JPH0666489B2 - Laser output mirror - Google Patents
Laser output mirrorInfo
- Publication number
- JPH0666489B2 JPH0666489B2 JP31331487A JP31331487A JPH0666489B2 JP H0666489 B2 JPH0666489 B2 JP H0666489B2 JP 31331487 A JP31331487 A JP 31331487A JP 31331487 A JP31331487 A JP 31331487A JP H0666489 B2 JPH0666489 B2 JP H0666489B2
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- laser
- output mirror
- mirror
- laser output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
- G02B27/0983—Reflective elements being curved
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08081—Unstable resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
- H01S3/093—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/20—Lasers with a special output beam profile or cross-section, e.g. non-Gaussian
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/0615—Shape of end-face
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
- H01S3/08068—Holes; Stepped surface; Special cross-section
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は高品質なレーザビームを発生するレーザ共振
器に用いるレーザ出力ミラーに関するものである。TECHNICAL FIELD The present invention relates to a laser output mirror used in a laser resonator for generating a high quality laser beam.
［従来の技術］ 第８図は例えば浜崎著「実用レーザ加工」（昭和61年度
テック出版）に記載された従来のレーザ出力ミラーを
用いたレーザ装置を示す断面構成図である。図におい
て、(1)は凸状レーザ出力ミラー母材であり、内面には
中央部に全反射コーティング膜(40)が、その周囲部に無
反射コーティング膜(2)が施され、外面には無反射コー
ティング膜(2)が施されている。(6)は凹状のコリメート
ミラー、(7)はレーザ媒質であり、ＣＯ２レーザ等のガ
スレーザを例にとれば、放電等により励起されたガス、
固体レーザを例にとれば、フラッシュランプ等により励
起された固体である。(8)、(9)は両ミラーで構成される
不安定型共振器内に発生されたレーザビーム、(10)は外
部に取り出されたレーザビームである。[Prior Art] FIG. 8 is a sectional configuration diagram showing a laser device using a conventional laser output mirror described in, for example, "Practical Laser Processing" by Hamasaki (Tech Publishing, 1986). In the figure, (1) is a convex laser output mirror base material, a total reflection coating film (40) in the center of the inner surface, a non-reflective coating film (2) is applied to the periphery, the outer surface A non-reflective coating film (2) is applied. (6) is a concave collimating mirror, (7) is a laser medium, and when a gas laser such as a CO 2 laser is taken as an example, a gas excited by discharge or the like,
Taking a solid-state laser as an example, it is a solid excited by a flash lamp or the like. (8) and (9) are laser beams generated in an unstable resonator composed of both mirrors, and (10) is a laser beam extracted to the outside.
次に動作について説明する。Next, the operation will be described.
凸状レーザ出力ミラーとコリメートミラー(6)とはいわ
ゆる不安定型共振器を構成している。レーザ出力ミラー
内面の全反射コーティング膜(40)により全反射拡大され
たレーザビーム(8)はコリメートミラー(6)によって平行
レーザビーム(9)に変換される間にレーザ媒質(7)によっ
て増幅され、その周囲部が全反射コーティング膜(40)の
回りからリング状レーザビーム(10)として外部に出力さ
れ、中央部には再び共振器内を往復させられる。The convex laser output mirror and the collimator mirror (6) constitute a so-called unstable resonator. The laser beam (8), which has undergone total reflection by the total reflection coating film (40) on the inner surface of the laser output mirror, is amplified by the laser medium (7) while being converted into a parallel laser beam (9) by the collimating mirror (6). The peripheral portion is output to the outside as a ring-shaped laser beam (10) from around the total reflection coating film (40) and is reciprocated in the resonator at the central portion.
