活性ガス導入系１０が接続してある。
(57) [Summary] [Purpose] The purpose is to maintain the evacuation capacity of a vacuum evacuation device configured by connecting a turbo molecular pump and an oil rotary pump to a vacuum chamber. [Structure] In vacuum exhaust pipes 2 and 3, which are formed by sequentially connecting a turbo molecular pump 5 and an oil rotary pump 7 to a vacuum chamber 1, valves 4 and 6 are provided upstream and downstream of the turbo molecular pump 5, respectively. In the pipe 8 between these valves,
An inert gas introduction system 10 is connected.
Description
この考案は真空チャンバーにターボ分子ポンプと油回転ポンプを順次接続して 、真空チャンバー内を10-7Torr以下の圧力の高真空領域および超高真空領域に排 気する真空排気配管に関する。The present invention relates to a vacuum exhaust pipe for connecting a turbo molecular pump and an oil rotary pump to a vacuum chamber in order and exhausting the inside of the vacuum chamber to a high vacuum region and an ultrahigh vacuum region at a pressure of 10 -7 Torr or less.
【０００１】[0001]
従来、真空チャンバーの内壁に水分が吸着すると、水分の吸着エネルギーが高 い為に、所定の到達圧力まで排気するのに要する時間が極端に長くなることが知 られている。水分の脱着を促進する為に、真空チャンバー壁を加熱しながら排気 することが行なわれている。 It has been conventionally known that when water is adsorbed on the inner wall of a vacuum chamber, the time required to exhaust to a predetermined ultimate pressure becomes extremely long because of high water adsorption energy. In order to accelerate the desorption of water, the vacuum chamber wall is heated and evacuated.
【０００２】 又、油回転ポンプを停止する際には、作動油の逆流を防ぐ為に、ポンプの上流 側配管に大気を導入している。Further, when the oil rotary pump is stopped, the atmosphere is introduced into the upstream pipe of the pump in order to prevent backflow of the hydraulic oil.
【０００３】 真空チャンバーにターボ分子ポンプと油回転ポンプを順次接続して構成した真 空排気配管では、油回転ポンプに導入した大気が、真空チャンバー内は勿論のこ と、ターボ分子ポンプ内に流入することは避ける必要があるので、前記ターボ分 子ポンプの上流および下流に夫々バルブを介設していた。In a vacuum exhaust pipe constructed by sequentially connecting a turbo molecular pump and an oil rotary pump to a vacuum chamber, the air introduced into the oil rotary pump flows into the turbo molecular pump as well as in the vacuum chamber. Since it is necessary to avoid doing so, valves were installed upstream and downstream of the turbo molecular pump.
【０００４】[0004]
前記のように、真空チャンバーに、ターボ分子ポンプと油回転ポンプを順次接 続した真空排気配管においては、排気装置を停止する場合、ターボ分子ポンプの 上流および下流側配管に介設したバルブを閉じ、油回転ポンプに大気を導入する 。従って、次の排気を開始する場合、ターボ分子ポンプ内が高真空状態で封じら れているので、油回転ポンプ側より低い圧力となっており、バルブを開けた際に 油回転ポンプ作動油の蒸発分子がターボ分子ポンプ側に流入（逆流）して、ター ボ分子ポンプ内を汚し、高真空以上の到達圧力までの排気を難しくする問題点が あった。 As described above, in the vacuum exhaust pipe in which the turbo molecular pump and the oil rotary pump are sequentially connected to the vacuum chamber, when stopping the exhaust device, close the valves installed in the upstream and downstream pipes of the turbo molecular pump. Introduce air into the oil rotary pump. Therefore, when the next evacuation is started, the turbo molecular pump is sealed in a high vacuum state, so the pressure is lower than on the oil rotary pump side, and when the valve is opened There is a problem that evaporated molecules flow into the turbo molecular pump side (backflow), pollute the inside of the turbo molecular pump, and make it difficult to exhaust up to the ultimate pressure above a high vacuum.
