JPH0656386B2 - Particle flow detector - Google Patents
Particle flow detectorInfo
- Publication number
- JPH0656386B2 JPH0656386B2 JP60218479A JP21847985A JPH0656386B2 JP H0656386 B2 JPH0656386 B2 JP H0656386B2 JP 60218479 A JP60218479 A JP 60218479A JP 21847985 A JP21847985 A JP 21847985A JP H0656386 B2 JPH0656386 B2 JP H0656386B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- particle
- pipe
- electrodes
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は静電容量式の流れ検出器に関する。FIELD OF THE INVENTION This invention relates to capacitive flow detectors.
従来の技術 従来、この種の流れ検出器は第19図と第20図のように構
成されている。1は静電容量検出用電極で、粒体2が通
過する樹脂製パイプ3に差込まれており、パイプ3とは
別の位置に取付けられた電子回路〔図示せず〕と前記電
極1とをコード4で接続し、前記電子回路によって電極
1間の静電容量変化を測定して、粒体2の流れの状態が
判定されている。また、電極間隔1は測定対象粒体の粒
子径に比べて十分に大きく設定されている。2. Description of the Related Art Conventionally, this type of flow detector is configured as shown in FIGS. 19 and 20. Reference numeral 1 denotes an electrostatic capacitance detection electrode, which is inserted into a resin pipe 3 through which the particles 2 pass, and an electronic circuit [not shown] attached at a position different from the pipe 3 and the electrode 1 Are connected by a cord 4 and the change in capacitance between the electrodes 1 is measured by the electronic circuit to determine the flow state of the granules 2. In addition, the electrode interval 1 is set to be sufficiently larger than the particle diameter of the particles to be measured.
発明が解決しようとする問題点 このような従来の構成では、電極1のパイプ3の内側へ
の突出量が多いため、粒体2の流れが妨げられており、
粒体のスムーズな落下を期待できない。Problems to be Solved by the Invention In such a conventional configuration, since the amount of protrusion of the electrode 1 to the inside of the pipe 3 is large, the flow of the granules 2 is hindered,
You cannot expect a smooth drop of particles.
本発明は粒体の落下を妨げることがなく、しかも、より
高感度な測定を期待できる流れ検出器を提出することを
目的とする。It is an object of the present invention to provide a flow detector that does not hinder the fall of particles and that can be expected to measure with higher sensitivity.
問題点を解決するための手段 本発明の粒体の流れ検出器は、粒体通過経路形成部材の
内周面あるいは外周面に沿ってグランド電極とホット電
極から成る一対以上の静電容量検出用電極設け、静電容
量検出用電極間の容量変化から粒体の流れ状態を検出す
る検出回路を設けると共に、前記静電容量検出用電極の
グランド電極とホット電極の粒体通過方向の間隔を測定
対象粒体の粒子径に略等しく構成したことを特徴とす
る。Means for Solving the Problems A particle flow detector of the present invention is for detecting a pair of capacitances composed of a ground electrode and a hot electrode along an inner peripheral surface or an outer peripheral surface of a particle passage forming member. An electrode is provided, and a detection circuit is provided to detect the flow state of the particles based on the capacitance change between the capacitance detection electrodes, and the distance between the ground electrode of the capacitance detection electrode and the hot electrode in the particle passage direction is measured. It is characterized in that it is configured to be approximately equal to the particle diameter of the target granules.
作用 この構成によると、静電容量検出用電極を粒体通過経路
形成部材の内周面あるいは外周面に沿って設けたため、
内周面に沿って設けた場合には従来に比べて粒体通過経
路中への突出量がわずかであり、外周面に沿って設けた
場合にはその突出量を零に出来、粒体のスムーズな落下
を期待できる。また、測定対象粒体の粒径に応じて静電
容量検出電極の幅を設定したため、従来よりも高感度の
測定が可能である。Action According to this configuration, since the capacitance detection electrode is provided along the inner peripheral surface or the outer peripheral surface of the particle passage route forming member,
When it is provided along the inner peripheral surface, the amount of protrusion into the particle passage path is small compared to the conventional case, and when it is provided along the outer peripheral surface, the amount of protrusion can be zero, and You can expect a smooth fall. Moreover, since the width of the capacitance detection electrode is set according to the particle diameter of the measurement target particle, it is possible to perform measurement with higher sensitivity than before.
