JPH0658333B2 - Conductivity measuring method and measuring apparatus therefor - Google Patents
Conductivity measuring method and measuring apparatus thereforInfo
- Publication number
- JPH0658333B2 JPH0658333B2 JP32368988A JP32368988A JPH0658333B2 JP H0658333 B2 JPH0658333 B2 JP H0658333B2 JP 32368988 A JP32368988 A JP 32368988A JP 32368988 A JP32368988 A JP 32368988A JP H0658333 B2 JPH0658333 B2 JP H0658333B2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- voltage
- circuit
- measuring
- conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000001514 detection method Methods 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000005259 measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は被測定溶液に浸漬された一対の電極に交流電圧
を印加してその間に流れる電流により溶液の電導度を測
定する方法および測定装置に関する、 〔従来の技術〕 従来、電導度を測定して液体成分、例えば水分の検知な
どに応用することが知られており、かかる場合、被測定
溶液に浸漬された一対の電極間に一定の交流電圧を印加
して電極間電流を測定することにより行なわれているの
が通常である。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a method and a measuring apparatus for applying an AC voltage to a pair of electrodes immersed in a solution to be measured and measuring the electrical conductivity of the solution by the current flowing between them. [Related Art] [Prior Art] Conventionally, it is known to measure the electric conductivity and apply it to the detection of a liquid component such as water, and in such a case, a certain amount of electricity is applied between a pair of electrodes immersed in a solution to be measured. This is usually done by applying an AC voltage and measuring the interelectrode current.
しかしながら、例えば無水弗酸などに含まれる水分の規
格は20ppm以下などと次第に厳しくなってきており、従
って電導計の測定範囲が従来に比べ格段に広範囲のもの
が要求されるに致っており従来の定電圧方式では、この
ような微量成分の検知は勿論、広範囲に測定することも
困難であった。However, the standard of water contained in hydrofluoric acid anhydride, for example, is gradually becoming stricter than 20ppm, so that the measuring range of conductivity meter is required to be much wider than the conventional one. In the constant voltage method, it was difficult to detect such a small amount of component and to measure in a wide range.
本発明はこのような点に鑑みてなされたもので、微量な
液体成分の検知を可能にするとともに測定範囲をも広げ
た電導測定方法およびその測定装置を提供することを目
的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a conductivity measuring method and a measuring apparatus therefor capable of detecting a minute amount of a liquid component and widening a measuring range.
本発明は、被測定溶液中に浸漬した一対の電極間に交流
電圧を印加して電極間に流れる電流によって前記溶液の
電導度を測定する方法において、電極間で消費される電
力が一定になるように、前記一対の電極間に印加される
交流電圧を制御することを特徴とするもので、具体的な
測定装置は、被測定溶液に浸漬される一対の電極間に交
流電圧を印加する電圧制御回路と、電極間に流れる電流
を測定する電流検出回路と、該電流検出回路の信号を対
数に変換する対数変換回路と、電極間で消費れれる電力
を演算する電力演算回路と、該演算回路の出力と基準電
力を比較してその差に応じた信号を電圧制御回路に出力
する比較回路とを具備せしめたことを特徴とするもので
ある。The present invention is a method of applying an AC voltage between a pair of electrodes immersed in a solution to be measured to measure the electrical conductivity of the solution by a current flowing between the electrodes, in which the power consumed between the electrodes is constant. As described above, the AC voltage applied between the pair of electrodes is controlled, and the specific measuring device is a voltage for applying the AC voltage between the pair of electrodes immersed in the solution to be measured. A control circuit, a current detection circuit that measures a current flowing between the electrodes, a logarithmic conversion circuit that converts the signal of the current detection circuit into a logarithm, a power calculation circuit that calculates the power consumed between the electrodes, and the calculation. It is characterized by including a comparison circuit for comparing the output of the circuit and the reference power and outputting a signal corresponding to the difference to the voltage control circuit.
無水弗酸中の水分を検知する電導度測定を例にとって説
明する。A description will be given by taking an example of electric conductivity measurement for detecting water in hydrofluoric anhydride.
一対の電極を無水弗酸中に浸漬してその間の抵抗をR
(Ω)とすると、弗酸中の電導度K(μS/cm)は (C:セル定数)となり、水分量は電導度に比例するの
で電導度Kを測定すればよい。すなわち1.5μS/cm が
0.1ppm、15000 μS/cm が1000ppm に相当する。Immersing a pair of electrodes in anhydrous hydrofluoric acid and measuring the resistance between them by R
(Ω), the conductivity K (μS / cm) in hydrofluoric acid is (C: cell constant), and the water content is proportional to the electrical conductivity, so the electrical conductivity K may be measured. That is, 1.5 μS / cm
0.1 ppm and 15000 μS / cm correspond to 1000 ppm.
ここで検出電流すなわち電極間電流iは通常数mA〜数
mA/100であり、前記のセル定数は0.3〜0.5とすればよ
いので電導度1.5μS/cm のとき抵抗R=200 kΩ、
電極間電流i=0.05mA、電導度15000 μS/cm のとき
抵抗R=20Ω、電極間電流i=5mAとなるよう設定す
ると電極間で消費される電力(以下、電極間電力と略称
する)P(mW)はP=i2Rであるのでいずれも0.5m
Wと一定となる。この関係を一対の電極間に印加される
交流電圧(以下、電極間電圧と略称)Eと電極間電流i
との関係で示すと第2図のようになり、電導度がK=1.
5μS/cmのときにはE=10V、K=150μS/cm のとき
E=1V、K=15000 μS/cm のときE=0.1VとlogK
=log150-2logE なる関係を満足するような電圧を印加
することにより電極間電流は0.05mA〜5mAと10進2
桁 の好適な範囲で水分濃度を0.1ppmから1000ppm まで、10
進4桁の非常に広範囲に測定することができる。Here, the detected current, that is, the interelectrode current i is usually several mA to several mA / 100, and the cell constant may be 0.3 to 0.5. Therefore, when the electric conductivity is 1.5 μS / cm, the resistance R = 200 kΩ,
When the interelectrode current i = 0.05 mA, the electric conductivity is 15000 μS / cm, the resistance R = 20 Ω, and the interelectrode current i = 5 mA, the power consumed between the electrodes (hereinafter abbreviated as interelectrode power) P (MW) is P = i 2 R, so both are 0.5m
It becomes constant with W. This relationship is expressed by an alternating voltage (hereinafter abbreviated as interelectrode voltage) E applied between a pair of electrodes and an interelectrode current i.
It is as shown in Fig. 2 in terms of the relationship with, and the conductivity is K = 1.
E = 10 V when 5 μS / cm, E = 1 V when K = 150 μS / cm, E = 0.1 V and K when K = 15000 μS / cm
= Voltage150-2logE, the voltage between the electrodes is 0.05mA-5mA and the decimal value is 2
digit In the preferred range of water concentration from 0.1ppm to 1000ppm, 10
It can measure a very wide range of 4 digits.
これに対して従来の定電圧法で例えば0.1ppmの水分濃度
(電導度1.5μS/cm)を測定しようとすると定電圧を10V
(i=0.05mA)とする必要があり、そうすると水分濃度
1000 ppm(電導度15000 μS/cm)において電極間電流i
は の関係から電導度に比例するので500 mAとなり分極効
果が高く、発熱量(P=5W)も大きくなるので、誤差
が大きくなり、電極にも悪影響を与えるばかりか、0.05
mA〜500 mAの電流、すなわち10進4桁(500/0.05=1
04) を1レンジで測定する必要があり、実質的に不可能
である。電極間電流iを低くするために定電圧を低くす
ると電導度が小さいところは電極間電流iが大幅に小さ
くなってしまい検出が困難となり誤差が増大するととも
にやはり、10進4桁の電流を測定する必要があり実質的
に不可能である。On the other hand, with the conventional constant voltage method, for example, the water concentration of 0.1 ppm
If you try to measure (conductivity 1.5μS / cm), the constant voltage is 10V.
(i = 0.05 mA), so the water concentration
Electrode current i at 1000 ppm (conductivity 15000 μS / cm)
Is Since it is proportional to the electric conductivity, it becomes 500 mA and the polarization effect is high, and the calorific value (P = 5 W) also becomes large, so the error becomes large and not only the electrode is adversely affected, but 0.05
mA-500mA current, that is, 4 decimal digits (500 / 0.05 = 1
0 4 ) must be measured in one range, which is practically impossible. If the constant voltage is lowered to lower the inter-electrode current i, the inter-electrode current i will be greatly reduced in places where the electrical conductivity is small, making detection difficult and increasing the error as well as measuring the decimal 4-digit current. Is necessary and practically impossible.
また、本発明の方法によると、 となり、Pが一定であるのでK=Ai2(A:定数)、す
なわち logK∝2logiとなり、対数目盛で表示すること
ができる。Further, according to the method of the present invention, Since P is constant, K = Ai 2 (A: constant), that is, logK∝2logi, which can be displayed on a logarithmic scale.
以下、図面を参照しながら、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.
第1図は本発明の好適な実施例を示す回路構成図、第2
図は本発明の作用を説明するための電極間電圧E(V)と
電極間電流i(mA)の関係を示す図、第3図は本発明の
電導度測定装置における目盛板を示す。FIG. 1 is a circuit configuration diagram showing a preferred embodiment of the present invention, and FIG.
The figure shows the relationship between the interelectrode voltage E (V) and the interelectrode current i (mA) for explaining the operation of the present invention, and FIG. 3 shows the scale plate in the electric conductivity measuring apparatus of the present invention.
第1図に示すように本発明の電導度測定装置は一対の電
極1に交流電圧を印加する電圧調整機能を有する電圧制
御回路2と、電極1間に流れる電流を測定する電流検出
回路3と、この電流検出回路の出力信号を対数に変換す
る対数変換回路4と、電極間電圧E(V)と電極間電流i
(mA)に基づき電極間で消費される電力P(mW)(=E
i)を演算する電力演算回路5と、基準電力Po(mW)を
設定する基準電力設定回路6と電極間電力Pと基準電力
Poを比較してその差に応じた信号B(P−Po)(B:
定数)を電圧制御回路2に出力する比較回路7を少なく
とも具備し、その他図示しない各種計器に接続するため
の電流変換回路8など設けることができる。As shown in FIG. 1, the conductivity measuring apparatus of the present invention comprises a voltage control circuit 2 having a voltage adjusting function for applying an AC voltage to a pair of electrodes 1, and a current detection circuit 3 for measuring a current flowing between the electrodes 1. , A logarithmic conversion circuit 4 for converting the output signal of the current detection circuit into a logarithm, an interelectrode voltage E (V) and an interelectrode current i.
The electric power P (mW) (= E) consumed between the electrodes based on (mA)
i), a power calculation circuit 5 for calculating the reference power Po, a reference power setting circuit 6 for setting the reference power Po (mW), and a signal B (P-Po) corresponding to the difference between the interelectrode power P and the reference power Po. (B:
At least a comparison circuit 7 for outputting a constant) to the voltage control circuit 2 may be provided, and a current conversion circuit 8 for connecting to various instruments not shown may be provided.
このような構成の電導度測定装置を前述のように無水弗
酸中の水分濃度を測定する場合に適用するには、電極間
電力を0.5mWと一定になるように電導度K1.5μS/cm
〜15000μS/cmに応じて電極間電圧Eを10V〜0.1Vの
範囲で変え、そのときの電極間電流i(0.05mA〜5m
A)から第3図に示すような目盛板により電導度Kとと
もに0.1ppmから1000ppm までの水分濃度を検出すること
ができるもので、また、精度も0.1ppm〜500ppmの範囲で
±2%以内で高精度であり、500ppm〜1000ppm の範囲内
でも±4%以内の精度で充分実用に供しうることを確認
した。In order to apply the electric conductivity measuring device having such a constitution to the case of measuring the water concentration in the anhydrous hydrofluoric acid as described above, the electric conductivity K1.5 μS / cm should be kept constant at 0.5 mW between the electrodes.
The interelectrode voltage E is varied in the range of 10 V to 0.1 V according to ˜15000 μS / cm, and the interelectrode current i at that time (0.05 mA to 5 m
It is possible to detect the water concentration from 0.1ppm to 1000ppm with the conductivity K by the scale plate as shown in Fig. 3 from A), and the accuracy is within ± 2% in the range of 0.1ppm to 500ppm. It was confirmed that it is highly accurate and can be put to practical use with an accuracy within ± 4% even within the range of 500 ppm to 1000 ppm.
以上、好適な実施例により説明したが、本発明はこれに
限定されることなく、種々の応用が可能なものである。Although the preferred embodiment has been described above, the present invention is not limited to this, and various applications are possible.
被測定溶液についてい、弗酸以外にも、土壌中の水質測
定など特に広範囲の測定範囲が要求される場合に好適で
あるが、測定範囲が狭い場合であっても応用できること
は言うまでもない。The solution to be measured is suitable when a wide range of measurement is required in addition to hydrofluoric acid, such as measurement of water quality in soil, but it is needless to say that it can be applied even when the range of measurement is narrow.
電圧制御回路について、一対の電極に印加する波形は方
形波等の交流電圧でもよいが、正弦波形の交流電圧が誤
差の要因となる直流のドリフト分が少なく好ましい。ま
た、電圧を制御する方法は発振回路の振幅を変える方
法、電圧降下方式において抵抗を変える方法、SCR
(シリコン制御整流素子)の点孤角を制御する方法など
が使用可能である。In the voltage control circuit, the waveform applied to the pair of electrodes may be an AC voltage such as a square wave, but an AC voltage having a sine waveform is preferable because it has less DC drift that causes an error. Further, the method of controlling the voltage is to change the amplitude of the oscillation circuit, the method of changing the resistance in the voltage drop method,
A method of controlling the firing angle of the (silicon-controlled rectifying element) can be used.
各種の回路について、特に電力演算回路については温度
による特性の変化を補償するための温度補償回路を付属
させることさらに好ましい。It is more preferable to attach a temperature compensating circuit for compensating a change in characteristics due to temperature to various circuits, particularly to a power operation circuit.
本発明は一対の電極間で消費される電力が一定になるよ
うに電極間電圧を制御して印加するので単一レンジで10
進4桁の広範囲の測定、微小電導度の測定を可能にする
ばかりか、発熱量も一定であるので、発熱による電極等
への悪影響を除去するとともに表示も広範囲の測定範囲
を対数目盛で行なうことができるなど著効を奏するもの
である。In the present invention, since the voltage between the electrodes is controlled and applied so that the power consumed between the pair of electrodes is constant,
Not only is it possible to measure a wide range of four digits and microconductivity, but the calorific value is also constant, so the adverse effect on the electrodes etc. due to heat generation is eliminated and the display is performed on a logarithmic scale over a wide range. It is very effective as it can.
第1図は本発明の好適な実施例を示す回路構成図、第2
図は本発明の作用を説明するための電極間電圧E(V)と
電極間電流i(mA)の関係を示す図、第3図は本発明の
電導度測定装置における目盛板を示す。 1……一対の電極、2……電圧制御回路 3……電流検出回路、4……対数変換回路 5……電力演算回路、6……基準電力設定回路 7……比較回路FIG. 1 is a circuit configuration diagram showing a preferred embodiment of the present invention, and FIG.
The figure shows the relationship between the interelectrode voltage E (V) and the interelectrode current i (mA) for explaining the operation of the present invention, and FIG. 3 shows the scale plate in the electric conductivity measuring apparatus of the present invention. 1 ... Pair of electrodes, 2 ... Voltage control circuit 3 ... Current detection circuit, 4 ... Logarithmic conversion circuit 5 ... Power calculation circuit, 6 ... Reference power setting circuit 7 ... Comparison circuit
Claims (2)
流電圧を印加して電極間に流れる電流によって前記溶液
の電導度を測定する方法において、電極間で消費される
電力が一定になるように、前記一対の電極間に印加され
る交流電圧を制御することを特徴とする電導度測定方
法。1. A method of measuring an electric conductivity of a solution by applying an AC voltage between a pair of electrodes immersed in a solution to be measured and measuring a conductivity of the solution by a current flowing between the electrodes. So that the AC voltage applied between the pair of electrodes is controlled.
流電圧を印加する電圧制御回路と、電極間に流れる電流
を測定する電流検出回路と、該電流検出回路の出力信号
を対数に変換する対数変換回路と、電極間で消費される
電力を演算する電力演算回路と、該演算回路の出力と基
準電力を比較してその差に応じた信号を電圧制御回路に
出力する比較回路とを具備せしめたことを特徴とする電
導度測定装置。2. A voltage control circuit for applying an AC voltage between a pair of electrodes immersed in a solution to be measured, a current detection circuit for measuring a current flowing between the electrodes, and an output signal of the current detection circuit in logarithm. A logarithmic conversion circuit for converting, a power calculation circuit for calculating the power consumed between the electrodes, and a comparison circuit for comparing the output of the calculation circuit and the reference power and outputting a signal according to the difference to the voltage control circuit. An electric conductivity measuring device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32368988A JPH0658333B2 (en) | 1988-12-23 | 1988-12-23 | Conductivity measuring method and measuring apparatus therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32368988A JPH0658333B2 (en) | 1988-12-23 | 1988-12-23 | Conductivity measuring method and measuring apparatus therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02170040A JPH02170040A (en) | 1990-06-29 |
| JPH0658333B2 true JPH0658333B2 (en) | 1994-08-03 |
Family
ID=18157499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32368988A Expired - Lifetime JPH0658333B2 (en) | 1988-12-23 | 1988-12-23 | Conductivity measuring method and measuring apparatus therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0658333B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5509358B1 (en) * | 2013-02-12 | 2014-06-04 | 株式会社 堀場アドバンスドテクノ | Specific resistance measuring circuit, specific resistance measuring apparatus, liquid sample management method, and liquid sample management system |
| WO2014126035A1 (en) * | 2013-02-12 | 2014-08-21 | 株式会社堀場アドバンスドテクノ | Resistivity-measuring circuit, cell for measuring liquid sample, resistivity-measuring apparatus, liquid sample control method and liquid sample control system |
-
1988
- 1988-12-23 JP JP32368988A patent/JPH0658333B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5509358B1 (en) * | 2013-02-12 | 2014-06-04 | 株式会社 堀場アドバンスドテクノ | Specific resistance measuring circuit, specific resistance measuring apparatus, liquid sample management method, and liquid sample management system |
| WO2014126035A1 (en) * | 2013-02-12 | 2014-08-21 | 株式会社堀場アドバンスドテクノ | Resistivity-measuring circuit, cell for measuring liquid sample, resistivity-measuring apparatus, liquid sample control method and liquid sample control system |
| US10082477B2 (en) | 2013-02-12 | 2018-09-25 | Horiba Advanced Techno, Co., Ltd. | Resistivity-measuring circuit, cell for measuring liquid sample, resistivity-measuring apparatus, liquid sample control method, and liquid sample control system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02170040A (en) | 1990-06-29 |
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