JPH0665962B2 - Method and apparatus for positioning two objects using magnetism - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a method and a device for positioning two objects in a non-contact manner using magnetism.

BACKGROUND ART Magnetic detection systems such as magnetic sensors have been conventionally known, but most of these are used when detecting the presence of a magnetic substance. Therefore, the use of the magnetic detection system in the three-dimensional positioning method as in the present invention has not been known to the present inventors.

[Object of the Invention] Therefore, a first object of the present invention is to provide two objects which are placed in an unspecified positional relationship with each other in a three-dimensional free space, and in which there are inclusions between them so that they are difficult to visually recognize. It is to provide a method of positioning in a range of 5 degrees of freedom or 6 degrees of freedom by a non-contact method.

A second object of the present invention is to provide a two-object positioning device that embodies the above positioning method.

[Specific Means for Solving Problems] According to the present invention, two magnetic detection systems satisfying a predetermined relationship are provided in the magnetic field by utilizing the property of a radiation magnetic field rotationally symmetric about the magnetic center axis. Has been reached by.

In the present invention as described above, the first object is provided with the magnetic source for generating the radiation magnetic field rotationally symmetrical about the magnetic central axis, and the second object has the central axis as the normal line. Define two different first and second planes, the first of which is
A magnetic sensor for balance detection (hereinafter referred to as a magnetic sensor for balance) capable of detecting a magnetic field at at least three detection points on the same circular orbit and having different phases is arranged on the plane of. On the second plane, scanning magnetic sensors for circularly scanning a predetermined orbit around the center thereof are disposed, respectively, and each of the balancing magnetic sensors disposed on the first plane. The sensitive axes are arranged in a positional relationship including an arrangement such that they intersect at a finite point on the central axis of the second object or are parallel to the central axis.

The two-object positioning method of the present invention is roughly classified into the following two methods.

The first method is to align the central axes of the second object and the first object with each other, and the second method is further advanced in the magnetic field of the second object and the first object. The position is controlled to the desired positional relationship after the relative position of is determined.

Such a method of the present invention is suitable for positioning and axis alignment of various machine tools, and is particularly invisible to the operator.
It is desirable when the object is positioned in a predetermined positional relationship.

[Operation and Effect of the Invention] In the method of the present invention, when all the outputs of the magnetic sensor for balance match, or the outputs of a specific combination match (hereinafter, the balance output matching condition is satisfied. The case of the above) is analyzed by the basic principle of electromagnetism and geometrical consideration, and the central axis of the second object intersects the magnetic central axis of the magnetic source provided with the first object at a predetermined angle, Both axes are coplanar.

Therefore, when such a condition is satisfied, the magnetic sensor for scanning is circularly scanned on a predetermined circular orbit, the magnetic field strength on the orbit is measured by sampling, and the prepared magnetic reference information is applied to the reference magnetic distribution information. Then, the relative position (coordinates) where the second object is placed with respect to the central axis (magnetic central axis) of the magnetic source of the first object is found.

As a result, the relative positional relationship of the second object with respect to the first object in the three-dimensional space is found, so the position information found in this way is compared with the position designation information that is the control target value. By referring to this, the three-dimensional control amount necessary for the moving means is naturally calculated, so that the second object can be positioned at the target position if the second object is relatively moved according to the control amount.

Further, when the method of the present invention is carried out semi-automatically, it is necessary to manually operate while confirming whether or not the object has moved, and thus a display device for monitoring the movement of the moving means is required.

Since the method and apparatus of the present invention have the above-described configuration, the magnetic source can be generated by a non-contact method in the three-dimensional free space between the second object and the first object that are in an unspecified positional relationship with each other. Can be positioned in 5 degrees of freedom excluding the rotation angle around the magnetic center axis, and if a specific motion condition is added to the second object, it can be positioned in 6 degrees of freedom including the positioning of the rotation angle around the magnetic center axis. Can be positioned.

In the present invention as described above, since magnetism is used as the information medium, even if there is an obstacle between the second object and the first object, it affects the magnetic field formed by the magnetic source. It can be carried out unless given, and it has the advantage of being able to be positioned accurately even when the two are invisible to each other, and the range of application in this respect is enormous.