実施例 以下、本発明の実施例を第1図〜第18図に基づいて説明
する。Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 18.
第1図は樹脂製パイプ3の外周面Aに銅箔等の導電部を
直接に貼着してホット電極5とグランド電極61,62
が形成されており、ホット電極5とグランド電極61,
62間の静電容量変化を検出回路〔図示せず〕で測定し
て、パイプ3中を通過する粒体2の流れ状態が判定され
る。FIG. 1 shows that a conductive portion such as a copper foil is directly attached to the outer peripheral surface A of the resin pipe 3 and the hot electrode 5 and the ground electrodes 6 1 , 6 2 are attached.
Are formed, and the hot electrode 5 and the ground electrode 6 1 ,
The change in capacitance between the two is measured by a detection circuit (not shown) to determine the flow state of the particles 2 passing through the pipe 3.
このように構成したため、静電容量極出用電極としての
電極5,61,62はパイプ3の内部通路B1には突部
として表われないため、粒体2の通過を妨げない。With this configuration, the electrodes 5, 6 1 , 6 2 as the electrodes for outputting electrostatic capacitance do not appear as protrusions in the internal passage B 1 of the pipe 3, and thus do not hinder the passage of the granules 2.
第1図ではパイプ3の外周面Aに電極5,61,62を
設けたが、これは第2図の一部切欠き図に示すように、
パイプ3の内周面Cに銅箔等の導電部を直接に貼着して
電極5,61,62を形成しても同様である。但し、こ
の場合にはパイプ3の内部通路B1に導電部の厚み分の
突出部が発生するが、ごく僅かであるため粒体2の通過
を妨げるものでない。Electrodes 5,6 1 on the outer peripheral surface A of the pipe 3 in Figure 1, 6 2 but was provided which, as shown in partial cut-away view of FIG. 2,
Electrodes 5,6 1 by sticking the conductive portion such as the copper foil directly on the inner peripheral surface C of the pipe 3, is the same to form a 6 2. However, in this case, a protrusion corresponding to the thickness of the conductive portion is generated in the internal passage B 1 of the pipe 3, but since it is very small, it does not hinder the passage of the granules 2.
なお、第1図と第2図の実施例では導電部を貼着して電
極5,61,62を形成したが、これは貼着によらずに
導電性塗料を印刷することによっても同様の効果が得ら
れる。Although the formation of the electrodes 5, 6 1, 6 2 by sticking the conductive portion in the embodiment of Figure 1 and Figure 2, which is also by printing a conductive paint irrespective of the attached The same effect can be obtained.
第1図と第2図では筒状のパイプ3の外周あるいは内周
に電極5,61,62を形成したが、これはパイプ3を
用いずに第3図、第4図のようにしても構成できる。Electrodes 5,6 1 on the outer periphery or the inner periphery of the tubular pipe 3 in Figure 1 and Figure 2, 6 2 was formed, this third view without using a pipe 3, as FIG. 4 Can be configured.
第3図は電極5,61,62のパターンが形成されたフ
レキシブル配線基板7を、そのパターン面Dを外側にし
て筒状に巻き上げたもので、粒体2はパターン面Dの裏
面Eで囲まれた内部通路B2を通過する。Figure 3 is a flexible wiring board 7 on which a pattern of electrodes 5, 6 1, 6 2 are formed, which was wound up in a cylindrical shape with the pattern surface D on the outside, granules 2 backside E of the pattern surface D It passes through the internal passage B 2 surrounded by.
第4図はパターン面Dを内側にして筒状に巻き上げたも
ので、粒体2はパターン面Dで囲まれた内部通路B2を
通過する。In FIG. 4, the pattern surface D is rolled up in a tubular shape, and the particles 2 pass through the internal passage B 2 surrounded by the pattern surface D.
