JPH0659619B2 - How to attach polishing cloth to surface plate of polishing device - Google Patents

Description

Description: TECHNICAL FIELD OF THE INVENTION The present invention is to insert a work piece between an upper surface plate and a lower surface plate to which a polishing cloth is adhered and rotate them relatively, and between the both surface plates. In addition, the present invention relates to a method of reattaching a polishing cloth attached to an upper surface plate of a polishing device that polishes while supplying an abrasive from a plurality of abrasive supply ports opened in the polishing cloth through the upper surface plate.

[Technical Background of the Invention and Problems Thereof] In this type of polishing apparatus, a polishing cloth is adhered to one or both of opposite surfaces of an upper surface plate and a lower surface plate that rotate in mutually opposite directions, and A workpiece such as a wafer is held by a carrier between the surface plates, and the carrier is meshed with an internal gear and a sun gear to rotate and revolve around the surface plate and the surface plate to which the polishing cloth is attached. The workpiece is rotated or moved relative to the workpiece to polish the surface of the workpiece, which is usually configured as shown in FIG.

That is, as shown in FIG. 1, 1 is an upper surface plate, 2 is a lower surface plate, and polishing cloths 3 and 4 are attached to the surfaces facing each other, and the lower surface plate 2 has a bearing retainer 5 Via the hollow shaft 6, the bearings 7, 7 and the bearing metal 8 to the base 9
Gear 1 rotatably supported on and attached to a hollow shaft 6
Rotation is applied from a drive source (not shown) by 0, while the upper surface plate 1 is suspended from a piston rod 13 of a main cylinder 12 fixed to a frame 11 via a coupling 16 so as to be vertically movable. Has been done.

Then, in the hollow shaft 6, bearings 17, 17,
A shaft 20 is rotatably inserted through a hollow shaft 18 and bearings 19, 19 which will be described later, and the shaft 20 is driven in a direction opposite to that of the hollow shaft 6 from a drive source (not shown) via a gear 21 attached to the lower end thereof. The spline shaft 20a is attached to the upper end of the spline shaft 20a, and the spline shaft 20a is detachably engaged with the spline hole 16a of the coupling 16 for suspending the upper surface plate 1. It is supposed to do.

Further, between the upper and lower surface plates 1 and 2, as shown in detail in FIGS. 2 and 3, there are a plurality of carriers 22 for holding and holding the workpiece A in the holding holes 22a to regulate the position thereof. A gear portion 22b is formed on the outer peripheral portion of the carrier 22, and the gear portion 22b is interposed between the sun gear 23 and the bearing metal 8 provided on the upper end of the hollow shaft 18 and bearings 24, 24.
The sun gear 23 and the internal gear 25 are rotated by gears 26 and 27 from a drive source (not shown) so as to rotate and revolve the carrier 22. It has become.

That is, in the polishing apparatus described above, the upper surface plate 1 is moved upward to be in the open state, while the plurality of workpieces A ... Are fitted into the holding holes 22a of the carrier 22 and placed on the lower surface plate 2, Then, the main cylinder 12 is actuated to lower the upper surface plate 1 to a predetermined lowering position to move the upper surface plate 1 to the workpiece A.
Clamping force, that is, a processing pressure set to a predetermined value is applied to the workpiece A to clamp it between the upper and lower polishing cloths 3 and 4,
The upper and lower surface plates 1 and 2, the sun gear 23, and the internal gear 25 are rotated by gears 10, 21, 26 and 27 by a drive source (not shown) to polish the workpieces A ... It is what

Furthermore, the work piece A ...
The polishing agent is supplied so that the polishing can be performed efficiently and with high precision, and the polishing agent supply device has the configuration shown in FIG.

The polishing agent supply device 28 is connected to a fifth supply source (not shown).
The tray 2 shown in the figure has a plurality of supply ports 29a formed therein.
9 is replenished with abrasive 30 and these trays 29 supply port 2
The abrasive 30 that freely falls from 9a ...
As shown in FIG. 6, it is supplied to the upper surface plate 1 through which a plurality of supply ports 32 are penetrated, and from the supply ports 33 formed in the polishing cloth 3 to the polishing surface of the workpiece A. The polishing agent 30 is supplied.

However, in such a conventional polishing apparatus, the abrasive agent supply joints 34 connected to the ends of the hoses 31 are screwed to the receiving side of the supply port 32 of the upper surface plate 1. Therefore, not only is it very difficult to attach and detach, but the upper surface plate 1 itself has a three-piece structure in which the upper plate 35, the intermediate plate 36, and the lower plate 37 are superposed by the bolts 38 and 39. 3 is replaced, the bolt 39 is removed, the lower plate 37 to which the polishing cloth 3 is attached is taken out of the machine, the old polishing cloth is peeled off and removed, and then the attachment surface of the lower plate 37 is faced up. After the placement, a new polishing cloth 3 is attached to the attachment surface, and a punching tool is inserted from the polishing cloth 3 side to a position corresponding to the supply opening 32 of the lower plate 37 to supply the polishing cloth 3 with the supply opening 33. After making a hole in ... For pasting work for replacing the means such superimposed bets 37 to the medium plate 36 is fixed by bolts 39 is carried out, decomposition of the upper stool 1 &
The assembling work is troublesome, and further, the flatness of the upper surface plate is liable to be misaligned due to the repetition of the assembling work, and the processing accuracy of the work piece is deteriorated, and when the polishing cloth is punched, the scraps from the drilling dust are not supplied to the slurry supply port 32. However, there are various problems such that it is liable to remain in the memory, and it is difficult to remove it, and the cost is high because the upper platen itself has a three-plate structure.

[Object of the Invention] The present invention has been made based on the above circumstances.
It is an object of the present invention to provide a method of reattaching a polishing cloth to a surface plate of a polishing device, which makes it possible to easily replace the polishing cloth without disassembling the upper surface plate.

[Summary of the Invention] In order to achieve the above-mentioned object, according to the present invention, a polishing cloth is attached to at least an upper surface plate of a pair of upper and lower surface plates, and an abrasive supply port is provided on the upper surface plate on the receiving side. While forming a step to form a large-diameter mouth portion and penetrating the same, while supplying a polishing agent by detachably inserting and holding an abrasive joint at the receiving-side large-diameter mouth of the supply port, In replacing the polishing cloth on the upper surface plate of the polishing device for polishing the work piece arranged between the upper and lower surface plates, a non-perforated polishing cloth is attached to the upper surface plate, and then the joint It is characterized in that a small diameter abrasive supply port is punched in the polishing cloth by inserting a large-diameter mouth portion on the receiving side of the supply port in the removed state or a punching tool.

[Embodiment of the Invention] Hereinafter, the present invention will be described in detail with reference to an embodiment shown in Figs. 7 to 13. In the illustrated embodiment of the present invention, the same parts as those of the conventional polishing apparatus shown in FIGS. 1 to 6 are designated by the same reference numerals and the description thereof will be omitted.

That is, the present invention, as shown in FIG. 7 and FIG.
The upper platen 1 has a two-plate structure in which an upper plate 40 and a lower plate 41 are assembled and fixed by bolts 42, and a cooling liquid passage 43 is formed between the upper and lower plates 40 and 41. , The receiving side of the abrasive supply port 44 penetrating the upper surface plate 1 is stepped in the large diameter port 44a, and the supply port of the tray 29 in which the abrasive 30 is replenished in the large diameter port 44a. 29a, one end of which is connected to the hose 31 ..., and an insertion portion 45a of a polishing agent supply joint 45 at the other end is detachably inserted and held. These joints 45 insert the hose 31 into one end of a main body 46. The cap 47 is connected to the hose 31 by screwing the cap 47 into the hose 31.
The large-diameter opening 44a of No. 4 can be easily attached and detached, and the insertion portion 45a is provided with an O-ring 48 for sealing.

Next, a description will be given of the replacement means when the polishing cloth 3 adhered to the upper surface plate 1 has a reduced processing capacity due to abrasion or the like with reference to FIG. 9. First, the old polishing cloth 3 is removed from the lower plate 41. Peel it off and replace it with a new non-perforated polishing cloth 3. next,
Wooden or plastic blade receiving member 4 on the lower surface plate 2
9 is placed, and a drilling tool 50 is inserted into the large-diameter opening 44a from the receiving side of the supply port 44 of the upper surface plate 1 from which the abrasive supply joint 45 has been pulled out in advance, and the tip of the tool 50 is touched by hand. By pressing with, the supply ports 33 ... Are opened in the polishing cloth 3.

In addition, FIGS. 10 to 13 show another embodiment of the fitting state of the above-mentioned insertion portion 45a of the abrasive supply joint 45 and the large diameter opening 44a of the abrasive supply port 44 of the upper surface plate 1. As shown in FIG. 10, they are fitted to each other in a tapered shape, or as shown in FIG. 11, they are fitted to each other by forming a ring-shaped projection 45b on the joint insertion portion 45a and fitting them. As shown in the drawing, around the tapered portion of the supply port 44, or as shown in FIG. 13, the joint insertion portion 4 having the protrusion 45b.
5A is provided with elastic materials 44b such as flexible plastics or rubbers around the respective 5a so as to improve the watertightness.

In addition, it goes without saying that the present invention can be modified and implemented within a range that does not change the gist of the present invention.

[Effects of the Invention] As described above, according to the present invention, the receiving side of the abrasive supply port penetratingly formed in the upper surface plate is stepped to the large-diameter opening, and this large-diameter opening is provided. While making the abrasive agent supply joint easily removable, when reattaching the polishing cloth, you can insert a drilling tool from the large-diameter side of the receiving side of the supply port to make a hole for the polishing cloth supply port. This makes it easier to replace the polishing cloth and make holes in the supply port without disassembling the upper surface plate as in the past, and also to make holes in the polishing cloth by forming a large diameter opening. The workability can be expected to be improved, for example, scraps can be easily removed, and it is also effective in maintaining the accuracy of the surface plate.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing an example of a polishing apparatus, FIG. 2 is a plan view of the same main part, FIG. 3 is a vertical cross-sectional view of the same main part, and FIG. 4 is a main part of a conventional abrasive supply system. Enlarged sectional view, FIG. 5 is a plan view of the supply tray, FIG. 6 is a plan view of the upper surface plate,
FIG. 7 is a cross-sectional view of an essential part showing an embodiment of a polishing agent supply system according to the present invention, FIG. 8 is an enlarged cross-sectional view of the same essential part, and FIG. 9 is an explanation showing a process of repositioning and punching a polishing cloth. FIGS. 10 to 13 are explanatory views showing other embodiments of the abrasive supply system according to the present invention. 1 ... Upper surface plate, 2 ... Lower surface plate, 3 ... Abrasive cloth, 29 ...
Tray, 30 ... Abrasive, 31 ... Hose, 33 ... Polishing cloth supply port, 40 ... Upper plate, 41 ... Lower plate, 42 ... Bolt, 44 ... Abrasive supply port, 44a ...
... Large-diameter port, 45 ... Joint, 45a ... Insertion part, 48 ...
... O-ring, 49 ... Blade receiving member, 50 ... Drilling tool, A ... Workpiece.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinichi Tazawa 2068-3 Ooka, Numazu-shi, Shizuoka Toshiba Machine Co., Ltd. Numazu Business Office (72) Masami Endo 2068-3 Ooka, Numazu-shi, Shizuoka Toshiba Machine Co., Ltd. Numazu Business In-house (56) References Japanese Patent Publication No. 40-12678 (JP, B1) Japanese Publication No. 53-11098 (JP, B2) Actual Publication No. 59-20938 (JP, Y2)

Claims (1)

[Claims] 1. A polishing cloth is adhered to at least an upper surface plate of a pair of upper and lower surface plates, and an abrasive supply port is formed stepwise on the upper surface plate so that the receiving side has a large diameter opening. A workpiece to be disposed between the upper and lower surface plates while being penetrated and while supplying a polishing agent by detachably inserting and holding an abrasive coupling at the receiving side large diameter opening of the supply port When reattaching the polishing cloth to the upper surface plate of the polishing device for polishing, the non-perforated polishing cloth was adhered to the upper surface plate, and then the joint side was removed and the receiving side of the supply port was large. A method of reattaching a polishing cloth to a surface plate of a polishing apparatus, comprising inserting a drilling tool into the polishing cloth to form a small-diameter abrasive supply port.