[Examples] Examples of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows a first object and a second object in a radiation magnetic field rotationally symmetrical about a magnetic center axis for explaining the method of the present invention.

Reference numeral 1 is a first object, 2 is a magnetic generation source that generates a rotationally symmetric radiation magnetic field about the magnetic center axis OM, and the central axis of the first object 1 and the magnetic central axis OM are matched. . As the magnetic source, an electromagnet can be used as well as a permanent magnet such as a disc magnet or a cylindrical magnet.

Reference numeral 3 is a second object, and the balance magnetic sensors 41 to 43 and the scan magnetic sensor 5 are provided on two different first and second planes B having the central axis OC as a normal line. There is. Each of these magnetic sensors is configured using a flux gate magnetic sensor, a Hall element magnetic sensor, or a magnetic modulation type magnetic sensor.

In order to carry out the method of the present invention, it is necessary for the balance magnetic sensor 4 to determine whether or not the balance output coincidence condition, which will be described later, is established. Therefore, in the illustrated example, the three balance magnetic sensors 41 to 43 are set to the second Are arranged at at least three or more detection points having different phases on the same circular orbit at the same distance from the center axis OC of the object 3, and the respective balance magnetic sensors 41 to
The 43 sensitive axes l1 to l3 intersect each other at one point on the central axis OC of the second object 3 or are arranged in a positional relationship including an arrangement such that they are parallel to each other.

As for the balance magnetic sensor, even if not a plurality of magnetic sensors as shown in the figure, one magnetic sensor can circularly scan the same circular orbit to detect the magnetic field strength at at least three detection points. You can do it like this.

2a to 2c specifically show an example of arrangement of the balance magnetic sensor 4.

In these figures, C is the intersection of the first plane A and the central axis OC of the second object 3, r is the distance from the central axis OC to the sensor 4, and l1, l2, l3, l4 are respectively Magnetic sensor for balance
The direction of the sensitive axis of 41, 42, 43, 44 is shown.

FIG. 2a shows an example of the arrangement of the balance magnetic sensors 41, 42, 43, and the respective sensitive axes l1, l2, l3 intersect the central axis OC of the second object 3 at one point.

FIG. 2b shows another example of the arrangement of the balance magnetic sensors 41, 42, 43. The respective sensitive axes l1, l2, l3 are parallel to the central axis OC of the second object 3. There is.

Also, FIGS. 2a and 2b show the case where three magnetic sensors are used, but four magnetic sensors may be used, and an example of that case is shown in FIG. 2c.

In FIG. 2c, the sensitive axes l2 and l3 of the two sensors 42 and 43 intersect the central axis OC of the second object 3 at one point, and the sensitive axes l1 and l4 of the other sensors 41 and 44 are central axis OC. It is arranged to be parallel to.

FIG. 3a is an explanatory diagram of circular scanning of the scanning magnetic sensor, and FIG. 3b shows another configuration example of the scanning magnetic sensor.

What is shown in FIG. 3b is the second plane B of the second object 3.
And a large number of magnetic sensors are arrayed in a circulating array at a predetermined distance at an equal distance r from an intersection C ′ with the central axis OC of the second object 3.

The magnetic distribution information of the radiated magnetic field necessary for carrying out the method of the present invention is obtained by circularly scanning the magnetic sensor for scanning (for example, by circularly scanning one magnetic sensor, electronically scanning a large number of magnetic sensors arranged in sequence. There is a method such as scanning to, or taking out the output from a large number of magnetic sensors at the same time), and the measurement value is sampled.

FIG. 4 is a flow chart showing a control procedure when the method of the present invention is carried out using a microcomputer system, and FIG. 5 is a schematic configuration diagram of the present invention corresponding to the claims.

The outline of the method of the present invention is as follows.

At step 100, initialization is performed.

In step 101, the moving means 10 is driven so that the second object 3 approaches or moves away from the first object 1. This movement is performed in step 102 until the output matching determination means 6 matches the balanced output matching condition, that is, the outputs of the above-mentioned magnetic sensors for balancing 4 match or the outputs of the specific combination match. .

Then, in step 102, when the balance output matching condition is satisfied, the scanning magnetic sensor 5 is circularly scanned (-scanning magnetic sensor scanning means 7).

When this scanning magnetic sensor 5 is circularly scanned, the input magnetic field on which the second object 3 is placed is sampled, and two mathematically independent magnetic field information for obtaining magnetic distribution information of the radiated magnetic field. For example, the average value or the median value of the input magnetic field component to the scanning magnetic sensor with respect to the scan angle, the change value or the rotation angle of the scanning sensor that gives the maximum value or the minimum value of the input magnetic field component is calculated.

In step 104, the calculated magnetic information is compared with the magnetic distribution information which is a description prepared in advance, and the relative position of the second object 3 with respect to the first object is read or calculated (-position direction detecting means). 8).

Thus, when the relative position of the second object 3 is calculated, the target position designation signal to be positioned (a signal defining the target position to which the second object 3 should move, hereinafter referred to as such) The control amount of the moving means 10 is calculated.

Then, in step 106, the control means 9 drives the moving means 10 according to the calculated control amount to move the second object 3 to the target position (-moving means 10).

FIG. 6 is a system diagram when the present invention shown in FIG. 5 is applied as an X-ray imaging apparatus, and is used in the fully automatic control mode.

FIG. 7 is a diagram showing a functional configuration example of the moving means when the device shown in FIG. 5 is used.

In FIG. 6, the microcomputer system MICO is shown.
The M has a basic configuration including a CPU, ROM, and RAM and an I / O expansion port.

Here, the ROM stores a program necessary for carrying out the method of the present invention and magnetic distribution information serving as a reference as in a function table described later, and the RAM temporarily stores the data taken in at the time of control. To be done.

The outputs from the balance magnetic sensors 41 to 44 and the scan magnetic sensor 5 are all A / D converter 1 so that the microcomputer system MICOM can interpret them.
2 and then input to the CPU through the I / O expansion port, and the control signal from the CPU is transmitted through the I / O expansion port to the scanning means 7 and the moving means 10 of the magnetic sensor 5 for scanning.
Have been sent to.

Reference numeral 11 is a display means for displaying the moving states of the two objects as appropriate information.

The apparatus shown in FIG. 6 having the above construction is combined with the moving means functionally shown in FIG. 7 to carry out the method of the present invention.

In FIG. 7, the magnetic source 2 provided on the first object 1 is shown as a disk magnet, and the second object 3 can be moved by moving means having P1 to P5 as movable points. .

Here, P5 is a point that moves vertically in the x0 axis direction in the coordinate system (x0, y0, z0) defined in the figure, and P3 and P4 are both horizontal arbitrary angles ψ ′, ψ ″, And the center of the second object is positioned at an arbitrary point in the (x0, y0, z0) coordinate system by the combination of these three movable points P1, P3, P4.

Further, P2 is a point for rotating the second object 3 in the horizontal direction by an arbitrary angle ψ, P1 is a point for rotating the second object 3 in the vertical direction by an arbitrary angle θ, and these points P1 to Due to the movement of P5, the moving means 10 positions the second object 3 with five degrees of freedom excluding the angle around the central coordinate axis Zc set to the second object.

The movable points of P1 to P5 in this moving means can drive P1 to P5 shown in FIG. 6 by a drive motor,
Such driving is possible by driving the drive circuit with each control amount determined according to the calculation result of the CPU.

FIG. 8 shows the movement of the points P3 and P4 in the above-mentioned moving means, and both independently rotate in the horizontal direction by arbitrary angles ψ ′ and ψ ″.

As a result, the second object 3 is positioned at an arbitrary point of the two-dimensional coordinates on the plane parallel to the y0z0 plane.

Incidentally, such means may be configured such that one of P3 and P4 is linearly moved and the other is rotationally moved.
In this case, since a point for linear movement is provided, one arm may be expanded or contracted.

The above moving means is a functional representation centering on the movement of the movable points P1 to P5, and a specific moving means is a set of known electrical and mechanical means for the above movable points P1 to P5. It goes without saying that it is realized by using matching.

