JPH0657845B2 - Operating method of degreasing sintering furnace - Google Patents
Operating method of degreasing sintering furnaceInfo
- Publication number
- JPH0657845B2 JPH0657845B2 JP9369986A JP9369986A JPH0657845B2 JP H0657845 B2 JPH0657845 B2 JP H0657845B2 JP 9369986 A JP9369986 A JP 9369986A JP 9369986 A JP9369986 A JP 9369986A JP H0657845 B2 JPH0657845 B2 JP H0657845B2
- Authority
- JP
- Japan
- Prior art keywords
- degreasing
- furnace
- sintering
- temperature
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005238 degreasing Methods 0.000 title claims description 46
- 238000005245 sintering Methods 0.000 title claims description 46
- 238000011017 operating method Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 claims description 21
- 239000012535 impurity Substances 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 この発明は、脱脂焼結炉により被処理物に対して脱脂と
焼結を連続的に行う場合の操業方法に関するものであ
る。TECHNICAL FIELD The present invention relates to an operating method in which degreasing and sintering are continuously performed on an object to be treated by a degreasing and sintering furnace.
「従来の技術」 セラミックスや金属粉末等を焼結する場合には、被処理
物に対して脱脂および焼結を連続的に行うことのできる
脱脂焼結炉を用いることが多い。"Prior Art" When sintering ceramics, metal powder, or the like, a degreasing and sintering furnace that can continuously degrease and sinter an object to be treated is often used.
その場合の操業手順は、所定時間の脱脂工程を経て焼結
工程に移行するようにしていることが一般的である。す
なわち、まず炉内を所定の脱脂温度としてその状態を所
定時間保ち、被処理物に含有されている不純物たとえば
バインダーとして用いられているワックス等を蒸発させ
て炉内から排気し(脱脂工程)、その後、炉内をさらに
加熱して焼結温度に昇温するとともに、必要に応じて炉
内を所定の圧力に調整し、その状態を所定時間保って焼
結を行う(焼結工程)ようにしている。In that case, the operating procedure is generally such that a degreasing process for a predetermined time is followed by a sintering process. That is, first, the furnace is kept at a predetermined degreasing temperature for a predetermined time, and impurities contained in the object to be treated, such as wax used as a binder, are evaporated and exhausted from the furnace (degreasing step), After that, the inside of the furnace is further heated to raise the sintering temperature, and if necessary, the inside of the furnace is adjusted to a predetermined pressure, and the state is maintained for a predetermined time for sintering (sintering step). ing.
ところで上記の場合、特に脱脂工程の所要時間を正確に
設定することが重要である。すなわち、脱脂工程の時間
が短いと不純物が充分に排気されないまま焼結工程に移
行してしまって焼結成品の品質に悪影響を及ぼしてしま
うし、逆に脱脂工程の時間が長いと操業時間が長くなっ
て生産性が低下してしまうことになる。In the above case, it is important to accurately set the time required for the degreasing process. That is, if the time of the degreasing process is short, the impurities move to the sintering process without being sufficiently exhausted, which adversely affects the quality of the sintered product, and conversely, if the time of the degreasing process is long, the operating time is long. It will become long and productivity will decrease.
従来においては、そのような脱脂時間の設定は、経験に
基づいて人為的にその都度行っていることが実情であ
る。Conventionally, it is the actual situation that such degreasing time is artificially set each time based on experience.
「発明が解決しようとする問題点」 しかしながら、脱脂に要する時間は被処理物に含有され
ているワックス等の量に左右されることは勿論である
が、被処理物の大きさや形状によっても異なるものであ
り、正確は脱脂時間の設定は必ずしも容易ではない。し
たがって、従来の経験に基づく脱脂時間の設定では、正
確かつきめ細かな設定を行うことは極めて困難であり、
往々にして焼結製品の品質低下を招いたり、あるいはそ
れを避けるために必要以上に脱脂時間を長くし、そのた
めに操業時間がいたずらに長くなってしまうという問題
を生じていた。"Problems to be Solved by the Invention" However, the time required for degreasing obviously depends on the amount of wax contained in the object to be treated, but also depends on the size and shape of the object to be treated. However, accurately, it is not always easy to set the degreasing time. Therefore, it is extremely difficult to set the degreasing time based on the conventional experience accurately and precisely.
In many cases, the quality of the sintered product is deteriorated, or in order to avoid it, the degreasing time is unnecessarily lengthened, which causes a problem that the operation time becomes unnecessarily long.
この発明は上記の事情に鑑みてなされたもので、焼結製
品は品質を確保し、また操業時間の短縮を図ることので
きる脱脂焼結炉の操業方法を提供することを目的とす
る。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method for operating a degreasing and sintering furnace that can ensure the quality of a sintered product and shorten the operating time.
