JPH0665463B2 - Guide roller for ultra-precision polishing - Google Patents
Guide roller for ultra-precision polishingInfo
- Publication number
- JPH0665463B2 JPH0665463B2 JP61215963A JP21596386A JPH0665463B2 JP H0665463 B2 JPH0665463 B2 JP H0665463B2 JP 61215963 A JP61215963 A JP 61215963A JP 21596386 A JP21596386 A JP 21596386A JP H0665463 B2 JPH0665463 B2 JP H0665463B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- guide roller
- ultra
- dynamic pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/108—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work involving a sectioned bowl, one part of which, e.g. its wall, is stationary and the other part of which is moved, e.g. rotated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は、遊離砥粒によるラッピング、ポリシング、
メカノケミカルポリシング等の超精密研磨加工に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention is directed to lapping, polishing, and
It relates to ultra-precision polishing such as mechanochemical polishing.
［従来の技術］ 従来から、遊離砥粒による超精密研磨機は第４図に示す
ような修正輪型が使われている。この図において、ラッ
プ皿、ポリシャ等の回転可能な工具１上に環状の修正輪
３が配置され、その中に被加工物としての試料を工具１
側の面に接着した円盤状プレート５を収納する。修正輪
は、工具１の外方からＶ字状に延長された２本のアーム
7,9の先端に回転可能に取付けられたガイドローラ11,13
にて支持されている。[Prior Art] Conventionally, a correction wheel type as shown in FIG. 4 has been used as an ultra-precision polishing machine using loose abrasive grains. In this figure, an annular correction wheel 3 is arranged on a rotatable tool 1 such as a lapping plate or polisher, and a sample as a workpiece is placed in the correction wheel 3.
The disk-shaped plate 5 adhered to the side surface is stored. The correction wheel consists of two arms extending from the outside of the tool 1 in a V shape.
Guide rollers 11,13 rotatably attached to the tips of 7,9
Supported by.
そして、工具１が図中で反時計方向に回転すると、これ
につれて修正輪３は、工具１の外周側と内周側との周速
度の差によってガイドローラ11,13に支持されつつ図中
で反時計方向に従動回転し、これと同時にプレート５も
試料と共に同方向に回転する。このようにして試料は、
それ自体回転しながら工具１の回転により研磨される。Then, when the tool 1 rotates counterclockwise in the drawing, the correction wheel 3 is supported by the guide rollers 11 and 13 due to the difference in peripheral speed between the outer peripheral side and the inner peripheral side of the tool 1 accordingly. The plate 5 is driven to rotate counterclockwise, and at the same time, the plate 5 rotates in the same direction as the sample. In this way the sample is
It is ground by the rotation of the tool 1 while rotating itself.
一般に、上述の研磨により試料面をより均一化して加工
するには、工具１と修正輪３ならびにプレート５の各回
転数をそれぞれ同一にするのが理想である。このため、
従来では修正輪３を支持するガイドローラ11,13を玉軸
受あるいはすべり軸受により回転支持して回転抵抗を減
少させている。Generally, in order to make the surface of the sample more uniform by the above-described polishing, it is ideal that the tool 1, the correction wheel 3, and the plate 5 have the same rotational speed. For this reason,
Conventionally, the guide rollers 11 and 13 that support the correction wheel 3 are rotatably supported by ball bearings or slide bearings to reduce the rotational resistance.
ところが、最近、超精密研磨加工の精度がより高度に要
求されているが、この精度に最も関係する要因の１つと
してガイドローラ11,13からの回転による振動がある。
ラッピング，ポリシング等研磨加工は定盤工具の表面形
状の転写を加工の原理としていることから考えても、試
料に振動を与えることは超精密加工の精度を低下させる
ことは明らかである。第４図をみてもわかるように、試
料を支えているのはガイドローラ11,13であり、ガイド
ローラ11,13の回転により振動が発生すると、この振動
が直接的に精度に影響を及ぼすことになる。However, recently, there has been a demand for higher precision in ultraprecision polishing processing, and one of the factors most related to this precision is vibration due to rotation from the guide rollers 11 and 13.
Considering that lapping, polishing and other polishing processes use the transfer of the surface shape of the surface plate tool as the principle of processing, it is clear that applying vibration to the sample reduces the precision of ultra-precision processing. As can be seen from FIG. 4, it is the guide rollers 11, 13 that support the sample, and when vibrations are generated by the rotation of the guide rollers 11, 13, this vibration directly affects the accuracy. become.
