JPH0654814B2 - Method for manufacturing solar cell device - Google Patents

Description

The present invention relates to a method for manufacturing a solar cell device in which a plurality of solar cell modules are juxtaposed.

(B) Conventional technology A solar cell device in which a plurality of solar cell modules capable of generating electricity by themselves are juxtaposed and adjacent modules are electrically connected in series and / or in parallel to obtain an arbitrary electric capacity. Is, for example, JP-A-57-212280
It is already known as disclosed in the publication. According to the solar cell device disclosed in such publication, as shown in FIG. 12, the adjacent solar cell modules (30A) (30
B) are electrically connected to each other by the substrate (3) supporting the power generation film (31).
In the opposite directions of the corresponding side surface of 2), a pair of electrodes (34) (35) constituting the power generation film (31) together with the semiconductor photoactive layer (33) are extended, and the solar cell module (30) of each other. Elastic metal pieces (3
We are trying to realize 6) by interposing it against its elasticity.

Therefore, according to such a structure, the electrodes (34) (35) must be extended on the opposite sides of the substrate (32), respectively, and the electrical connection between the individual solar cell modules (30A) (30B) must be established. Although it can be performed simply and reliably, its practical application is difficult.

On the other hand, the solar cell disclosed in Japanese Unexamined Patent Publication No. 56-158486 has a structure in which a solar cell wafer is incorporated into a quadrilateral substrate to form a solar cell module, and a terminal portion is provided in the square, so that the adjacent solar cells are connected to each other. The electrical connection between the battery modules is achieved by coupling the terminal portions. This structure has an advantage that electrical connection between a plurality of solar cell modules can be easily performed.

(C) Problems to be Solved by the Invention The present invention focuses on the fact that the solar cell module in which the terminal portions are arranged in a square as described above has a practical electrical connection between the plurality of solar cell modules. It is a technical object to provide an industrially advantageous manufacturing method of a solar cell device having a connection structure.

(D) Means for solving the problem The present invention has been made to solve such a problem, a plurality of solar cell modules having terminal portions arranged on a quadrilateral substrate are juxtaposed, and In a method for manufacturing a solar cell device, in which solar cell modules are electrically connected to terminal portions arranged at both ends of at least one side close to each other, the solar cell module is arranged such that one side of the substrate faces the side. Of a plurality of strip-shaped power generation films arranged on the sides of the substrate. The power generation film includes a first electrode film formed on the main surface of the substrate and a source gas of a source gas formed on the main surface by a deposition method. A semiconductor photoactive layer formed by decomposition, and a second electrode film provided so as to face the first electrode film with the active layer sandwiched therebetween, and these power generation films are adjacent gaps between the power generation films. The adjacent one Of the first electrode film and the second electrode film of the other side are connected in series, and both ends of each side are connected to the first electrode film or the second electrode film of the power generation film. The terminal portion having the same polarity formed as described above is provided to prevent the quadrilateral substrate from dropping in the square of the opening of the tray used when the semiconductor photoactive layer is deposited by the depot-up method. A drop prevention piece is provided, and when the semiconductor photoactive layer is deposited by covering the square of the substrate with the fall prevention piece, the semiconductor photoactive layer is prevented from being attached to the square and the fall It is characterized in that the terminal portion is provided in a square of a quadrilateral substrate covered with the prevention piece.

(E) Action In the present invention, when the semiconductor photoactive layer is formed by the depot-up method, the square of the substrate covered with the fall prevention piece provided in the opening of the tray to prevent the substrate from falling. Since the electrode portion is provided on the substrate, it is possible to form a good-quality semiconductor photoactive layer without pinholes on the entire surface of the substrate except the square.

Further, it is not preferable from the viewpoint of improving the photoelectric conversion efficiency to dispose the terminal portion for taking out electricity, which does not originally have a photoelectric conversion function, at the center of the substrate on which the power generation film is formed. On the other hand, since the solar cell module used in the present invention is formed by arranging a plurality of strip-shaped power generation films along the surface of the substrate, its terminal portion is structurally easy to be formed near the periphery of the substrate. Can be placed at. Therefore, in the present invention, it is possible to use the square of the substrate in which it is difficult to obtain a good-quality semiconductor photoactive layer as the terminal portion, and to use the portion where a good film quality is formed as the active layer as the power generation film. Become.

(F) Example FIG. 1 shows a solar cell module (1) which constitutes a solar cell device manufactured according to the present invention. The solar cell module (1) itself receives an electron and / or positive light when irradiated with light. It has a power generation function to generate holes carriers.

2 and 3 are II-II 'line and III in FIG.
-III 'line sectional drawing is shown. In FIG. 1 to FIG. 3, (2) is a permeable and insulative, for example, glass quadrilateral substrate having a square shape in this embodiment, (3a) to (3)
b) is a strip-shaped power generation film spaced apart on the substrate (2), and each of the power generation films (3a) to (3d) is a through hole of SnO ₂ , ITO or the like from the substrate (2) side. Conductive oxide (TC
O) of the first electrode films (4a) to (4d) and semiconductor photoactive layers (5a) to (5d) such as amorphous silicon having a semiconductor junction and coated by a plasma decomposition method by a devoup method described later, preferably Has a laminated structure in which second electrode films (6a) to (6d) having a three-layer structure of aluminum, a titanium-silver alloy and aluminum are sequentially laminated. Strip-shaped power generation film (3a) having the above-mentioned laminated structure
The total film thickness of (3d) depends on the semiconductor material forming the photoactive layers (5a) to (5d), and has a single structure or p forming each layer of pin by amorphous silicon as described above.
Layer is composed of amorphous silicon carbide, i layer n
It is on the order of a few microns when mainly composed of amorphous silicon such as a heterojunction structure in which layers are amorphous silicon, and further, a tandem structure in which both layers are laminated,
Moreover, even CdS-based alloys have a stop of at most 10 μm, which is almost negligible compared to the thickness of the substrate (2). Then, the four strip-shaped power generation films (3a) to (3d) spaced apart from each other are provided in the ineffective region which does not contribute to power generation in the adjacent space portions thereof, and the second electrode film (6) adjacent to the left side is formed.
a) to (6d) and right adjacent first electrode films (4b) to (4)
and d) are electrically connected in series by depositing striped coupling electrode films (7ab) (7bc) (7cd) made of a titanium silver alloy or a laminate of titanium silver alloy, aluminum and titanium silver alloy. .

(8) is the side (2 ▲) of the substrate (2) from the leftmost power generation film (3a).
▼) is a stripe-shaped terminal electrode film that is superposed on the exposed portion (4a ′) of the first electrode film (4a) exposed in the same process as the coupling electrode films (7ab) to (7cd). The terminals (8A) and (8B) having an isosceles triangular shape are provided at both ends along the side (2) of the board, that is, the corners (2A) and (2B) of the board (2). The terminal electrode film (8) is basically unnecessary, but the first electrode film (4)
When a) is formed of TCO, since the TCO has a high sheet resistance, the terminal portions (8A) (8A) (8A) (8) for extracting the power generated by the power generation films (3a) to (3d) to the outside.
When B) is arranged on the corners (2A) and (2B) of the substrate (2) as described above, the longitudinal length of the first electrode film (4a) having a high resistance value is reached before reaching the terminal portions (8A) and (8B). The power loss in the exposed portion (4a ') exposed in the direction is suppressed by the low resistance due to the superposed deposition of the terminal electrode film (8).

(9) is a reverse polarity terminal electrode film extending in stripes from the second electrode film (6c) of the rightmost power generation film (3d) toward the side (2 ▲ ▼) of the substrate (2), The terminal electrode film (9) includes the terminal electrode film (8) and the coupling electrode films (7ab) to (7c).
Through the same process as in (d), the first electrode films (4a) to (4d) previously formed along the substrate side (2 ▲ ▼) are superposed and deposited on the fixed electrode film (10) made of the same material. Has been done.
(9C) and (9D) are 1/4 placed on the corners (2C) and (2D) of the substrate (2) which are both ends of the terminal electrode film (9) of the opposite polarity.
The terminal portions (9C) and (9D) have a circular shape and are formed in the same step as the above-mentioned terminal electrode film (9).
Although they are separated by the four arc-shaped slits (11C) and (11D), they are electrically connected by the interposition of the fixed electrode film (10).

The terminal portions (9A) to (9D) arranged in the squares (2A) to (2D) in this manner are the power generation films (3a) to (9a) as shown in FIG.
Even when the passivation film (12) is applied to protect (3d), it is exposed and its shape is a right angled triangular shape.
The difference from the 1/4 circular shape makes it possible to identify the polarity even if the substrate (2) has a symmetrical square shape.

