JPH0661129B2 - Magnetic storage - Google Patents
Magnetic storageInfo
- Publication number
- JPH0661129B2 JPH0661129B2 JP58160765A JP16076583A JPH0661129B2 JP H0661129 B2 JPH0661129 B2 JP H0661129B2 JP 58160765 A JP58160765 A JP 58160765A JP 16076583 A JP16076583 A JP 16076583A JP H0661129 B2 JPH0661129 B2 JP H0661129B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic layer
- recording
- layer
- oxide magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910001566 austenite Inorganic materials 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 239000000654 additive Substances 0.000 claims description 6
- 230000000996 additive effect Effects 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 239000010409 thin film Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910018104 Ni-P Inorganic materials 0.000 description 2
- 229910018536 Ni—P Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 本発明は磁気記憶装置に用いられる磁気ディスク等の磁
気記憶体にかかわる。The present invention relates to a magnetic storage body such as a magnetic disk used in a magnetic storage device.
磁気記憶装置における記録密度の向上は斯界の変わらぬ
趨勢であり、これを実現するためには磁気記録体の薄層
化が不可欠である。The improvement of the recording density in the magnetic storage device is a constant trend in this field, and in order to realize this, it is indispensable to make the magnetic recording medium thin.
従来、磁気ディスクとしては酸化鉄微粒子とバインダー
の混合を基体上に塗布したいわゆるコーティング媒体が
広く用いられてきた。記録密度の増加にともないコーテ
ィング媒体の薄層化がなされているが、この厚さを数千
Å以下にし、しかも均一な記録再生特性を実現すること
はきわめて困難である。Conventionally, a so-called coating medium in which a mixture of iron oxide fine particles and a binder is applied on a substrate has been widely used as a magnetic disk. As the recording density increases, the coating media are becoming thinner, but it is extremely difficult to reduce this thickness to several thousand liters or less and to realize uniform recording / reproducing characteristics.
そこでコーティング媒体に代る高性能磁気記録体とし
て、薄層化が容易な連続薄膜媒体が注目されている。連
続薄膜媒体としてメッキ法により作製されたCo-Ni-Pメ
ッキ磁気記録体が開発されているが、これと同様に薄膜
化が可能な酸化物磁性薄膜の方が磁気特性及び耐食性，
機械的強度等に関し優れている。Therefore, as a high-performance magnetic recording medium that replaces the coating medium, a continuous thin film medium that can be easily thinned has attracted attention. A Co-Ni-P plated magnetic recording medium prepared by the plating method has been developed as a continuous thin film medium. Similar to this, an oxide magnetic thin film that can be thinned has better magnetic properties and corrosion resistance.
Excellent in mechanical strength.
このように磁気ディスク装置の記録密度は年々向上し、
現在装置として線密度についてはおよそ14000FRPI，ト
ラック密度は1100TPI（トラックピッチ23.5μｍ）のも
のが最高である。従来、ディスクのトラック上に情報を
記録再生するデータヘッドのサーボ方式は、データを記
録するディスクとは別に、サーボ信号を記録したディス
クを用いるサーボ面サーボ方式が一般的であるが、サー
ボ面サーボ方式ではディスク間の温度差による熱膨張の
差の分だけ磁気ヘッドのトラック位置決め精度が上げら
れないためにトラック密度の向上に限界が生じてきてい
る。In this way, the recording density of magnetic disk devices has improved year by year,
Currently, the highest linear density of about 14000 FRPI and track density of 1100 TPI (track pitch 23.5 μm) is the highest. Conventionally, a servo system of a data head for recording / reproducing information on / from a track of a disc is generally a servo surface servo system using a disc on which a servo signal is recorded in addition to a disc for recording data. In the method, since the track positioning accuracy of the magnetic head cannot be increased by the difference in thermal expansion due to the temperature difference between the disks, there is a limit in improving the track density.
近年サーボ面サーボ方式と異なって、γ-Fe2O3粒子を用
いたコーティングディスクにおいて上下２層の磁性層を
使用し、下層にサーボ情報を記録し、上層にデータ情報
を記録したデータ面サーボ方式（ベリードサーボ方式）
の実験結果が報告されている。Different from the servo surface servo system in recent years, in a coated disk using γ-Fe 2 O 3 particles, two upper and lower magnetic layers are used, servo information is recorded in the lower layer, and data information is recorded in the upper layer. Method (bellied servo method)
The experimental results of are reported.
しかしながらγ-Fe2O3コーティングディスクにおいて磁
性膜厚を薄くすることが困難なために（0.5μｍが限界
と言われる）記録密度を大幅に増加させることはむずか
しく、さらに高密度記録再生時の対信号雑音比（SNR）
が小さいという欠点を有する。However, since it is difficult to reduce the magnetic film thickness in a γ-Fe 2 O 3 coated disk (it is said that 0.5 μm is the limit), it is difficult to increase the recording density drastically. Signal to noise ratio (SNR)
Has the drawback of being small.
本発明の目的は、これらの問題点を改善して高密度記録
が可能で、かつSNRの良好なデータ面サーボ方式に適す
る磁気記憶体を提供することにあり、その基本構成はス
パッタ法を用いた磁気２重層磁気記憶体において、非磁
性層を介して上層のデータ用磁性薄膜及び下層のサーボ
用磁性膜厚に酸化物連続薄膜を使用したことにありベリ
ードサーボ用磁気記憶体として極めて優れた特性を有し
ている。It is an object of the present invention to provide a magnetic memory body that can solve these problems and enable high-density recording and that is suitable for a data surface servo system with a good SNR. In the magnetic double-layer magnetic storage device, the continuous magnetic oxide thin film was used for the upper magnetic data thin film and the lower servo magnetic film thickness through the non-magnetic layer. have.
すなわち本発明によれば非磁性基体と、この基体を被覆
し、Coの添加物を重量パーセントで2.0%から4.0%含むγ
-Fe2O3、またはγ-Fe2O3とFe3O4の中間組成物を主成分
とし、ディスクのトラック上に情報を記録再生するデー
タヘッドのサーボ情報を記録する下層酸化物磁性層と、
この下層酸化物磁性層を被覆する非磁性層と、この非磁
性層を被覆し、Coの添加物を重量パーセントで1.3%から
2.0%含むγ-Fe2O3またはγ-Fe2O3とFe3O4の中間組成物
を主成分とし、データ情報を記録する上層酸化物磁性層
とを備える磁気記録体であって、下層酸化物磁性層の保
持力が1000エルステッドから2000エルステッドであり、
上層酸化物磁性層の保持力が500エルステッドから1000
エルステッドの間であることを特徴とする磁気記録体が
提供される。That is, according to the present invention, a non-magnetic substrate and a γ-containing Co substrate containing 2.0% to 4.0% by weight of a Co additive are contained.
-Fe 2 O 3 or a lower oxide magnetic layer that mainly contains an intermediate composition of γ-Fe 2 O 3 and Fe 3 O 4 and records servo information of a data head that records / reproduces information on / from a track of a disk. When,
A non-magnetic layer that covers the lower oxide magnetic layer and a non-magnetic layer that covers the non-magnetic layer and contains Co additive from 1.3% by weight.
A magnetic recording medium, which comprises 2.0% of γ-Fe 2 O 3 or an intermediate composition of γ-Fe 2 O 3 and Fe 3 O 4 , as a main component, and an upper oxide magnetic layer for recording data information, The coercive force of the lower oxide magnetic layer is from 1000 oersteds to 2000 oersteds,
Coercive power of the upper oxide magnetic layer is from 500 Oersted to 1000
There is provided a magnetic recording medium characterized by being between Oersted.
非磁性基体としては、ガラス，アルマイト被覆アルミニ
ウム合金、またはニッケル・リン合金被覆アルミニウム
合金を表面研摩した基体等が適し、これを被覆する下層
酸化物磁性層としてはCo等の添加物を含むγ-Fe2O3を主
成分とする、もしくはγ-Fe2O3とFe3O4の中間組成物を
主成分とする酸化鉄磁性層が適し、これを被覆する非磁
性層としてはSiO2,Al2O3,α−Fe2O3等があり厚さは0.2
〜0.8μｍが好ましい。これを被覆する上層酸化物磁性
層はCo等の添加物を含むγ-Fe2O3もしくはγ-Fe2O3とFe
3O4の中間組成物を主成分とする酸化鉄磁性層が適す
る。下層酸化物磁性層にサーボ信号を上層酸化鉄磁性層
にデータ信号が記録される。下層酸化物磁性層は、上層
酸化物磁性層にデータ信号が記録される際ヘッド磁界の
影響がないように1000から2000Oeまでの保磁力が好まし
く、一方上層酸化物磁性層はデータ信号が書き易くかつ
高密度に記録できるために500〜1000Oeが好ましくこれ
により高トラック密度時のサーボ信号のSNR及びデータ
信号のSNRが向上するのでSNRの良好なデータ面サーボ方
式を可能にすることが出来る。As the non-magnetic substrate, a substrate obtained by polishing the surface of glass, an alumite-coated aluminum alloy, or a nickel-phosphorus alloy-coated aluminum alloy is suitable, and the lower oxide magnetic layer for coating the γ-containing additive such as Co An iron oxide magnetic layer containing Fe 2 O 3 as a main component or an intermediate composition of γ-Fe 2 O 3 and Fe 3 O 4 as a main component is suitable, and a non-magnetic layer covering this is SiO 2 , Al 2 O 3 , α-Fe 2 O 3 etc., and the thickness is 0.2
.About.0.8 .mu.m is preferred. The upper oxide magnetic layer covering this is γ-Fe 2 O 3 or γ-Fe 2 O 3 and Fe containing additives such as Co.
