JPH0663570B2 - Diaphragm manufacturing method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a method for manufacturing a diaphragm in which spiral ripples are formed from the center toward the outside.

[Conventional technology and its problems]

The inventors of the present invention, in Japanese Patent Application No. 1-112879, etc., have a corrugated cross section around the stainless steel foil center circle 10 at any point around it, as shown in FIG. The spiral ripple P proposed a diaphragm D which is inclined toward the central circle 10 (see FIG. 4).

In the proposed diaphragm D, since the ripple P has a spiral shape, the rigidity of the periphery is uniformized, and when the flexing action is performed, the flexure is uniformly bent in the circumferential direction without deviation of stress, that is, the flexing characteristics are satisfactory. Met.

However, as shown in FIG. 9, in the pressure-displacement curve (deflection characteristic curve), the difference t generated during pressurization (forward time: ○) and during depressurization (return time: ●) is not yet satisfactory. The fact that this difference t is small or absent means that there is no difference in the bending characteristics of the diaphragm D with respect to pressure increase / decrease.
This is a very important factor when using the diaphragm D as a pressure detector.

For this reason, the inventors of the present application, while repeatedly performing the bending characteristic test of the diaphragm D, as shown by the chain line in FIG.
The central circle 10 part is reversed to "bowl-shaped bulge" at the time of pressurization and "cup-shaped dent" at the time of depressurization, "peco-peco" at the time of so-called pressurization / depressurization, and this reversal adversely affects the characteristics, and the difference t It was found that this is the cause of the occurrence of.

Based on this finding, if a disk of the same size as the surface of the central circle 10 is fixed to the surface of the central circle 10, it is considered that "pekopeko" in the central circle 10 part will disappear, and such a diaphragm is manufactured (Example 4). Figure, Figure 5), the pressure-
When the displacement curve was obtained, good results were obtained as shown in FIG.

However, when fixing the above-mentioned disk by YAG laser welding, it was very difficult to perform the operation with the disk and the central circle 10 being positioned on the same axis, which was a complicated work. If this positioning is not accurate, the deflection becomes uneven, and accuracy becomes a problem.

In view of the above points, the present invention has an object of facilitating the positioning in the method of manufacturing the diaphragm.

[Means for Solving the Problems]

In order to solve the above problems, in the present invention, around the metal foil material center circle, from any point around it, a wavy cross section exhibiting a spiral ripple, and the surface of the center circle has the surface and In the method for producing the above-mentioned diaphragm with fixed disks of the same size, the metal foil is compressed between the die and the punch, and the ripples formed on the pressure contact surface of the die are molded into the metal foil, and With a kicker pin that penetrates on the center axis of the die or punch, the formed metal foil is pressed to form a protrusion in the center of the die, and the metal foil is released from the die, and the disk is formed with the hole in the center of the protrusion. It is configured to be fixed to the metal foil by being fitted to.

Here, the disk refers to a disk having a material and a thickness that are not deformed by the pressure applied to the diaphragm.

[Action]

In the method of manufacturing a diaphragm according to the present invention having such a structure, the center of the die and punch is normally determined accurately, and therefore the diaphragm (metal foil) is formed in the state where the center is accurately formed. Then, since the protrusion is formed on itself by the kicker pin on the center axis, the protrusion is also accurately on the center axis. On the other hand, the disk is also usually subjected to press punching, and the center hole thereof is likewise accurately formed on the center axis. Therefore, by fitting the center hole into the protrusion, the disc is accurately fixed on the same axis as the diaphragm.

[Example] First, as shown in FIG.
And die B, and punch A to die B via support H
And press down to press-form between the die B and the punch A.

In the center of the die B, the die insert (molding die) 1 shown in FIG.
Is fitted. The die insert 1 is made of die steel and has a drill hole 2 formed in the center thereof around which the ripple P'of the diaphragm D is engraved. The dimensions of this ripple P'are determined so that the diaphragm D shown in FIG. 4 can be molded. The dimensions of the diaphragm D are as follows. That is, in the figure, the radius of curvature R is 100 mm, the diameter S of the central circle 10 is 10 mm, the radius of curvature of the peaks / valleys of the ripple R is 0.5 mm, the height of ripples is t = 0.2 mm, the height of ripples is h = 2.7 mm, The ripple length in the radial direction was 1 = 15.5 mm, and the finished outer diameter was 54 mm.

