JPH0654626B2 - Electrode and manufacturing method thereof - Google Patents
Electrode and manufacturing method thereofInfo
- Publication number
- JPH0654626B2 JPH0654626B2 JP62277124A JP27712487A JPH0654626B2 JP H0654626 B2 JPH0654626 B2 JP H0654626B2 JP 62277124 A JP62277124 A JP 62277124A JP 27712487 A JP27712487 A JP 27712487A JP H0654626 B2 JPH0654626 B2 JP H0654626B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- electrode
- infiltrated
- base member
- tungsten alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 50
- 229910052802 copper Inorganic materials 0.000 claims description 45
- 239000010949 copper Substances 0.000 claims description 45
- 229910001080 W alloy Inorganic materials 0.000 claims description 24
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 claims description 24
- 238000003466 welding Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 238000005304 joining Methods 0.000 description 16
- 230000008595 infiltration Effects 0.000 description 7
- 238000001764 infiltration Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000005219 brazing Methods 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000010273 cold forging Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
- H01H11/04—Apparatus or processes specially adapted for the manufacture of electric switches of switch contacts
- H01H11/041—Apparatus or processes specially adapted for the manufacture of electric switches of switch contacts by bonding of a contact marking face to a contact body portion
- H01H11/045—Apparatus or processes specially adapted for the manufacture of electric switches of switch contacts by bonding of a contact marking face to a contact body portion with the help of an intermediate layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Switches (AREA)
- Contacts (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ガス開閉器の電力用開閉装置や真空開閉器等
で使用される電極とその製造方法に関する。TECHNICAL FIELD The present invention relates to an electrode used in a power switchgear for a gas switch, a vacuum switch, and the like, and a manufacturing method thereof.
[従来の技術〕 電力用開閉装置や真空開閉器等で使用する電極は、第4
図に示すように、通電用台部材3の先端に、銅タングス
テン合金接点1がろう付け接合された構造をしていた。
しかし、最近では第3図に示すように、銅タングステン
合金接点1を銅の溶浸によって形成し、さらに溶浸銅残
部2を通電用台部材3と直接接合した電極が使用されて
きている。[Prior Art] The electrodes used in power switchgear, vacuum switch, etc.
As shown in the figure, the copper-tungsten alloy contact 1 was brazed to the tip of the current-carrying base member 3.
However, recently, as shown in FIG. 3, an electrode has been used in which the copper-tungsten alloy contact 1 is formed by infiltration of copper, and the infiltration copper residue 2 is directly joined to the energization base member 3.
第4図に示すような場合、接合をろう接で行ったもの
は、銅タングステン合金と他部材とのろう接が難しく接
合強度が安定していない。また、低融点、低電導率のろ
う材が接合に介在しているため、短絡電流遮断時などの
苛酷な熱衝撃により、ろう接部分より銅タングステン合
金接点が脱落することもあった。そのため、電力の供給
系統に大事故が発生する危険性があった。In the case shown in FIG. 4, when the joining is performed by brazing, it is difficult to braze the copper-tungsten alloy and other members, and the joining strength is not stable. In addition, since a brazing material having a low melting point and a low electric conductivity is present in the joint, the copper-tungsten alloy contact may sometimes drop from the brazing portion due to a severe thermal shock when the short-circuit current is cut off. Therefore, there is a risk that a major accident may occur in the power supply system.
また、ろう材を使用しないで直接接合したものは、接合
時の加熱で通電用台部材が焼鈍され機械的強度が低下
し、さらに銅タングステン合金接点が酸化しやすいの
で、接合部の加熱を最小限に留めなければならない。こ
のため、直接接合方法として、従来摩擦圧接や電子ビー
ム溶接を行っていた。しかし、これらの方法で接合して
も銅タングステン合金接点中のタングステン自体が酸化
しやすく、高融点金属であるために接合部で合金を造り
にくいうえ、また前記接点と通電用台部材の硬度差が大
きいと直接接合しにくいこともあって安定した十分な接
合強度が得られなかった。In the case of directly joining without using a brazing material, the heating of the energizing base member is annealed by the heating at the time of joining, the mechanical strength is lowered, and the copper-tungsten alloy contact is easily oxidized, so the heating of the joint is minimized. You have to keep it to the limit. Therefore, as a direct joining method, friction welding and electron beam welding have been conventionally performed. However, even if they are joined by these methods, the tungsten itself in the copper-tungsten alloy contact is easily oxidized, and since it is a refractory metal, it is difficult to form an alloy at the joint, and the hardness difference between the contact and the energization base member is also high. If it is large, it may be difficult to bond directly, and stable and sufficient bonding strength cannot be obtained.
