JPH0666484B2 - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPH0666484B2 JPH0666484B2 JP61226801A JP22680186A JPH0666484B2 JP H0666484 B2 JPH0666484 B2 JP H0666484B2 JP 61226801 A JP61226801 A JP 61226801A JP 22680186 A JP22680186 A JP 22680186A JP H0666484 B2 JPH0666484 B2 JP H0666484B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode conductor
- internal electrode
- film
- effect element
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000694 effects Effects 0.000 title claims description 17
- 239000004020 conductor Substances 0.000 claims description 39
- 239000011521 glass Substances 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000010304 firing Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は高精度位置決めに用いられる電歪効果素子に関
する。The present invention relates to an electrostrictive effect element used for highly accurate positioning.
第２図はこの種の電歪効果素子の従来例の斜視図であ
る。複合ペロブスカイト構造を有するチタン酸ジルコン
酸鉛からなる電歪セラミック部材１と銀を用いた内部電
極導体２を交互に重ね合わせて積層焼結体が形成されて
いる。積層焼結体の対向する側面には、内部電極導体層
２の端面を一層おきに絶縁するために絶縁膜３が被着さ
れている。そして外部電極導体４により内部電極導体層
２を端面にて一層おきに交互に接続して一対のくし歯形
電極が形成されている。電歪効果素子に電気信号を加え
るために一対の外部電極導体４にリード線５が半田６で
半田づけして取り付けられている。なお、外部電極導体
４は銀、銀−パラジウムなどにガラスフリットを添加し
た導体ペーストを印刷、焼成して形成されている。FIG. 2 is a perspective view of a conventional example of this type of electrostrictive effect element. An electrostrictive ceramic member 1 made of lead zirconate titanate having a composite perovskite structure and an internal electrode conductor 2 made of silver are alternately stacked to form a laminated sintered body. An insulating film 3 is applied to opposite side surfaces of the laminated sintered body so as to insulate the end surfaces of the internal electrode conductor layers 2 every other layer. The inner electrode conductor layers 2 are alternately connected to each other by the outer electrode conductors 4 at the end faces to form a pair of comb tooth-shaped electrodes. Lead wires 5 are attached to the pair of external electrode conductors 4 by soldering with a solder 6 in order to apply an electric signal to the electrostrictive effect element. The external electrode conductor 4 is formed by printing and firing a conductor paste obtained by adding glass frit to silver, silver-palladium, or the like.
上述した従来の電歪効果素子は、外部電極導体層４に半
田付けを行なうと半田に銀が食われて外部電極導体層４
と電歪セラミック部材１との間の接着力が低下し電歪効
果素子は振動部品であるため、駆動時リード線に余分な
力が加わり、最悪の場合は破断してしまうという欠点が
ある。In the conventional electrostrictive effect element described above, when the external electrode conductor layer 4 is soldered, the solder is eroded by silver and the external electrode conductor layer 4 is
Since the adhesive force between the electrostrictive ceramic member 1 and the electrostrictive ceramic member 1 is reduced and the electrostrictive effect element is a vibrating component, an extra force is applied to the lead wire at the time of driving, and in the worst case, there is a drawback that it breaks.
本発明の電歪効果素子は、電圧セラミック部材と内部電
極導体とが交互に重ね合わされてなる積層焼結体を含
み、積層焼結体の１つの側面に露出する内部電極導体層
の端面に一層おきに絶縁層が被着され、前記側面と対向
する積層焼結体の側面に露出する内部電極導体層の端面
のうち、前記絶縁層が被着されていない内部電極導体層
の端面にも絶縁層が被着され、各側面において絶縁層お
よび露出する内部電極導体層とを共通に覆って一層おき
に内部電極導体層と接続された外部電極導体が設けられ
て２つのくし歯形内部電極が形成されている電歪効果素
子において、外部電極導体が導電性ガラス膜と導体膜の
２層からなることを特徴とする。The electrostrictive effect element of the present invention includes a laminated sintered body in which voltage ceramic members and internal electrode conductors are alternately stacked, and one layer is formed on the end surface of the internal electrode conductor layer exposed on one side surface of the laminated sintered body. An insulating layer is deposited on every other side, and among the end surfaces of the internal electrode conductor layer exposed on the side surface of the laminated sintered body facing the side surface, the end surface of the internal electrode conductor layer on which the insulating layer is not applied is also insulated. Layers are applied to cover the insulating layer and the exposed inner electrode conductor layer in common on each side surface, and external electrode conductors connected to the inner electrode conductor layer are provided every other layer to form two comb-shaped inner electrodes. In the disclosed electrostrictive effect element, the external electrode conductor is composed of two layers of a conductive glass film and a conductor film.