［発明が解決しようとする問題点］ しかしながら、前述の玉軸受やすべり軸受によるガイド
ローラ11,13の支持では、ガイドローラ11,13側からの軸
受部のころがり若しくはすべりよる振動が修正輪３およ
びプレート５を介して試料に伝播するため、試料の加工
面、特にその外周側にはチッピングが生じたり、クラッ
クが深く入り加工歪が顕著に現われてしまうという問題
がある。[Problems to be Solved by the Invention] However, when the guide rollers 11 and 13 are supported by the above-described ball bearings and slide bearings, vibrations due to rolling or sliding of the bearing portion from the guide roller 11 and 13 side cause correction wheel 3 and Since the light propagates through the plate 5 to the sample, there are problems that chipping occurs on the processed surface of the sample, especially the outer peripheral side thereof, and cracks deeply appear and processing distortion appears remarkably.
この発明はこのような従来の問題点に着目してなされた
もので、回転振動を減少させた超精密研磨加工用ガイド
ローラの提供を目的とする。The present invention has been made in view of such conventional problems, and an object thereof is to provide a guide roller for ultra-precision polishing processing in which rotational vibration is reduced.
［問題点を解決するための手段］ この目的を達成するためにこの発明は、研磨盤に対し従
動回転する修正輪が研磨盤上に配置され、この修正輪を
支持する超精密研磨用ガイドローラにおいて、支持部材
に固定支持されるシャフトと、シャフトに固定支持され
流体槽を構成するステータと、ステータに対し回転可能
で前記流体槽内に一部位が収納され且つ他の一部位が前
記修正輪に接触可能なロータとを有し、前記ステータと
ロータとの互いの対向面の何れか一方にステータとロー
タとの間に動圧を発生させる動圧発生部を設ける構成と
した。[Means for Solving the Problems] In order to achieve this object, the present invention is directed to a superprecision polishing guide roller in which a correction wheel that is driven to rotate with respect to a polishing disk is disposed on the polishing disk and supports the correction wheel. A shaft fixedly supported by a support member, a stator fixedly supported by the shaft to form a fluid tank, a part rotatable in the stator and partially housed in the fluid tank, and another portion being the correction wheel. And a rotor capable of contacting the rotor, and a dynamic pressure generating unit for generating a dynamic pressure between the stator and the rotor is provided on either one of the facing surfaces of the stator and the rotor.
［作用］ このような構成において、修正輪の回転に伴ってロータ
が回転すると、ステータの流体槽内の流体がステータと
ロータとの何れか一方の動圧発生部に引き込まれること
によりステータとロータとの間に動圧が発生する。この
ため、ステータとロータとは流体を介しての相対回転関
係となり、ロータの回転振動は極めて小さいものとなっ
て修正輪に与える振動は微小なものとなる。この結果、
試料の超精密研磨加工が精度良く行なわれる。[Operation] In such a configuration, when the rotor rotates with the rotation of the correction wheel, the fluid in the fluid tank of the stator is drawn into the dynamic pressure generating portion of either one of the stator and the rotor, and thus the stator and the rotor. Dynamic pressure is generated between and. Therefore, the stator and the rotor have a relative rotational relationship via the fluid, the rotational vibration of the rotor is extremely small, and the vibration applied to the correction wheel is minute. As a result,
Ultra-precision polishing of the sample is performed with high accuracy.
［実施例］ 以下、図面に基づきこの発明の一実施例を詳細に説明す
る。Embodiment An embodiment of the present invention will be described in detail below with reference to the drawings.
第１図は第４図のガイドローラ11,13に相当する部位の
拡大された断面図である。ガイドローラとしてのロータ
15を回転支持し図中で上部側先端にねじ部17aが形成さ
れたシャフト17の下部側にはステータ19が固定支持され
ている。ステータ19は、シャフト17に固定支持される内
側円筒部21と、内側円筒部21との間で環状空間を形成す
る外側円筒部23と、内側円筒部21および外側円筒部23の
両下端部をつなぐ底部円板25とから形成されている。上
記内側円筒部21、外側円筒部23および底部円板25とによ
り囲まれた部位が環状の流体槽27となり、この流体槽27
内に油28が満たされる。FIG. 1 is an enlarged sectional view of a portion corresponding to the guide rollers 11 and 13 in FIG. Rotor as guide roller
A stator 19 is fixedly supported on the lower side of a shaft 17 that rotatably supports 15 and has a threaded portion 17a formed at the upper end in the figure. The stator 19 includes an inner cylindrical portion 21 fixedly supported by the shaft 17, an outer cylindrical portion 23 forming an annular space between the inner cylindrical portion 21, and both lower ends of the inner cylindrical portion 21 and the outer cylindrical portion 23. It is formed from a bottom disc 25 that connects to the bottom disc 25. A portion surrounded by the inner cylindrical portion 21, the outer cylindrical portion 23, and the bottom disc 25 serves as an annular fluid tank 27.