An iron oxide magnetic layer containing an intermediate composition of 3 O 4 as a main component is suitable. A servo signal is recorded on the lower oxide magnetic layer and a data signal is recorded on the upper iron oxide magnetic layer. The lower oxide magnetic layer preferably has a coercive force of 1000 to 2000 Oe so that the head magnetic field is not affected when a data signal is recorded on the upper oxide magnetic layer, while the upper oxide magnetic layer facilitates writing of data signals. In addition, 500 to 1000 Oe is preferable for high-density recording, which improves the SNR of the servo signal and the SNR of the data signal at the time of high track density, thus enabling a data surface servo system with a good SNR.
以下本発明による磁気記憶体の特徴を実施例により説明
する。The features of the magnetic memory according to the present invention will be described below with reference to examples.
実施例 本実施例の磁気記憶体の構造を図に示した。非磁性基体
１としてアルミニウム合金基板にアルマイト被覆し、そ
れを鏡面研摩したものを用い、この上にコバルトを重量
パーセントで2.0%から4.0%及び銅を２％含むFe3O4をタ
ーゲットとし、アルゴン雰囲気中でスパッタ圧力4×10
-3Torr、スパッタ電力2.0KWで膜厚0.2μｍから0.5μｍ
のFe3O4を主成分とする酸化鉄磁性薄膜を形成し、これ
を大気中300℃で１時間酸化し下層酸化物磁性層２を得
た。これは膜厚がおよそ0.25μｍまではγ-Fe2O3を主成
分とする酸化鉄磁性薄膜であったが、それ以上のものは
γ-Fe2O3とFe3O4の中間組成物を主成分とする酸化物磁
性薄膜でありこれらの磁性膜の保持力は1000Oeから2000
Oeであった。Example The structure of the magnetic memory of this example is shown in the figure. As the non-magnetic substrate 1, an aluminum alloy substrate coated with alumite and mirror-polished was used. On this, Fe 3 O 4 containing 2.0% to 4.0% by weight of cobalt and 2% of copper was used as a target, and argon was used. Sputtering pressure 4 × 10 in atmosphere
-3 Torr, sputter power 2.0KW, film thickness 0.2μm to 0.5μm
Fe 3 O 4 was used as a main component to form an iron oxide magnetic thin film, and this was oxidized in the atmosphere at 300 ° C. for 1 hour to obtain a lower oxide magnetic layer 2. This was an iron oxide magnetic thin film containing γ-Fe 2 O 3 as the main component up to a film thickness of approximately 0.25 μm, but more than that was an intermediate composition of γ-Fe 2 O 3 and Fe 3 O 4 . Is a magnetic oxide thin film whose main component is, and the coercive force of these magnetic films is from 1000 Oe to 2000
It was Oe.
次に下層酸化物磁性層２の上に非磁性層３としてSiO2を
膜厚0.2μｍから0.8μｍ形成し、この上にコバルトを重
量パーセントで1.3％から2.0％及び銅を２％含むFe3O4
ターゲットを用いて、アルゴン雰囲気中でスパッタ圧力
4×10-3Torr、スパッタ電力1.75KWで膜厚0.1μｍから0.
2μｍのFe3O4を主成分とする酸化鉄磁性薄膜を形成し、
これを大気中275℃で１時間酸化してγ-Fe2O3を主成分
とする上層酸化物磁性層４を形成した。Next, a SiO 2 film having a thickness of 0.2 μm to 0.8 μm is formed as a nonmagnetic layer 3 on the lower oxide magnetic layer 2, and Fe 3 containing cobalt of 1.3% to 2.0% and copper of 2% by weight is formed on the SiO 2 film. O 4
Sputtering pressure in a argon atmosphere using a target
4 × 10 -3 Torr, sputtering power 1.75KW and film thickness 0.1μm to 0.
An iron oxide magnetic thin film containing 2 μm of Fe 3 O 4 as a main component is formed,
This was oxidized in air at 275 ° C. for 1 hour to form an upper oxide magnetic layer 4 containing γ-Fe 2 O 3 as a main component.
この様にして得られた磁気記録体の上層酸化物磁性層４
に記録したデータ信号の記録密度は、磁気ヘッドのギャ
ップ長0.15μｍから1.0μｍでD50（孤立波出力の1/2と
なる再生出力の記録密度）が25〜66KFRPIでSNRの良好な
高密度特性が得られた。また下層酸化物磁性層２に記録
したサーボ信号のSNRは下層酸化物磁性層２が高保磁力
磁性層であるためにCo-Ni-Pメッキ型磁性媒体に比して
４〜５dB改善出来た。The upper oxide magnetic layer 4 of the magnetic recording material thus obtained
Recording density of the recorded data signal, (recording density of the reproduction output becomes 1/2 of the isolated wave output) D 50 at 1.0μm from the gap length 0.15μm magnetic head good dense SNR at 25~66KFRPI to The characteristics were obtained. Further, the SNR of the servo signal recorded in the lower oxide magnetic layer 2 could be improved by 4 to 5 dB as compared with the Co-Ni-P plated magnetic medium because the lower oxide magnetic layer 2 was a high coercive force magnetic layer.
以上、実施例で示されたように、磁気２重層ディスクに
よりデータ面サーボ方式を実現する時、上層及び下層の
磁性層にコバルトをドープしたγ-Fe2O3をスパッタ法に
より作製した磁性媒体を用いることによりデータ信号の
高密度化とサーボ信号の高SNR化が可能となった。As described in the above embodiments, when the data surface servo system is realized by the magnetic double layer disk, the magnetic medium in which the upper and lower magnetic layers are made of cobalt-doped γ-Fe 2 O 3 is produced by the sputtering method. By using, it has become possible to increase the data signal density and servo signal SNR.
図は本発明の実施例で用いた磁気記憶体の断面図であ
る。 １は非磁性基板で、２はサーボ信号の記録用の下層酸化
物磁性層で、３は非磁性層、４はデータ信号の記録用の
上層酸化物磁性層である。The figure is a cross-sectional view of a magnetic memory used in an example of the present invention. Reference numeral 1 is a non-magnetic substrate, 2 is a lower oxide magnetic layer for recording servo signals, 3 is a non-magnetic layer, and 4 is an upper oxide magnetic layer for recording data signals.
Claims (1)
加物を重量パーセントで2.0%から4.0%含むγ-Fe2O3、ま
たはγ-Fe2O3とFe3O4の中間組成物を主成分とし、ディ
スクのトラック上に情報を記録再生するデータヘッドの
サーボ情報を記録する下層酸化物磁性層と、この下層酸
化物磁性層を被覆する非磁性層と、この非磁性層を被覆
し、Coの添加物を重量パーセントで1.3%から2.0%含むγ
-Fe2O3またはγ-Fe2O3とFe3O4の中間組成物を主成分と
し、データ情報を記録する上層酸化物磁性層とを備える
磁気記録体であって、下層酸化物磁性層の保持力が1000
エルステッドから2000エルステッドであり、上層酸化物
磁性層の保持力が500エルステッドから1000エルステッ
ドの間であることを特徴とする磁気記録体。1. A non-magnetic substrate and γ-Fe 2 O 3 , or γ-Fe 2 O 3 and Fe 3 O 4 coating the substrate and containing 2.0% to 4.0% by weight of a Co additive. A lower oxide magnetic layer containing an intermediate composition as a main component for recording servo information of a data head for recording / reproducing information on / from a disk track, a non-magnetic layer covering the lower oxide magnetic layer, and the non-magnetic layer. A layer containing 1.3% to 2.0% by weight of Co additive γ
-Fe 2 O 3 or γ-Fe 2 O 3 and an intermediate composition of Fe 3 O 4 as a main component, and a magnetic recording medium having an upper oxide magnetic layer for recording data information, comprising: Layer holding power is 1000
A magnetic recording medium characterized in that it is from Oersted to 2000 Oersted, and the coercive force of the upper oxide magnetic layer is from 500 Oersted to 1000 Oersted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58160765A JPH0661129B2 (en) | 1983-09-01 | 1983-09-01 | Magnetic storage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58160765A JPH0661129B2 (en) | 1983-09-01 | 1983-09-01 | Magnetic storage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6052918A JPS6052918A (en) | 1985-03-26 |
| JPH0661129B2 true JPH0661129B2 (en) | 1994-08-10 |
Family
ID=15721969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58160765A Expired - Lifetime JPH0661129B2 (en) | 1983-09-01 | 1983-09-01 | Magnetic storage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0661129B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5062582A (en) * | 1989-08-02 | 1991-11-05 | International Paper Company | Apparatus and method for producing semi-converted diskette liners |
| US9402426B2 (en) | 2008-04-10 | 2016-08-02 | Asics Corporation | Upper garment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531505A (en) * | 1976-06-28 | 1978-01-09 | Hitachi Ltd | High density information recording medium and preparation thereof |
-
1983
- 1983-09-01 JP JP58160765A patent/JPH0661129B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6052918A (en) | 1985-03-26 |
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