【０００５】[0005]
この考案は前記の問題点に鑑みてなされたもので、真空チャンバーにターボ分 子ポンプと油回転ポンプを接続して構成した真空排気装置の、排気能力の維持を 図ることを目的としている。 The present invention has been made in view of the above problems, and an object thereof is to maintain the exhaust capacity of a vacuum exhaust device configured by connecting a turbo molecular pump and an oil rotary pump to a vacuum chamber.
【０００６】 斯る目的を達成するこの考案の真空排気装置は、真空チャンバーにターボ分子 ポンプと油回転ポンプを順次接続してなる真空排気配管において、前記ターボ分 子ポンプの上流および下流にバルブが介設してあり、これらのバルブ間の配管に 不活性ガス導入系が接続してあることを特徴としている。In the vacuum exhaust apparatus of the present invention which achieves the above object, in a vacuum exhaust pipe in which a turbo molecular pump and an oil rotary pump are sequentially connected to a vacuum chamber, valves are provided upstream and downstream of the turbo molecular pump. It is characterized in that it is installed and an inert gas introduction system is connected to the pipe between these valves.
【０００７】 前記不活性ガス導入系には、アルゴンガス、窒素ガス等を用いることができる 。露点の低いものとする為に、純度９９．９９９％以上とすることが望ましい。Argon gas, nitrogen gas or the like can be used for the inert gas introduction system. In order to have a low dew point, it is desirable that the purity is 99.999% or higher.
【０００８】[0008]
この考案の真空排気配管では、排気装置を停止する場合、ターボ分子ポンプ内 に不活性ガスを封入することができる。然して封入圧力を、油回転ポンプ側の到 達圧力より高い圧力としておくことによって、ターボ分子ポンプと油回転ポンプ 間の流体の逆流を無くすることができる。 With the vacuum exhaust pipe of this invention, when the exhaust device is stopped, an inert gas can be filled in the turbo molecular pump. However, the backflow of the fluid between the turbo molecular pump and the oil rotary pump can be eliminated by making the filling pressure higher than the reached pressure on the oil rotary pump side.
【０００９】[0009]
以下この考案の実施例を図１に基づいて説明する。図１において１は真空チャ ンバーで主排気系となる真空排気配管２と、副排気系となる真空排気配管３が接 続してある。 An embodiment of this invention will be described below with reference to FIG. In FIG. 1, reference numeral 1 denotes a vacuum chamber, which is connected to a vacuum exhaust pipe 2 which serves as a main exhaust system and a vacuum exhaust pipe 3 which serves as an auxiliary exhaust system.
【００１０】 各真空排気配管２、３は、真空チャンバー１側から、バルブ４、ターボ分子ポ ンプ５、バルブ６、油回転ポンプ７を接続管８、８を介して順次接続して構成し てある。主排気系のターボ分子ポンプ５および油回転ポンプ７の排気速度は、副 排気系の夫々の排気速度より大きいものとしてある。油回転ポンプ７とバルブ６ の配管８には、リークバルブ９が設けてある。Each of the vacuum exhaust pipes 2 and 3 is configured by connecting a valve 4, a turbo molecular pump 5, a valve 6 and an oil rotary pump 7 in order from the vacuum chamber 1 side through connecting pipes 8 and 8. is there. The exhaust speeds of the turbo molecular pump 5 and the oil rotary pump 7 of the main exhaust system are assumed to be higher than the exhaust speeds of the auxiliary exhaust system. A leak valve 9 is provided in the oil rotary pump 7 and the pipe 8 of the valve 6.