このように、外部電極導体に対し導電性ガラス膜とニッ
ケルや銅などの無電解メッキ膜の２層構造を採用するこ
とにより、セラミックとの密着力は導電性ガラス膜が受
けもち、また導電性ガラス膜の表面の小さな凸凹に無電
解メッキ膜がスパイク状に食い込むので接着力が従来品
に比べて数倍増加する。In this way, by adopting the two-layer structure of the conductive glass film and the electroless plating film of nickel or copper for the external electrode conductor, the conductive glass film can receive the adhesion force with the ceramic, Since the electroless plating film bites into small irregularities on the surface of the glass film in a spike shape, the adhesive strength increases several times as compared with the conventional product.
次に、本発明の実施例について図面を参照して説明す
る。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の電歪効果素子の一実施例の部分断面図
である。第２図と同番号は同じものを示す。FIG. 1 is a partial sectional view of an embodiment of the electrostrictive effect element of the present invention. The same numbers as in FIG. 2 indicate the same items.
本実施例では、導電性ガラス膜７とニッケルメッキ膜８
の２層により内部電極導体層２を端面にて一層おきに交
互に接続して一対のくし歯形電極を構成せしめる外部電
極導体が形成されている。In this embodiment, the conductive glass film 7 and the nickel plating film 8 are used.
The two outer layers form the outer electrode conductors that alternately connect the inner electrode conductor layers 2 at every other end face to form a pair of comb-shaped electrodes.
次に、本実施例の電歪効果素子の製造方法について説明
する。まず、ペロブスカイト結晶構造を多成分固溶体セ
ラミックの粉末（例えばPZT）に有機バインダー（例え
ばポリビニールブチラール樹脂）の粉末を混合してグリ
ーンシートを作る。この上に銀ペーストを印刷塗布した
後、60〜80層に積層して高温度焼結（例えば1000℃以
上）を行なうことによって積層焼結体が形成される。つ
いで、この積層焼結体の対向する側面に露出した内部電
極導体層２の端面には、電気泳動法によるガラスの塗布
および焼結により絶縁層３が出来る。この対向側面に導
電性ガラスペースト（焼成後の面積抵抗が200mΩ／□以
下の特性を有するアルカリ金属酸化物）をスクリーン印
刷で膜厚30μｍ位に形成し、これを焼成温度800℃で焼
成する。このようにして導電性ガラス膜７が形成された
積層焼結体を無電解ニッケルメッキ浴に浸漬して導電性
ガラス膜７が形成された部分にニッケルメッキ膜８を被
着形成する。Next, a method of manufacturing the electrostrictive effect element according to the present embodiment will be described. First, a green sheet is prepared by mixing a powder of an organic binder (for example, polyvinyl butyral resin) with a powder of a multi-component solid solution ceramic (for example, PZT) having a perovskite crystal structure. After a silver paste is applied by printing onto this, it is laminated in 60 to 80 layers and subjected to high temperature sintering (for example, 1000 ° C. or higher) to form a laminated sintered body. Next, the insulating layer 3 is formed on the end surface of the internal electrode conductor layer 2 exposed on the opposing side surfaces of the laminated sintered body by applying and sintering glass by an electrophoretic method. A conductive glass paste (alkaline metal oxide having a sheet resistance after firing of 200 mΩ / □ or less) is formed on the opposite side surfaces by screen printing to a film thickness of about 30 μm, and this is fired at a firing temperature of 800 ° C. The laminated sintered body having the conductive glass film 7 thus formed is dipped in an electroless nickel plating bath to form a nickel plating film 8 on the portion where the conductive glass film 7 is formed.
上述のように作成された電歪効果素子に半田付けでリー
ド線を接続した後、接続部の接着強度を測定すると従来
0.2〜0.3Kg/mm2であったものが、本実施例では0.7〜1.1
Kg/mm2と３倍以上も強度が向上した。After connecting the lead wire by soldering to the electrostrictive effect element created as described above, it was found that the adhesive strength of the connection part was measured.
What was 0.2 ~ 0.3 Kg / mm 2 , 0.7 ~ 1.1 in this example.
The strength was improved by Kg / mm 2 and more than 3 times.
なお、無電解銅メッキ膜を形成してもよい。この無電解
銅メッキを形成するために、下地の導電性ガラス膜７に
銀を添加する。この場合の製造方法は前述の実施例と同
様であり、省略する。本実施例のリード線の接続部の接
着強度も0.8〜1.1Kg/mm2と大きく、かつ外部電極導体の
面積抵抗も８mΩ/cm2と従来の銀電極に比べて1/2と低下
した。An electroless copper plated film may be formed. To form this electroless copper plating, silver is added to the underlying conductive glass film 7. The manufacturing method in this case is the same as that of the above-described embodiment, and will be omitted. The adhesive strength of the connecting portion of the lead wire of this example was as high as 0.8 to 1.1 Kg / mm 2 , and the area resistance of the external electrode conductor was 8 mΩ / cm 2 , which was half that of the conventional silver electrode.
