JPH065608B2 - Method for manufacturing gas discharge panel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Outline] The present invention utilizes a float electrode and a capacitor to reduce the number of electrode terminals for connecting a drive circuit to enable multiple drive.
In the C-shaped gas discharge panel, the dielectric layer provided on the wiring on the crossover side of the display float electrode, that is, the wiring connecting the float electrode and the capacitive coupling electrode (referred to as the routing electrode) is the other part. In order to solve the problem of a thinner dielectric film and poor dielectric strength, a capacitive coupling dielectric layer is formed on the routing electrode and the capacitive coupling electrode, and then the capacitive coupling dielectric layer is formed on the float electrode. When forming a dielectric layer having a larger thickness, a dielectric layer having a larger capacitance is formed on the routing electrode by simultaneously forming the thick dielectric layer on the routing electrode. This is to increase the dielectric strength by forming the dielectric layer on the coupling electrode to be reasonably thick without changing the coupling capacitance value.

[Industrial application field]

The present invention relates to a method for manufacturing an AC type gas discharge panel used in a display device, and more particularly to an AC type gas which enables multiple driving while reducing the number of electrode terminals for connecting a driving circuit by using a float electrode and a capacitor. In a discharge panel, the present invention relates to a manufacturing method for improving the withstand voltage of a dielectric layer provided on a lead-out electrode extending a capacitive coupling electrode for capacitively coupling with a float electrode.

Multiple X electrodes and multiple Y electrodes, each coated with a dielectric layer
A pair of panel-constituting substrates supporting electrodes are arranged opposite to each other through a gas discharge space, and a voltage is selectively applied to the X electrode and the Y electrode to cause light emission at the intersection thereof by a gas discharge, and characters, figures, etc. The AC type gas discharge panel for displaying the above is well known.

In this type of gas discharge panel, a large number of X and Y electrodes are required to increase the display amount and perform delicate display, but the number of electrode terminals and the number of drive circuits are increased accordingly, resulting in cost reduction. Invite high.

In order to solve such a problem, a panel structure in which the number of electrode terminals for connecting a drive circuit is reduced by using a float electrode and a capacitor is disclosed in Japanese Patent Laid-Open No. 61-61341 (Japanese Patent Publication No. 2-1789).
9).

The gas discharge panel having such a structure is provided with a routing electrode for extending (connecting) the float electrode to the capacitive coupling electrode in order to capacitively couple the float electrode and the drive electrode,
An insulating layer is provided on each of the routing electrode and the capacitive coupling electrode, and the insulating layer on the routing electrode is for crossover,
The insulating layer on the capacitive coupling electrode is used for capacitive coupling, and the drive electrode is provided on the capacitive coupling insulating layer, and the drive electrode wiring is provided on the crossover insulating layer.

Here, since the insulating layer for crossover needs to increase the withstand voltage between the routing electrode and the wiring of the drive electrode, a method of manufacturing an insulating layer having a high withstand voltage is required.

[Conventional technology]

A conventional AC type gas discharge panel described in the above-mentioned Japanese Patent Laid-Open No. 61-61341 is shown in the cross-sectional view of the principal part of FIG. 3 and the electrode layout configuration diagram of the display panel substrate of FIG.

In these drawings, 1a is a display side glass substrate, and 2 is a back side glass substrate. On the display side glass substrate 1a,
A plurality of display float electrodes 3 (16 in the figure) extending in the X-axis direction (the horizontal direction of the paper in FIG. 3, and the vertical direction of the paper in FIG. 4) are formed, and the 16 float electrodes are ends. Is divided into four groups of four.

As shown in FIG. 4, one end of the float electrode 3 is connected to the capacitive coupling electrode 5 provided in the peripheral portion of the panel via the routing electrode 4. The lead-out electrode 4 has a pitch narrower than that of the float electrode 3 and is bent at the center to lead out the end in the Y direction. The capacitive coupling electrode 5 is
Spaces formed by narrowing the arrangement pitch of the lead-out electrodes are used, and they are arranged side by side in the X direction for each group. Four crossover side drive electrodes 10 are juxtaposed in the X direction on the routing electrode 4 and the capacitive coupling electrode 5 via an insulating layer (dielectric layer) as described later.

The other end of the float electrode 3 is connected to a capacitive coupling electrode 6 which is extended straight and arranged in parallel in the Y direction. On the capacitive coupling electrodes 6, four short-side drive electrodes 11 are provided on the Y side via an insulating layer (dielectric layer) as described later.
Are installed side by side.

And, on the area where the respective routing electrodes 4 and the capacitive coupling electrodes 5 and 6 are arranged, a plan view of FIG. 5 (a) and a view of FIG. 5 along the section line AA of FIG. 5 (a) are shown. As shown in the cross-sectional view of the main part of (b), for example, a low-melting-point glass paste mainly containing lead oxide (PbO) is selectively applied and then fired to form the second dielectric layer 7 with a hatched line. It is selectively formed as shown. The dielectric layer 7 on the capacitive coupling electrodes 5 and 6 serves as an insulating layer for capacitive coupling with drive electrodes 10 and 11, which will be described later, and the dielectric layer 7 on the routing electrode 4 is insulated from the wiring of the drive electrodes. It becomes an insulating layer for.

Next, on the plurality of float electrodes 3 in the display area, a plan view of FIG. 6 (a) and a cross-section of a main part of FIG. 6 (b) taken along the line AA of FIG. 6 (a). As shown in the figure, for example, a low-melting-point glass paste mainly composed of lead oxide (PbO) is selectively applied thicker than the film thickness of the second dielectric layer 7 for capacitive coupling, followed by firing treatment. A thick first dielectric layer 8 is formed.

Further, the second dielectric layer 7 covering the routing electrode 4 and the capacitive coupling electrode 5 extended from one of the respective float electrodes 3.
A plurality of drive electrodes 10 on the crossover side are formed on the upper surface of the plurality of crossover-side drive electrodes 10 for commonly connecting the same-rank capacitance coupling electrodes of the respective groups. As shown in FIG. 4, in the drive electrode 10, a portion corresponding to the capacitive coupling electrode 5 connected to the lead-out electrode 4 is formed to have a land-shaped thick line width, and other portions to be wiring are formed. It is formed with a thin line width to reduce crosstalk.

On the surface of the second dielectric layer 7 provided on the other side of each float electrode 3, a plurality of drive electrodes 11 that connect the capacitive coupling electrodes 6 in common to each group are formed, and then these surfaces are formed. The protective film 9 is deposited. It should be noted that in the figure, the routing electrode 4 and the connecting lead portion of the drive electrode 10 are shown with their positions displaced for the sake of clarity, but they actually overlap in a plane.

On the other hand, a plurality of discharge electrodes 12 are formed in the Y-axis direction on the rear glass substrate 2, and a dielectric layer 13 and a protective layer are formed on the upper surface thereof.
14 are sequentially stacked.

In these two glass substrates 1 and 2, the electrodes on the respective substrates, that is, the float electrodes 3 and the discharge electrodes 12 are orthogonal to each other,
Further, the gas discharge space 15 is disposed so as to face each other with a constant gas discharge space 15 and the periphery is sealed with a sealing material 16.
A discharge gas mainly containing neon (Ne) is enclosed in the.

By adopting such a structure in which the float electrode 3 and the drive electrodes 10 and 11 are capacitively coupled via the second dielectric layer 7, it is possible to reduce the number of electrode terminals for connecting the drive circuit.

[Problems to be solved by the invention]

By the way, the second dielectric layer 7 is formed on the routing electrode 4 and the capacitive coupling electrodes 5 and 6 on the crossover side of the float electrode 3.
In the step of forming, a low melting point glass paste mainly composed of, for example, lead oxide (PbO) is selectively applied on the arrangement area of the routing electrode and the capacitive coupling electrode, and then heat treatment is performed. Due to the difference in surface area and heat capacity between the routing electrode and the capacitive coupling electrodes 5 and 6 and the difference in wetting property with the surface of the glass substrate 1, the dielectric layer on the routing electrode 4 is located on the capacitive coupling electrode 5. The film is formed to be extremely thinner than the dielectric layer 7 of the above, so that the dielectric strength voltage between the routing electrode 4 and the crossover side drive electrode 10 facing each other through the thin second dielectric layer 7 becomes poor. There was a problem.

Therefore, in order to solve such a problem, it may be possible to simply form the second dielectric layer 7 to be thicker than the conventional one, but the capacitance value for capacitively coupling with the drive electrodes 10 and 11 becomes small, so that the gas discharge does not occur. There is a drawback that the required voltage cannot be supplied sufficiently.

In view of such conventional drawbacks, the present invention makes it possible to form only the dielectric layer 7 on the routing electrode extended from each float electrode to be reasonably thick without increasing the number of steps. It is an object of the present invention to provide a method for manufacturing an AC type gas discharge panel with an improved withstand voltage.

[Means for solving problems]

In order to achieve the above-mentioned object, the present invention, as shown in the plan view of FIG. 1 (a) and the sectional view of the main part of FIG. 1 (b) taken along the line AA of FIG. On the glass substrate 1a, first, a plurality of float electrodes 3 each having a lead electrode 4 and a capacitive coupling electrode 5 at one end and a capacitive coupling electrode 6 at the other end are formed in the X-axis direction, and then each lead electrode 4 and A dielectric material layer for capacitively coupling with the drive electrode is selectively applied only on the region where the capacitive coupling electrodes 5 and 6 are provided.

Next, as shown in the plan view of FIG. 2 (a) and the sectional view of the main part of FIG. 2 (b) taken along the line A-A of the plan view, on the plurality of float electrodes 3 and After a dielectric material layer thicker than the dielectric material layer for capacitive coupling is applied to the surface of the dielectric material layer on the routing electrode 4 extending from each float electrode 3, the dielectric material for capacitive coupling is applied. By firing the body material layer and the thick dielectric material layer by heat treatment, the capacitive coupling second dielectric layer 7 and the thick first dielectric layer 8 are simultaneously formed.

In summary, the present invention focuses on the fact that the formation regions of the lead-out electrode and the capacitive coupling electrode on the crossover side of the float electrode are separated from each other so that the dielectric layer can be formed individually, and the crossover on the lead-out electrode is concerned. The dielectric layer for use is manufactured by using the step of coating the capacitive coupling electrode with the capacitive coupling dielectric layer and the step of coating the float electrode with the dielectric layer.

[Work]

As the dielectric layer 21 on the routing electrode 4 extending from each float electrode 3 formed by the manufacturing method of the present invention, the dielectric layer 21 on the capacitive coupling second dielectric layer 7 and the plurality of float electrodes 3 are formed. Since the thick first dielectric layer 8 to be formed is partially laminated, the coupling capacitance value of the first dielectric layer 7 for capacitive coupling on the capacitive coupling electrodes 5 and 6 is not changed, In addition, it becomes possible to easily form the film without increasing the number of forming steps, and the conventional problem of a poor withstand voltage is solved.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIGS. 1 (a) and (b) and FIGS. 2 (a) and (b) show the A according to the present invention.
It is a figure which shows the manufacturing method of a C-shaped gas discharge panel in process order, (a) is a top view, (b) is a principal part sectional drawing.

In FIGS. 1 (a) and 1 (b), reference numeral 1a is, for example, a display glass substrate, and first of all, each wiring electrode 4 is formed on one end of the glass substrate 1a by a vapor deposition method, a sputtering method, a photolithography process or the like. A plurality of float electrodes 3 made of a chromium (Cr) thin film having a capacitive coupling electrode 5 and a capacitive coupling electrode 6 at the other end are formed in the X-axis direction as shown in the drawing.

Next, for capacitive coupling with the drive electrode, only on the area where the routing electrode 4 extending from the float electrode 3 and the capacitive coupling electrodes 5 and 6 (indicated by the diagonally right-dashed lines toward the drawing) is capacitively coupled, For example, a dielectric material layer made of a low melting point glass paste or the like mainly containing lead oxide (PbO) is selectively applied to a predetermined thickness.

Subsequently, as shown in FIGS. 2 (a) and 2 (b), the dielectric material layer on the plurality of float electrodes 3 and the plurality of routing electrodes 4 (the portion of the broken line rising to the left toward the drawing). ), Which is thicker than the dielectric material layer, such as lead oxide (P
A dielectric material layer made of a low-melting-point glass paste or the like mainly composed of bO) is applied.

Then, the capacitive coupling dielectric material layer and the thick dielectric material layer are fired by heat treatment to form the capacitive coupling second dielectric layer 7 and the thick first dielectric layer 8, respectively.

In the panel substrate 1 thus formed, the crossover dielectric on the routing electrode 4 is maintained without changing the coupling capacitance value of the capacitive coupling first dielectric layer 7 on the capacitive coupling electrodes 5 and 6. It is possible to easily form the body layer 21 thicker than the second capacitive coupling dielectric layer 7 on the capacitive coupling electrodes 5 and 6.

In addition, in the above embodiments, an example in which a plurality of float electrodes, a lead electrode extending therefrom, and a capacitive coupling electrode are provided on the display glass substrate has been described, but the present invention is not limited to this example. However, the present invention is also applicable to, for example, an AC type gas discharge panel having a configuration in which a plurality of float electrodes, a lead electrode extending from the float electrode, and a capacitive coupling electrode are provided on the back side glass substrate facing the display glass substrate. Needless to say.

[Effects of the Invention] As is apparent from the above description, according to the method for manufacturing an AC gas discharge panel of the present invention, the number of steps for forming the dielectric layer on the leading electrode extending from each float electrode is increased. There is an advantage that it is possible to form the second dielectric layer on each capacitive coupling electrode thicker than the capacitive coupling dielectric layer without changing the coupling capacitance value of the second dielectric layer.

Therefore, between the respective routing electrodes and the driving electrodes crossing over the respective routing electrodes when the driving electrodes for capacitive coupling facing the respective capacitive coupling electrodes are arranged on these second dielectric layers. The withstand voltage of the
Insulation defects can be easily prevented.

[Brief description of drawings]

FIGS. 1 (a) and (b) and FIGS. 2 (a) and (b) show the A according to the present invention.
It is a figure which shows the manufacturing method of a C type gas discharge panel in order of a process, (a) is a top view, (b) is a principal part sectional drawing, FIG. 3 is an AC type gas discharge panel using the conventional float electrode. FIG. 4 is a cross-sectional view of a main part for explaining, FIG. 4 is a plan view showing an electrode arrangement configuration of a display side panel substrate in the conventional panel of FIG. 3, FIGS. 5 (a), 5 (b) and 6 (a). ), (B) are views showing a method of manufacturing a conventional panel in the order of steps, (a) is a plan view,
(b) is a sectional view of a main part. 1 and 2, 1 is a glass substrate, 3 is a float electrode, 4 is a lead electrode,
Reference numerals 5 and 6 are capacitive coupling electrodes, 7 is a capacitive coupling dielectric layer, 8 is a thick dielectric layer, and 21 is a partial dielectric layer on the routing electrodes.

Front page continued (72) Inventor Toshiyuki Minamito, 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa, Fujitsu Limited (72) Inventor Akira Otsuka 1015, Kamedotachu, Nakahara-ku, Kawasaki, Kanagawa Reference Japanese Patent Laid-Open No. 60-182636 (JP, A) Actually developed 51-55263 (JP, U)

Claims (1)

[Claims] 1. A float electrode and a drive electrode are capacitively coupled in a crossover side drive electrode formation portion and a short side drive electrode formation portion in the peripheral portion of a panel so as to be multiply driven.
The float electrodes are formed on the substrate in a plurality of groups for each number of drive electrodes on the crossover side from the end, and the crossover side of the float electrodes has a pitch narrower than that of the display unit so as to form a space. This is connected to the first capacitive coupling electrode with a routing electrode, and the first capacitive coupling electrode utilizes the space so that the portions corresponding to the same drive electrodes of each group are arranged in a straight line and within each group. In the above, the short side of the float electrode is formed by extending the float electrode as it is to form a second capacitive coupling electrode for each float electrode connected by the extension, and The drive electrode on the crossover side
The crossover wiring portion is formed on the first capacitive coupling electrode of the corresponding float electrode via a capacitive coupling insulating layer and has a narrow line width, and the capacitive coupling portion of the short-side drive electrode further comprises: Each float electrode group is formed on the second capacitive coupling electrode via an insulating layer for capacitive coupling, and a wiring portion of the routing electrode on the crossover side of the float electrode and the drive electrode on the crossover side. In the manufacture of an AC type gas discharge panel in which an insulating layer thicker than the capacitive coupling insulating layer is provided between the floating electrode (3) and the wiring electrode, the wiring electrode on the crossover side of the float electrode (3) is used. (4)
The thick insulating layer on the top is subjected to the following two steps, that is, the first step of covering the portion excluding the float electrode (3) with the capacitive coupling insulating layer (7), and the float electrode (3) routing electrode
(4) AC formed by a second step of simultaneously covering the capacitive coupling insulating layer (7) above with an insulating layer (8) having a thickness thicker than the capacitive coupling insulating layer Method for manufacturing flat gas discharge panel.