JPH0665466B2 - Soot mixed diamond polishing wheel - Google Patents
Soot mixed diamond polishing wheelInfo
- Publication number
- JPH0665466B2 JPH0665466B2 JP5749688A JP5749688A JPH0665466B2 JP H0665466 B2 JPH0665466 B2 JP H0665466B2 JP 5749688 A JP5749688 A JP 5749688A JP 5749688 A JP5749688 A JP 5749688A JP H0665466 B2 JPH0665466 B2 JP H0665466B2
- Authority
- JP
- Japan
- Prior art keywords
- soot
- diamond
- diamond particles
- mixed
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910003460 diamond Inorganic materials 0.000 title claims description 51
- 239000010432 diamond Substances 0.000 title claims description 51
- 238000005498 polishing Methods 0.000 title claims description 10
- 239000004071 soot Substances 0.000 title description 11
- 239000002245 particle Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 12
- 238000003754 machining Methods 0.000 description 8
- 239000006061 abrasive grain Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は研摩等の砥石に係り、基材の表面に煤混入ダイ
ヤモンド粒子を析出形成した煤混入ダイヤモンド研摩砥
石に関する。Description: TECHNICAL FIELD The present invention relates to a grindstone for polishing or the like, and relates to a soot-mixed diamond grinding wheel in which soot-mixed diamond particles are deposited and formed on a surface of a base material.
従来、金属やセラミックス等の被加工物を精度よく加工
するには、ダイヤモンド砥石による研摩やダイヤモンド
砥粒によるラッピングがある。Conventionally, in order to accurately process a workpiece such as metal or ceramics, polishing with a diamond grindstone or lapping with diamond abrasive grains is used.
前記ダイヤモンド砥石はダイヤモンド粒子と結合材を焼
結してなるもので、表面のダイヤモンド粒子によって被
加工物を研摩する。The diamond grindstone is formed by sintering diamond particles and a binder, and the diamond particles on the surface grind the workpiece.
前記ラッピングは、被加工物と加工すべき理想形状にき
わめて近い工具（以下ラップという）との間に微細粉末
状のラップ剤を入れて、これらの間に相対運動を行なう
もので、前記ラップ剤がダイヤモンド砥粒であり、この
ダイヤモンド砥粒の切削作用により被加工物の加工面を
摩耗する。In the lapping, a fine powdery lapping agent is put between a workpiece and a tool (hereinafter, referred to as a lapping) that is extremely close to an ideal shape to be machined, and relative movement is performed between them. Are diamond abrasive grains, and the cutting surface of the diamond abrasive grains abrades the processed surface of the workpiece.
上記従来技術では次のような問題点がある。 The above conventional technique has the following problems.
１）ダイヤモンド砥石では表面にダイヤモンド粒子と結
合剤があり、刃先となるダイヤモンド粒子が均一になら
ず精密加工に適していない。1) The diamond grindstone has diamond particles and a binder on the surface, and the diamond particles forming the cutting edge are not uniform, which is not suitable for precision machining.
２）ダイヤモンド砥粒によるラッピングでは仕事量に比
して加工量が少なく、加工時間を多く必要とする。2) Lapping with diamond abrasive grains requires less machining amount and more machining time than the work amount.
３）ダイヤモンド砥石及びダイヤモンド砥粒によるラッ
ピングの両者とも、ダイヤモンド粒子による加工であ
り、被加工物に対してあたりが硬い。また、そのダイヤ
モンド粒子の形状の不均一により、被加工物に傷等を生
じさせてしまうことがある。よって超精密加工に適応し
えない。3) Both the diamond grindstone and the lapping with the diamond abrasive grains are processing with diamond particles, and are hard against the work piece. Further, the uneven shape of the diamond particles may cause scratches or the like on the workpiece. Therefore, it cannot be applied to ultra-precision machining.
本発明は上記課題に鑑みてなされたもので、精密加工及
び超精密加工に適応し、加工能率がよい煤混入ダイヤモ
ンド研摩砥石を提供することにある。The present invention has been made in view of the above problems, and it is an object of the present invention to provide a soot-mixed diamond polishing wheel that is suitable for precision processing and ultra-precision processing and has high processing efficiency.
本発明は上記課題を解決するために次のように構成し
た。The present invention is configured as follows to solve the above problems.
水素ガスと炭化水素ガスから合成される球状の煤混入ダ
イヤモンド粒子を、基材の表面に析出形成してなること
を特徴とする煤混入ダイヤモンド研摩砥石とした。A soot-mixed diamond polishing grindstone is characterized in that spherical soot-mixed diamond particles synthesized from hydrogen gas and hydrocarbon gas are deposited and formed on the surface of a base material.
本発明は上記構成により次のように作用する。 The present invention operates as follows with the above configuration.
基材の表面に水素ガスと炭化水素ガスから合成される球
状の煤混入ダイヤモンド粒子を析出形成することによ
り、基材の表面は球状の煤混入ダイヤモンド粒子で均一
な刃先となる。By depositing and forming spherical soot-containing diamond particles synthesized from hydrogen gas and hydrocarbon gas on the surface of the base material, the surface of the base material has spherical soot-containing diamond particles and a uniform cutting edge.
本発明の実施例を図面に基づいて詳細に説明する。 Embodiments of the present invention will be described in detail with reference to the drawings.
本実施例の煤混入ダイヤモンド研摩砥石Ａは第１図に示
すように、アルミナ，モリブデン，タングステン等の基
材１の表面に球状の煤混入ダイヤモンド粒子２を析出形
成してなる。As shown in FIG. 1, the soot-mixed diamond polishing wheel A of this embodiment is formed by depositing spherical soot-mixed diamond particles 2 on the surface of a base material 1 such as alumina, molybdenum, or tungsten.
前記基材１は板状のものであり、前記煤混入ダイヤモン
ド粒子２は水素ガスと炭化水素ガスから合成され、その
炭化水素ガスはメタンガスとし、そのメタンの濃度は３
〜５％とした。The base material 1 is plate-shaped, and the soot-mixed diamond particles 2 are synthesized from hydrogen gas and hydrocarbon gas, and the hydrocarbon gas is methane gas, and the concentration of methane is 3
-5%.
前記煤混入ダイヤモンド粒子２を合成する装置は、基材
１を収納する容器と、容器内を排気して真空にする真空
発生機と、マイクロ波を発生させるマグネトロンと、マ
イクロ波を容器に導く導波管と、マイクロ波の反射波を
調整するプランジャーとから成る。The apparatus for synthesizing the soot-mixed diamond particles 2 includes a container for accommodating the base material 1, a vacuum generator for exhausting the inside of the container to a vacuum, a magnetron for generating a microwave, and a guide for guiding the microwave to the container. It consists of a wave tube and a plunger that adjusts the reflected wave of the microwave.
基材１は、支持台に載置し容器と導波管の交わる中央に
設置する。The base material 1 is placed on a support and installed at the center where the container and the waveguide intersect.
前記容器には、石英管を使用した。A quartz tube was used as the container.
基材１に煤混入ダイヤモンド粒子を析出させるには、容
器内を真空度10-3Torrまで真空した後、メタンガスの濃
度が３％となるようにメタンガスと水素ガスを容器内に
容器の上開口部より導入しつつ、容器内を容器の下開口
部より排気して容器内の圧力を真空度30Torrに維持する
と共に、基材１に波長2.45GHz,出力300Wのマイクロ波を
照射して基材１の温度を860℃にする。そして数時間こ
の状態を維持する。In order to deposit soot-mixed diamond particles on the base material 1, the inside of the container is evacuated to a vacuum degree of 10 -3 Torr, and then methane gas and hydrogen gas are introduced into the container so that the concentration of methane gas becomes 3%. While introducing from the bottom part, the inside of the container is evacuated from the lower opening of the container to maintain the pressure inside the container at a vacuum degree of 30 Torr, and the base material 1 is irradiated with microwaves of wavelength 2.45 GHz and output 300 W. Bring the temperature of 1 to 860 ° C. And this state is maintained for several hours.
前記メタンガスと水素ガスの流量は100cc／minとした。The flow rates of the methane gas and hydrogen gas were 100 cc / min.
前記容器内の圧力およびマイクロ波により、基材１の周
囲に放電プラズマが発生して水素ガスが原子状水素とな
り、この原子状水素とメタンガスが反応すると共にマイ
クロ波の吸収とプラズマの衝撃により基材１は加熱して
基材１の表面に多数の煤混入ダイヤモンド粒子２が析出
する。Due to the pressure in the container and the microwave, discharge plasma is generated around the base material 1 and the hydrogen gas becomes atomic hydrogen, and the atomic hydrogen and methane gas react with each other, and at the same time the microwave is absorbed and the plasma is bombarded. The material 1 is heated to deposit a large number of soot-mixed diamond particles 2 on the surface of the base material 1.
この煤混入ダイヤモンド粒子２は第２図に示すように、
球状で、煤（無定形炭素あるいは、ダイヤモンドと炭素
の中間体であるダイヤモンドライクカーボン）2aとダイ
ヤモンド微粒子2bが共存している状態のものである。As shown in FIG. 2, the soot-mixed diamond particles 2 are
It is spherical and has soot (amorphous carbon or diamond-like carbon that is an intermediate between diamond and carbon) 2a and diamond fine particles 2b coexisting.
前記煤混入ダイヤモンド研摩砥石２の表面は、多数の煤
混入ダイヤモンド粒子２が均一に析出しており、しか
も、その煤混入ダイヤモンド粒子２が球状で煤2aとダイ
ヤモンド微粒子2bからなるため、被加工物に対してあた
りが柔らかく、潤滑作用もあるので、研摩加工に適して
いる。またダイヤモンド微粒子2bが超微粒子であるため
精密加工及び超精密加工に適している。A large number of soot-mixed diamond particles 2 are evenly deposited on the surface of the soot-mixed diamond grinding wheel 2, and the soot-mixed diamond particles 2 are spherical and consist of soot 2a and diamond particles 2b. It is suitable for polishing because it has a soft touch and has a lubricating effect. Further, since the diamond fine particles 2b are ultrafine particles, they are suitable for precision processing and ultraprecision processing.
本実施例は上記装置及び方法により基材１に煤混入ダイ
ヤモンド粒子２を析出形成したが、他の装置及び方法を
用いてもよく、例えば熱フィラメントCVD法や高周波CVD
法等でもよい。また、基材１が板状のものであったが基
材１の形状を円柱状のにして、その周面に煤混入ダイヤ
モンド粒子２を析出形成してもよい。さらに、種々の形
状の基材に煤混入ダイヤモンド粒子を析出形成できるの
で煤混入ダイヤモンド研摩砥石をラップとして用いるこ
とができ、この場合ラップ剤は不要となる。In this embodiment, the soot-mixed diamond particles 2 are deposited and formed on the substrate 1 by the above apparatus and method, but other apparatuses and methods may be used, for example, hot filament CVD method and high frequency CVD.
Law or the like may be used. Further, although the base material 1 has a plate shape, the base material 1 may have a cylindrical shape and the soot-mixed diamond particles 2 may be deposited and formed on the peripheral surface thereof. Furthermore, since soot-mixed diamond particles can be deposited and formed on substrates of various shapes, a soot-mixed diamond polishing wheel can be used as a lap, and in this case, a lapping agent is unnecessary.
本発明は上記のように構成したので次のような効果があ
る。Since the present invention is configured as described above, it has the following effects.
水素ガスと炭化水素ガスから合成される球状の煤混入ダ
イヤモンド粒子を基材の表面に析出形成してなることに
より、基材の表面は煤混入ダイヤモンド粒子で均一な刃
先となり、精密加工に適応し加工能率がよく、加工時間
を短縮できる。また、煤混入ダイヤモンド粒子が球状で
あり、煤を有するので、被加工物に対してあたりが柔ら
かく、被加工物に傷等を生じさせることがなく、超精密
加工に適応しえる。By forming spherical soot-containing diamond particles synthesized from hydrogen gas and hydrocarbon gas on the surface of the base material, the surface of the base material becomes a uniform cutting edge with soot-containing diamond particles, which is suitable for precision machining. Good machining efficiency and shorter machining time. In addition, since the soot-mixed diamond particles are spherical and have soot, the diamond particles are soft against the work piece, do not cause scratches on the work piece, and can be applied to ultra-precision machining.
図面の第１図は本発明の本実施例を示す説明図、第２図
は煤混入ダイヤモンド粒子の説明図である。 Ａ……煤混入ダイヤモンド研摩砥石 １……基材 ２……煤混入ダイヤモンド粒子 2a……煤 2b……ダイヤモンド微粒子FIG. 1 is an explanatory view showing the present embodiment of the present invention, and FIG. 2 is an explanatory view of soot-mixed diamond particles. A: Soot mixed diamond polishing whetstone 1 ... Substrate 2 ... Soot mixed diamond particles 2a ... Soot 2b ... Diamond fine particles
Claims (1)
状の煤混入ダイヤモンド粒子を、基材の表面に析出形成
してなることを特徴とする煤混入ダイヤモンド研摩砥
石。1. A soot-mixed diamond polishing whetstone characterized in that spherical soot-mixed diamond particles synthesized from hydrogen gas and hydrocarbon gas are deposited and formed on the surface of a base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5749688A JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5749688A JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01234165A JPH01234165A (en) | 1989-09-19 |
| JPH0665466B2 true JPH0665466B2 (en) | 1994-08-24 |
Family
ID=13057333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5749688A Expired - Lifetime JPH0665466B2 (en) | 1988-03-11 | 1988-03-11 | Soot mixed diamond polishing wheel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0665466B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2997824B2 (en) * | 1991-09-12 | 2000-01-11 | 光洋精工株式会社 | Bearing lubrication device |
| JP5177422B2 (en) * | 2008-12-27 | 2013-04-03 | 冨士ダイス株式会社 | Grinding method with resin bond grindstone suitable for grinding nitrogen-added cermet |
| JP2013046960A (en) * | 2012-10-16 | 2013-03-07 | Fuji Dies Kk | Resin bond grinding wheel suitable for grinding processing of hard material such as nitride-added cermet |
-
1988
- 1988-03-11 JP JP5749688A patent/JPH0665466B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01234165A (en) | 1989-09-19 |
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