このため、高温でも安定な接合強度を有し、銅タングス
テン合金接点の酸化を防止するものとして、最近では第
3図に示すような銅タングステン合金接点1を銅の溶浸
によって形成し、この接点に溶着した溶浸銅残部2を通
電用台部材3と直接接合した電極が使用されてきてい
る。Therefore, in order to prevent the oxidation of the copper-tungsten alloy contact, the copper-tungsten alloy contact 1 shown in FIG. An electrode has been used in which the infiltrated copper residue 2 welded to the above is directly joined to the current-carrying base member 3.
しかし、前記のような溶浸銅残部2を介して前記接点1
と通電用台部材3を接合して電極を製造しても、溶浸銅
残部には鋳造巣などの空孔が多数存在しているため、銅
タングステン合金接点と通電用台部材との接合強度が低
く、曲げ等に対する機械的強度も低く通電性に劣る欠点
があった。However, the contact 1 is formed through the infiltrated copper residue 2 as described above.
Even if an electrode is manufactured by joining the energization base member 3 with the energization base member 3, since there are many holes such as casting holes in the remaining infiltrated copper, the joining strength between the copper-tungsten alloy contact and the energization base member is high. And the mechanical strength against bending and the like is low and the electrical conductivity is poor.
[問題点を解決するための手段〕 前記問題点を解決するためには、前記溶浸銅残部を、通
電用台部材と接合する前に不活性ガス雰囲気中でヒータ
ーや電子ビーム等で加熱溶融し脱ガス処理し、冷間鍛造
等の硬化処理を行い空孔を除去するのが最適であること
を本発明者は見出した。[Means for Solving Problems] In order to solve the above problems, the remaining infiltrated copper is heated and melted by a heater, an electron beam, or the like in an inert gas atmosphere before being joined to the energization base member. The present inventor has found that it is optimal to remove the voids by performing a degassing treatment and a hardening treatment such as cold forging.
すなわち、本発明の電極は、タングステンスケルトンに
銅を溶浸して得た銅タングステン合金接点の端面に溶浸
銅残部を介して接合してなる電極において、前記溶浸動
残部が脱ガスおよび硬化銅からなることを特徴とする。That is, the electrode of the present invention is an electrode formed by joining the end surface of a copper-tungsten alloy contact obtained by infiltrating copper to a tungsten skeleton via the remainder of the infiltration copper, wherein the remainder of the infiltration movement is degassed and hardened copper. It is characterized by consisting of.
本発明の電極は、溶浸時の銅残部を不活性ガス雰囲気中
で溶融脱ガスし、鍛造硬化処理したのち通電用台部材先
端面と圧接、電子ビーム溶接、摩擦圧接の中の何れかの
接合手段によって接合することによって得られる。The electrode of the present invention, the copper residue at the time of infiltration is melted and degassed in an inert gas atmosphere, and after forging and hardening treatment, pressure contact with the tip surface of the current-carrying base member, electron beam welding, or friction welding. It is obtained by joining with joining means.
不活性ガスとしては、Arガス、窒素ガス等の銅タング
ステン合金接点と通電用台部材、とくに溶浸銅に対して
不活性雰囲気を形成するガスが使用できる。As the inert gas, a gas such as Ar gas or nitrogen gas that forms an inert atmosphere with respect to the copper-tungsten alloy contact and the current-carrying base member, particularly infiltrated copper can be used.
そして、前記処理をした溶浸銅残部と通電用台部材を接
合するのに、不活性ガス雰囲気中での加熱圧接によれ
ば、接合強度も十分で安価に製造できる。摩擦圧接によ
れば、更に大きな接合強度が得られる。特に通電用台部
材が銅または銅合金で製造されている場合、銅同志又は
銅と銅合金との接合となり接合強度が高く高温でも安定
な接合強度が得られる。Then, by heating and pressure welding in an inert gas atmosphere to bond the remaining infiltrated copper and the current-carrying base member that have been treated as described above, the bonding strength is sufficient and the manufacturing can be performed at low cost. By friction welding, even greater joining strength can be obtained. In particular, when the energization base member is made of copper or a copper alloy, the copper or copper and the copper alloy are bonded to each other, and the bonding strength is high and stable bonding strength can be obtained even at high temperature.