「問題点を解決するための手段」 この発明は、炉内を脱脂温度に保持して被処理物に含有
されている不純物を蒸発させて除去する脱脂工程を経
て、炉内を焼結温度に昇温して被処理物を焼結する焼結
工程に移行する脱脂焼結炉の操業方法において、脱脂工
程の過程で炉内の不純物濃度を測定し、その測定結果に
基づいて炉内の昇温を開始して焼結工程に移行すること
を特徴としている。"Means for Solving Problems" The present invention has a degreasing process in which a furnace is kept at a degreasing temperature to evaporate and remove impurities contained in an object to be treated, and then the furnace is heated to a sintering temperature. In the operating method of the degreasing and sintering furnace in which the temperature is raised to the sintering step of sintering the object to be processed, the impurity concentration in the furnace is measured during the degreasing step, and the temperature inside the furnace is raised based on the measurement result. It is characterized by starting the temperature and shifting to the sintering process.
「実施例」 以下、この発明の実施例を第1図および第2図を参照し
て説明する。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
まず、第2図を参照して、この実施例の方法に用いる脱
脂焼結炉1の構成について説明する。この脱脂焼結炉1
は、炉体2の内部に加熱室3が配設され、その加熱室3
の内部に装入した被処理物4をヒーター5によって加熱
することによって脱脂および焼結を行うようになってい
る。図中の符号6は加熱室3内の不活性ガス等のキャリ
アガスを供給するためのガス供給管、7はガス供給装置
である。このガス供給装置7は、ガス供給量を調節する
ことによって炉内圧力を調節できるようになっている。
また、図中の符号8は、脱脂工程において被処理物4か
ら発生する不純物のガスをキャリアガスとともに排気す
るための排気管であり、9は排気装置である。以上の構
成は従来一般の脱脂焼結炉と同様である。First, the configuration of the degreasing and sintering furnace 1 used in the method of this embodiment will be described with reference to FIG. This degreasing and sintering furnace 1
Is provided with a heating chamber 3 inside the furnace body 2.
The object 4 to be treated placed inside the furnace is heated by a heater 5 to degrease and sinter. Reference numeral 6 in the drawing is a gas supply pipe for supplying a carrier gas such as an inert gas in the heating chamber 3, and reference numeral 7 is a gas supply device. The gas supply device 7 can adjust the pressure in the furnace by adjusting the gas supply amount.
Reference numeral 8 in the drawing is an exhaust pipe for exhausting the gas of impurities generated from the object to be treated 4 in the degreasing step together with the carrier gas, and 9 is an exhaust device. The above configuration is the same as that of a conventional general degreasing sintering furnace.
上記構成に加えてこの脱脂焼結炉1では、排気管8の途
中に不純物のガス濃度を計測し得るセンサ10が取り付
けられており、このセンサ10の出力信号は制御装置1
1に送られるようになっている。この制御装置11は、
センサ10からの信号に基づいて上記ヒーター5の発熱
量を変化させて炉内温度を制御できるとともに、上記ガ
ス供給装置7を制御することにより炉内圧力も制御でき
るようになっている。In addition to the above configuration, in this degreasing and sintering furnace 1, a sensor 10 that can measure the gas concentration of impurities is attached in the middle of the exhaust pipe 8, and the output signal of this sensor 10 is the control device 1.
It will be sent to 1. This control device 11
The furnace temperature can be controlled by changing the heat generation amount of the heater 5 based on the signal from the sensor 10, and the furnace pressure can also be controlled by controlling the gas supply device 7.
次に、上記の脱脂焼結炉1を用いて被処理物4に対して
脱脂および焼結を連続的に行う場合の操業手順につい
て、第1図を参照して説明する。第1図はこの操業手順
における炉内の不純物のガス濃度C、炉内温度T、炉内
圧力Pの経時変化を、共通の縦軸上に重ねて示したもの
である。横軸は操業開始以後の経過時間tである。Next, an operating procedure in the case where the degreasing and sintering furnace 1 is used to continuously degrease and sinter the object 4 will be described with reference to FIG. FIG. 1 shows changes over time in the gas concentration C of impurities in the furnace, the temperature T in the furnace, and the pressure P in the furnace in this operating procedure, which are superimposed on the common vertical axis. The horizontal axis represents the elapsed time t after the start of operation.
第1図に示すように、被処理物4を加熱室3内に装入し
たら、まずヒーター5による加熱を開始し、炉内温度T
を所定の脱脂温度T1とする。また同時に排気装置9によ
って排気を行って炉内を所定の脱脂圧力P1(真空)に保
つとともに、センサ10によってその排気中の不純物の
ガス濃度Cを計測する。このガス濃度Cは当初は高まっ
ていくが排気に伴って次第に低下していくことになる。As shown in FIG. 1, when the object to be treated 4 is loaded into the heating chamber 3, first heating by the heater 5 is started to set the temperature T in the furnace.