【００１１】 前記の真空排気配管２、３のバルブ４とターボ分子ポンプ５の配管８にはガス 導入系１０が接続してある。ガス導入系１０は、ガスボンベ１１、導入管１２お よびバルブ１３で構成されたもので、導入管１２には、圧力調整弁、流量系など が介設されるが図示は省略した。ガスボンベ１１は実施例の場合、純度９９．９ ９９％のアルゴンガスが封入されたものを使用した。尚、図中１４は圧力ゲージ である。A gas introduction system 10 is connected to the valves 4 of the vacuum exhaust pipes 2 and 3 and the pipe 8 of the turbo molecular pump 5. The gas introduction system 10 is composed of a gas cylinder 11, an introduction pipe 12 and a valve 13. The introduction pipe 12 is provided with a pressure regulating valve, a flow rate system and the like, but they are not shown. In the case of the example, the gas cylinder 11 used was one filled with argon gas having a purity of 99.999%. Reference numeral 14 in the figure is a pressure gauge.
【００１２】 上記実施例の真空排気配管のポンプを停止する場合には、バルブ４、６を閉じ て、バルブ４、６間にガス導入系１０のバルブ１３を開けて、不活性ガスをター ボ分子ポンプ５およびその上流並びに下流の配管８内に導入すると共に、油回転 ポンプ７の配管８内は、リークバルブ９を開けて大気を導入するようにすること ができる。When the pump of the vacuum exhaust pipe of the above-mentioned embodiment is stopped, the valves 4 and 6 are closed and the valve 13 of the gas introduction system 10 is opened between the valves 4 and 6 to turn off the inert gas. The gas can be introduced into the molecular pump 5 and the pipes 8 upstream and downstream thereof, and in the pipe 8 of the oil rotary pump 7, a leak valve 9 can be opened to introduce the atmosphere.
【００１３】 然して、次に真空チャンバー１の真空排気を行う場合、先ず副排気系の真空排 気配管３側で排気し、次いで主排気系の真空排気配管２で排気する。However, when the vacuum chamber 1 is evacuated next, first, the vacuum exhaust pipe 3 of the auxiliary exhaust system is exhausted, and then the vacuum exhaust pipe 2 of the main exhaust system is exhausted.
【００１４】 各真空排気配管を動作させる場合、リークバルブ９を閉じて、油回転ポンプ７ を運転し、油回転ポンプ７とバルブ６の間の配管８内を１０0 〜１０-1Torr程度 まで排気した後、バルブ６を開け、次いでターボ分子ポンプ５を運転した後、バ ルブ４を開けるようにする。副排気系から主排気系への切替えは、真空チャンバ ー１内の圧力が、主排気系のターボ分子ポンプ５内の圧力より高い状態で行う。When operating each vacuum exhaust pipe, the leak valve 9 is closed, the oil rotary pump 7 is operated, and the inside of the pipe 8 between the oil rotary pump 7 and the valve 6 is adjusted to about 10 0 to 10 -1 Torr. After exhausting the gas, the valve 6 is opened, the turbo molecular pump 5 is operated, and then the valve 4 is opened. Switching from the auxiliary exhaust system to the main exhaust system is performed in a state where the pressure in the vacuum chamber 1 is higher than the pressure in the turbo molecular pump 5 of the main exhaust system.
【００１５】 このようにすることによって、バルブ６、４（特に６）の開操作の際には、上 流側、即ちバルブ６の開の際はターボ分子ポンプ５側、バルブ４の開の際は真空 チャンバー１側が高い圧力になり、配管８内で流体の逆流を無くすることができ る。従って、油回転ポンプ７の作動油の蒸発分子がバルブ６を越えてターボ分子 ポンプ５内に逆流して汚染するのを防止することができる。By doing so, when the valves 6 and 4 (particularly 6) are opened, the upstream side, that is, when the valve 6 is opened, the turbo molecular pump 5 side is opened, and when the valve 4 is opened. Since the vacuum chamber 1 side has a high pressure, it is possible to eliminate the backflow of the fluid in the pipe 8. Therefore, it is possible to prevent the vaporized molecules of the hydraulic oil of the oil rotary pump 7 from passing through the valve 6 and flowing back into the turbo molecular pump 5 to be contaminated.