また、前記処理をした溶浸銅残部と通電用台部材を接合
するのに電子ビームやレーザーを用いて溶接すれば容易
に強固な接合が得られる。更に、溶浸銅残部を多く生成
させるようにし、本発明の処理を施せば、これを直接通
電用台部材として使用でき、従来のような接点部と通電
用台部材との接合の工程が不用になり、しかも、電極と
しての強度が安定したものができる。Further, if the remaining infiltrated copper thus treated and the current-carrying base member are welded together by using an electron beam or a laser, a strong joint can be easily obtained. Furthermore, if a large amount of infiltrated copper residue is generated and the treatment of the present invention is applied, this can be directly used as a current-carrying base member, and the conventional process of joining the contact portion and the current-carrying base member is unnecessary. In addition, a stable electrode strength can be obtained.
前記の方法で作成した電極は、銅タングステン合金接点
と通電用台部材との接合の継ぎ物である溶浸銅残部に
は、空孔がなく、また接合強度が極めて大きく、機械的
強度も向上し、通電性も良くなる。The electrode created by the above method is a joint of the copper-tungsten alloy contact and the current-carrying base member, and has no pores in the remaining infiltrated copper, and the bonding strength is extremely large, and the mechanical strength is also improved. Also, the electrical conductivity is improved.
以下、実施例により、本発明を具体的に説明する。Hereinafter, the present invention will be specifically described with reference to examples.
実施例1 タングステン粉末を圧力2t/cm2、形状φ12mm×6mm
に気圧成形し、1300℃の水素炉で焼結してタングステン
のスケルトンを作製した。そして前記スケルトンをφ12
mm×40mmの穴を明けたカーボンボックスに入れ、その上
に銅の切断層を詰めて前記の水素炉で銅溶浸を行い、銅
タングステン合金を作製した。このとき、カーボン治具
を用いて溶浸銅残部が銅タングステン合金の片面に残る
ように工夫した。そして溶浸銅残部と一体となった前記
合金を1150℃の窒素炉に入れて溶浸銅残部を再溶融し、
脱ガス処理を行なった。それから溶浸銅残部を冷間鍛造
し、機械加工してφ10mm×30mm(ここでは銅タングステ
ン合金厚さは5mm)の形状に仕上げた。そして、この接
点部材の組成及び物性値を測定した。その結果を表1に
示す。Example 1 Tungsten powder with a pressure of 2 t / cm 2 and a shape of φ12 mm × 6 mm
A tungsten skeleton was produced by pressure forming into a glass and sintering it in a hydrogen furnace at 1300 ° C. And the skeleton is φ12
It was put in a carbon box having a hole of mm × 40 mm, a copper cutting layer was filled on the box, and copper infiltration was performed in the hydrogen furnace to produce a copper-tungsten alloy. At this time, a carbon jig was used so that the remaining infiltrated copper was left on one surface of the copper-tungsten alloy. Then, the alloy integrated with the remaining infiltrated copper is put into a nitrogen furnace at 1150 ° C. to remelt the remaining infiltrated copper,
A degassing process was performed. Then, the remaining infiltrated copper was cold forged and machined to a shape of φ10 mm × 30 mm (here, copper-tungsten alloy thickness is 5 mm). Then, the composition and physical property values of this contact member were measured. The results are shown in Table 1.
次に、前記試料とφ30mm× 100mmの銅棒を窒素ガス雰囲
気中で加熱圧接、及び摩擦圧接と電子ビーム溶接により
接合した。そして、この接合部の硬度を測定したが、前
記3接合方法のいずれもHRF−70以上あった。溶浸銅
残部を処理しない従来の方法のものは、HRF−25程度
であるのに対して、4倍以上硬度が高くなった。ロック
ウェルの60kgの荷重をかけ鋼球圧子によっても接合面で
剥がれや亀裂が生じなかった。また、接合部分の断面写
真を示す第2図によると、溶浸銅残部2には空孔がな
く、また接点部材1と溶浸銅残部2、及び溶浸銅残部2
と銅棒(通電用台部材3)が強固に接合していることが
わかる。以上のように接合部において、機械的強度が向
上していることがわかる。 Next, the sample and a copper rod of φ30 mm × 100 mm were joined by heating pressure welding, friction welding and electron beam welding in a nitrogen gas atmosphere. Then, the hardness of this joint portion was measured, and it was HRF-70 or higher in all of the above three joining methods. The conventional method that does not process the remaining infiltrated copper has a hardness of about HRF-25, whereas the hardness is four times or more higher. Even if a 60 kg load of Rockwell was applied and the steel ball indenter did not peel or crack at the joint surface. Further, according to FIG. 2 showing a cross-sectional photograph of the joined portion, the infiltrated copper residual portion 2 has no holes, and the contact member 1, the infiltrated copper residual portion 2, and the infiltrated copper residual portion 2
It can be seen that and the copper rod (the energization base member 3) are firmly joined. As described above, it can be seen that the mechanical strength is improved at the joint.