第5図と第6図はパイプ3とフレキシブル配線基板7を
組合せた実施例を示し、フレキシブル配線基板7がパイ
プ3の外周面Aに被せられている。なお、この場合には
フレキシブル配線基板7のパターン面Dをパイプ3の外
周面A側に配設して巻き上げるか、または裏面Eをパイ
プ3の外周面A側に配設して巻き上げられる。第7図は
第5図の具体例を示し、フレキシブル配線基板7は環状
のキャップ81,82でパイプ3の外周面Aに押付けら
れており、キャップ81,82の外側にパイプ3を囲む
ように筒状シールドケース9が被せられている。10は中
空部で、浮遊容量の低減に役立っている。5 and 6 show an embodiment in which the pipe 3 and the flexible wiring board 7 are combined, and the flexible wiring board 7 is covered on the outer peripheral surface A of the pipe 3. In this case, the pattern surface D of the flexible wiring board 7 is arranged on the outer peripheral surface A side of the pipe 3 and wound up, or the back surface E is arranged on the outer peripheral surface A side of the pipe 3 and wound up. FIG. 7 shows a specific example of FIG. 5, in which the flexible wiring board 7 is pressed against the outer peripheral surface A of the pipe 3 by the annular caps 8 1 and 8 2 , and the pipe 3 is placed outside the caps 8 1 and 8 2. A cylindrical shield case 9 is covered so as to surround the. 10 is a hollow part, which helps reduce the stray capacitance.
第5図の実施例ではパイプ3の外周にフレキシブル配線
基板7を被せたが、これは第8図と第9図のようにパイ
プ3の内側にフレキシブル配線基板7を挿入しても同様
である。なお、この場合には、パイプ3の内部通路B1
にフレキシブル配線基板7の厚み分の突部が発生する
が、ごく僅かであるため粒体2の通過を妨げるものでな
い。第8図と第9図の実施例では、パターン面Dをパイ
プ3の内周面C側にして挿入されるか、あるいは裏面E
をパイプ3の内周面C側にして挿入される。In the embodiment of FIG. 5, the flexible wiring board 7 is covered on the outer circumference of the pipe 3, but this is the same even if the flexible wiring board 7 is inserted inside the pipe 3 as shown in FIGS. 8 and 9. . In this case, the internal passage B 1 of the pipe 3
Although a protrusion corresponding to the thickness of the flexible wiring board 7 is generated, it does not hinder the passage of the granules 2 because it is extremely small. In the embodiment of FIGS. 8 and 9, the pattern surface D is inserted with the inner peripheral surface C side of the pipe 3 or the back surface E is inserted.
Is inserted with the inner peripheral surface C side of the pipe 3 facing.
第10図は静電容量変化から粒体の流れ状態を判定する検
出回路11と通路形成部材としてのパイプ3との位置関係
を示す。ここでは第1図における実施例のパイプ3に隣
接した近傍位置に検出回路11を配設して、長いコードを
介さずに検出回路11と電極5,61,62を接続するこ
とによって浮遊容量を小さく出来ると共に、全体をコン
パクト化できる。12は電源電圧の印加および流れ状態判
定信号の出力などに使用されるケーブルである。FIG. 10 shows the positional relationship between the detection circuit 11 which determines the flow state of the particles based on the change in capacitance and the pipe 3 as a passage forming member. Here, the detection circuit 11 is arranged in the vicinity of the pipe 3 of the embodiment shown in FIG. 1 , and the detection circuit 11 and the electrodes 5, 6 1 , 6 2 are connected to each other without a long cord, thereby floating. The capacity can be reduced and the whole can be made compact. Reference numeral 12 is a cable used for applying a power supply voltage and outputting a flow state determination signal.
第11図は通路形成部材としてのパイプ3を鉛直方向に対
して角度θだけ傾斜させた使用状態を示す。このように
すれば、粒体2は確実にパイプ3の内周底部13上で、電
極5,61,62に近い位置を確実に通過するようにな
るため、第14図のようにパイプ3を真直すぐに鉛直方向
に取付けて粒体2を流した場合に比べて検出感度が大幅
に向上する。FIG. 11 shows a usage state in which the pipe 3 as a passage forming member is inclined by an angle θ with respect to the vertical direction. In this way, granules 2 is securely on the inner peripheral bottom 13 of the pipe 3, the position becomes reliably pass close to electrodes 5, 6 1, 6 2, a pipe as in FIG. 14 The detection sensitivity is significantly improved as compared with the case where the granular material 2 is flown by mounting 3 directly in the vertical direction.