To a predetermined degreasing temperature T 1 . At the same time, the exhaust device 9 exhausts gas to maintain the inside of the furnace at a predetermined degreasing pressure P 1 (vacuum), and the sensor 10 measures the gas concentration C of the impurities in the exhaust gas. The gas concentration C initially increases, but gradually decreases with exhaust.
そして、ガス濃度Cが所定の値C1になったことをセンサ
10が検出したら、その時点t1で制御装置11によりヒ
ーター5の発熱量を増大させ、炉内の昇温を開始する。
そして炉内温度Tが所定の焼結温度T2となったらその状
態を保持する。なお、この焼結温度T2には炉内圧力Pが
焼結圧力P2となる時点t3(後述)以前に、あるいはそれ
と同時に到達させるようにする。また、上記のガス濃度
C1の値は、不純物の排気能力等を勘案して設定すれば良
い。When the sensor 10 detects that the gas concentration C has reached the predetermined value C 1 , the controller 11 increases the heat generation amount of the heater 5 at the time t 1 to start the temperature rise in the furnace.
Then, when the temperature T in the furnace reaches a predetermined sintering temperature T 2 , that state is maintained. The sintering temperature T 2 should be reached before the time t 3 (described later) when the furnace pressure P becomes the sintering pressure P 2 or at the same time. Also, the above gas concentration
The value of C 1 may be set in consideration of the exhaust capacity of impurities.
それから、センサ10がガス濃度Cがほぼゼロとなった
ことを検出した時点t2で、制御装置11によりガス供給
装置7を制御して炉内圧力Pを高めていき、その炉内圧
力Pが所定の焼結圧力P2となったらその状態を保持す
る。Then, at time t 2 when the sensor 10 detects that the gas concentration C has become almost zero, the control device 11 controls the gas supply device 7 to increase the reactor internal pressure P, and the reactor internal pressure P increases. When the predetermined sintering pressure P 2 is reached, the state is maintained.
こうすることにより、炉内圧力がP2となった時点t3(こ
のときには既に炉内温度Tは焼結温度T2となっている)
で自動的に焼結工程に移行することになる。そして、そ
の状態で所定時間焼結を行った後、ヒーター5による加
熱を停止して炉内を冷却すれば操業は完了する。By doing so, the time t 3 at which the furnace pressure reaches P 2 (at this time, the furnace temperature T has already reached the sintering temperature T 2 )
Will automatically shift to the sintering process. Then, after performing sintering for a predetermined time in that state, heating by the heater 5 is stopped and the inside of the furnace is cooled to complete the operation.
以上の手順によれば、脱脂温度T1から焼結温度T2への昇
温開始および脱脂圧力P1から焼結圧力P2への昇圧開始
が、すなわち脱脂工程から焼結工程への移行が、センサ
10によるガス濃度Cの計測結果に基づいて自動的に、
かつ最適な時点で行なわれる。したがって経験に頼って
脱脂時間を予め設定しておく場合にように、充分に脱脂
がなされていないにも拘わらず焼結に移行してしまった
り、逆に必要以上に脱脂時間を長くすることがなく、焼
結成品の品質が確保されるとともに、操業時間がいたず
らに長くなってしまうことがない。According to the above procedure, the temperature starts to be increased from the degreasing temperature T 1 to the sintering temperature T 2 and the pressure increase from the degreasing pressure P 1 to the sintering pressure P 2 , that is, the transition from the degreasing process to the sintering process is performed. , Automatically based on the measurement result of the gas concentration C by the sensor 10,
And at the optimal time. Therefore, as in the case where the degreasing time is set in advance based on experience, it is possible to shift to sintering despite insufficient degreasing, or conversely, to extend the degreasing time longer than necessary. In addition, the quality of the sintered product is ensured, and the operating time does not become unnecessarily long.
また、形状や大きさが異なる被処理物を連続的に処理す
る際にもその都度脱脂時間の設定を変更する必要がな
く、必要かつ充分な脱脂を行った後に自動的に焼結に移
行するので、操業の簡便化および適性化を充分に図るこ
とができる。Further, even when continuously processing objects having different shapes and sizes, it is not necessary to change the setting of the degreasing time each time, and after the necessary and sufficient degreasing, the process automatically shifts to sintering. Therefore, it is possible to sufficiently simplify the operation and optimize the operation.