実施例2 実施例1と同様にして得た厚さ5mmの銅部材が一体形成
されたφ3mm×1mmの銅タングステン合金接点の銅部材
とφ3mm×4mmの銅製の通電用台部材とを、窒素ガス雰
囲気中で加熱圧接したもの、及び摩擦圧接したものと電
子ビーム溶接した電極を作製した。比較試料として、従
来から使用されている銅溶浸によって形成された銅タン
グステン合金接点(φ3mm×1mm)の溶浸銅残部を無処
理のまま銅製の通電用台部材に、窒素ガス雰囲気中で加
熱圧接したもの、及び摩擦圧接したものと電子ビーム溶
接した電極を前記と同形状に作製した。さらに第4図に
示すようなφ3mm×1mmの銅タングステン合金接点をφ
3mm×4mmの銅棒にろう接した従来の電極を作成してA
C 220V、3000Aの半サイクルアークを発生させて耐久
試験を行なった。試料はそれぞれ10個試験した。その結
果を表2に示す。Example 2 A copper member of a φ3 mm × 1 mm copper-tungsten alloy contact integrally formed with a copper member having a thickness of 5 mm obtained in the same manner as in Example 1 and a copper current-carrying member of φ3 mm × 4 mm were used as nitrogen gas. Electrodes that were heated and pressure welded in an atmosphere and friction and pressure welded were electron beam welded. As a comparative sample, the copper-tungsten alloy contact (φ3mm × 1mm), which has been used by conventional copper infiltration, is heated in a nitrogen gas atmosphere on a copper current-carrying base member without treatment. Electrodes welded by pressure welding and friction welding were produced in the same shape as above. In addition, make a φ3 mm × 1 mm copper-tungsten alloy contact as shown in Fig. 4
Create a conventional electrode brazed to a 3mm x 4mm copper rod and
A durability test was conducted by generating a half-cycle arc of C 220V, 3000A. Ten samples were tested each. The results are shown in Table 2.
表2から、溶浸銅残部を無処理のまま接点に接合して作
成した従来の電極より寿命が約25〜40数%以上延び、接
点をろう接したものと比較すると約2倍以上延びたこと
がわかった。本発明の製造方法を用いた電極は高温でも
安定な接合強度があることがわかった。更に本発明の電
極は、銅部材の電気伝導率を測定してみると溶浸銅残部
を処理しないで形成した従来の電極より良くなっている
ことがわかった。From Table 2, the service life is extended by about 25-40% by more than the conventional electrode made by joining the remaining infiltrated copper to the contact without treatment, and it is extended by more than about 2 times compared with the one in which the contact is brazed. I understood it. It was found that the electrode using the manufacturing method of the present invention has stable bonding strength even at high temperature. Furthermore, when the electric conductivity of the copper member was measured, it was found that the electrode of the present invention was better than the conventional electrode formed without processing the remainder of the infiltrated copper.
〔発明の効果〕 本発明の電極を用いると、高温でも銅タングステン合金
接点の脱落が無く寿命が延び、接合部での機械的強度や
銅部材の通電性が向上する。 [Effects of the Invention] When the electrode of the present invention is used, the copper-tungsten alloy contact does not fall off even at high temperatures, the life is extended, and the mechanical strength at the joint and the electrical conductivity of the copper member are improved.
更に、本発明の電極の製造方法を用いると銅タングステ
ン合金接点を銅部材を介して通電用台部材に強固に接合
することができ接合時の加熱による通電用台部材の機械
的強度低下が抑制される。Furthermore, when the electrode manufacturing method of the present invention is used, the copper-tungsten alloy contact can be firmly joined to the energizing base member via the copper member, and the mechanical strength of the energizing base member is prevented from lowering due to heating during the joining. To be done.
第1図は、本発明の電極の断面図である。第2図は、本
発明の銅タングステン合金接点に一体形成された銅部材
と通電用台部材の接合部の断面組織写真を示す。第3図
は、溶浸銅残部を無処理のまま、通電用台部材と接合し
た従来の電極の断而図を示す。第4図は、ろう接により
形成された従来の電極の断面図を示す。図中、 1……銅タングステン合金接点、2……銅部材、 3……通電用台部材、4……接合面FIG. 1 is a sectional view of an electrode of the present invention. FIG. 2 shows a photograph of a cross-sectional structure of a joint portion between a copper member and a current-carrying base member integrally formed with the copper-tungsten alloy contact of the present invention. FIG. 3 shows a metaphysical view of a conventional electrode in which the remaining infiltrated copper is left untreated and joined to a current carrying base member. FIG. 4 shows a sectional view of a conventional electrode formed by brazing. In the figure, 1 ... Copper-tungsten alloy contact, 2 ... Copper member, 3 ... Conducting base member, 4 ... Joining surface
───────────────────────────────────────────────────── フロントページの続き (72)発明者 本田 卓実 福岡県福岡市南区清水2丁目20番31号 日 本タングステン株式会社内 (56)参考文献 特公 昭44−14450(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takami Honda Nihon Tungsten Co., Ltd. 2-2031 Shimizu, Minami-ku, Fukuoka City, Fukuoka Prefecture (56) References Japanese Patent Publication No. 44-14450 (JP, B1)
Claims (2)
た銅タングステン合金接点の端面に溶浸銅残部を介して
接合してなる電極において、前記溶浸銅残部が脱ガスお
よび硬化銅からなる電極。1. An electrode comprising a tungsten-skeleton infiltrated with copper and bonded to an end face of a copper-tungsten alloy contact through the remainder of the infiltrated copper, wherein the remainder of the infiltrated copper is degassed and hardened copper. .
た銅タングステン合金接点の端面に固着している溶浸銅
残部を通電用台部材先端面と接合する電極の製造方法に
おいて、 前記溶浸銅残部を不活性ガス雰囲気中で溶融脱ガスし、
鍛造硬化処理したのち、圧接、電子ビーム溶接、摩擦圧
接の中の何れかの接合手段によって通電用台部材先端面
と接合する電極の製造方法。2. A method for producing an electrode, wherein the remainder of the infiltrated copper adhered to the end surface of a copper-tungsten alloy contact obtained by infiltrating copper into a tungsten skeleton is joined to the leading end surface of a current-carrying base member. The rest is melted and degassed in an inert gas atmosphere,
A method for producing an electrode, which is forged and hardened, and then joined to a leading end surface of a current-carrying base member by any one of a pressure welding method, an electron beam welding method, and a friction welding method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62277124A JPH0654626B2 (en) | 1987-10-31 | 1987-10-31 | Electrode and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62277124A JPH0654626B2 (en) | 1987-10-31 | 1987-10-31 | Electrode and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01120718A JPH01120718A (en) | 1989-05-12 |
| JPH0654626B2 true JPH0654626B2 (en) | 1994-07-20 |
Family
ID=17579125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62277124A Expired - Fee Related JPH0654626B2 (en) | 1987-10-31 | 1987-10-31 | Electrode and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0654626B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105057873A (en) * | 2015-07-20 | 2015-11-18 | 沈阳金昌蓝宇新材料股份有限公司 | Method for preparing CuW/Cu/CuCrZr integrated contact through electron beam welding |
| CN105057874A (en) * | 2015-07-20 | 2015-11-18 | 沈阳金昌蓝宇新材料股份有限公司 | Method for preparing CuW/Cu/40CrNiMoA integrated contact through electron beam welding |
| CN111508734B (en) * | 2020-03-26 | 2022-02-08 | 陕西斯瑞新材料股份有限公司 | Method for producing copper-tungsten contact by electron beam infiltration |
| JP7634493B2 (en) * | 2022-03-03 | 2025-02-21 | 日本碍子株式会社 | Power supply member and wafer placement table |
-
1987
- 1987-10-31 JP JP62277124A patent/JPH0654626B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01120718A (en) | 1989-05-12 |
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