なお、第10図のような検出回路11の取付け位置と第11図
のような傾斜取付けによって得られる効果は、第1図の
実施例のみならず、第2図、第3図、第4図、第5図お
よび第8図の何れの実施例においても同様に得られる。The effect obtained by the mounting position of the detection circuit 11 as shown in FIG. 10 and the inclined mounting as shown in FIG. 11 is not limited to the embodiment shown in FIG. 1 but also shown in FIG. 2, FIG. 3, FIG. The same is obtained in any of the embodiments shown in FIGS.
第12図〜第14図は電極間隔と測定対象粒体の粒径dの関
係を示す。第12図(a)のようにパイプ3にホット電極5
とグランド電極6を設けた場合、粒体2が通過しない状
態での電極5と6の静電容量値〔基本容量値C0〕は、
第13図のように電極間隔L1が大きくなるほど小さくな
る。粒体2が通過すると静電容量がΔC変化して、C0
+ΔCの容量値を示す。ΔCは電極間隔L1が小さい程
大きいが、検出できる粒体粒子2′と電極との距離h
は、第14図に示すように電極間隔L1が大きくなる程大
きくなって広い範囲を監視できる。そのため、ΔC、h
ともに良好にするためには、電極間隔を第12図(b)のよ
うに粒子径(d)と略等しくL2に設定することが好まし
い。12 to 14 show the relationship between the electrode spacing and the particle size d of the particles to be measured. As shown in Fig. 12 (a), the hot electrode 5 is attached to the pipe 3.
When the ground electrode 6 and the ground electrode 6 are provided, the electrostatic capacitance value [basic capacitance value C 0 ] of the electrodes 5 and 6 in a state where the particle 2 does not pass is
As shown in FIG. 13, it becomes smaller as the electrode spacing L 1 becomes larger. When the granules 2 pass, the capacitance changes by ΔC and C 0
The capacitance value of + ΔC is shown. ΔC is larger as the electrode interval L 1 is smaller, but the distance h between the detectable granular particle 2 ′ and the electrode is h.
As shown in FIG. 14, the larger the electrode spacing L 1 is, the larger the distance can be monitored. Therefore, ΔC, h
In order to improve both of them, it is preferable to set the electrode interval to L 2 which is substantially equal to the particle diameter (d) as shown in FIG. 12 (b).
なお、L2dに設定することによって高感度に測定で
きるという効果は、第2図、第3図、第4図、第5図お
よび第8図の実施例においても同様である。The effect of high sensitivity measurement by setting L 2 d is the same in the embodiments of FIGS. 2, 3, 4, 5 and 8.
第15図は検出回路11の具体構成を示す。16は発振部で、
第16図(a)のように定電圧V0の交流信号を発生する。1
7は発振部16の信号を抽出する共振部で、基本中心周波
数が発振部16の信号周波数あるいはその近傍に設定され
ており、前記ΔC成分に応じて共振周波数が変化する。
ここでは、電極間容量がC0の場合〔空の場合〕には第
16図(b)のように信号周波数が同じで波高値がV0より
も低い交流信号が共振部17の出力に発生し、通路形成部
材中に粒体2が存在しかつ粒体2で移動しない(C0+
ΔCmax)場合〔詰まっている場合〕には第16図(c)のよ
うに信号周波数が同じで波高値が第16図(b)より低い交
流信号が共振部17の出力に発生し、通路形成部材中で粒
体2が移動している〔C0+ΔC〕場合〔流れ中〕に
は、第16図(d)のように信号周波数が同じでその流れ状
態に応じて波高値が第16図(d)と(c)の間で変化する交流
信号が共振部17の出力に発生する。18は共振部17の出力
に発生する時々の交流信号を直流レベルの信号Stに変
換する検波部で、第16図(b),(c),(d)の各信号波形は
それぞれV1,V2,V3に変換される。なお、V1>
V3>V2である。19,20は増幅器で、ここでは増幅率
が“1”であるとする。21は第1のコンパレータで、増
幅器19を介して検波部18の時々の信号Stと直流レベル
V1の基準信号R1とのレベル比較を行う。22は第2の
コンパレータで、前記信号Stと直流レベルV2の基準
信号R2とのレベル比較を行う。ここでは説明の都合
上、第1のコンパレータ21は信号StのレベルがV2に
達した状態で出力O2が“H”レベルに反転し、第2の
コンパレータ22は信号StのレベルがV2に達した状態
で出力O2が“H”レベルに反転するものとし以下の説
明を続ける。23は出力O1,O2の信号が入力に印加さ
れたゲート部で、出力O1が“H”レベルで端子T1を
“H”レベルにし、出力O2が“H”レベル端子T3を
“H”レベルにし、出力O1とO2が共に“L”レベル
端子T2を“H”レベルにするよう構成されており、端
子T1が“H”レベルに反転すると空状態、端子T2が
“H”レベルに反転すると流れ中状態、端子T3が
“H”レベルに反転すると詰まり状態であることがわか
る。FIG. 15 shows a specific configuration of the detection circuit 11. 16 is an oscillator,
As shown in FIG. 16 (a), an AC signal of constant voltage V 0 is generated. 1
Reference numeral 7 denotes a resonance section for extracting a signal of the oscillation section 16, whose fundamental center frequency is set at or near the signal frequency of the oscillation section 16, and the resonance frequency changes according to the ΔC component.
Here, when the interelectrode capacitance is C 0 [when it is empty],
As shown in Fig. 16 (b), an AC signal with the same signal frequency and a peak value lower than V 0 is generated at the output of the resonance part 17, and the granules 2 exist in the passage forming member and move with the granules 2. Not (C 0 +
In the case of ΔCmax) [when it is clogged], an AC signal having the same signal frequency and a peak value lower than that in FIG. 16 (b) is generated at the output of the resonance part 17 as shown in FIG. When the granules 2 are moving in the member [C 0 + ΔC] [in flow], the signal frequency is the same as in Fig. 16 (d), and the crest value varies depending on the flow state. An AC signal that changes between (d) and (c) is generated at the output of the resonance unit 17. Reference numeral 18 denotes a detection unit that converts an alternating current signal generated at the output of the resonance unit 17 into a DC level signal St. The signal waveforms of FIGS. 16 (b), (c), and (d) are V 1 , respectively. Converted to V 2 and V 3 . In addition, V 1 >
V 3 > V 2 . Reference numerals 19 and 20 denote amplifiers, and the amplification factor is "1" here. Reference numeral 21 denotes a first comparator, which compares the occasional signal St of the detector 18 with the reference signal R 1 of the DC level V 1 via the amplifier 19. A second comparator 22 compares the level of the signal St with the reference signal R 2 of the DC level V 2 . Here, for convenience of explanation, the output O 2 of the first comparator 21 is inverted to the “H” level when the level of the signal St reaches V 2 , and the second comparator 22 outputs the signal St of which the level is V 2 It is assumed that the output O 2 inverts to the “H” level in the state where the temperature reaches 0. Reference numeral 23 denotes a gate portion to which the signals of the outputs O 1 and O 2 are applied to the input, the output O 1 is at “H” level and the terminal T 1 is at “H” level, and the output O 2 is at “H” level terminal T 3 Is set to the "H" level, the outputs O 1 and O 2 both set the "L" level terminal T 2 to the "H" level, and when the terminal T 1 is inverted to the "H" level, the empty state, the terminal It can be seen that when T 2 is inverted to the “H” level, it is in a flow state, and when the terminal T 3 is inverted to the “H” level, it is a blocked state.
上記各実施例においては、静電容量検出用電極として1
つのホット電極5と2つのグランド電極61,62とを
設けたが、電極の数量および電極形状は上記実施例に限
定されるものではなく、静電容量検出用電極はホット電
極とグランド電極が一対以上設けられていればよい。In each of the above-described embodiments, the capacitance detection electrode is 1
Although one hot electrode 5 and two ground electrodes 6 1 and 6 2 are provided, the number of electrodes and the shape of the electrodes are not limited to those in the above-described embodiment, and the capacitance detection electrode is a hot electrode and a ground electrode. It suffices if at least one pair is provided.