FIG. 5 shows the resin-based passivation film (1
2) is a solar cell module (1A) to (1D) coated by, for example, screen printing in a square-shaped substrate (2)
Of the solar cell modules (1A) to (1D) are in a state of being juxtaposed by abutting the side surfaces of the solar cell modules (1A) to (1D).
(9C) and (9D) are sides (2 ▲ ▼) that are in contact with each other.
They come close to each other at both ends of (2 ▲ ▼).

Thus, the terminals (8A) (8B) (9) exposed from the passivation film (12) in the squares (2A) to (2D) of the substrate (2) of each solar cell module (1A) to (1D).
C) and (9D) are abutted side by side, for example, in the shape of a four-piece field as shown in FIG.
Modules (1A) adjacent to each other at both ends of ▼)
As a result of being close to the terminal parts (8A), (8B), (9C), and (9D) of (1D), if an attempt is made to make a serial / parallel connection as in the above-mentioned prior art, the adjacent terminal parts (8A) (8A) (8A)
B) (9C) (9D) and side edges (2 ▲ ▼) (2 ▲ ▼) and (2 ▲ ▼) (2) in the same row direction as them.
Terminal part (8A) (8B) located along (▲ ▼)
Stripe-shaped first to third metal foils (13i) to (13iii) are wired so as to connect with (9C) and (9D), and at locations where they straddle each terminal portion (8A) (8B) (9C) (9D). If so, both are soldered.

Figure 7 shows the amorphous silicon photoactive layer (5)
The principle diagram for forming by the plasma decomposition method is shown, and a pair of opposed electrodes (15i) are connected to the RF power source (14) of 13.56 MHz and are opposed to each other to excite plasma.
During (15ii), four substrates (2i) to (2iv) are simultaneously placed on the common tray (16) so that the adherend faces the bottom as shown in exploded view in FIG. ) ~ (1
7 iv) and one main surface of which is covered with a heat equalizing plate (18) is placed, and one counter electrode (15)
i) The reaction gas such as silane (SiH ₄ ) is uniformly discharged into the plasma region from a large number of discharge holes (19) ... 16) exposed substrate on the bottom surface (2
i) to (2iv) on the other main surface.

Incidentally, in FIG. 7, (20) is the other counter electrode (15i
When a photoactive layer (5) is connected to a heater power source (21) by a heater provided in i), heat is generated and the substrates (2i) to (2i) are heated.
v) is uniformly heated from one main surface side through the soaking plate (18).

In this way, the photoactive layer (5) is formed by depositing on the other main surface of the substrates (2i) to (2iv) exposed on the bottom surface of the tray (16) by using a so-called deposition method. For example, flakes adhered to the inner wall of the reactor due to the reaction up to the previous time do not drop and adhere to the adherend surfaces (2i) to (2iv), and a high-quality film without pinholes can be obtained.

However, in order to adopt the depot-up method, the substrate (2i) ~
The adherend surface of (2iv) must be directed downwards, and the openings (17i) to (17iv) of the tray (16) must be connected to the substrate (2iv).
i) to (2iv) have the same shape, the substrates (2i) to
(2iv) is the square (17) of each opening (17i) to (17iv) for dropping from the tray (16) as shown in FIG.
a) to (17d) fall prevention pieces (22a) to (22d)
Is provided. Therefore, the maximum area to which the photoactive layer (5) can be applied is as shown by the hatched area in FIG. 10, and the squares (2A) to (2A) of the substrates (2i) to (2iv)
As a result of (2D) being covered by the fall prevention pieces (22a) to (22d), the squares (2A) to (2D) are not attached. Means for preventing such drop must be provided somewhere as long as the depot-up method is adopted. Therefore, in the present invention, as described above, the square (2A) to
They were provided in (2D). As in the present invention, the terminals (8) for external extraction are provided on the squares (2A) to (2D) of the substrate (2).
The arrangement of (A), (8B), (9C), and (9D) does not mean that the effective area contributing to power generation is reduced. That is, as described above, the squares (2A) to (2D) of the substrate (2) form the portions where the photoactive layer (5) does not adhere, that is, the power generation films (3a) to (3d) as long as the depot-up method is adopted. This is an invalid area that cannot be processed and always occurs. Therefore, the square is defined as an invalid area, and this is defined as the terminal portions (8A) (8B) (9
C) By effectively utilizing as terminal (9D), even though the terminal portion is provided on the main surface of the substrate (2) forming the power generation films (3a) to (3d), the area of the effective area is reduced. It must not happen.