［発明が解決しようとする問題点］ 従来のレーザ出力ミラーを用いたレーザ装置は以上のよ
うに構成されていたのでレーザビームは外部にリング状
に取り出される。このリング状のレーザビームをレーザ
加工に用いるためにレンズで集光しようとしても、リン
グ状であることからくる回折効果によりよく絞ることが
できず、例えば第９図(a)には取り出されたレーザビー
ムの強度分布の断面形状、第９図(b)にはそのレーザビ
ームをレンズ等により集光した場合のレーザビームの強
度分布の断面形状の一例を示すが、第９図(b)に示すよ
うにサイドピークをともなって集光されていることがわ
かる。またこのサイドピークの大きさはレーザ出力ミラ
ー内面の全反射コーティング膜(40)の外径を小さくし
て、外部により中づまりのレーザビームを取り出すこと
により実現できるが、この場合には共振器を１回往復す
るごとに多くの部分が外部に出力されることになり、従
って共振器の結合率が低下し、発振効果が悪化するとい
う問題もあった。[Problems to be Solved by the Invention] Since the conventional laser device using the laser output mirror is configured as described above, the laser beam is extracted outside in a ring shape. Even if an attempt was made to focus this ring-shaped laser beam on a lens to use it for laser processing, the ring-shaped laser beam could not be narrowed down well due to the diffraction effect due to the ring shape. For example, it was extracted in FIG. 9 (a). The cross-sectional shape of the intensity distribution of the laser beam is shown in FIG. 9 (b). An example of the cross-sectional shape of the intensity distribution of the laser beam is shown in FIG. 9 (b). As shown, it is understood that light is condensed with side peaks. Further, the size of this side peak can be realized by reducing the outer diameter of the total reflection coating film (40) on the inner surface of the laser output mirror and taking out the laser beam that is clogged to the outside. A large number of parts are output to the outside each time the motor makes a round trip, and therefore, there is a problem that the coupling rate of the resonator is lowered and the oscillation effect is deteriorated.
この発明は上記のような問題点を解決するためになされ
たものであり、発振効率の低下を招くことなく中づまり
状のかつ位相のそろったレーザビームを得ることのでき
るレーザ共振器に用いるレーザ出力ミラーを得ることを
目的とする。The present invention has been made to solve the above-mentioned problems, and a laser used for a laser resonator capable of obtaining a laser beam having a concentric shape and a phase without causing a reduction in oscillation efficiency. Aims to get an output mirror.
［問題点を解決するための手段］ この発明に係わるレーザ出力ミラーは、中央部に施され
るコーティング膜を部分反射コーティング膜とし、上記
中央部とその周囲部とを通過する二つのレーザビーム間
の位相調整を、ミラーの一面もしくは他面のコーティン
グ膜と上記ミラーの母材との間に、上記母材と同じ屈折
率を持つ薄膜を形成して行なうようにしたものである。[Means for Solving Problems] In a laser output mirror according to the present invention, a coating film applied to a central portion is a partially reflective coating film, and a laser beam between two laser beams passing through the central portion and its peripheral portion is provided. The phase adjustment is performed by forming a thin film having the same refractive index as the base material between the coating film on one surface or the other surface of the mirror and the base material of the mirror.
［作用］ この発明におけるレーザ出力ミラーは、レーザビームの
一部を透過させることにより、そのビーム形状を従来の
リング状から中づまり状のレーザビームとして取り出
す。さらにミラーの母材とその表面に施されたコーティ
ング膜との間に形成された薄膜は外部に取り出されるレ
ーザビームの位相を調整して、そのレーザビームがよく
集光されるようにする。[Operation] The laser output mirror according to the present invention allows a part of the laser beam to pass therethrough, thereby extracting the beam shape from a conventional ring-shaped laser beam to a conical laser beam. Further, the thin film formed between the base material of the mirror and the coating film formed on the surface of the mirror adjusts the phase of the laser beam extracted to the outside so that the laser beam is well focused.
［実施例］ 以下、この発明の一実施例によるレーザ出力ミラーを図
について説明する。[Embodiment] A laser output mirror according to an embodiment of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例によるレーザ出力ミラーを
示す断面図、第２図はそのレーザ出力ミラーを実際のレ
ーザ装置に用いた例を示す断面構成図である。図におい
て、(1)は例えば、ZnSeの凸状レーザ出力ミラー母材で
あり、その内面周囲部及び外面には、例えばPbF2一層に
よる無反射コーティング膜(2)(3)が施され、その内面中
央部には、例えばZnSe、ThF4の多層膜による部分反射コ
ーティング膜(4)が施されている。(5)はコーティング膜
(3)(4)と母材(1)との間に形成された母材と同一の屈折
率を持つ例えばZnSeの薄膜、(6)は凹状のコリメートミ
ラー、(7)はレーザ媒質であり、ＣＯ２レーザ等のガス
レーザを例にとれば、放電等により励起されたガス、固
体レーザを例にとれば、フラッシュランプ等により励起
された固体である。(8)、(9)は両ミラーで構成される不
安定型共振器内に発生されたレーザビーム、(10)は外部
に取り出されたレーザビーム、(100)は外ワクである。FIG. 1 is a sectional view showing a laser output mirror according to an embodiment of the present invention, and FIG. 2 is a sectional configuration view showing an example in which the laser output mirror is used in an actual laser device. In the figure, (1) is, for example, a convex laser output mirror base material of ZnSe, the inner surface peripheral portion and the outer surface, for example, a non-reflective coating film (2) (3) with a single layer of PbF 2 is applied, A partially reflective coating film (4) made of, for example, a multilayer film of ZnSe and ThF 4 is applied to the center of the inner surface. (5) is the coating film
(3) A thin film of, for example, ZnSe having the same refractive index as that of the base material formed between (4) and the base material (1), (6) a concave collimating mirror, and (7) a laser medium. For example, a gas laser such as a CO 2 laser is a gas excited by discharge or the like, and a solid laser is a solid excited by a flash lamp or the like. (8) and (9) are laser beams generated in an unstable resonator composed of both mirrors, (10) is a laser beam extracted to the outside, and (100) is an outer frame.
次に動作について説明する。Next, the operation will be described.
凸状レーザ出力ミラーとコリメートミラー(6)とはいわ
ゆる不安定型共振器を構成している。レーザ出力ミラー
内面の部分反射コーティング膜(4)により部分反射拡大
されたレーザビーム(8)はコリメートミラー(6)によって
平行レーザビーム(9)に変換される間にレーザ媒質(7)に
よって増幅され、その中心部は部分反射コーティング膜
(4)を通して、周囲部は無反射コーティング膜(3)を通し
て出力され、両者は合成されてレーザ(10)となる。この
出力されたレーザビーム(10)は中づまりであるため、従
来のリング状のレーザビームよりよく集光されることは
いうまでもないが、さらによく集光されるにはその断面
内で位相がよく揃っている必要がある。不安定型共振器
内に発生するレーザビーム(9)の位相はよく揃っている
ことが知られているために、外部に出力されるレーザビ
ームの位相が揃うには、コーティング膜(3)(4)を通過す
るレーザビーム間に位相差が生じないようにすればよ
い。しかしながらコーティング膜(4)は部分反射コーテ
ィング膜、コーティング膜(3)は無反射コーティング膜
とうように反射率が異なり、膜の構成が異なるため、そ
れぞれのコーティング膜を通過するビーム間に位相差が
生じることがしばしばある。この発明ではそれぞれのコ
ーティング膜を通過することによる位相差をコーティン
グ膜と母材との間に、母材と同一の屈折率を持ち、厚み
が分布を持つ薄膜(5)を形成して実現している。例えば
部分反射コーティング膜(4)を通過するレーザビームの
位相が無反射コーティング膜(3)を通過するレーザビー
ムの位相に比べてδ進んでいるとすれば、波長λ，薄膜
(5)の屈折率ｎとしてｄ＝（ｎ−１）・λ・δ／360だけ
コーティング膜(3)の下の薄膜(5)の厚みをコーティング
膜(4)の下のものに比べて厚くすることより実現でき
る。The convex laser output mirror and the collimator mirror (6) constitute a so-called unstable resonator. The laser beam (8) partially reflected and expanded by the partially reflective coating film (4) on the inner surface of the laser output mirror is amplified by the laser medium (7) while being converted into a parallel laser beam (9) by the collimator mirror (6). , Its central part is a partially reflective coating film
Through (4), the peripheral portion is output through the antireflection coating film (3), and both are combined to form a laser (10). It is needless to say that the output laser beam (10) is a hollowed beam, so that it is better focused than the conventional ring-shaped laser beam. It is necessary to be well aligned. It is known that the phase of the laser beam (9) generated in the unstable resonator is well aligned.Therefore, in order to align the phase of the laser beam output to the outside, the coating film (3) (4 It is sufficient to prevent a phase difference from occurring between the laser beams passing through). However, the coating film (4) has a different reflectance, such as a partially reflective coating film, and the coating film (3) has a different reflectivity, such as a non-reflective coating film.Therefore, the phase difference between the beams passing through each coating film is Often occurs. In this invention, the phase difference caused by passing through each coating film is realized by forming a thin film (5) having the same refractive index as the base material and a thickness distribution between the coating film and the base material. ing. For example, if the phase of the laser beam passing through the partially reflective coating film (4) is ahead of the phase of the laser beam passing through the non-reflective coating film (3) by δ,
As the refractive index n of (5), the thickness of the thin film (5) under the coating film (3) is thicker than that under the coating film (4) by d = (n−1) · λ · δ / 360. It can be realized by doing.
第３図(a)にはこのようにして位相が良く揃って出力さ
れたレーザビームをＣＯ２レーザ装置において得た例
を、第３図(b)にはその集光ビームパターンの例を模式
的に示した。この発明によればサイドピークをほとんど
ともなわずきわめて良好に集光されていることがわか
る。FIG. 3 (a) schematically shows an example of a laser beam output in this manner with a well-aligned phase in a CO 2 laser device, and FIG. 3 (b) shows an example of its focused beam pattern. Indicated. According to the present invention, it can be seen that the light is condensed very well with almost no side peaks.
なお、上記実施例では内面のコーティング膜と母材との
間に位相調整用の薄膜を挿入する構成を示したが第４図
に示すように外面のコーティング膜と母材との間に挿入
しても良い。In the above embodiment, the thin film for phase adjustment is inserted between the coating film on the inner surface and the base material. However, as shown in FIG. 4, the thin film for phase adjustment is inserted between the coating film on the outer surface and the base material. May be.
また、上記実施例では内面のコーティング膜と母材との
間全面に薄膜(5)を挿入したが、第５図、第６図に示す
ように中央部もしくは周囲部のみに挿入して位相調整し
てもよい。Further, in the above embodiment, the thin film (5) was inserted between the coating film on the inner surface and the base material, but as shown in FIGS. 5 and 6, the thin film (5) was inserted only in the central portion or the peripheral portion to adjust the phase. You may.
また、位相の調整は第３図(b)に示すようにサイドピー
クをもたずに集光されることを目的としてされ、共振器
構成によっては完全に位相を揃えるよりも周囲部の位相
を若干進めるもしくは遅らせることにより高集光ビーム
が獲られることもある。In addition, the phase adjustment is aimed at focusing without side peaks as shown in Fig. 3 (b), and depending on the resonator configuration, the phase of the surrounding part may be set rather than perfectly aligned. Highly focused beams may be obtained by slightly advancing or delaying.
さらにこの発明例では不安定型共振器への応用例のみを
示したが、第７図に示すように凹状ミラーのレーザ出力
ミラー(11)により安定型共振器に用いても良い。この場
合コーティング膜(3)として部分反射コーティング膜(4)
に比べて反射率の低いものを用いることにより中高のガ
ウスモードが効率よく発生させれる。Further, although the example of the present invention shows only the application example to the unstable resonator, it may be used for the stable resonator by the laser output mirror (11) of the concave mirror as shown in FIG. In this case, the partial reflection coating film (4) is used as the coating film (3).
By using a material whose reflectance is lower than that of, high and medium Gaussian modes can be efficiently generated.
［発明の効果］ 以上のように、この発明によればレーザ出力ミラーの中
央部に施されるコーティング膜を部分反射コーティング
膜とし、上記中央部とその周囲部とを通過する二つのレ
ーザビーム間の位相調整を、ミラーの一面もしくは他面
のコーティング膜と上記ミラーの母材との間に、上記母
材と同じ屈折率を持つ薄膜を形成して行なうようにした
ので、ミラー上に形成される反射コーティング膜は通常
のミラーと同じ構成ででき、工業的に容易に、従って安
価に位相調整したレーザ出力ミラーが得られる効果があ
る。また母材に段差をつけて位相調整する場合よりも量
産に向くという効果もある。[Effects of the Invention] As described above, according to the present invention, the coating film applied to the central portion of the laser output mirror is a partially reflective coating film, and the two laser beams passing through the central portion and the peripheral portion thereof are Phase adjustment is performed by forming a thin film having the same refractive index as the base material between the coating film on one surface or the other surface of the mirror and the base material of the mirror. The reflective coating film having the same structure as that of a normal mirror has an effect that a laser output mirror whose phase is adjusted can be obtained easily and industrially. Further, there is an effect that it is suitable for mass production as compared with the case where the base material is provided with a step and the phase is adjusted.
第１図はこの発明の一実施例によるレーザ出力ミラーを
示す断面図、第２図はこの発明の一実施例に係わるレー
ザ装置を示す断面構成図、第３図(a)(b)は各々この発明
の一実施例に係わるレーザ装置におけるレーザビームの
特性を示す特性図、第４図、第５図、及び第６図は各々
この発明の他の実施例によるレーザ出力ミラーを示す断
面図、第７図はこの発明の他の実施例に係わるレーザ装
置を示す断面構成図、第８図は従来のレーザ出力ミラー
を用いたレーザ装置を示す断面構成図、並びに第９図
(a)(b)は各々従来のレーザ装置におけるレーザビームの
特性を示す特性図である。 図において、(1)はレーザ出力ミラー母材、(2)(3)は無
反射コーティング膜、(4)は部分反射コーティング膜、
(5)は薄膜、(11)はレーザ出力ミラーである。 なお、図中、同一符号は同一または相当部分を示す。1 is a sectional view showing a laser output mirror according to an embodiment of the present invention, FIG. 2 is a sectional configuration view showing a laser device according to an embodiment of the present invention, and FIGS. 3 (a) and 3 (b) are respectively A characteristic view showing characteristics of a laser beam in a laser device according to an embodiment of the present invention, FIGS. 4, 5, and 6 are sectional views showing a laser output mirror according to another embodiment of the present invention, respectively. FIG. 7 is a sectional configuration diagram showing a laser device according to another embodiment of the present invention, FIG. 8 is a sectional configuration diagram showing a laser device using a conventional laser output mirror, and FIG.
