JPH0659575B2 - Method of joining metal and ceramics - Google Patents
Method of joining metal and ceramicsInfo
- Publication number
- JPH0659575B2 JPH0659575B2 JP26681885A JP26681885A JPH0659575B2 JP H0659575 B2 JPH0659575 B2 JP H0659575B2 JP 26681885 A JP26681885 A JP 26681885A JP 26681885 A JP26681885 A JP 26681885A JP H0659575 B2 JPH0659575 B2 JP H0659575B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramics
- joining
- layer
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 105
- 239000002184 metal Substances 0.000 title claims description 105
- 239000000919 ceramic Substances 0.000 title claims description 65
- 238000000034 method Methods 0.000 title claims description 29
- 239000000463 material Substances 0.000 claims description 26
- 238000005219 brazing Methods 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 229910000531 Co alloy Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 102200082816 rs34868397 Human genes 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 この発明は、金属とセラミックスとの接合方法に関する
ものである。The present invention relates to a method for joining metal and ceramics.
「従来の技術」 周知のように、摩耗作用を頻繁に受ける金属部材（金属
母材）に対しては、一部にセラミックスを用いて部材の
耐摩耗性，耐熱性等の向上を図る手段がとられている。"Prior art" As is well known, for a metal member (metal base material) that is frequently subjected to wear, there is a means to improve wear resistance and heat resistance of the member by using ceramics in part. It is taken.
従来、上記のような金属とセラミックスとの接合方法
は、第６図に示すように、金属母材１とセラミックス２
とを金属中間層３を介して接合一体化するものであっ
た。この接合の具体的方法としては、主に次の３つの方
法が用いられている。まず、第１の方法は、セラミック
ス２の接合面に予め３０〜６０μｍ程度の厚みのメタラ
イジング層を形成しておき、このセラミックス２に前記
金属中間層３をロウ付するとともにこの金属中間層３を
金属母材１にロウ付する方法である。また、第２の方法
は、金属母材１の接合面には金属用のロウ材を塗布する
とともに、セラミックス２にはメタライズ用のロウ材を
塗布し、これらの間に金属中間層３を介装し、これらを
加熱することによってロウ付、一体化する方法である。
そして、第３の方法は、金属母材１とセラミックス２と
の間の金属中間層３の材質を軟質合金もしくは低膨張性
金属から構成し、これら３者を加圧下で加熱し、金属中
間層３をそれぞれ金属母材１およびセラミックス２中に
拡散させ、接合する方法である。Conventionally, as shown in FIG. 6, the method of joining the metal and the ceramics as described above is performed by using the metal base material 1 and the ceramics 2 as shown in FIG.
And were joined and integrated via the metal intermediate layer 3. The following three methods are mainly used as specific methods for this joining. First, in the first method, a metalizing layer having a thickness of about 30 to 60 μm is formed in advance on the joint surface of the ceramics 2, and the metal intermediate layer 3 is brazed to the ceramics 2 and the metal intermediate layer 3 is formed. Is a method of brazing the metal base material 1. In the second method, a brazing material for metal is applied to the joint surface of the metal base material 1, a brazing material for metallization is applied to the ceramics 2, and a metal intermediate layer 3 is interposed between them. It is a method of mounting and brazing by heating these and integrating them.
Then, the third method is that the material of the metal intermediate layer 3 between the metal base material 1 and the ceramics 2 is made of a soft alloy or a low expansion metal, and these three are heated under pressure to form the metal intermediate layer. 3 is diffused into the metal base material 1 and the ceramics 2, respectively, and joined.
上記金属中間層３としては、Ｃｕ，Ａｌ，ＮｉやＡｇ等
の貴金属、そしてこれら単体金属を含んでなる軟質合
金、また、Ｆｅ・Ｎｉ・Ｃｏ合金、Ｆｅ・Ｎｉ合金、
Ｗ，Ｍｏ等の合金あるいは単体の低熱膨張性金属が使用
されている。As the metal intermediate layer 3, a noble metal such as Cu, Al, Ni or Ag, and a soft alloy containing these simple metals, Fe.Ni.Co alloy, Fe.Ni alloy,
Alloys such as W and Mo or simple low thermal expansion metals are used.
上記接合方法において、接合強度はセラミックス２と金
属中間層３との接合面積に比例することが知られてい
る。また、金属母材１とセラミックス２との間にかかる
応力を緩和するためには、金属中間層３としてはある程
度以上の厚みが必要であるが、金属中間層３のセラミッ
クス２への影響を考える場合、この金属中間層３の厚み
は薄い方が好ましいことになる。従って、現状におい
て、セラミックス２に直接接合しているメタライジング
層などは上記したように３０〜６０μｍ程度の薄さに形
成されている。In the above joining method, it is known that the joining strength is proportional to the joining area between the ceramics 2 and the metal intermediate layer 3. Further, in order to relieve the stress applied between the metal base material 1 and the ceramics 2, the metal intermediate layer 3 needs to have a certain thickness or more, but the influence of the metal intermediate layer 3 on the ceramics 2 is considered. In this case, it is preferable that the thickness of the metal intermediate layer 3 is thin. Therefore, in the present situation, the metallizing layer or the like directly bonded to the ceramics 2 is formed as thin as about 30 to 60 μm as described above.
「発明が解決しようとする問題点」 ところで、上記従来の金属とセラミックスとの接合方法
には、下記のような問題点があり、その解決が望まれて
いる。"Problems to be Solved by the Invention" By the way, the above-described conventional method of joining metal and ceramics has the following problems, and the solution thereof is desired.
すなわち、上記接合方法においては、第７図に示すよう
に、通常は接合強度を上げるためにセラミックス２の接
合側の面２ａのほぼ全域を覆うように金属中間層３を形
成し、接合している。ところがこのような構造において
は、熱膨張率の大きい金属母材１の冷却収縮に伴なって
金属中間層３にかかる引張り応力は、図中矢印のよう
に、接合部分の外周部においては各辺の中央に向って働
くことになり、その結果、金属中間層３の角部Ｃ…に最
も大きな引張り応力が働く、そのため、引張り応力に対
して弱いセラミックス２は、上記角部Ｃに相当する部分
に応力集中が生じてクラックが発生し、剥離してしまう
ことがしばしば発生している。That is, in the above joining method, as shown in FIG. 7, the metal intermediate layer 3 is usually formed so as to cover almost the entire area of the joining-side surface 2a of the ceramic 2 in order to increase the joining strength, and joining is performed. There is. However, in such a structure, the tensile stress applied to the metal intermediate layer 3 as the metal base material 1 having a large coefficient of thermal expansion is cooled and contracted, and the tensile stress applied to the metal intermediate layer 3 is at each side in the outer peripheral portion of the joined portion as indicated by the arrow in the figure. Of the metal intermediate layer 3. As a result, the largest tensile stress acts on the corner portion C of the metal intermediate layer 3. Therefore, the ceramics 2 weak against the tensile stress is the portion corresponding to the corner portion C. Often, stress concentration occurs on the surface, cracks occur, and peeling occurs.
これに対し、第８図に示すように、応力集中を避けるた
めに接合部分４に角部をつくらないように金属中間層３
の形状を円板状とする接合方法が考えられる。しかし、
例えば、Ａｌ２Ｏ３の熱膨張率は７．８×１０-6，Ｓｉ
３Ｎ４のそれは４×１０-6であり、鋼材のそれは１４〜
１７×１０-6というように、金属母材の熱膨張率はセラ
ミックスの２〜４倍もあるため、角部のない接合面の採
用によって接合面積をある程度減少して、換言すれば接
合強度をある程度犠牲にして行なう上記改良方法におい
ても、第９図に示すように、経時的に接合部分の外周に
沿ってセラミックス２にクラックが発生し、終には剥離
してしまうと言う劣化現象を避けることができていな
い。On the other hand, as shown in FIG. 8, in order to avoid stress concentration, the metal intermediate layer 3 should be formed so as not to form a corner at the joint portion 4.
A joining method in which the shape of the is a disk shape is conceivable. But,
For example, the coefficient of thermal expansion of Al 2 O 3 is 7.8 × 10 −6 , Si
That of 3 N 4 is 4 × 10 −6 , and that of steel is 14 to 10.
Since the coefficient of thermal expansion of the metal base material is 2 to 4 times that of ceramics such as 17 × 10 −6 , the joining area is reduced to some extent by adopting a joining surface without corners, in other words, the joining strength is improved. Even in the above-described improved method which is sacrificed to some extent, as shown in FIG. 9, a deterioration phenomenon in which cracks are generated in the ceramics 2 along the outer circumference of the joint portion with time and finally peeled off is avoided. I haven't been able to.
この発明は上記事情に鑑みてなされたもので、その目的
は接合強度を犠牲にすることなく、金属とセラミックス
との、冷却時の収縮差による応力がセラミックスにかか
るのを減少させ、それによりセラミックスにクラックを
発生させず、製品の信頼性の向上および高寿命化を図る
ことのできる金属とセラミックスとの接合方法を提供す
ることにある。The present invention has been made in view of the above circumstances, and an object thereof is to reduce the stress applied to the ceramics due to the difference in contraction during cooling between the metal and the ceramics without sacrificing the bonding strength. It is an object of the present invention to provide a method for joining a metal and a ceramic, which is capable of improving the reliability of the product and extending the life of the product without causing cracks in the metal.
「問題点を解決するための手段」 この発明に係る金属母材とセラミックスとの接合方法
は、金属中間層をセラミックスに接合一体化する金属薄
層とこの金属薄層より厚くかつ接合面積の小さい接合金
属層との２層から構成し、前記金属薄層を少なくとも両
側に側壁部を持つ形状に形成し、その側壁部を前記セラ
ミックスの側面に配置またはセラミックスの側部肉厚部
に埋設するように接合する方法である。この方法におい
て、金属中間層を形成する金属薄層と接合金属層との一
体化は、金属薄層をセラミックスにロウ付した後にこの
金属薄層に接合金属層をロウ付するか、これらロウ付を
同時に行なうかの方法によりなされる。また、金属母材
と接合金属層とのロウ付もセラミックス−金属薄層−接
合金属層をロウ付した後に行なうか、これらのロウ付と
同時に行なうかの方法がある。"Means for Solving Problems" A method for joining a metal base material and ceramics according to the present invention is a metal thin layer for joining and integrating a metal intermediate layer to ceramics, and a thicker and smaller joining area than the metal thin layer. It is composed of two layers including a bonding metal layer, and the thin metal layer is formed in a shape having side wall portions on at least both sides, and the side wall portions are arranged on the side surfaces of the ceramics or embedded in the side wall thick portions of the ceramics. It is a method of joining to. In this method, the thin metal layer forming the metal intermediate layer and the joining metal layer are integrated by brazing the thin metal layer to the ceramics and then brazing the joining metal layer to the thin metal layer, or by brazing these. Is done at the same time. Further, there is a method of brazing the metal base material and the joining metal layer after brazing the ceramics-thin metal layer-joining metal layer or simultaneously with these brazing.
「作用」 上記方法では、金属薄層はセラミックスの接合側のほぼ
全面ばかりでなく、側面部分まで含めた広い面積に接合
される。そして、この金属薄層は０．１〜１mm程度の厚
みの薄い層である。また、この金属薄層を少なくとも両
側に側壁部を持つ形状に成形し、その側壁部でセラミッ
クスを挾持する形でセラミックスに接合している。従っ
て、この方法によれば、次のような作用効果を得ること
ができる。[Operation] According to the above method, the thin metal layer is bonded not only on almost the entire bonding side of the ceramic but also over a wide area including the side surface portion. The thin metal layer is a thin layer having a thickness of about 0.1 to 1 mm. Further, the thin metal layer is formed into a shape having side wall portions on at least both sides, and the side wall portions are bonded to the ceramics so as to sandwich the ceramics. Therefore, according to this method, the following operational effects can be obtained.
（イ）冷却時に金属母材とセラミックスとの間に生じる
収縮に基づき、セラミックスにかかる引張り応力は、金
属薄層によってセラミックスの接合側の面に均等に分散
され、セラミックスの接合面にクラックの原因となる引
張り応力の局部的集中が防止される。(B) Due to the contraction between the metal base material and the ceramics during cooling, the tensile stress applied to the ceramics is evenly distributed by the thin metal layer to the surface of the ceramics joint side, causing cracks in the ceramics joint surface. It is possible to prevent the local concentration of the tensile stress.
（ロ）金属薄層とセラミックスとの接合面積が大きいの
で、セラミックスの接合強度が大幅に増大する。(B) Since the bonding area between the thin metal layer and the ceramic is large, the bonding strength of the ceramic is significantly increased.
（ハ）金属薄層はその側壁部でセラミックスを挾持する
形状となっているので、金属母材の冷却収縮に伴なって
金属薄層にかかる引張り応力は金属薄層がセラミックス
を機械的に挾持する力に有効利用されることになり、よ
り一層セラミックスの接合強度および接合部の信頼性を
向上させる。(C) Since the thin metal layer has a shape that holds the ceramics on its side wall, the tensile stress applied to the thin metal layer due to the cooling shrinkage of the metal base material causes the thin metal layer to mechanically hold the ceramics. It is effectively used for the strength of the ceramics, further improving the bonding strength of the ceramics and the reliability of the bonding portion.
従って、この発明の接合方法によれば、金属母材とセラ
ミックスとを接合してなる製品の信頼性の大幅な向上お
よび長寿命化を図ることができる。Therefore, according to the joining method of the present invention, it is possible to significantly improve the reliability and extend the life of the product obtained by joining the metal base material and the ceramics.
なお、接合金属層としては、前記従来の金属中間層と同
様の材質のものから適宜選択される。そして、金属薄層
としては、Ｃｕ，Ａｌ，Ｎｉ，Ｆｅ・Ｎｉ合金、Ｆｅ・
Ｎｉ・Ｃｏ合金、Ｍｏ，Ｗ，Ｎｂ，Ｔａ，Ｔｉ，Ｃｒ等
が使用可能であり、特に、Ｃｕ，Ａｌ，Ｆｅ・Ｎｉ合
金、Ｆｅ・Ｎｉ・Ｃｏ合金が望ましい。また、金属薄層
の厚み寸法としては０．１〜１mmが好ましい。というの
は、０．１mm以下であると上記した引張り応力分散作用
が発揮されないからであり、逆に１mmを越えると、この
金属薄層自体が発揮する引張り応力が大きくなり、セラ
ミックスに影響を及ぼし始めるからである。さらに接合
金属層の厚み寸法は、通常従来の金属中間層と同程度と
される。The joining metal layer is appropriately selected from the same materials as those of the conventional metal intermediate layer. Then, as the thin metal layer, Cu, Al, Ni, Fe.Ni alloy, Fe.
Ni.Co alloy, Mo, W, Nb, Ta, Ti, Cr, etc. can be used, and Cu, Al, Fe.Ni alloy and Fe.Ni.Co alloy are particularly preferable. The thickness of the thin metal layer is preferably 0.1 to 1 mm. The reason is that if the thickness is 0.1 mm or less, the above-mentioned tensile stress dispersion action is not exhibited, and if it exceeds 1 mm, the tensile stress exerted by the thin metal layer itself becomes large, which affects the ceramics. Because it starts. Further, the thickness dimension of the joining metal layer is usually set to be approximately the same as that of the conventional metal intermediate layer.
次に、この発明を実施例によりさらに詳しく説明する。Next, the present invention will be described in more detail with reference to Examples.
「実施例１」 ３０mm×６０mm×５mmの鋼（Ｓ４５Ｃ）製の金属母材１
と、１５mm×３０mm×５mmのアルミナ焼結体セラミック
ス２とを接合するに当って、まず、セラミックス２の接
合側の面および全側面を覆うようにして０．３mm厚の銅
製の金属薄層５をロウ付した。次に、この金属薄層５に
１０mm×２０mm×２mmの銅製の接合金属層６をロウ付す
るとともに、この接合金属層６と上記金属母材１とをロ
ウ付して接合製品を得た。"Example 1" 30 mm x 60 mm x 5 mm steel (S45C) metal base material 1
And the alumina sintered body ceramics 2 of 15 mm × 30 mm × 5 mm are joined, first, a thin metal layer 5 of copper having a thickness of 0.3 mm is formed so as to cover the joining side surface and the entire side surface of the ceramics 2. Was brazed. Next, a 10 mm × 20 mm × 2 mm copper joining metal layer 6 was brazed to the thin metal layer 5, and the joining metal layer 6 and the metal base material 1 were brazed to obtain a joined product.
これに対し、比較品として上記と同材質，同寸法の金属
母材とセラミックスを１０mm×２０mm×２mmの銅製の金
属中間層を介してロウ付した製品を作製した。On the other hand, as a comparative product, a product was prepared by brazing a metal base material and ceramics having the same materials and dimensions as described above through a 10 mm × 20 mm × 2 mm copper metal intermediate layer.
そして、２０℃から１００℃／分で５００℃まで昇温
し、その後５００℃で３０分間保持、つづいて１００℃
／分で２０℃まで降温し、２０℃で３０分間保持の一続
きを１サイクルとする熱サイクルテストに上記本発明品
および比較品をかけて各々の引張り剪断による常温接合
強度変化を測定した。その結果、第３図に示すように本
発明による製品は１００回の熱サイクルにかけた後も高
い強度を維持しており、本発明による製品の信頼性の高
さを確認することができた。Then, the temperature is raised from 20 ° C to 100 ° C / min up to 500 ° C, and then held at 500 ° C for 30 minutes, followed by 100 ° C.
The temperature was lowered to 20 ° C./min, and the above-described product of the present invention and the comparative product were subjected to a thermal cycle test in which one cycle of holding at 20 ° C. for 30 minutes was one cycle, and changes in room-temperature bonding strength due to tensile shearing were measured. As a result, as shown in FIG. 3, the product according to the present invention maintained high strength even after being subjected to 100 thermal cycles, and it was possible to confirm the high reliability of the product according to the present invention.
「実施例２および３」 第４図および第５図は、それぞれ本発明の第２および第
３の実施例を説明するための要部断面図であり、これら
各実施例は接合位置に変化をもたせたものである。第４
図に示すように、第２の実施例では、セラミックス２の
側面２ｃの上部を残して各対の対向する側面もしくは全
側面を所定厚み切欠き、この切欠き部分および接合側の
面（底面）を覆うようにして切欠厚みと同厚み寸法の金
属薄層７を接合することに特徴がある。一方、第５図に
示すように、第３の実施例では、セラミックス２の底面
の側部近傍にスリット状の溝２ｂを全周または両側部に
沿って形成し、この溝２ｂにその端部８ａを差し込み、
セラミックス２の底面を覆うようにして金属薄層８を接
合することに特徴がある。"Embodiments 2 and 3" FIGS. 4 and 5 are cross-sectional views of essential parts for explaining the second and third embodiments of the present invention, respectively, and in each of these embodiments, the joining position is changed. It is something that was held. Fourth
As shown in the figure, in the second embodiment, the opposing side surfaces or all side surfaces of each pair are cut out by a predetermined thickness except the upper part of the side surface 2c of the ceramics 2, and the cutout portion and the bonding side surface (bottom surface). It is characterized in that the metal thin layer 7 having the same thickness dimension as the notch thickness is bonded so as to cover the. On the other hand, as shown in FIG. 5, in the third embodiment, a slit-shaped groove 2b is formed in the vicinity of the side portion of the bottom surface of the ceramics 2 along the entire circumference or both sides thereof, and the end portion of the groove 2b is formed in the groove 2b. Insert 8a,
It is characterized in that the thin metal layer 8 is bonded so as to cover the bottom surface of the ceramics 2.
このように本発明を構成しても前記第１の実施例と同様
の作用効果を得ることができる。また、この２つの実施
例は、表面近くに金属薄層が露出しない構造なので、製
品の表面に加わる摩耗作用が強い場合に適用して好まし
いものである。Even if the present invention is configured in this way, the same operational effects as those of the first embodiment can be obtained. Further, these two examples have a structure in which the thin metal layer is not exposed near the surface, and therefore are preferable when applied to the case where the abrasion effect applied to the surface of the product is strong.
「発明の効果」 以上説明したように、この発明に係る金属とセラミック
スとの接合方法によれば、次のような作用効果を得るこ
とができる。"Effects of the Invention" As described above, according to the method for joining metal and ceramics according to the present invention, the following operational effects can be obtained.
（イ）接合金属層を介してセラミックスにかかる金属母
材の引張り応力は、金属薄層によってセラミックスの接
合側の面に均等に分散され、セラミックスの接合面にク
ラックの原因となる引張り応力の局部的集中が防止され
る。(A) The tensile stress of the metal base material applied to the ceramics through the bonding metal layer is evenly distributed by the thin metal layer on the surface of the ceramics on the bonding side, and the local tensile stresses that cause cracks on the ceramics bonding surface Concentration is prevented.
（ロ）金属薄層とセラミックスとの接合面積が大きいの
で、セラミックスの接合強度が大幅に増大する。(B) Since the bonding area between the thin metal layer and the ceramic is large, the bonding strength of the ceramic is significantly increased.
（ハ）金属薄層はその側壁部でセラミックスを挾持する
形状となっているので、金属母材の冷却収縮に伴なって
金属薄層にかかる引張り応力は、金属薄層がセラミック
スを機械的に挾持する力に有効利用されることになり、
より一層セラミックスの接合強度および接合部の信頼性
を向上させる。(C) Since the thin metal layer has a shape in which the side wall portion holds the ceramic, the tensile stress applied to the thin metal layer due to cooling shrinkage of the metal base material causes the thin metal layer to mechanically support the ceramic. It will be effectively used for holding power,
To further improve the bonding strength of ceramics and the reliability of the bonded portion.
このように、この発明によれば、金属とセラミックスと
を接合してなる製品の信頼性の大幅な向上および長寿命
化を図ることができる。As described above, according to the present invention, it is possible to significantly improve the reliability and extend the life of a product obtained by joining metal and ceramics.
第１図および第２図はこの発明の第１の実施例を説明す
るためのもので、第１図はこの発明の接合方法による接
合品の断面図、第２図は第１図II−II線視図、第３図は
第１の実施例による製品と比較品を熱サイクルにかけて
接合強度変化を測定した結果を示すグラフ、第４図はこ
の発明の第２の実施例を説明するためのもので、この発
明方法による接合品の要部の断面図、第５図はこの発明
の第３の実施例を説明するためのもので、この発明方法
による接合品の要部の断面図、第６図は従来の接合方法
による接合品の断面図、第７図は第６図VII−VII線視
図、第８図および第９図は従来の他の接合方法を示すも
ので、それぞれ接合品の要部底面図および要部側面図で
ある。 １……金属母材、２……セラミックス、６……接合金属
層、５，７，８……金属薄層。FIGS. 1 and 2 are for explaining the first embodiment of the present invention. FIG. 1 is a sectional view of a joined product by the joining method of the present invention, and FIG. 2 is FIG. 1 II-II. FIG. 3 is a line diagram, FIG. 3 is a graph showing the results of measuring the bond strength change of the product according to the first embodiment and the comparative product through thermal cycles, and FIG. 4 is a graph for explaining the second embodiment of the present invention. FIG. 5 is a sectional view of an essential part of a joined product according to the method of the present invention, and FIG. 5 is for explaining a third embodiment of the present invention. FIG. 6 is a cross-sectional view of a joined product by a conventional joining method, FIG. 7 is a view taken along the line VII-VII of FIG. 6, and FIGS. 8 and 9 show another conventional joining method. FIG. 3 is a bottom view and a side view of a main part of FIG. 1 ... Metal base material, 2 ... Ceramics, 6 ... Bonding metal layer, 5, 7, 8 ... Metal thin layer.
Claims (1)
介して接合一体化する金属とセラミックスとの接合方法
において、 前記金属中間層を前記セラミックスに接合一体化する
０．１〜１．０mmの金属薄層とこの金属薄層より厚くか
つ接合面積の小さい接合金属層との２層から構成し、 前記金属薄層を少なくとも両側に側壁部を持つ形状に形
成し、その側壁部を前記セラミックスの側面に接合また
はセラミックスの側部近傍の肉厚部に埋設，接合するこ
とを特徴とする金属とセラミックスとの接合方法。1. A method for joining a metal and a ceramic in which a metal base material and a ceramic are joined and integrated via a metal intermediate layer, wherein the metal intermediate layer is joined and integrated to the ceramic in an amount of 0.1 to 1.0 mm. And a bonding metal layer thicker than the thin metal layer and having a smaller bonding area, the thin metal layer is formed in a shape having side wall portions on at least both sides, and the side wall portion is formed of the ceramics. A method for joining metal and ceramics, characterized in that it is joined to the side surface of the metal or is embedded and joined to a thick portion near the side portion of the ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26681885A JPH0659575B2 (en) | 1985-11-27 | 1985-11-27 | Method of joining metal and ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26681885A JPH0659575B2 (en) | 1985-11-27 | 1985-11-27 | Method of joining metal and ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130133A JPS62130133A (en) | 1987-06-12 |
| JPH0659575B2 true JPH0659575B2 (en) | 1994-08-10 |
Family
ID=17436092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26681885A Expired - Fee Related JPH0659575B2 (en) | 1985-11-27 | 1985-11-27 | Method of joining metal and ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0659575B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114833410B (en) * | 2022-07-05 | 2022-10-14 | 中机智能装备创新研究院(宁波)有限公司 | Method for reducing residual stress of heterogeneous brazed joint |
-
1985
- 1985-11-27 JP JP26681885A patent/JPH0659575B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62130133A (en) | 1987-06-12 |
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