【００１６】 前記バルブ４、６間のターボ分子ポンプ５へ導入する不活性ガスは、１０0 〜 １０-1Torrより高い圧力で大気圧以下の圧力範囲で導入すれば良いことになる。The inert gas introduced into the turbo molecular pump 5 between the valve 4 and 6, it is sufficient to introduce at pressures ranging atmospheric at pressures above 10 0 ~ 10 -1 Torr.
【００１７】 尚、真空チャンバー１を大気に開放する場合、チャンバー内壁に水分子が吸着 すると、高真空領域或いは超高真空領域に排気する時間が長時間になることは前 記のとうりである。従って、真空チャンバー１を開放する際には、真空チャンバ ー１内に不活性ガスを導入すると共に、大気が流入しない手段（例えば開口部を 不活性ガスによるガスカーテンで遮断する）を付加するのが望ましい。When the vacuum chamber 1 is opened to the atmosphere, if water molecules are adsorbed on the inner wall of the chamber, it takes a long time to evacuate to a high vacuum region or an ultrahigh vacuum region, as described above. . Therefore, when the vacuum chamber 1 is opened, an inert gas is introduced into the vacuum chamber 1 and a means for preventing the inflow of the atmosphere (for example, the opening is blocked by a gas curtain of the inert gas) is added. Is desirable.
【００１８】[0018]
以上に説明したようにこの考案によれば、真空排気配管内に設置したターボ分 子ポンプが大気中の水分子や、油回転ポンプから蒸発する油分子に汚染されない ようにしたので、真空チャンバー側を高真空領域あるいは超高真空領域へ、繰り 返し、短時間で排気可能にできる効果がある。 As described above, according to the present invention, the turbo molecular pump installed in the vacuum exhaust pipe is prevented from being contaminated by water molecules in the atmosphere or oil molecules evaporated from the oil rotary pump. Is repeated in the high-vacuum region or the ultra-high-vacuum region, and the gas can be exhausted in a short time.
【図１】この考案の実施例の系統図である。FIG. 1 is a system diagram of an embodiment of the present invention.
１ 真空チャンバー ２、３ 真空排気配管 ４、６、１３ バルブ ５ ターボ分子ポンプ ７ 油回転ポンプ ８ 配管 ９ リークバルブ １０ ガス導入系 １１ ガスボンベ １２ 導入管 １４ 圧力ゲージ 1 Vacuum chamber 2, 3 Vacuum exhaust pipe 4, 6, 13 Valve 5 Turbo molecular pump 7 Oil rotary pump 8 Pipe 9 Leak valve 10 Gas introduction system 11 Gas cylinder 12 Introduction pipe 14 Pressure gauge
Claims (1)
油回転ポンプを順次接続してなる真空排気配管におい
て、前記ターボ分子ポンプの上流および下流にバルブが
介設してあり、これらのバルブ間の配管に、不活性ガス
導入系が接続してあることを特徴とした真空排気配管。1. A vacuum evacuation pipe in which a turbo molecular pump and an oil rotary pump are sequentially connected to a vacuum chamber, and valves are provided upstream and downstream of the turbo molecular pump, and a pipe between these valves is provided. The vacuum exhaust pipe is characterized in that an inert gas introduction system is connected to the.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9322592U JPH0653780U (en) | 1992-12-25 | 1992-12-25 | Vacuum exhaust pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9322592U JPH0653780U (en) | 1992-12-25 | 1992-12-25 | Vacuum exhaust pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0653780U true JPH0653780U (en) | 1994-07-22 |
Family
ID=14076610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9322592U Pending JPH0653780U (en) | 1992-12-25 | 1992-12-25 | Vacuum exhaust pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0653780U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9824883B2 (en) | 2013-12-27 | 2017-11-21 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium |
-
1992
- 1992-12-25 JP JP9322592U patent/JPH0653780U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9824883B2 (en) | 2013-12-27 | 2017-11-21 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium |
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