9 to 11 show an example of carrying out the method of the present invention in the so-called semi-automatic control mode. In this semi-automatic control mode, while the operator visually recognizes the output of the balance magnetic sensor 4, the second object 3 is manually moved to align the axes of the two objects.

Therefore, the display means 11 for monitoring the moving state, that is, the positioning state of the second object 3, and the operating device 13 for manually operating the moving means 10 are required.

The characteristic feature of this semi-automatic control mode is that the output of the balance magnetic sensor 4 is manually moved until the output matching determination means 6 determines the matching condition and the output matching of the scanning magnetic sensor 5 is confirmed. The means 10 is directly controlled to display the movement state (relationship between two objects) 11
The fine adjustment control by such means is continuously performed until the state of control completion is displayed on the display means 11.

FIG. 10 is a flowchart required in this case.

In such a semi-automatic control mode, as will be understood from the description of the principle of the invention described later, the central axis OC on the second object 3 matches the magnetic central axis OM of the magnetic source 2 on the first object 1. This is particularly useful when performing axis alignment control.

In order to effectively make the judgment in this case, a display means using a bar graph LED as shown by 11 in FIG. 9 is preferably used.

When such a display means 11 is used, as the balance magnetic sensor 4, four magnetic sensors 41 to 44 as shown in FIG. 2c are arranged in a cross shape (four magnetic sensors 41). ~ 44 are arranged at an angle of 90 degrees to each other with respect to a circle centered on the central axis OC of the second object 3) and is particularly useful until the alignment control is completed. , The bar graph LED lights up according to the deviation amount of the control, and when the axis alignment control is completed, the central LED lights up to notify the completion of the control.

However, the present invention implemented in such a semi-automatic control mode is not applied only to the above-mentioned axis alignment control, and the second object 3 is not used in the same manner as the above-mentioned invention method by the fully automatic control. It goes without saying that the present invention can also be applied to the case where the first object 1 is positioned in an arbitrary relationship within a range of 5 degrees of freedom except for angling around the magnetic center axis OM of the magnetic generation source 2.

Since the method and apparatus of the present invention as described above utilize magnetism, even if there is an inclusion between two objects and they are in a relationship that makes it difficult to visually recognize each other, the two are positioned by a non-contact method. It is possible and its application range is extremely wide.

It is needless to say that such a method of the present invention is suitable for positioning and axial alignment of various machine tools, and is particularly desirable for positioning two objects invisible to the operator in a predetermined positional and directional relationship.

Next, the principle of the method of the present invention having the above-mentioned configuration will be described.

The method of the present invention is carried out in a predetermined space region in a radiation magnetic field that is rotationally symmetrical about the magnetic center axis. Generally, the practicable spatial region is limited depending on the strength of the magnetic field of the magnetic generation source 2, but if the properties of the radiated magnetic field, such as the disturbance of the magnetic field and the saturation phenomenon of the magnetic sensor, are considered, It has been clarified by the inventors of the present invention that it can be practically used in a region satisfying the condition where the central axis of the magnetic field and the central axis of the magnetic detection system intersect at an angle within ± 80 degrees.

According to the method of the present invention as described above, the second object 3 provided with the magnetic detection system for the first object 1 provided with the magnetic source 2 is provided.
The relative positional relationship can be determined with respect to the coordinates (xM, yM, zM, θM, ψM) in the five position directions excluding the rotation angle around the magnetic center axis OM of the magnetic source 2 of the first object 1.

Next, in order to understand the principle of the present invention, first, the function of the balance magnetic sensor will be considered.

One magnetic sensor S is placed in a radiation magnetic field that is rotationally symmetric about the magnetic center axis OM, and a straight line intersecting with the sensitive axis of the sensor S or an arbitrary straight line OC parallel to the sensitive axis is considered, and one point on the straight line is considered. Assuming that the magnetic sensor S is rotated about C as the center of rotation, the magnetic sensor S receives the component in the direction of the sensitive axis of the magnetic field at the position where the magnetic sensor S is placed, and in the radiating magnetic field, the magnetic force lines are radially from the magnetic central axis. Since it spreads without crossing, it is easily understood that the input magnetic field component of the sensor S is a periodic function with a period of 360 degrees.