FIG. 11 shows another embodiment manufactured according to the present invention,
The difference from the embodiment of FIG. 6 lies in the connection form of the solar cell modules (1A) to (1D). That is, the embodiment of FIG. 6 has four solar cell modules (1A) to (1D).
Were connected in series and parallel, but in this embodiment, 4
Striped metal foils (13ia) wired in the first and second rows to connect all of the solar cell modules (1A) to (1D), which are also arranged in the shape of a square, in series. (13id) (13iib) (13ii
c) is divided at its center.

In the above embodiments, the number of solar cell modules (1) is four, but the number of solar cell modules (1) to which the present invention is applicable may be an integer of two or more. In addition, various combinations of connection forms may be applied.

(F) Effect of the Invention As is clear from the above description, the present invention is provided in the square of the opening of the tray for preventing the substrate from dropping when the semiconductor photoactive layer is formed by the depot-up method. Since the electrode portion is provided in the square of the substrate covered with the fall prevention piece, that is, the portion where the semiconductor photoactive layer is not formed by the fall prevention piece is used as the electrode portion. The active layer can be applied to almost the entire area of the substrate except the square, and the effective area contributing to solar power generation can be maximized.

Furthermore, in order to improve the photoelectric conversion efficiency, it is usually necessary to arrange the terminal portion that does not contribute to photoelectric conversion as close to the periphery of the substrate as possible. On the other hand, according to the present invention, since a plurality of power generation films are arranged along the substrate surface and these power generation films are connected in series, it becomes easy to arrange the terminal portions in the squares of the substrate, and photoelectric conversion is performed. It is possible to make an arrangement that can improve efficiency.

[Brief description of drawings]

FIG. 1 is a plan view showing a state of a solar cell module used in a method for manufacturing a solar cell device of the present invention before passivation treatment, FIG. 2 is a sectional view taken along line II-II ′ of FIG. 1, and FIG. 1 is a cross-sectional view taken along the line III-III 'in FIG. 1, FIG. 4 is a plan view showing a state of the solar cell module shown in FIG. 1 after passivation treatment, and FIG. 5 is a solar cell of a solar cell device manufactured by a book. A plan view showing an example of a module arrangement,
FIG. 6 is a plan view showing an embodiment of a solar cell device manufactured according to the present invention, FIGS. 7 to 10 show a manufacturing method of an essential part of the present invention, FIG. 7 is a principle view, and FIG. The figure is an exploded perspective view, FIG. 9 is a partially enlarged plan view, FIG. 10 is a plan view, and FIG.
FIG. 1 is a plan view showing another embodiment manufactured by the present invention, and FIG. 12 is a sectional view showing a conventional example. (1) (1A) to (1D) …… Solar cell module, (2)
(2i) to (2iv) ... substrate, (2A) to (2D) ...
… Corner, (3a) to (3d) …… Power generation film, (8A) (8B) (9
C) (9D) …… Terminal part, (15i) (15ii) ……
Counter electrode, (16) ... Tray, (17i) (17iv) ...
... Openings, (22a) to (22d) ... Fall prevention pieces.

 ─────────────────────────────────────────────────── ─── Continuation of front page (56) Reference JP-A-57-211280 (JP, A) JP-A-56-158486 (JP, A) JP-A-56-105627 (JP, A)

Claims (1)

[Claims] 1. A solar system in which a plurality of solar cell modules having terminal portions arranged on a quadrilateral substrate are juxtaposed, and the solar cell modules electrically connect the terminal portions arranged at both ends of at least one side close to each other. In the method for manufacturing a battery device, the solar cell module includes a plurality of strip-shaped power generation films arranged from one side of the substrate to another side opposite to the side, and the power generation film is formed on the substrate. Formed on the main surface,
A first electrode film, a semiconductor photoactive layer formed on the main surface by decomposing a raw material gas by using a deposition method, and a second electrode provided so as to face the first electrode film with the active layer interposed therebetween. And a series connection due to the adjoining one of the first electrode films and the other of the second electrode films being overlapped with each other in the adjacent space portion between the power generating films. The first side of the power generation film is provided on both ends of each side.
The electrode film or the second electrode film is formed so as to be continuous with the terminal part of the same polarity, and the square of the opening part of the tray used when the semiconductor photoactive layer is deposited by the deposition method. The semiconductor photoactive layer is provided on the square when a drop prevention piece for preventing the quadrilateral substrate from falling is provided and the square of the substrate is covered with the drop prevention piece to apply the semiconductor photoactive layer. The method for manufacturing a solar cell device, characterized in that the terminal portion is provided in a square of a quadrilateral substrate which is covered with the fall prevention piece while being prevented from being attached.