第17図と第18図はそれぞれ第3図、第4図、第5図およ
び第8図の実施例に使用して有効なフレキシブル配線基
板7の展開図で、矢印F方向が粒体2の通過方向であ
る。ここでは、51,52がホット電極61,62,6
3がグランド電極であり、第17図ではホット電極相互
間、グランド電極相互間がそれぞれフレキシブル配線基
板7のパターン141,142で連結されている。また、第18
図では外部リード線151によってホット電極相互間が接
続され、グランド電極相互間が外部リード線152,153に
よって接続されている。電極間隔は第12図(b)説明した
ようにL2dにパターンが形成されている。FIGS. 17 and 18 are development views of the flexible wiring board 7 effective for use in the embodiments of FIGS. 3, 4, 5, and 8, respectively. It is the direction of passage. Here, 5 1, 5 2 hot electrode 6 1, 6 2, 6
Reference numeral 3 is a ground electrode, and in FIG. 17, the hot electrodes are connected to each other and the ground electrodes are connected to each other by the patterns 14 1 and 14 2 of the flexible wiring board 7. Also, the 18th
In the figure, the external lead wires 15 1 connect the hot electrodes to each other, and the ground electrodes connect to each other by the external lead wires 15 2 and 15 3 . The electrode interval is a pattern formed on L 2 d as described in FIG. 12 (b).
発明の効果 以上のように本発明によると、の粒体の流れ検出器は、
粒体通過経路形成部材の内周面あるいは外周面に沿って
グランド電極とホット電極から成る一対以上の静電容量
検出用電極を設けたため、粒体通過経路中への検出用電
極の突出量が零かあるいは微量であるため、粒体の流れ
を妨げることなくその流れ状態判定できる。EFFECTS OF THE INVENTION As described above, according to the present invention, the particle flow detector of
Since more than one pair of capacitance detection electrodes consisting of a ground electrode and a hot electrode are provided along the inner peripheral surface or the outer peripheral surface of the particle passage route forming member, the amount of protrusion of the detection electrode into the particle passage route is reduced. Since it is zero or a very small amount, it is possible to determine the flow state without disturbing the flow of the particles.
更に本発明では、静電容量検出用電極のグランド電極と
ホット電極の粒体通過方向の間隔を測定対象粒体の粒子
径に略等しく構成したため、従来に比べて高感度で微小
な粒体であってもこの流れ状態を検出判定できるもので
ある。Furthermore, in the present invention, since the distance between the ground electrode of the capacitance detection electrode and the hot electrode in the particle passage direction is configured to be substantially equal to the particle diameter of the measurement target particle, it is possible to use a highly sensitive and minute particle as compared with the conventional one. Even if there is, this flow state can be detected and judged.
第1図は本発明の第1の実施例の要部斜視図、第2図は
第2の実施例の一部切欠き斜視図、第3図は第3の実施
例の要部斜視図、第4図は第4の実施例の一部切欠き斜
視図、第5図は第5の実施例と第6の実施例の概略斜視
図、第6図は第5図の平面図、第7図は第5図の具体例
を示す一部切欠き正面図、第8図は第7の実施例と第8
の実施例の概略斜視図、第9図は第8図の平面図、第10
図は通路形成部材と検出回路との位置関係を示す斜視
図、第11図は通路形成部材の取付姿勢を示す一部切欠き
斜視図、第12図と第13図および第14図は粒体粒子径と静
電容量検出用電極寸法の説明図、第15図は検出回路の構
成図、第16図は流れ状態に応じた第15図の要部波形図、
第17図と第18図はそれぞれフレキシブル配線基板の展開
図、第19図は従来の流れ検出器の要部斜視図、第20図は
第19図の水平断面図である。 2……粒体、3……パイプ、5……ホット電極、61,
62……グランド電極、7……フレキシブル配線基板、
9……シールドケース、11……検出回路、d……粒体粒
子径、L2……電極間隔。FIG. 1 is a perspective view of an essential part of the first embodiment of the present invention, FIG. 2 is a partially cutaway perspective view of the second embodiment, and FIG. 3 is a perspective view of an essential part of the third embodiment. FIG. 4 is a partially cutaway perspective view of the fourth embodiment, FIG. 5 is a schematic perspective view of the fifth and sixth embodiments, and FIG. 6 is a plan view of FIG. FIG. 8 is a partially cutaway front view showing a specific example of FIG. 5, and FIG. 8 is a seventh embodiment and an eighth view.
FIG. 9 is a schematic perspective view of the embodiment of FIG.
FIG. 11 is a perspective view showing the positional relationship between the passage forming member and the detection circuit, FIG. 11 is a partially cutaway perspective view showing the mounting posture of the passage forming member, and FIGS. 12, 13 and 14 are granules. Explanatory drawing of particle diameter and electrode size for capacitance detection, FIG. 15 is a configuration diagram of a detection circuit, FIG. 16 is a waveform diagram of essential parts of FIG. 15 according to a flow state,
17 and 18 are development views of the flexible wiring board, FIG. 19 is a perspective view of a main part of a conventional flow detector, and FIG. 20 is a horizontal sectional view of FIG. 2 ...... granules, 3 ...... pipe, 5 ...... hot electrode, 6 1,
6 2 ...... Ground electrode, 7 ...... Flexible wiring board,
9 ...... shield case, 11 ...... detecting circuit, d ...... granular particle size, L 2 ...... electrode spacing.
Claims (1)
周面に沿ってグランド電極とホット電極から成る一対以
上の静電容量検出用電極を設け、静電容量検出用電極間
の容量変化から粒体の流れ状態を検出する検出回路を設
けると共に、前記静電容量検出用電極のグランド電極と
ホット電極の粒体通過方向の間隔を測定対象粒体の粒子
径に略等しく構成した粒体の流れ検出器。1. A capacitance change between electrodes for capacitance detection, wherein a pair of electrodes for capacitance detection consisting of a ground electrode and a hot electrode are provided along the inner peripheral surface or the outer peripheral surface of a particle passage forming member. A particle which is provided with a detection circuit for detecting the flow state of the particle from the particle, and the distance between the ground electrode and the hot electrode of the capacitance detecting electrode in the particle passage direction is substantially equal to the particle diameter of the particle to be measured. Flow detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60218479A JPH0656386B2 (en) | 1985-09-30 | 1985-09-30 | Particle flow detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60218479A JPH0656386B2 (en) | 1985-09-30 | 1985-09-30 | Particle flow detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6276441A JPS6276441A (en) | 1987-04-08 |
| JPH0656386B2 true JPH0656386B2 (en) | 1994-07-27 |
Family
ID=16720574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60218479A Expired - Lifetime JPH0656386B2 (en) | 1985-09-30 | 1985-09-30 | Particle flow detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0656386B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9823176B2 (en) | 2015-06-19 | 2017-11-21 | Hyundai Motor Company | Particulate matter sensor |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5208544A (en) * | 1990-09-26 | 1993-05-04 | E. I. Du Pont De Nemours And Company | Noninvasive dielectric sensor and technique for measuring polymer properties |
| JPH08271301A (en) * | 1995-03-30 | 1996-10-18 | Chichibu Onoda Cement Corp | Flow measuring device for powder/grain |
| WO2012004621A1 (en) * | 2010-07-06 | 2012-01-12 | Bry-Air Prokon Sagl | Capacitance electrode structure for measuring moisture |
| JP6959633B2 (en) * | 2017-05-19 | 2021-11-02 | 長岡産業株式会社 | Charge measuring device, fluid manufacturing equipment, method for measuring the amount of electric charge in a fluid, and method for manufacturing a fluid |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748617A (en) * | 1980-09-08 | 1982-03-20 | Hitachi Ltd | Level detector for finely divided particles |
| JPS6059120U (en) * | 1983-09-27 | 1985-04-24 | サンクス株式会社 | capacitive sensor |
-
1985
- 1985-09-30 JP JP60218479A patent/JPH0656386B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9823176B2 (en) | 2015-06-19 | 2017-11-21 | Hyundai Motor Company | Particulate matter sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6276441A (en) | 1987-04-08 |
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