上述した実施例では導体膜としてニッケルと銅のメッキ
膜に例を取ったが、Cu,Cu-Niなどの蒸着膜、銀、銀−パ
ラジウムなどの導電ペーストを焼付けた膜であっても同
様の効果があることはもちろんである。In the above-described embodiments, nickel and copper plating films are taken as an example of the conductor film. Of course, it is effective.
以上説明したように本発明は、外部電極導体に対し導電
性ガラス膜と導体膜の２層構造をとることにより、以下
のような効果がある。As described above, the present invention has the following effects by adopting the two-layer structure of the conductive glass film and the conductor film for the external electrode conductor.
半田付けによる導体部の半田食われがなくなる。Elimination of solder erosion of the conductor due to soldering.
電歪セラミック部材と外部電極導体の接着力が向上
し、電歪効果素子の振動時の信頼性が改善される。The adhesive force between the electrostrictive ceramic member and the external electrode conductor is improved, and the reliability of the electrostrictive effect element during vibration is improved.
外部電極導体の導電率が大きくなる。The conductivity of the external electrode conductor is increased.
第１図は本発明の電歪効果素子の一実施例の部分断面
図、第２図は従来例の斜視図である。 １……電歪セラミック部材、 ２……内部電極導体層、 ３……絶縁層、 ７……導電性ガラス膜、 ８……ニッケルメッキ膜。FIG. 1 is a partial sectional view of an embodiment of the electrostrictive effect element of the present invention, and FIG. 2 is a perspective view of a conventional example. 1 ... Electrostrictive ceramic member, 2 ... Internal electrode conductor layer, 3 ... Insulating layer, 7 ... Conductive glass film, 8 ... Nickel plated film.
Claims (2)
互に重ね合わされてなる積層焼結体を含み、積層焼結体
の１つの側面に露出する内部電極導体層の端面に一層お
きに絶縁層が被着され、前記側面と対向する積層焼結体
の側面に露出する内部電極導体層の端面のうち、前記絶
縁層が被着されていない内部電極導体層の端面にも絶縁
層が被着され、前記各側面において前記絶縁層および露
出する内部電極導体層とを共通に覆って一層おきに前記
内部電極導体層と接続された外部電極導体が設けられて
２つのくし歯形内部電極が形成されている電歪効果素子
において、 前記外部電極導体が導電性ガラス膜と導体膜の２層から
なることを特徴とする電歪効果素子。1. A laminated sintered body comprising piezoelectric ceramic members and internal electrode conductors alternately laminated, wherein insulating layers are alternately provided on the end faces of the internal electrode conductor layers exposed on one side surface of the laminated sintered body. Of the end faces of the internal electrode conductor layer to which the insulating layer is not attached, of the end faces of the internal electrode conductor layer exposed to the side face of the laminated sintered body facing the side face, the insulating layer is also attached to the end face of the internal electrode conductor layer. External electrode conductors that are connected to the internal electrode conductor layers are provided by alternately covering the insulating layer and the exposed internal electrode conductor layers on each of the side surfaces to form two comb-shaped internal electrodes. The electrostrictive effect element, wherein the external electrode conductor is composed of two layers of a conductive glass film and a conductive film.
スト焼付膜のいずれか一つからなる特許請求の範囲第１
項記載の電歪効果素子。2. The conductive film according to claim 1, wherein the conductive film is any one of a metal plating film, a vapor deposition film, and a paste baking film.
The electrostrictive effect element according to the item.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61226801A JPH0666484B2 (en) | 1986-09-24 | 1986-09-24 | Electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61226801A JPH0666484B2 (en) | 1986-09-24 | 1986-09-24 | Electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6380585A JPS6380585A (en) | 1988-04-11 |
| JPH0666484B2 true JPH0666484B2 (en) | 1994-08-24 |
Family
ID=16850825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61226801A Expired - Lifetime JPH0666484B2 (en) | 1986-09-24 | 1986-09-24 | Electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0666484B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2536101B2 (en) * | 1988-11-17 | 1996-09-18 | 日本電気株式会社 | Electrostrictive effect element |
| JPH02137278A (en) * | 1988-11-17 | 1990-05-25 | Nec Corp | electrostrictive effect element |
| JPH11115190A (en) * | 1997-10-20 | 1999-04-27 | Fujitsu Ltd | Inkjet printer |
| DE19928187C1 (en) * | 1999-06-19 | 2000-12-28 | Bosch Gmbh Robert | Piezoelectric actuator for operating mechanical component e.g. valve, has selected internal electrodes extending across full width of multi-layer structure with bridging of corresponding layer by opposing external electrode |
| US7525240B2 (en) | 2004-04-26 | 2009-04-28 | Tdk Corporation | Electronic component |
-
1986
- 1986-09-24 JP JP61226801A patent/JPH0666484B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6380585A (en) | 1988-04-11 |
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