なお、上記実施例では炉内を加圧した状態で焼結を行う
ようにし、昇圧開始時期もセンサによって制御するよう
にしたが、常圧あるいは真空状態で焼結する場合にも適
用できるし、また圧力制御については必ずしもセンサに
よることはない。It should be noted that, in the above-mentioned embodiment, the sintering is performed in a state where the pressure in the furnace is increased, and the pressurization start timing is also controlled by the sensor, but it can be applied to the case of sintering under normal pressure or vacuum, Further, pressure control does not always depend on a sensor.
また、この発明の実施にあたっては、第2図に示した脱
脂焼結炉に限らず適宜構成の脱脂焼結炉を用いることが
できる。たとえば上記では制御装置によって温度設定お
よび圧力設定を自動的に行うようにしたが、センサによ
る計測結果を監視することによって手動で行うようにし
ても良い。またセンサは炉体内に取り付けても良い。Further, in carrying out the present invention, not only the degreasing and sintering furnace shown in FIG. 2 but also a degreasing and sintering furnace having an appropriate structure can be used. For example, in the above, the temperature setting and the pressure setting are automatically performed by the control device, but they may be manually performed by monitoring the measurement result by the sensor. The sensor may be mounted inside the furnace.
「発明の効果」 以上で詳細に説明したように、この発明によれば、不純
物濃度を測定しその測定結果に基づいて昇温を開始して
焼結工程に移行するので、その移行を最適な時点で行う
ことができ、したがって、焼結成品の品質を確保できる
とともに、操業時間の短縮を図ることができるという効
果を奏する。[Effect of the Invention] As described in detail above, according to the present invention, the impurity concentration is measured, and the temperature rise is started based on the measurement result to shift to the sintering step. Therefore, the quality of the sintered product can be ensured and the operation time can be shortened.
第1図および第2図はこの発明の実施例を示すもので、
第1図はこの実施例の手順における不純物濃度、炉内温
度、炉内圧力の経時変化を現した図、第2図はこの実施
例に用いる脱脂焼結炉の概略構成を示す断面図である。 1……脱脂焼結炉、10……センサ、T1……脱脂温度、
T2……焼結温度。1 and 2 show an embodiment of the present invention,
FIG. 1 is a diagram showing changes with time in the impurity concentration, furnace temperature, and furnace pressure in the procedure of this embodiment, and FIG. 2 is a sectional view showing a schematic configuration of a degreasing and sintering furnace used in this embodiment. . 1 ... Degreasing sintering furnace, 10 ... Sensor, T 1 ... Degreasing temperature,
T 2 …… Sintering temperature.
Claims (1)
されている不純物を蒸発させて除去する脱脂工程を経
て、炉内を焼結温度に昇温して被処理物を焼結する焼結
工程に移行する脱脂焼結炉の操業方法において、脱脂工
程の過程で炉内の不純物濃度を測定し、その測定結果に
基づいて炉内の昇温を開始して焼結工程に移行すること
を特徴とする脱脂焼結炉の操業方法。1. A furnace is heated to a sintering temperature to burn the object to be treated through a degreasing step of removing impurities contained in the object to be treated by evaporating and removing impurities contained in the object to be treated at the degreasing temperature. In the operating method of the degreasing sintering furnace that shifts to the sintering process that binds, the impurity concentration in the furnace is measured in the process of the degreasing process, and the temperature rise in the furnace is started based on the measurement result to start the sintering process. A method for operating a degreasing and sintering furnace, which is characterized by a transition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9369986A JPH0657845B2 (en) | 1986-04-23 | 1986-04-23 | Operating method of degreasing sintering furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9369986A JPH0657845B2 (en) | 1986-04-23 | 1986-04-23 | Operating method of degreasing sintering furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62250103A JPS62250103A (en) | 1987-10-31 |
| JPH0657845B2 true JPH0657845B2 (en) | 1994-08-03 |
Family
ID=14089649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9369986A Expired - Lifetime JPH0657845B2 (en) | 1986-04-23 | 1986-04-23 | Operating method of degreasing sintering furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0657845B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5617336B2 (en) * | 2010-05-11 | 2014-11-05 | セイコーエプソン株式会社 | Method for manufacturing sintered body |
| JP6631080B2 (en) * | 2015-08-11 | 2020-01-15 | セイコーエプソン株式会社 | Method for producing sintered body and heating furnace |
| JP7474413B2 (en) * | 2020-09-29 | 2024-04-25 | 株式会社島津製作所 | Degreasing furnace and degreasing method |
| CN114284179B (en) * | 2021-12-24 | 2023-07-11 | 南京屹立芯创半导体科技有限公司 | Temperature adjusting method of pressure oven and pressure oven |
-
1986
- 1986-04-23 JP JP9369986A patent/JPH0657845B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62250103A (en) | 1987-10-31 |
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