Oil 28 is filled therein.
内側円筒部21の上部は外側円筒部23より若干上方に突出
しており、この突出部21aの外径21は流体槽27の内周壁
を構成する内側円筒部21の外径より小さくなっている。
突出部21aの上端に当接した状態で、第４図のアーム7,9
に相当する支持部材としての支持板29がシャフト17にね
じ部17aに螺合し固定され、更に支持板29の上部側には
ナット31が螺合し支持板29を固定している。The upper portion of the inner cylindrical portion 21 projects slightly above the outer cylindrical portion 23, and the outer diameter 21 of the protruding portion 21a is smaller than the outer diameter of the inner cylindrical portion 21 forming the inner peripheral wall of the fluid tank 27.
Arms 7 and 9 shown in FIG. 4 are contacted with the upper end of the protruding portion 21a.
A supporting plate 29 as a supporting member corresponding to the above is fixed to the shaft 17 by being screwed into the threaded portion 17a, and a nut 31 is screwed to the upper side of the supporting plate 29 to fix the supporting plate 29.
前記ロータ15は、第４図に示したものと同様な図示しな
い研磨盤としてのラップ皿、ポリシャ等の工具上に配置
された修正輪に接触して回転するガイドローラ部33と、
流体槽27内に配置されるロータ部35とから形成されてい
る。The rotor 15 is a guide roller portion 33 that rotates in contact with a correction wheel arranged on a tool such as a lapping plate or polisher (not shown) similar to that shown in FIG. 4,
It is formed of a rotor portion 35 arranged in the fluid tank 27.
ガイドローラ部33は、流体槽27の上部開口を覆う位置に
あって内周側端部が内周側円筒部21の突出部21aに近接
して配置された上部壁33aと、上部壁33aの外周側端部か
ら下方に延長された円筒部33bとからなる。ロータ部35
は、ガイドローラ33の上部壁33a下面に固定され、外周
側中央部に環状凹部35aが形成されている。The guide roller portion 33 includes an upper wall 33a, which is located at a position covering the upper opening of the fluid tank 27 and has an inner peripheral side end portion arranged in proximity to the projecting portion 21a of the inner peripheral side cylindrical portion 21, and an upper wall 33a. It comprises a cylindrical portion 33b extending downward from the outer peripheral side end portion. Rotor part 35
Is fixed to the lower surface of the upper wall 33a of the guide roller 33, and an annular recess 35a is formed in the central portion on the outer peripheral side.
ステータ19の内側円筒部21と底部円板25とにそれぞれ対
向するロータ部35の内周壁35bと下面部35cとには、ロー
タ15の回転によりこの各部35b,35cとステータ19との間
に油が引き込まれて動圧を発生させる動圧発生部37が形
成されている。第２図はこの動圧発生部37を示すロータ
部35の底面図である。下面部35cの動圧発生部37は、第
２図のIII−III断面図である第３図に示すように、内周
端から外周端に向けて径方向に向き且つ周方向に等間隔
に設けられた複数の凸部39を備えている。凸部39は、扇
状の平面部39aと、各凸部39共に平面部39aの第２図中で
反時計方向側に設けられ反時計方向に向うに従って平面
部39aより低くなるように傾斜した帯状のテーパ部39bと
を有している。内周壁35bの動圧発生部も上述した下面
部35cと同様に周方向に複数の凸部が等分に設けられ、
凸部には平面部とテーパ部とが形成されている。下面部
35c,内周壁35b共に、凸部の分割数、あるいはテーパ部
の傾斜角度等は流体槽27内の油28の粘度、ロータ15の回
転数を考慮して適宜決定する。The inner peripheral wall 35b and the lower surface portion 35c of the rotor portion 35, which face the inner cylindrical portion 21 of the stator 19 and the bottom circular plate 25, respectively, have oil between the respective portions 35b, 35c and the stator 19 due to rotation of the rotor 15. A dynamic pressure generating portion 37 is formed that is drawn in to generate dynamic pressure. FIG. 2 is a bottom view of the rotor portion 35 showing the dynamic pressure generating portion 37. As shown in FIG. 3 which is a sectional view taken along the line III-III in FIG. 2, the dynamic pressure generating portions 37 of the lower surface portion 35c face in the radial direction from the inner peripheral end to the outer peripheral end and are equally spaced in the peripheral direction. It has a plurality of convex portions 39 provided. The convex portion 39 is provided with a fan-shaped flat portion 39a, and each convex portion 39 is provided on the flat portion 39a on the counterclockwise direction side in FIG. 2 and is inclined so as to become lower than the flat portion 39a in the counterclockwise direction. And a taper portion 39b. Similarly to the lower surface portion 35c described above, the dynamic pressure generating portion of the inner peripheral wall 35b is also provided with a plurality of convex portions equally in the circumferential direction,
A flat portion and a tapered portion are formed on the convex portion. Lower surface
For both 35c and the inner peripheral wall 35b, the number of divisions of the convex portion, the inclination angle of the taper portion, and the like are appropriately determined in consideration of the viscosity of the oil 28 in the fluid tank 27 and the rotation speed of the rotor 15.
このような構成において、研磨盤の回転につれて修正輪
が回転すると、この修正論に接触するロータ15が回転す
る。ロータ15が回転すると、環状凹部35aの内の油28が
動圧発生部37が形成されたロータ部35とステータ19の底
部円板25との間にまず引込まれた後、更にロータ部35と
ステータ19の内側円筒部21との間にも引き込まれ、この
結果ロータ部35とステータ19の底部円板25および内側円
筒部21との間に動圧が発生する。これにより、ロータ部
35とステータ19の底部円板25および内側円筒部21との間
には、回転時における固体間の接触がなくなり、両者は
常に油による薄い膜を介しての回転となるので、ロータ
15の回転による振動は僅かなものとなり、超精密研磨加
工がより高度に精度よく実現できる。In such a configuration, when the correction wheel rotates as the polishing disc rotates, the rotor 15 that contacts this correction theory rotates. When the rotor 15 rotates, the oil 28 in the annular recess 35a is first drawn between the rotor portion 35 in which the dynamic pressure generating portion 37 is formed and the bottom disc 25 of the stator 19, and then the rotor portion 35 and It is also drawn in between the inner cylindrical portion 21 of the stator 19, and as a result, dynamic pressure is generated between the rotor portion 35 and the bottom disc 25 of the stator 19 and the inner cylindrical portion 21. This allows the rotor section
Between the rotor 35 and the bottom disc 25 of the stator 19 and the inner cylindrical portion 21, there is no contact between solids during rotation, and both are always rotated through a thin film of oil.
Vibration caused by rotation of 15 will be slight, and ultra-precision polishing processing can be realized with higher accuracy.
このようなガイドローラをラッピング加工に使用したと
ころ、従来みられた試料のチッピングが顕微鏡下でも全
く検出されることはなかった。またポリシング加工に適
用した場合にも従来に比べ平面精度や表面あらさが１〜
５割程度改善された。When such a guide roller was used for lapping, the chipping of the sample, which was conventionally observed, was not detected even under a microscope. In addition, even when applied to polishing processing, the flatness and surface roughness are
It was improved by about 50%.
なお、この発明は前述の実施例に限定されるものではな
い。例えば、流体槽27の中には油28に変えて水を入れて
もよく、またロータ15あるいはステータ19の相互の摺動
部位に低摩擦係数の金属やプラスチックあるいはドライ
ベアリングを使用したり、あるいは油28の中に固体潤滑
剤としてM0S2やWS2等の粉末を微小量添加すると回転が
より滑かになる効果がある。The present invention is not limited to the above embodiment. For example, water may be put in the fluid tank 27 instead of the oil 28, and a metal or plastic having a low coefficient of friction or a dry bearing may be used at the mutual sliding portion of the rotor 15 or the stator 19, or If a minute amount of powder such as M 0 S 2 or WS 2 is added to the oil 28 as a solid lubricant, the rotation becomes smoother.
また、動圧発生部はロータ15側に設けずにステータ19側
に設けてもよい。更に動圧発生部は上記実施例では底部
円板25と内側円筒部21との双方に対向する部位のロータ
部35に設けたが、底部円板25側に対向する部位のロータ
部35のみに設けてもよい。これは勿論ステータ19側に動
圧発生部を設けた場合も同様に底部円板25側のみに動圧
発生部を設けてもよい。このように１ケ所にのみ動圧発
生部を設けた場合は多少効果は低下するので、この場合
には相互の摺動部に前記した低摩擦係数の金属等を用い
た方がよい。Further, the dynamic pressure generating portion may be provided on the stator 19 side instead of the rotor 15 side. Further, the dynamic pressure generating portion is provided in the rotor portion 35 at a portion facing both the bottom disc 25 and the inner cylindrical portion 21 in the above embodiment, but only at the rotor portion 35 at a portion facing the bottom disc 25 side. It may be provided. Of course, even when the dynamic pressure generating portion is provided on the stator 19 side, the dynamic pressure generating portion may be provided only on the bottom disk 25 side. If the dynamic pressure generating portion is provided only at one location as described above, the effect is somewhat lowered. In this case, therefore, it is better to use the above-mentioned metal having a low friction coefficient for the mutual sliding portions.
［発明の効果］ 以上のようにこの発明の超精密研磨用ガイドローラによ
れば、互いに対向する回転面間に動圧を発生させるよう
にして、固体間の接触がなく薄い流体膜で支えられなが
ら回転するようにしたため、ガイドローラの回転による
振動が極めて微小なものとなり、修正輪および試料に与
える振動も減少するので超精密研磨加工の精度がより高
度に実現できる。[Advantages of the Invention] As described above, according to the guide roller for ultra-precision polishing of the present invention, the dynamic pressure is generated between the rotating surfaces facing each other, and there is no contact between solids and is supported by a thin fluid film. Since it is rotated while it is rotated, the vibration due to the rotation of the guide roller is extremely small, and the vibration given to the correction wheel and the sample is also reduced, so that the precision of the ultra-precision polishing processing can be realized to a higher degree.
第１図はこの発明の一実施例のガイドローラの断面図、
第２図は第１図のロータ部の底面図、第３図は第２図の
III−III断面図、第４図は従来の修正輪型の研磨機の模
式図である。 15……ロータ、17……シャフト 19……ステータ、27……流体槽 29……支持板（支持部材） 37……動圧発生部FIG. 1 is a sectional view of a guide roller according to an embodiment of the present invention,
2 is a bottom view of the rotor portion shown in FIG. 1, and FIG. 3 is a bottom view of FIG.
III-III sectional view and FIG. 4 are schematic views of a conventional correction wheel type polishing machine. 15 …… Rotor, 17 …… Shaft 19 …… Stator, 27 …… Fluid tank 29 …… Support plate (support member) 37 …… Dynamic pressure generator
Claims (1)
上に配置され、この修正輪を支持する超精密研磨用ガイ
ドローラにおいて、支持部材に固定支持されるシャフト
と、シャフトに固定支持され流体槽を構成するステータ
と、ステータに対し回転可能で前記流体槽内に一部位が
収納され且つ他の一部位が前記修正輪に接触可能なロー
タとを有し、前記ステータとロータとの互いの対向面の
何れか一方にステータとロータとの間に動圧を発生させ
る動圧発生部を設けたことを特徴とする超精密研磨用ガ
イドローラ。1. A correction wheel, which is driven to rotate with respect to a polishing plate, is arranged on the polishing plate, and a guide roller for ultra-precision polishing which supports the correction wheel has a shaft fixedly supported by a support member and a shaft fixedly supported by the shaft. And a rotor which is rotatable with respect to the stator and which is partially accommodated in the fluid tank and has another portion that can come into contact with the correction wheel. A guide roller for ultra-precision polishing, characterized in that a dynamic pressure generating portion for generating dynamic pressure is provided between a stator and a rotor on either one of the surfaces facing each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61215963A JPH0665463B2 (en) | 1986-09-16 | 1986-09-16 | Guide roller for ultra-precision polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61215963A JPH0665463B2 (en) | 1986-09-16 | 1986-09-16 | Guide roller for ultra-precision polishing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6374565A JPS6374565A (en) | 1988-04-05 |
| JPH0665463B2 true JPH0665463B2 (en) | 1994-08-24 |
Family
ID=16681140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61215963A Expired - Lifetime JPH0665463B2 (en) | 1986-09-16 | 1986-09-16 | Guide roller for ultra-precision polishing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0665463B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04201177A (en) * | 1990-11-30 | 1992-07-22 | Hitachi Ltd | Polishing machine |
| JP4698230B2 (en) | 2005-01-07 | 2011-06-08 | サーパス工業株式会社 | Flow control device |
| JP5249310B2 (en) | 2010-12-17 | 2013-07-31 | Ｃｋｄ株式会社 | Fluid control valve |
-
1986
- 1986-09-16 JP JP61215963A patent/JPH0665463B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6374565A (en) | 1988-04-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |