JPH0667786B2 - Method for manufacturing translucent ceramics - Google Patents
Method for manufacturing translucent ceramicsInfo
- Publication number
- JPH0667786B2 JPH0667786B2 JP60114660A JP11466085A JPH0667786B2 JP H0667786 B2 JPH0667786 B2 JP H0667786B2 JP 60114660 A JP60114660 A JP 60114660A JP 11466085 A JP11466085 A JP 11466085A JP H0667786 B2 JPH0667786 B2 JP H0667786B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- firing
- translucent
- atmosphere
- translucent ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 title description 27
- 239000000843 powder Substances 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 22
- 238000010304 firing Methods 0.000 claims description 20
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 18
- 229910010293 ceramic material Inorganic materials 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 9
- 239000002244 precipitate Substances 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- 229910052745 lead Inorganic materials 0.000 claims description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000010936 titanium Substances 0.000 description 10
- 239000002994 raw material Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- CMOAHYOGLLEOGO-UHFFFAOYSA-N oxozirconium;dihydrochloride Chemical compound Cl.Cl.[Zr]=O CMOAHYOGLLEOGO-UHFFFAOYSA-N 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000007670 refining Methods 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- FYDKNKUEBJQCCN-UHFFFAOYSA-N lanthanum(3+);trinitrate Chemical compound [La+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O FYDKNKUEBJQCCN-UHFFFAOYSA-N 0.000 description 3
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 3
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 150000002978 peroxides Chemical class 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 150000004703 alkoxides Chemical class 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】 本発明は透光性セラミツクスの製造方法、特に、ランタ
ン変性ジルコン酸チタン酸鉛(以下,PLZTと記
す。)からなる透光性セラミツクスの製造方法に関す
る。The present invention relates to a method for producing a translucent ceramic, and more particularly to a method for producing a translucent ceramic made of lanthanum-modified lead zirconate titanate (hereinafter referred to as PLZT).
(従来の技術) 近年、PLZT透光性セラミツクスが大きな電気光学効
果や電界で制御できる光散乱効果を示すことから、単結
晶に代わる電気光学材料として着目されている。このP
LZT透光性セラミツクスは、一般的には、ち密で均質
なものを得るため、ホットプレス法により製造されてい
るが、加圧用アルミナ型の大きさや加圧装置の圧力に上
限があるため、ウエハーの大面積化及び量産化が困難
で、設備も高価であるなどの問題がある。このため、焼
成時にホットプレスを用いない雰囲気焼成法が提案され
ている。例えば、Journal of American Ceramic Societ
y,Vol.55,No.11、541〜544頁にはL.M.Bra
wnにより金属アルコキシド溶液を所定混合比で混合して
水酸化物の粉末を得、これを500℃で仮焼した後、冷
間プレスし、その成型体をそれと同材料の粉末で覆い、
酸素中1050〜1175℃の温度で4時間以上焼成す
る方法が、また、Journal of American Ceramic Societ
y,Vol.56,No.2、91〜96頁には、GaryS.Snow
により、酸化物混合法あるいは化学的沈澱法により得た
PLZT粉末をそのまま加圧成型し、これを容器内に入
れた後、雰囲気形成粉末を充填し、酸素ガスを流動させ
ながら1200℃で60時間焼成する方法が開示されて
いる。(Prior Art) In recent years, PLZT translucent ceramics have been attracting attention as an electro-optical material that replaces single crystals, because they exhibit a large electro-optical effect and a light scattering effect that can be controlled by an electric field. This P
LZT translucent ceramics are generally manufactured by the hot pressing method in order to obtain dense and homogeneous ones. It is difficult to increase the area and mass production, and the equipment is expensive. Therefore, an atmosphere firing method that does not use a hot press at the time of firing has been proposed. For example, Journal of American Ceramic Societ
y, Vol. 55, No. 11, pp. 541-544, L. M. Bra
A metal alkoxide solution was mixed with wn at a predetermined mixing ratio to obtain a hydroxide powder, which was calcined at 500 ° C. and then cold pressed, and the molded body was covered with a powder of the same material as that,
The method of calcination in oxygen at a temperature of 1050-1175 ° C for 4 hours or more is also the Journal of American Ceramic Societ.
y, Vol. 56, No. 2, pp. 91-96, Gary S. Snow
The PLZT powder obtained by the oxide mixing method or the chemical precipitation method was pressure-molded as it is, and after it was put in a container, an atmosphere forming powder was filled, and it was kept at 1200 ° C. for 60 hours while flowing oxygen gas. A method of firing is disclosed.
(発明が解決しようとする問題点) しかしながら、前者の方法では高価な金属ランタンなど
を用いてアルコキシドを生成しなければならないこと
と、雰囲気材としてPLZT透光性セラミツクス材料と
同じ材料を使用しているため、原料が高価で製品コスト
が高くなるという問題がある。また、後者の方法では雰
囲気材としてPbZrO3とPbOの混合粉末を使用しているた
め、その分安価となるが、焼成温度が高いため、成型体
が大きくなると焼成中にPbOが蒸発して不足し、所望の
組成のものを得るのが困難となるという問題がある。(Problems to be Solved by the Invention) However, in the former method, an alkoxide must be generated using expensive metal lanthanum, and the same material as the PLZT translucent ceramic material is used as the atmosphere material. Therefore, there is a problem that the raw material is expensive and the product cost is high. In the latter method, the mixed powder of PbZrO 3 and PbO is used as the atmosphere material, so it is cheaper, but because the firing temperature is high, PbO evaporates during firing when the molded body becomes large and becomes insufficient. However, it is difficult to obtain a desired composition.
(問題点を解決するための手段) 本発明は、前記問題点を解決するため、Pb、La、Z
r及びTiのイオンを過酸化水素を含む水溶液中で反応
させて生成した沈澱物を熱処理してPLZTからなる透
孔性セラミツクス材料を用意する一方、Pb、La、Z
r及びTiの酸化物もしくは焼成により酸化物となるそ
れらの元素の化合物を所定割合で混合、焼成して前記透
光性セラミツクス材料と略同組成のPLZTからなる雰
囲気材を用意し、前記透光性セラミツクス材料の粉末を
成型して得た成型体を前記雰囲気材の粉末中に埋設し、
酸素気流中1080〜1150℃で焼成することを特徴
とするものである。(Means for Solving Problems) In order to solve the above problems, the present invention provides Pb, La, Z
A precipitate formed by reacting r and Ti ions in an aqueous solution containing hydrogen peroxide is heat-treated to prepare a porous ceramic material made of PLZT, while Pb, La, Z
An atmosphere material made of PLZT having substantially the same composition as the translucent ceramics material is prepared by mixing and firing the oxides of r and Ti or compounds of those elements that become oxides by firing at a predetermined ratio and firing the translucent light. Embedding a molded body obtained by molding a powder of a conductive ceramic material in the powder of the atmosphere material,
It is characterized in that it is fired at 1080 to 1150 ° C. in an oxygen stream.
本発明方法において透光性セラミツクス材料として、P
b、La、Zr及びTiのイオンを過酸化水素を含む水
溶液中で反応させて生成した沈澱物を熱処理する化学的
精製法により生成したものを使用するのは、出発原料が
安価で、一定組成の生成物が容易に得られること、また
小さな粒径の仮焼粉末が得られ、焼成温度も低いからで
ある。この透光性セラミツクス材料は、例えば、Pb、
La、Zr及びTiの硝酸塩あるいは塩化物等を溶解さ
せて各イオンを含む水溶液となし、これらの水溶液を過
酸化水素の存在下、混合し、アルカリ性溶液を加えてpH
9以上に調整することによって複合過酸化物を沈澱さ
せ、この沈澱物をロ過したのち100℃以上の温度で熱
処理することによって製造できる。In the method of the present invention, P is used as the translucent ceramic material.
The starting material is inexpensive and has a constant composition because the precipitate produced by reacting ions of b, La, Zr and Ti in an aqueous solution containing hydrogen peroxide is heat-treated. This is because the product (1) is easily obtained, a calcined powder having a small particle size is obtained, and the firing temperature is low. This translucent ceramic material is, for example, Pb,
La, Zr, and Ti nitrates or chlorides are dissolved to form an aqueous solution containing each ion. These aqueous solutions are mixed in the presence of hydrogen peroxide, and an alkaline solution is added to adjust the pH.
It can be produced by precipitating the composite peroxide by adjusting it to 9 or more, filtering this precipitate, and then heat treating it at a temperature of 100 ° C. or more.
この場合、pHを9以上とするのは、生成物の組成の安定
化を図るためである。pH調整のため添加するアルカリ性
溶液としては、水酸化ナトリウム溶液、水酸化カリウム
溶液、アンモニア水など任意のものを使用できる。ま
た、過酸化水素量は、生成するPLZT1モルに対して
モル比で0.1倍以上とするのが安定した組成物を得る
ために適当である。熱処理の温度は、複合過酸化物中に
存在する過酸化水素が水としてほぼ完全に除去される1
00℃以上であれば良い。透孔セラミツクス材料として
は、通常は約750℃で2時間程度仮焼し、粉砕して粉
末としたものを使用するのが好ましい。In this case, the reason why the pH is set to 9 or higher is to stabilize the composition of the product. As the alkaline solution to be added for pH adjustment, any solution such as sodium hydroxide solution, potassium hydroxide solution, aqueous ammonia can be used. Further, the amount of hydrogen peroxide is suitably 0.1 times or more in molar ratio with respect to 1 mol of PLZT to be produced, in order to obtain a stable composition. The heat treatment temperature is such that hydrogen peroxide present in the composite peroxide is almost completely removed as water.
It may be at least 00 ° C. As the porous ceramic material, it is usually preferable to use a material which is calcined at about 750 ° C. for about 2 hours and then pulverized into powder.
このようにして得られたPLZTからなる粉末の組成
は、次の一般式で表わされるものである。The composition of the PLZT powder thus obtained is represented by the following general formula.
Pb1-xLax(Zr1-yTiy)O1-x/4O3 (式中、0.04≦x≦0.25、0.05≦y≦0.95で示される) なお、後述の実施例では、透光性セラミツクス材料粉末
の出発原料として、硝酸鉛、硝酸ランタン、オキシ塩化
ジルコニウム及び四塩化チタンを用いているが、これら
は酸化物を硝酸に溶解させて、鉛、ランタン、ジルコニ
ウム及びチタンのイオンを含む溶液としても良く、ま
た、オキシ塩化ジルコニウムや四塩化チタンを次式に従
って硝酸塩に変えて用いるようにしても良い。Pb 1-x La x (Zr 1-y Ti y ) O 1-x / 4 O 3 (in the formula, represented by 0.04 ≦ x ≦ 0.25, 0.05 ≦ y ≦ 0.95) Lead nitrate, lanthanum nitrate, zirconium oxychloride and titanium tetrachloride are used as starting materials for the light-sensitive ceramics material powder. A solution containing the same may be used, or zirconium oxychloride or titanium tetrachloride may be used instead of the nitrate according to the following formula.
ZrOCl2+NH4OH→Zr(OH)4 Zr(OH)4+HNO3→Zr(NO3)4 TiCl4+NH4OH→Ti(OH)4 Ti(OH)4+HNO3→TiO(NO3)2 この場合、チタンの溶液は一般に加水分解し易く調合が
困難であるが、過酸化水素を共存させることにより、安
定化させることができ、所定の組成のものを得ることが
できる。ZrOCl 2 + NH 4 OH → Zr (OH) 4 Zr (OH) 4 + HNO 3 → Zr (NO 3 ) 4 TiCl 4 + NH 4 OH → Ti (OH) 4 Ti (OH) 4 + HNO 3 → TiO (NO 3 ) 2 In this case, the titanium solution is generally easily hydrolyzed and difficult to prepare, but it can be stabilized by the coexistence of hydrogen peroxide, and a predetermined composition can be obtained.
なお、過酸化水素を共存させずに塩化物を用いると、鉛
イオンはヒドロキシクロライドとなって沈澱し、目的と
する組成の複合過酸化物が得られないので、過酸化水素
を共存させることが必要である。If chloride is used in the absence of hydrogen peroxide, lead ions will be converted to hydroxy chloride to precipitate, and a complex peroxide having the desired composition cannot be obtained. is necessary.
透光性セラミツクスは、このようにして得た粉末を、加
圧成型後、雰囲気材中に埋設して酸素気流中1080〜
1150℃で焼成することにより製造される。この雰囲
気材は、酸化物混合法、即ち、Pb、La、Zr及びT
iの酸化物もしくは炭酸塩を前記透光性セラミツクス材
料と同じ組成となるように所定割合で混合し、これを焼
成する方法により得られるものが使用されるが、Pbを
化学量論的組成比よりも適当量多くするのが好ましい。The translucent ceramic is obtained by pressing the powder thus obtained, burying it in an atmosphere material, and then immersing it in an oxygen stream at a temperature of 1080 to
It is manufactured by firing at 1150 ° C. This atmosphere material is an oxide mixed method, that is, Pb, La, Zr and T.
The oxide or carbonate of i is mixed at a predetermined ratio so as to have the same composition as the translucent ceramics material, and a material obtained by a method of firing this is used. Pb is a stoichiometric composition ratio It is preferable to increase the amount by a suitable amount.
本発明は、所望の光学的特性を得るため、化学的精製法
により安価に得られた所望の組成比の透光性セラミツク
ス材料粉末を用いることにより比較的低温度で焼成で
き、また、酸化物混合法により得た前記原料粉末と同組
成の雰囲気材を使用することにより、焼成中の組成の変
動を防止し、安価に、かつ大面積の透光性セラミツクス
の製造を可能にするものである。INDUSTRIAL APPLICABILITY In order to obtain desired optical properties, the present invention can be fired at a relatively low temperature by using a transparent ceramics material powder having a desired composition ratio obtained at low cost by a chemical refining method, and an oxide. By using an atmosphere material having the same composition as that of the raw material powder obtained by the mixing method, it is possible to prevent the composition from changing during firing and to inexpensively produce a large-area translucent ceramic. .
以下、本発明方法について実施例を挙げて具体的に説明
する。Hereinafter, the method of the present invention will be specifically described with reference to examples.
(実施例) 出発原料として純度99.5%の硝酸鉛(Pb(N
O3)2)、純度99.99%の硝酸ランタン(La(NO3)
3)、純度99.95%の四塩化チタン(TiCl4)及び純
度99.9%のオキシ塩化ジルコニウム(ZrOCl2)
を用い、組成式: Pb0.91La0.09(Zr0.65Ti0.35)0.9775O3 に従い、Pbが0.3原子%過剰になるように秤量し、
硝酸鉛、硝酸ランタン及びオキシ塩化ジルコニウムを純
水約600mに加熱しながら溶解させ、これに0.3
モル過酸化水素を含む四塩化チタン溶液及び純水とH2
O21.7モルを加えて全量を約1とした。これにア
ンモニア水を加えてpHを9に調整し、生成した沈澱物を
ロ過した後、水洗、乾燥した。この沈澱物を750℃で
2時間仮焼した後、湿式粉砕し、乾燥させて粒径0.1
〜0.2ミクロンの透光性セラミツクスの原料粉末を得
た。この原料粉末をX線回折で調べた結果、完全な結晶
性のPLZTとなっていることが確認された。(Example) Lead nitrate (Pb (N
O 3 ) 2 ), lanthanum nitrate (La (NO 3 )) with a purity of 99.99%
3 ), titanium tetrachloride (TiCl 4 ) having a purity of 99.95% and zirconium oxychloride (ZrOCl 2 ) having a purity of 99.9%.
In accordance with the composition formula: Pb 0.91 La 0.09 (Zr 0.65 Ti 0.35 ) 0.9775 O 3 , and Pb was weighed so as to have an excess of 0.3 atomic%,
Lead nitrate, lanthanum nitrate and zirconium oxychloride are dissolved in pure water while heating to about 600 m, and 0.3
Titanium tetrachloride solution containing molar hydrogen peroxide and pure water and H 2
O 2 1.7 mol was added to make the total amount about 1. Aqueous ammonia was added to adjust the pH to 9, the precipitate formed was filtered, washed with water and dried. This precipitate was calcined at 750 ° C. for 2 hours, then wet-milled and dried to a particle size of 0.1.
A raw material powder of transparent ceramics having a size of .about.0.2 micron was obtained. As a result of examining this raw material powder by X-ray diffraction, it was confirmed that it was a completely crystalline PLZT.
また、これとは別に酸化鉛(PbO)、酸化ランタン
(La2O3)、酸化ジルコニウム(ZrO2)、酸化チ
タン(TiO2)を出発原料として用い、これを組成
式:Pb0.91La0.09(Zr0.65Ti0.35)0.9775O3に従っ
て、Pbが0.3原子%過剰になるように秤量した。こ
の原料粉末を900℃で2時間仮焼した後、湿式粉砕
し、乾燥させてPLZTからなる雰囲気材粉末を得た。Separately, lead oxide (PbO), lanthanum oxide (La 2 O 3 ), zirconium oxide (ZrO 2 ), and titanium oxide (TiO 2 ) are used as starting materials, and the composition formula: Pb 0.91 La 0.09 ( According to Zr 0.65 Ti 0.35 ) 0.9775 O 3 , Pb was weighed so as to have an excess of 0.3 at%. This raw material powder was calcined at 900 ° C. for 2 hours, wet-milled and dried to obtain an atmosphere material powder made of PLZT.
前記透光性セラミツクスの材料粉末を直径12mm、厚さ
2mm、密度4g/cm3のペレットに加圧成型した。次い
で、第1図に示すように、前記酸化物混合法により生成
した雰囲気材粉末45gを約120ccのアルミナルツボ
(1)に入れ、前記ペレット(2)を雰囲気材粉末(3)中に埋
め込み、アルミナルツボの口をアルミナ板(4)で軽く蓋
をし、アルミナルツボを炉(5)内にセットし、酸素ガス
を0.5/minの流量で炉内に流しながら第1表に示
す温度で25〜100時間焼成し、透光性セラミツクス
の試料を得た。なお、昇温は4℃/minで行ない、降温
は900℃まで3℃/minで、以後は自然徐冷とした。The light-transmitting ceramic material powder was pressure-molded into pellets having a diameter of 12 mm, a thickness of 2 mm and a density of 4 g / cm 3 . Then, as shown in FIG. 1, 45 g of the atmosphere material powder produced by the above-mentioned oxide mixing method was mixed with about 120 cc of alumina crucible.
Put in (1), embed the pellet (2) in the atmosphere material powder (3), lightly cover the mouth of the alumina crucible with the alumina plate (4), set the alumina crucible in the furnace (5), A sample of translucent ceramics was obtained by firing at a temperature shown in Table 1 for 25 to 100 hours while flowing oxygen gas into the furnace at a flow rate of 0.5 / min. The temperature was raised at 4 ° C./min, the temperature was lowered to 900 ° C. at 3 ° C./min, and thereafter, the temperature was naturally cooled.
このようにして得た透光性セラミツクスの試料1〜8の
両面を鏡面研摩して、厚さ1.2mmとし、波長0.632
8ミクロンの光線を用いて透過率を測定した。その結果
を第1表に示す。Both surfaces of the transparent ceramics samples 1 to 8 thus obtained were mirror-polished to have a thickness of 1.2 mm and a wavelength of 0.632.
The transmittance was measured using a light beam of 8 microns. The results are shown in Table 1.
また、比較例として、前記雰囲気材粉末を原料粉末とし
てペレットを作成し、前記化学的精製法により生成した
原料粉末を用いた場合と同様にして焼成後、研摩した比
較試料9、10について透過率を測定した結果を第1表
に合わせて示す。Further, as a comparative example, the transmittances of Comparative Samples 9 and 10 which were prepared by pelletizing the atmosphere material powder as a raw material powder and firing the same as in the case of using the raw material powder produced by the chemical refining method and polishing The results of the measurement are shown in Table 1.
第1表の結果から明らかなように、本発明方法によれ
ば、焼成温度が低くても十分な透光性が得られるが、酸
化物混合法により生成したPLZTを透光性セラミツク
ス材料粉末として用い1110℃の温度で焼成した場合
には透光性が得られない。このような相異を生ずるの
は、化学的精製法により生成した透光性セラミツクス材
料粉末の方が、酸化物混合法により生成されたPLZT
粉末のものより組成が均一で、粒径が小さく、反応性が
良いためであると推測される。 As is clear from the results in Table 1, according to the method of the present invention, sufficient translucency can be obtained even if the firing temperature is low, but PLZT produced by the oxide mixing method is used as the translucent ceramic material powder. When used and fired at a temperature of 1110 ° C., no translucency is obtained. This difference is caused by the fact that the transparent ceramic material powder produced by the chemical refining method is PLZT produced by the oxide mixing method.
It is presumed that this is because the composition is more uniform, the particle size is smaller, and the reactivity is better than that of powder.
また、1110℃で100時間焼成して得た前記試料5
及び比較試料10のマクロ組織を電子顕微鏡写真で調べ
た処、本発明方法のものでは、粒径が5ミクロン程度で
残留ポアが殆ど認められなかったが、比較例のものでは
粒径が6ミクロンとやや大きく残留ボアの存在がかなり
多く認められた。The sample 5 obtained by firing at 1110 ° C. for 100 hours
Also, when the macrostructure of Comparative Sample 10 was examined by an electron micrograph, the method of the present invention showed that the particle size was about 5 microns and almost no residual pores were recognized, but the comparative example had a particle size of 6 microns. The presence of residual bores was fairly large.
(発明の効果) 以上説明したように、本発明方法によれば、安価な出発
原料を用いて化学的精製法により生成したランタン変性
ジルコン酸チタン酸鉛を透光性セラミツクスの原料粉末
としているため、比較的低い温度で焼成でき、これが雰
囲気材としてより安価な酸化物等を原料とする酸化物混
合法による透光性セラミツクスと略同組成のランタン変
性ジルコン酸チタン酸鉛の粉末を用いていることと相ま
って、所望の組成の透光性セラミツクスを製造できると
同時に、製品コストを安価にすることができる。また、
加圧成型するだけで良いので、ホットプレス法のように
寸法制限を受けることが無く、大面積の透光性セラミツ
クスを製造でき、量産化できるなど優れた効果が得られ
る。(Effect of the invention) As described above, according to the method of the present invention, the lanthanum-modified lead zirconate titanate produced by the chemical refining method using an inexpensive starting material is used as the raw material powder for the light-transmitting ceramics. The powder of lanthanum-modified lead zirconate titanate having almost the same composition as the translucent ceramics prepared by an oxide mixing method using a cheaper oxide as a raw material can be fired at a relatively low temperature. Combined with this, it is possible to manufacture a translucent ceramic having a desired composition and at the same time, to reduce the product cost. Also,
Since only press molding is required, there is no dimensional limitation as in the hot pressing method, and it is possible to produce a large-area translucent ceramic, and it is possible to obtain an excellent effect such as mass production.
第1図は本発明方法における焼成時の炉内の配置状態を
示す概略説明図である。 1〜アルミナルツボ、2〜ペレット、 3〜雰囲気材粉末、5〜炉。FIG. 1 is a schematic explanatory view showing an arrangement state in a furnace during firing in the method of the present invention. 1-alumina crucible, 2-pellet, 3-atmosphere material powder, 5-furnace.
Claims (3)
化水素を含む水溶液中で反応させて生成した沈澱物を熱
処理してランタン変性ジルコン酸チタン酸鉛からなる透
光性セラミツクス材料を用意する一方、Pb、La、Z
r及びTiの酸化物もしくは焼成により酸化物となるそ
れらの元素の化合物を所定割合で混合、焼成して前記透
光性セラミツクス材料と略同組成のランタン変性ジルコ
ン酸チタン酸鉛からなる雰囲気材を用意し、前記透光性
セラミツクス材料の粉末を成型して得た成型体を前記雰
囲気材の粉末中に埋設し、酸素気流中1080〜115
0℃で焼成することを特徴とする透光性セラミツクスの
製造方法。1. A translucent ceramic material comprising lanthanum-modified lead zirconate titanate is prepared by heat-treating a precipitate formed by reacting Pb, La, Zr and Ti ions in an aqueous solution containing hydrogen peroxide. On the other hand, Pb, La, Z
An atmosphere material made of lanthanum-modified lead zirconate titanate having substantially the same composition as the translucent ceramics material is prepared by mixing oxides of r and Ti or compounds of those elements which become oxides by firing at a predetermined ratio and firing. A molded body prepared by molding the powder of the translucent ceramics material is embedded in the powder of the atmosphere material, and the mixture is placed in an oxygen stream of 1080-115.
A method for producing a translucent ceramic, which comprises firing at 0 ° C.
組成比よりPbを多く含有している特許請求の範囲第1
項記載の透光性セラミツクスの製造方法。2. The light transmissive ceramic material contains more Pb than the stoichiometric composition ratio.
A method for producing a translucent ceramic according to the item.
を多く含有している特許請求の範囲第1項又は第2項記
載の透光性セラミツクスの製造方法。3. The atmosphere material is Pb based on a stoichiometric composition ratio.
The method for producing a translucent ceramic according to claim 1 or 2, which contains a large amount of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60114660A JPH0667786B2 (en) | 1985-05-27 | 1985-05-27 | Method for manufacturing translucent ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60114660A JPH0667786B2 (en) | 1985-05-27 | 1985-05-27 | Method for manufacturing translucent ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61275165A JPS61275165A (en) | 1986-12-05 |
| JPH0667786B2 true JPH0667786B2 (en) | 1994-08-31 |
Family
ID=14643373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60114660A Expired - Lifetime JPH0667786B2 (en) | 1985-05-27 | 1985-05-27 | Method for manufacturing translucent ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0667786B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2647436B2 (en) * | 1988-05-25 | 1997-08-27 | 住友大阪セメント株式会社 | PLZT synthesis method |
| JP4803367B2 (en) * | 2006-03-30 | 2011-10-26 | Tdk株式会社 | Method for adjusting characteristics of sintered parts |
-
1985
- 1985-05-27 JP JP60114660A patent/JPH0667786B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61275165A (en) | 1986-12-05 |
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