JPH0660417B2 - Work potential detector - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work potential detecting device used in a plating processing apparatus or the like, and more particularly to a work potential detecting apparatus suitable for a magnetic storage disk plating processing apparatus. Regarding

(Prior Art) In general, a magnetic storage disk used in a computer or the like uses an annular plate of aluminum or an aluminum alloy as a disk material, and the surface of the disk is made of cobalt.
A magnetic medium is formed by electroless plating of nickel / phosphorus. Further, in such a disc, since it is necessary to maintain the plating quality extremely high, it is necessary to control the plating processing time with high accuracy.

(Problems to be Solved by the Invention) However, in electroless plating, the time from the immersion of the workpiece in the treatment liquid to the actual start of plating varies depending on various conditions. Therefore, it is difficult to control the actual plating time.

As a countermeasure against this, a method has been proposed in which the potential difference between the treatment liquid and the workpiece is measured in the state where the workpiece is immersed in the treatment liquid, and the actual plating start time is detected based on the variation in the potential difference. However, even if such a method is adopted, the conventional processing apparatus has a problem that it is difficult to detect the potential of the work due to the structure of the carousel.

(Means for Solving Problems) In order to solve the above problems, the present invention provides a carrousel with a work-supporting rod-shaped support made of a conductive material horizontally, and an annular groove (or a mountain portion) on the outer periphery of the support. ) Are provided in parallel with each other in the axial direction of the support at regular intervals, the conductive material is exposed only on the bottom surface of the groove that contacts the work, and the rest is covered with a non-conductive material to keep the work and the conductive state, and the potential is detected on the support. It is characterized by connecting the vessel.

(Operation) According to the above configuration, the mounting of the work is completed by fitting the hole of the work in the rod-shaped support and seating it in the groove.
Further, in the mounted state, the potential of the work is detected by the detection device via the inner peripheral surface of the work center hole, the bottom surface of the groove of the support, and the support body.

(Example) FIG. 1 shows a vertical cross section of a work W mounted on a carousel 1 (jig) and immersed in an electroless plating solution (not shown) in a processing bath T. The work W is a material of a magnetic storage disk, is formed of an annular and plate-shaped member made of aluminum or its alloy, and has a hole a in the center thereof.

The carousel 1 includes rod-shaped supports 2 and 3. The support 2 is inserted into the center hole a of the work W and supports the inner circumference thereof, and the work W is positioned in a posture perpendicular to the periphery of the support 2. A large number of works W are mounted at regular intervals in the longitudinal direction of the support 2, and the support 2 supports the works W over substantially the entire length thereof.

The support 2 has a boss 5 at one end, and the threaded portion of the shaft 6 is fixed to the threaded hole at the tip of the boss 5. The shaft 6 is concentric with the support 2, and the support 2 is horizontally supported in a cantilever state by the boss 8 of the frame 7 at the portion of the shaft 6. The boss 8 is a thick-walled tubular member, which is fixed to the frame 7. The inner peripheral surface of the boss 8 rotatably supports the shaft 6 via a bearing 10. Further, a liquid-tight seal 11 is interposed between the inner peripheral surface of the boss 8 and the boss 5.

The frame 7 to which the boss 8 is fixed has a hollow structure, has a chamber 12 having a closed structure inside, and extends vertically long.
The end of the shaft 6 projects into the chamber 12, and the sprocket 13 is attached to the projecting end. The sprocket 13 is connected to the upper and lower drive sprockets 16 via a chain 15 (drive mechanism) provided in the chamber 12. The sprocket 16 is fixed to the output shaft of a motor 17, and the motor 17 is also provided in the chamber of the frame 7 having a closed structure.

According to the above structure, the work W is also rotated in the processing liquid by rotating the support 2 via the chain 15 and the like by the motor 17 during the processing work. Therefore, the contact efficiency between the work W and the processing liquid is increased, and the processing time is shortened and the quality is improved. It is also possible to provide an external drive shaft in place of the motor 17 and drive the support 2 via the drive mechanism inside the chamber 12 by the drive shaft.

The upper end of the frame 7 is connected to a horizontally extending frame 18. In the illustrated plating treatment state, the frame 18
Both ends of the sheet are seated on a sheet or the like (not shown) at the upper edge of the processing tank T. Further, arms 20 project upward from the vicinity of both ends of the frame 18. Each arm 20 has a hook 21 at the upper end. When the carrocell 1 and the work W are moved up and down by a transfer robot (not shown) or the like, the transfer robot holds the hook 21 and holds
Is to be hung up.

The support 2, the boss 5, the shaft 6, and the sprocket 13 are made of a conductive material such as stainless steel, and are connected to each other in a conductive state. The carbon brush 22 is in contact with the end surface of the sprocket 13 on the boss 8 side. The carbon brush 22 is connected to a potential detector (not shown).
As will be described later, the work W is supported by the support 2 in a conductive state. On the other hand, in the processing tank T, a standard electrode 23 for detecting the potential of the processing liquid is provided. Therefore, the potential of the work W mounted on the support 2 is detected by the potential detector via the support 2 and the sprocket 13, and the potential of the processing liquid in the processing tank T is detected by the potential detector via the standard electrode 23. It is possible to detect that plating has actually started based on the change in the potential difference between the two.

The other support 3 is also configured in the same manner as the support 2 except that it has a large diameter, and is driven by the sprocket 13 and the potential of the work W (not shown in FIG. 1) on the support 3 is set. It can be detected through the sprocket 13 and the brush 22 fixed to the support 3.

The support 2 is used when mounting a work W having a small inner diameter and outer diameter, and the support 3 is used when mounting a work W having a large inner diameter and outer diameter.

As shown in FIG. 2 which is a partially cutaway enlarged partial schematic view of FIG.
On the outer peripheral surface of the support 2, a large number of annular ridges 25 and annular grooves 26 are alternately provided in the longitudinal direction. The top surface 27 of each mountain portion 25 is a cylindrical surface concentric with the center line S of the support 2, and both side surfaces 28 are tapered surfaces. Each groove 26
Bottom surface 29 of is a cylindrical surface concentric with the support center line S,
Both side surfaces 30 are annular surfaces that are substantially perpendicular to the support center line S. The work W is fitted in the groove 26, and the inner peripheral surface of the center hole a is seated on the upper portion of the bottom surface 29. Groove 2
The width 1 of 6 is set to be slightly larger than the thickness of the work W. Therefore, the work W is positioned in the longitudinal direction of the support 2 substantially immovable by the groove 26.

The top surface 27, the side surface 28, and the side surface 30 are covered with an insulating material such as resin. On the other hand, the bottom surface 29 is formed of the material surface of the support 2, and the work W and the support 2 are the work W.
Of the center hole a and the bottom surface 29 of the support 2 are electrically connected to each other via a contact portion. Although not clearly shown, the support 3 in FIG. 1 is also provided with similar ridges and grooves. It should be noted that the work W shown in the drawing has a non-magnetic medium (nickel / phosphorus) plated in advance on the surface other than the inner peripheral surface. In the illustrated apparatus, the surface of the non-magnetic medium is plated with the magnetic medium. To be done.

As shown in FIG. 3, which is a partially cut-away III-III schematic view of FIG.
The support 3 is provided between the two lower supports 2 and obliquely above.

The work W is loaded in the magazine M shown in FIG. 4 before the carousel 1 is mounted.
It is carried by the mounting device described later in the state of being loaded into the car and mounted on the carousel 1.

In FIG. 4 and FIG. 5 which is a schematic sectional view taken along the line V-V,
The magazine M includes a pair of side plates 35, a connecting member 36 connecting the lower ends of the side plates 35, and three rods 37 having both ends supported by the side plates 35. The rods 37 are attached to both upper side portions and the lower middle portion of the side plate 35, and are connected to the connecting member 36.
It runs parallel to. A large number of annular grooves 38 are provided at predetermined intervals on the outer peripheral surface of each rod 37, and the outer periphery of the work W is immovably inserted in the grooves 38 in the longitudinal direction of the rod 37. . In FIG. 5, the left and right rods 37 support the work W from both sides, and the lower rod 37 supports the work W from below. Therefore, in the state of being loaded in the magazine M, a large number of works W are arranged concentrically at a predetermined interval.
The entire centerline A extends parallel to the rod 37. Further, as shown in FIG. 4, hooks 39 are provided on the upper side of each side plate 35 so as to project to the side opposite to the work W.

As shown in FIG. 6 which is a schematic plan view, the mounting device includes a conveyor 40 for supplying a work and a hand robot 41, a transfer device 42, a turntable device 43, a hand robot 44 for discharging a magazine, and a conveyor 45.

The conveyor 40 is composed of a chain conveyor, and is configured to convey a magazine M loaded with works W in a horizontal direction. Further, by a mechanism (not shown), the magazine M can be placed on the entrance of the conveyor 40 in a posture in which the work center line A is parallel to the width direction of the conveyor 40.

The hand robot 41 includes a pair of rails 46 and a rail 46.
Robot body 47 that moves along the robot body 4
And an air cylinder mechanism 48 for driving 7.
The rail 46 extends parallel to the conveyor 40 from above the outlet 49 of the conveyor 40 to above the transfer device 42. The robot main body 47 is configured to hold a magazine M, as will be described later, and the magazine M on the outlet 49 is carried by the robot main body 47 onto the carriage 50 of the transfer device 42. The cylinder mechanism 48 is configured by combining, for example, three air cylinders, changes the stop position of the robot main body 47 on the transfer device 42, and three types of positions A1, A2, A3 on the carriage 50 (work center). The magazine M can be placed on any of the lines (only the lines are shown).

The transfer device 42 is located in front of the conveyor 40 in the conveying direction, and includes a pair of horizontal rails 51 orthogonal to the conveyor 40. The carriage 50 is driven by a cylinder 52 and moves on a rail 51.

The turntable device 43 is provided adjacent to the outlet of the transfer device 42, and a mechanism (not shown) allows the empty carousel 1 to be placed on the upper surface of the table 55.

The hand robot 44 and the conveyor 45 are the conveyor 4
0 and the same structure as the hand robot 41,
The conveyor 40 and the hand robot 41 are provided in the vicinity of the sides thereof in parallel with them.

As shown in FIG. 7, which is an enlarged partial schematic view taken along the line VII-VII in FIG. 6, an elevating part 62 is attached to the robot body 47 so as to be vertically movable by using a cylinder 60 and a guide rod 61. Arms 6 projecting downward are provided on both sides of the elevating part 62.
3 is provided, and a hook 65 that engages with the hook 39 of the magazine M from below is provided below the arm 63. A cylinder mechanism (not shown) for changing the distance between the arms 63 is provided on the elevating part 62. Therefore, when the magazine M on the conveyor 40 is transferred, both arms 6
With the space of 3 widened, the lifting / lowering portion 62 is moved by the cylinder 60.
The magazine M can be held and pulled up by the arms 63 by lowering the hooks 65 and positioning the hooks 65 below the hooks 39 by narrowing the gap between the arms 63, and then raising the elevating part 62. The magazine M held by the arm 63 can be lowered onto the upper surface of the lift table 70 of the carriage 50 by operating each part in the reverse order of this.

A vertical guide 71 is provided on the carriage 50, and the lift 71 is supported by the guide 71 so as to be vertically movable.
Although not shown, the carriage 50 is provided with a drive mechanism (cylinder mechanism) for raising and lowering the lift table 70.

The turntable device 43 is provided with a vertical shaft 72 that supports the table 55 and a motor mechanism (not shown) that rotates the vertical shaft 72. On the table 55, the supports 2 and 3 of the empty carousel 1 extend parallel to the rails 51, that is, parallel to the center line A of the work W on the carriage 50. Therefore, when the work W is held at an appropriate height by the carriage 50 and the carriage 50 is moved forward in this state, the support 2 or 3) is inserted into the center hole a of the work W, and the lift table 70 is lowered after the insertion. As a result, the work W is mounted on the support 2 or 3 as described above, and the magazine M is separated downward from the work W. The magazine M separated in this way is returned to the vicinity of the hand robot 44 by the carriage 50, and ejected by the hand robot 44 and the conveyor 45.

As shown in FIG. 3, the supports 2 are provided at four places, but in the mounting operation, the carriage 50 is provided for each magazine M.
By changing the upper magazine installation position (A1, A3: FIG. 6) and the vertical position of the elevating table 70, the work W is mounted on all the supports 2 in four mounting operations. Even when the work W has a large diameter and the support 3 is used, the installation position (A2) of the magazine M and the vertical position of the elevating table 70 are appropriately set.

When the mounting of the work W on the carousel 1 is completed as described above, the table 59 rotates 90 °, and the supports 2 and 3 and the work center line A are in a posture orthogonal to the rail 51. Then, the transfer robot (not shown) pulls up the carousel 1, and the work W is dipped in various pretreatment tanks (not shown), plating treatment tank T (FIG. 1), and posttreatment tank in order.

When the processing is completed in this manner, the work W is removed by the removing device (not shown) having the same structure as the mounting device.
Are collected from the carousel 1 into a magazine similar to the magazine M. The work procedure for the detaching device is the reverse of the work procedure for the mounting device.

(Effect of the Invention) According to the present invention as described above, since the support 2 for supporting the work W is used as the terminal for detecting the potential, it is not necessary to provide the carrocell 1 with the dedicated potential detecting terminal, and the structure is simple. Can be realized.

Also, since the potential of the work W can be detected reliably and easily,
By measuring the potential difference between the treatment liquid and the work, the actual plating start time can be accurately detected, the precision of control of the plating treatment time can be improved, and the quality of plating can be improved.

[Brief description of drawings]

FIG. 1 is a schematic vertical sectional view of a carousel of an embodiment of the present invention, FIG. 2 is a partially cutaway enlarged partial schematic view of FIG. 1, and FIG.
Partly cutaway III-III arrow schematic view, FIG. 4 is a schematic front view of the magazine, FIG. 5 is a schematic cross-sectional view taken along line VV of FIG. 4, FIG. 6 is a schematic plan view of the mounting device, and FIG. FIG. 7 is a schematic enlarged view taken along line VII-VII of FIG. 6. 1 ... Carousel, 2, 3 ... Rod support, 25 ... Mountain part, 26 ... Groove part, 29 ... Groove bottom, a ... Hole, W ... Work piece

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication location C25D 21/12 C (72) Inventor Satoshi Ishida 5-33-1 Shiba, Minato-ku, Tokyo NEC Corporation In stock company (72) Inventor Yuzo Kida 1-5-1 Exit, Hirakata, Osaka Prefecture Uemura Kogyo Co., Ltd. (72) Insider, Tetsuro Uemura 1-5-1 Exit, Hirakata, Osaka Uemura Kogyo Co., Ltd. (56) Reference JP-A-61-199070 (JP, A) JP-A-61-52367 (JP, A)

Claims (1)

[Claims] 1. A carrousel is horizontally provided with a rod-shaped support for supporting a work made of a conductive material, and a large number of annular grooves (or ridges) are provided on the outer periphery of the support in parallel with the support axial direction at a constant interval to contact the work. A work potential detecting device, characterized in that the conductive material is exposed only on the bottom surface of the groove portion and the rest is covered with a non-conductive material to keep the work in a conductive state, and a potential detector is connected to the support.