Therefore, further considering the case where the straight line OC intersects with the magnetic central axis OM, the 12th
As can be seen from the figure, one plane G is determined by the straight line OC including the magnetic center axis OM and the rotation center C of the magnetic sensor S, and the intersection angle is determined by δG.

Further, the line of intersection of the plane G and the rotational orbital plane of the magnetic sensor S is set to 1, and two symmetrical points of the sensor S whose line of symmetry is the line of symmetry
Considering the input magnetic field component of the sensor S at P and P ′,
Since the magnetic field is rotationally symmetric with respect to the magnetic center axis OM, it has the same value, and the symmetry points Pa and Pa 'on the line of intersection 1 have the minimum value or the maximum value as shown in FIG. Takes a value. Here, Pa and Pa ′ are rotation angles from a specific starting point (λ = 0) on the rotation orbit surface of the magnetic sensor S, and if one is λG, the other is naturally λ
It becomes G + 180 [degrees].

Then, under such conditions, when the rotation center OC of the sensor S is moved to a position that coincides with the magnetic center axis OM, the intersection angle δG between the plane G and the straight line OC becomes δG = 0, and on the rotation orbit surface of the sensor S. Then, the input magnetic field component of the sensor S becomes equal in all λG, and the periodic function becomes flat as shown in FIG. 13b.

Therefore, from the above consideration, when the outputs of at least three sensors S placed on the same circular orbit match, the rotational axis OC of the rotational circular orbit of the sensor S and the magnetic center axis OM Intersect at an angle of δG, especially δG = 0
If, then the rotational axis OC of the sensor S and the central axis OM of the magnetic field
Will be a match.

The presence of δG can be detected even when four or more magnetic sensors for balance detection are arranged on the same circular orbit, and the sensitive axes of the four or more sensors do not intersect with each other on the rotation axis OC. Even if there is a relationship, as shown in FIG. 2c, a specific relationship (when the two selected according to the conditions described later are matched in each group), the sensitive axis intersects with the rotary axis OC at one point, or It can be seen that even in a parallel relationship).

In this case, the sensitive axes of one of the four sensors intersect at a finite point on the rotation axis OC, and the other sensitive axes of the pair are parallel to each other. Even when a pair of left and right sensor outputs match, the rotation axis OC of the rotation circular orbit of the sensor S and the magnetic center axis OM of the magnetic field intersect at an angle of δG.

As described above, the term "balanced output coincidence condition" includes the coincidence condition obtained by combining the outputs at the specific detection points and the above-described total coincidence condition at three or more detection points.

However, when such four magnetic sensors S are provided to judge the coincidence of outputs, the combination arrangements (AC, DB and AD, B- as shown in FIG. 18 are used. It should be noted that C) is intentionally excluded.

This is because the plane G cannot be determined even if a pair of sensor outputs that are parallel to each other in such a combination array match. Therefore, it is necessary to exclude the case where the line segments connecting the detection points of each combination are parallel to each other.

Since the balance magnetic sensor 4 according to the present invention uses the above principle, when the balance magnetic sensor 4 satisfies the balance output matching condition, the circle on the plane A on which the balance magnetic sensor 4 is arranged is arranged. It means that the center axis of the orbit, that is, the center axis OC of the second object 3 is positioned at a position intersecting the magnetic center axis, that is, the center axis OM of the first object 1 at a predetermined angle δG. .

FIG. 14 shows the relationship between the balance magnetic sensor and the scan magnetic sensor on the plane G.

Then, in the present invention, after the second object is moved to a position satisfying such a balance output coincidence condition, in order to know the relative position in the magnetic field, parallel to the track surface of the balance sensor 4 separately. An input magnetic field is measured by scanning a scanning sensor 5 provided with an orbital surface on two sides, and based on the measured input magnetic field, two independent magnetic fields showing the characteristics of a radiation magnetic field rotationally symmetrical about a magnetic center axis are measured. The magnetic field information, for example, the average value (average of maximum value and minimum value) and change value (difference between maximum value and minimum value) of input magnetic field component strength of the magnetic sensor for scanning are calculated,
As shown in FIG. 15, according to the function table showing the magnetic distribution information of the radiated magnetic field rotationally symmetric about the reference magnetic center axis prepared in advance, on the plane G of the center C of the trajectory of the scanning sensor S on the plane G. Coordinates (zM, rM) [where zM and rM are points on the circular coordinates as seen from the magnetic source, zM is the position vector component on the magnetic center coordinate axis z of the magnetic field, and rM is this magnetic field. The respective position vector components in the radial direction perpendicular to the central coordinate axis zM are shown] from the function table. FIG. 16 shows a change value and an average value of the input magnetic field component strength of the scanning magnetic sensor when zM and rM are used as parameters.

In addition, in a radial magnetic field rotationally symmetric about the magnetic center axis, δG
And the coordinates of the center C of the trajectory of the sensor S on the plane G (zM, r
Since M) has a one-to-one correspondence, when the coordinates (zM, rM) of the rotation center C of the scanning magnetic sensor S on the plane G are known, δG is also determined from FIG.

Thus, after the relative positional relationship between the second object and the first object in the magnetic field is known, if the control target value is known, the arithmetic processing using the CPU is executed to reach the control target value. Since the three-dimensional control amount required to move the second object can be calculated, the moving means 10 can be positioned in five degrees of freedom other than the angle around the central axis OM of the magnetic field of the magnetic source 2.

The above principle can be summarized as follows.

(0) The second object 3 has six degrees of freedom with respect to the first object 1.

(I) The rotation axis ZC of the circular orbit on the plane A on which the balance magnetic sensor 4 is arranged by moving the second object so that the outputs of the balance magnetic sensor 4 are matched.
Can be positioned at a position intersecting the magnetic center coordinate axis ZM at a predetermined angle δG. The conditions for this are the following two methods.

・ When there are three balance magnetic sensors 4, all outputs are matched.

-When there are four balancing magnetic sensors: The sensor outputs are matched for each group (however, the outputs of the two groups do not have to match each other).

(II) The magnetic field information at the position where the magnetic detection system is placed is measured by the magnetic sensor for scanning, and two independent magnetic information are calculated.

(III) The calculated magnetic information is compared with the previously prepared reference magnetic distribution information, and the relative position is read or calculated.

(IV) Above, excluding angling around the central axis OM of the magnetic field 5
The degree of freedom orientation is complete.

It should be noted that FIGS. 15 to 17 all show magnetic distribution information of the radiated magnetic field that is rotationally symmetric about the magnetic center axis that serves as a reference and is used when carrying out the method of the present invention.
15 is determined, the plane G is measured from the average value and change value of the input magnetic field measured by the magnetic sensor for scanning and calculated in FIG.
Function table used to obtain the two-dimensional coordinates of (zM, rM) above, Fig. 16 shows the change value of the input magnetic field component strength of the magnetic sensor for scanning when zM, rM is used as a parameter, and the average value. The function table showing the value and is shown. Further, FIG. 17 shows a function table used for obtaining δG based on the calculated change value and average value of the input magnetic field measured by the magnetic sensor for scanning, and 1-2-3. The part surrounded by -4 shows a practical area used at the time of implementation in a practical range of -80 degrees <δ <+80 degrees, which is substantially the magnetic center axis OM. These are stored in the ROM in the control means 9 as a table or an equation.

The above is a description of the case where the first object and the second object are positioned with five degrees of freedom excluding the angle around the magnetic center axis. Since the standard is fixed, the first object 1
And when viewed from the system on the earth including the second object 3,
The specific part of the second object can always be moved so as to face a certain direction. For example, if the second object is provided with a means for detecting the vertical downward direction and the specific portion is held so as to be always in the vertical downward direction, the scan angle λG at which the measurement value of the magnetic sensor for scanning becomes maximum and minimum is obtained. By knowing, the second object can also be positioned with 6 degrees of freedom, ie around the magnetic center axis.

FIG. 19 illustrates the principle that the specific portion (bottom) of the second object is always maintained vertically downward and positioned with 6 degrees of freedom. The second object is centered on the magnetic center axis OM. Three
Is rotated in the order of (A) → (B) → (C) → (D) → (A). Regarding the scan angle of the second object 3, the vertex of the second object 3 is set to λG = 0.

Further, FIG. 20 shows that under such conditions, the scan angle λG at which the measurement value of the magnetic sensor for scanning becomes maximum or minimum is the angle λG at which the second object 3 is placed around the magnetic center axis. It indicates that they match.

[Brief description of drawings]

FIG. 1 is a diagram showing a second object and a first object placed in a radiation magnetic field that is rotationally symmetric about the magnetic center axis. FIGS. 2a to 2c are all examples of arrangement of magnetic sensors for balance detection. FIGS. 3a and 3b are arrangement examples of magnetic sensors for scanning. FIG. 4 is a flow chart showing an operation procedure of the position control method of the present invention. FIG. 5 is a method of implementing the method of the present invention in a fully automatic control mode. FIG. 6 is a block diagram of a positioning device used in the case of FIG. 8 is a specific system diagram thereof. FIG. 7 is a diagram showing a control system for positioning controlled by the device shown in FIG. Is an explanatory view of the operating mechanism of the control system. FIG. 9 is a schematic configuration diagram of an apparatus used when the method of the present invention is carried out in a semi-automatic control mode. FIG. 10 shows a control procedure carried out in that case. FIG. 11 is a system diagram showing FIG. 9 in more detail. FIG. 13 is a diagram for explaining the principle of the present invention. FIG. 13a, FIG. 13b are explanatory diagrams of the input magnetic field of the magnetic sensor in a rotationally symmetric magnetic field. FIG. 14 shows the output of the magnetic sensor for balance detection in the method of the present invention. Explanatory drawing of the magnetic field distribution state of the magnetic field in the case of coincidence FIG. 15 to FIG. 17 are all examples of a function table showing magnetic distribution information serving as a reference used when carrying out the method of the present invention. The figure is an arrangement example diagram of the magnetic sensor for balance detection, which is excluded by the matching determination condition of the sensor output. FIG. 19 and FIG. 20 are explanatory views when the second object is positioned at a predetermined angle around the magnetic center axis. (Explanation of symbols) 1 ... First object 2 ... Magnetic source 3 ... Second object 4,41 to 44 ... Magnetic sensor for balance detection l1 to l4 ... Sensitive axis 5 ... For scanning Magnetic sensor 6 ... Output matching determination means 7 ... Scanning magnetic sensor scanning means 8 ... Position / direction detection means 9 ... Control means 10 ... Moving means 11 ... Display means 12 ... Operating device

Claims (9)

[Claims] 1. A second object having a first object provided with a magnetic source for generating a radiation magnetic field rotationally symmetric about a magnetic center axis, a magnetic sensor for balance detection, and a magnetic sensor for scanning. And the magnetic sensor for balance detection is the same on the first plane of the two first and second planes different from each other with the central axis of the second object as a normal line. It is arranged at a position on the circular orbit capable of detecting magnetic fields at at least three detection points having different phases, and the respective sensitive axes intersect at a finite point on the central axis of the second object, or The scanning magnetic sensor is arranged in a relation including a combination so as to be parallel to the central axis, and the scanning magnetic sensor is on a second plane whose normal is the central axis of the second object, Circular scan on a circular orbit with the center of the plane as the axis of rotation Is arranged so as to come, and while the magnetic sensor for scanning the second object is circularly scanned, the first object and the second object are relatively moved in a three-dimensional space, When all the outputs of the magnetic sensor for balance detection match and all the outputs obtained when the magnetic sensor for scanning are circularly scanned match, the relative movement is stopped. 2 Object positioning method. 2. A) a first object provided with a magnetic source for generating a rotationally symmetric radiation magnetic field about a magnetic center axis, and b) different first and second bodies having the center axis as a normal line. Of the two planes, the first plane is provided with a magnetic sensor for balance detection capable of detecting a magnetic field at at least three detection points on the same circular orbit and having different phases. The magnetic sensors for use are arranged in a relation including a combination such that the respective sensitive axes intersect at a finite point on the central axis of the second object or are parallel to the central axis. A second magnetic plane for scanning is arranged on a second plane having the center axis of the second object as a normal line, the magnetic sensor for scanning performing circular scanning with the center of the plane as a rotation axis.
Object, c) moving means for relatively moving the first object and the second object to an arbitrary position in the three-dimensional space, d) output coincidence determining means for the magnetic sensor for balance detection, and e) the above. Scan sensor scanning means for circularly scanning the magnetic sensor for scanning, f) position display means for displaying the control state of the second object by the moving means, g) operating device for operating the moving means, h) A two-object positioning device utilizing magnetism, comprising: a control means for relatively moving the moving means in response to signals from the output coincidence determining means and the magnetic sensor for scanning. 3. A first object provided with a magnetic source for generating a radiation magnetic field which is rotatable about a magnetic center axis, and two different first and second planes having the center axis as a normal line. , A magnetic sensor for balance detection capable of detecting a magnetic field on at least three detection points having different phases on the same circular orbit of the plane is arranged on the first plane. In the sensor, the respective sensitive axes intersect at a finite point on the central axis of the second object,
Alternatively, the center of the second object is rotated in a relation including a combination that is parallel to the center axis, and the second plane having the center axis of the second object as a normal line. A method for locating a second object, each of which is provided with a magnetic sensor for scanning, which performs circular scanning as an axis, comprising: (a) relative to the first object and the second object in a three-dimensional space; (B) When all the outputs of the magnetic sensor for balance detection coincide with each other, the magnetic sensor for scanning is circularly scanned to measure the input component of the magnetic field on which the second object is placed. Then, (c) based on the measured magnetic field input component, predetermined mutually independent magnetic information is calculated, and then the first magnetic field information prepared in advance is compared with the above-mentioned first magnetic distribution information.
The positional relationship of the second object with respect to the object is read or calculated, and (d) the read or calculated position information and position designation information that defines the position where the second object should be placed. Is calculated to calculate a three-dimensional control amount required for relative movement, and (e) Finally, the second object is moved relative to the first object according to the calculated control amount. A method of positioning two objects using magnetism, characterized by moving and positioning to a control target position designated by the position designation information. 4. A) a first object provided with a magnetic source for generating a radiation magnetic field rotationally symmetrical about a magnetic center axis; and b) different first and second bodies having the center axis as a normal line. Of the two planes, the first plane is provided with a magnetic sensor for balance detection capable of detecting magnetic fields at at least three detection points on the same circular orbit and different in phase, and these balance detections are performed. The magnetic sensors for use are arranged in a relation including a combination such that the respective sensitive axes intersect at a finite point on the central axis of the second object or are parallel to the central axis. A second object in which magnetic sensors for scanning that perform circular scanning with the center as a rotation axis are respectively arranged on a second plane whose normal axis is the second object; and c) the first object Object and the second object above relative to any position in 3D space Moving means for moving; d) output coincidence determining means for the magnetic sensor for balance detection; e) scanning sensor scanning means for circularly scanning the magnetic sensor for scanning; and f) output of the magnetic sensor for balance detection. After the coincidence, the magnetic information independent from each other, which is calculated based on the measurement value when the scanning magnetic sensor is circularly scanned, is compared with the magnetic distribution information which is the reference prepared in advance, and the second object is placed. The position / direction detecting means for obtaining the relative position information, and g) the position information from the position / direction detecting means is compared with the position specifying information for defining the position where the second object should be placed, and necessary. A two-object positioning device utilizing magnetism, comprising: a three-dimensional control amount that is calculated, and a control unit that drives the moving unit according to the control amount. 5. The apparatus according to claim 2 or 4, wherein both the first object and the second object are made of a non-magnetic material. 6. The balance magnetic sensor according to claim 2, wherein the magnetic sensor for balance is composed of four magnetic sensors arranged at an angle of 90 degrees to the central axis. Equipment. 7. The apparatus according to claim 2, wherein the balance magnetic sensor and the scan magnetic sensor are fluxgate magnetic sensors, Hall elements or magnetic modulation type sensors. 8. The apparatus according to claim 2 or 4, wherein the magnetic source is a cylindrical permanent magnet or an electromagnet. 9. The apparatus according to claim 2, wherein the scanning magnetic sensor is arranged in front of the balancing magnetic sensor.