The punch insert 3 shown in FIG. 2 is also fitted in the center of the punch A. This punch insert 3 is made of urethane rubber,
Similarly, a drill hole 4 is formed in the center, but the surrounding area is a concave curved surface 5 which maintains a flat surface and does not have a ripple P '. The plane portion corresponds to the central circle 10. The hardness of urethane rubber is 50 to 95 on the HsA scale. If it is less than 50, sufficient pressing force cannot be obtained during press molding, and the metal foil cannot have a desired shape, especially the ripple P, whereas if it exceeds 95, the metal foil may be damaged.

In the hole 4 of the punch insert 3, as shown by the chain line in the figure,
The kicker pin 6 can be inserted and both nests 1, 3
After forming the diaphragm D by fitting, the kicker pin 6 is projected like a chain line.

This embodiment is constructed as described above. Now, when a 0.015 mm-thick stainless steel foil is placed on the die insert 1 and the punch A is pressed against the die B, the ripple P'on the surface of the die insert 1 is formed.
Is stamped on the metal foil, and then the kicker pin 6 is advanced to form a protrusion 8 in the center like embossing, and the diaphragm (metal foil) D after molding is inserted into the die insert 1
And, it is released from the punch insert 3. At this time, the protrusion of the kicker pin 6 does not hinder the existence of the drill hole 4 of the punch insert 3, and the air between the inserts 1 and 3 gathers at the pressing point (in the protrusion 8).

On the other hand, the disk 7 is made of SUS304 having a thickness of 0.5 mm, and a pair of 10 mmφ having a hole 7a and a protrusion 7b at the center thereof is manufactured in advance by press punching, and the disk is formed as shown in FIGS. As shown in FIG. 3, the two disks 7a and 7b are fitted to each other by using the projection 8 as a guide, so that the centers of both disks 7 are set at the center of the central circle 10 and set on the diaphragm D. That is, it is set in a centered manner. In this positioned state, YAG laser welding is performed to obtain the desired diaphragm D shown in FIGS. 4 and 5.

The pressure-displacement curve of the diaphragm D manufactured as described above is shown in FIG. 7, and as a comparative example, the diaphragm D shown in FIG. 8 to which the disk 7 is not fixed (the disk 7 is provided in FIG. 4). Fig. 9 shows the pressure-displacement curve of the (not shown).

Although the kicker pin 6 is provided on the punch A side in the embodiment, it may be provided on the die B side. At this time, the projection 8 projects to the opposite side.

〔The invention's effect〕

The present invention is configured as described above, and the protrusion for disc positioning is formed at the time of forming the diaphragm, so that the protrusion is accurately centered. Therefore, the disc is accurately and easily formed in the center circle of the diaphragm (metal foil). Stuck to.

Therefore, according to the present invention, there is an effect that a diaphragm having a bending characteristic with little difference between pressurization and depressurization can be manufactured with good workability.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view of an embodiment of a method of manufacturing a diaphragm according to the present invention, and FIGS. 2 (a) and 2 (b) are partially cutaway front views of the punch insert. A plan view, FIGS. 3 (a) and 3 (b) are partially cutaway front views of the die insert, a plan view, FIG. 4 is a perspective view of a diaphragm manufactured by the same embodiment, and FIG. 5 is FIG. 6 is a sectional view of the same embodiment, FIG. 6 is a pressure-displacement curve diagram of the diaphragm of FIG. 4, FIG. 8 is a sectional view of a conventional diaphragm, and FIG. 9 is the same conventional example. It is a pressure-displacement curve figure of. A ... Punch, B ... Die, D ... Diaphragm, H ... Post, P ... Swirl ripple, 1 ... Die insert, 2, 4 ... Drill hole, 3 ... Punch insert, 6 ... ... Kicker pin, 7 ... disk, 7a ... hole, 7b ... projection, 8 ... projection, 10 ... central circle.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-51664 (JP, A) JP-A-49-51605 (JP, A) Jitsukaihei 2-1456 (JP, U)

Claims (1)

[Claims] 1. A diaphragm having a corrugated cross section around the center circle of a metal foil material and exhibiting a spiral ripple from an arbitrary point around the center circle, and a disk having the same size as the surface is fixed to the center circle surface. In the manufacturing method, the metal foil is compressed between the die and the punch, the ripples formed on the pressure contact surface of the die are molded into the metal foil, and the kicker pin penetrates on the center axis of the die or the punch. By pressing the formed metal foil to form a protrusion in the center,
A method for manufacturing a diaphragm, characterized in that a metal foil is released from a die, and the disc is fixed to the metal foil by fitting a hole at the center thereof into the protrusion.