(a) and (b) are characteristic diagrams showing characteristics of a laser beam in a conventional laser device, respectively. In the figure, (1) is a laser output mirror base material, (2) (3) is a non-reflective coating film, (4) is a partially reflective coating film,
(5) is a thin film, and (11) is a laser output mirror. In the drawings, the same reference numerals indicate the same or corresponding parts.
Claims (3)
ィング膜を一面に、他面には無反射コーティング膜を施
したミラーにおいて、上記中央部に施されるコーティン
グ膜は部分反射コーティング膜であり、上記中央部と上
記周囲部とを通過する二つのレーザビーム間の位相調整
を、上記一面もしくは他面のコーティング膜と上記ミラ
ーの母材との間に、上記母材と同じ屈折率を持つ薄膜を
形成して行なうようにしたことを特徴とするレーザ出力
ミラー。1. A mirror in which a coating film having different reflectances at a central portion and a peripheral portion is provided on one surface and an antireflection coating film is provided on the other surface, the coating film provided on the central portion is a partially reflective coating film. The phase adjustment between the two laser beams passing through the central portion and the peripheral portion, between the coating film on the one surface or the other surface and the base material of the mirror, the same refractive index as the base material A laser output mirror characterized by being formed by forming a thin film having.
差がなくなるようにする特許請求の範囲第１項記載のレ
ーザ出力ミラー。2. A laser output mirror according to claim 1, wherein the phase adjustment eliminates the phase difference between the two laser beams.
囲第１項または第２項記載のレーザ出力ミラー。3. The laser output mirror according to claim 1 or 2, wherein the thin film material is the same as the base material.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31331487A JPH0666489B2 (en) | 1987-12-11 | 1987-12-11 | Laser output mirror |
| KR1019880006600A KR910008990B1 (en) | 1987-06-03 | 1988-06-02 | Laser apparatus |
| US07/201,999 US4903271A (en) | 1987-06-03 | 1988-06-03 | Laser apparatus |
| DE8888108902T DE3879547T2 (en) | 1987-06-03 | 1988-06-03 | LASER APPARATUS. |
| EP88108902A EP0293907B1 (en) | 1987-06-03 | 1988-06-03 | Laser apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31331487A JPH0666489B2 (en) | 1987-12-11 | 1987-12-11 | Laser output mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01154578A JPH01154578A (en) | 1989-06-16 |
| JPH0666489B2 true JPH0666489B2 (en) | 1994-08-24 |
Family
ID=18039734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31331487A Expired - Fee Related JPH0666489B2 (en) | 1987-06-03 | 1987-12-11 | Laser output mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0666489B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2738053B2 (en) * | 1989-09-18 | 1998-04-08 | 三菱電機株式会社 | Solid-state laser device |
-
1987
- 1987-12-11 JP JP31331487A patent/JPH0666489B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01154578A (en) | 1989-06-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5283692A (en) | Multi-layer graded reflectivity mirror | |
| US4219254A (en) | Corrective optics for higher order mode lasers | |
| JPH0666489B2 (en) | Laser output mirror | |
| JPS58154484A (en) | Laser beam conversion method | |
| JP2800006B2 (en) | Laser device | |
| JP2526946B2 (en) | Laser device | |
| JP2597499B2 (en) | Laser device | |
| JP2673304B2 (en) | Laser device | |
| JP2580702B2 (en) | Laser device | |
| JP2660335B2 (en) | Laser device | |
| JPH0682873B2 (en) | Laser equipment | |
| JPH0575185A (en) | Laser equipment | |
| JP2580704B2 (en) | Laser device | |
| JP2597500B2 (en) | Laser device | |
| JPH0371683A (en) | Gas laser device | |
| JP2568555B2 (en) | Semiconductor laser | |
| JP2668695B2 (en) | Beam flattening device | |
| JP2580703B2 (en) | Laser device | |
| JPH0644648B2 (en) | Laser equipment | |
| JPH07105545B2 (en) | Laser equipment | |
| JPS60217678A (en) | laser resonator | |
| CN1039466C (en) | Laser with phase plate high light beam quality within cavity | |
| JPH0463556B2 (en) | ||
| JP2673301B2 (en) | Solid-state laser device | |
| JPH05111786A (en) | Laser photosynthesis device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |