JPH066948B2 - Rotary vane two-stage oil rotary vacuum pump - Google Patents
Rotary vane two-stage oil rotary vacuum pumpInfo
- Publication number
- JPH066948B2 JPH066948B2 JP17099089A JP17099089A JPH066948B2 JP H066948 B2 JPH066948 B2 JP H066948B2 JP 17099089 A JP17099089 A JP 17099089A JP 17099089 A JP17099089 A JP 17099089A JP H066948 B2 JPH066948 B2 JP H066948B2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- rotor
- groove
- stage
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004891 communication Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- HVTQDSGGHBWVTR-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-phenylmethoxypyrazol-1-yl]-1-morpholin-4-ylethanone Chemical compound C(C1=CC=CC=C1)OC1=NN(C=C1C=1C=NC(=NC=1)NC1CC2=CC=CC=C2C1)CC(=O)N1CCOCC1 HVTQDSGGHBWVTR-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/08—Rotary pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、１段目のポンプのロータの両側面のシール
性を高めた回転翼形二段油回転真空ポンプに関する。Description: TECHNICAL FIELD The present invention relates to a rotary vane type two-stage oil rotary vacuum pump having improved sealability on both side surfaces of a rotor of a first-stage pump.
従来の真空ポンプとして、第３図に略図で示すように回
転翼型油回転真空ポンプを二段式に構成したものがあ
る。この真空ポンプは、ポンプケーシング１のシリンダ
室1a、1b内に偏心して、第１段ポンプのロータ２、第２
段ポンプのロータ３が夫々収容され、共通の回転軸４に
取付けられ、１台のモータで駆動されるようになってい
る。そして第１段ポンプの吸気口５は被排気容器に接続
され、第１段ポンプの排気口６は第２段ポンプの吸気口
７に通路８を介して接続され、第２段ポンプの排気口９
はばねで押圧された排気弁10を経て外気に解放されてい
る。図における11、13は回転翼、12、14は翼溝であり、
ロータ２、３の夫々にその一つの直径方向に沿うように
対をなして設けてある。また、15はオイルポンプ、16、
17は油回路であり、シリンダ室1a、1bへ送られた油はロ
ータ２、３の回転に従ってロータとシリンダ内面との隙
間に介在してシール作用をする。油通路17は高真空側へ
脱気された油を送るようになっている。シリンダ室1a内
に供給された油の一部はガスと共に通路８を通ってシリ
ンダ室1bへ送られる。As a conventional vacuum pump, there is a rotary vane type oil rotary vacuum pump of a two-stage type as shown in a schematic view of FIG. This vacuum pump is eccentrically located in the cylinder chambers 1a and 1b of the pump casing 1, and the rotor 2 and the second
The rotors 3 of the multi-stage pump are housed in each, mounted on a common rotary shaft 4, and driven by one motor. The intake port 5 of the first-stage pump is connected to the exhausted container, the exhaust port 6 of the first-stage pump is connected to the intake port 7 of the second-stage pump via the passage 8, and the exhaust port of the second-stage pump is connected. 9
Is released to the outside air via an exhaust valve 10 which is pressed by a spring. In the figure, 11 and 13 are rotor blades, 12 and 14 are blade grooves,
The rotors 2 and 3 are provided in pairs so as to extend along the diametrical direction. Also, 15 is an oil pump, 16,
Reference numeral 17 denotes an oil circuit, and the oil sent to the cylinder chambers 1a and 1b intervenes in the gap between the rotor and the cylinder inner surface as the rotors 2 and 3 rotate, and acts as a seal. The oil passage 17 is adapted to send the deaerated oil to the high vacuum side. A part of the oil supplied into the cylinder chamber 1a is sent to the cylinder chamber 1b through the passage 8 together with the gas.
前述したような従来の回転翼形二段油回転真空ポンプ
は、10-4Torrオーダの真空を得るためにはロータとシリ
ンダの間の隙間が重要な点となることは周知である。そ
して真空を保つために隙間と油の量が関係してくる。こ
の油の量は特に到達真空付近で問題になる。つまり、高
真空側の第１ポンプのシリンダ室1aへの給油は低真空側
の第２ポンプのシリンダ室1aを介して行われており、少
量である。そしてポンプの構造上高真空側の排気は通路
８を介して低真空側へ送られ、この時排気ガスと共に油
も同時に排気されるから、前記隙間に介在してシール作
用をする油の量は必ずしも充分ではない。また、シリン
ダ室1a内で油は回転軸方向の中央部へ押しやられる傾向
となることが知られている。このために、ロータとシリ
ンダの隙間を極力狭くする努力が一般的になされてい
る。例えばロータ２の側面とシリンダ室1aの内面との隙
間は0.02mmとか0.04mmといった値とされている。このよ
うな非常に小さい隙間とするには組立て時に高度な技術
を必要とする。また、隙間は性能にも微妙に影響する。It is well known that in the conventional rotary vane type two-stage oil rotary vacuum pump as described above, the gap between the rotor and the cylinder is an important point in order to obtain a vacuum of the order of 10 −4 Torr. And the gap and the amount of oil are related to maintain the vacuum. This amount of oil becomes a problem especially near the ultimate vacuum. That is, the oil supply to the cylinder chamber 1a of the first pump on the high vacuum side is performed via the cylinder chamber 1a of the second pump on the low vacuum side, which is a small amount. Then, because of the structure of the pump, the exhaust on the high vacuum side is sent to the low vacuum side through the passage 8, and at this time, the oil is exhausted together with the exhaust gas, so that the amount of the oil intervening in the gap and performing the sealing action is Not always enough. Further, it is known that the oil tends to be pushed to the central portion in the rotation axis direction in the cylinder chamber 1a. For this reason, efforts are generally made to minimize the gap between the rotor and the cylinder. For example, the gap between the side surface of the rotor 2 and the inner surface of the cylinder chamber 1a is 0.02 mm or 0.04 mm. Such a very small gap requires a high level of skill during assembly. In addition, the gap slightly affects the performance.
この発明は、第１段ポンプのロータ側面とシリンダ室内
面との間のシールを少ない油量で効果的に行うことによ
って従来よりも隙間を大きくすることができるシール構
造を具えた回転翼形二段油回転真空ポンプを提供するこ
とを課題とする。The present invention relates to a rotary vane type two-stage rotor having a seal structure capable of increasing a gap larger than conventional by effectively sealing a rotor side surface of a first stage pump and a cylinder chamber inner surface with a small amount of oil. An object is to provide a stage oil rotary vacuum pump.
この発明の手段は、第１段ポンプの排気通路を第２段ポ
ンプの吸気口に接続してなる回転翼形二段油回転真空ポ
ンプにおいて、第１段ポンプのロータの両側面の翼溝で
分断された各面に夫々ロータ周面に近い位置を通り両端
が翼溝から離れて終端した円弧状の外側溝を設け、前記
各面の各外側溝より内側のロータ軸に接近した位置に円
弧状の内側溝を設け、その内側溝を前記各外側溝のロー
タ回転方向前端部に連通する連絡溝を設け、前記内側溝
の対向するシリンダ端壁内面に開口する油供給路を設
け、その油供給路の基端部に油を供給する油供給手段を
設けたことを特徴とする。According to the means of the present invention, in a rotary vane type two-stage oil rotary vacuum pump in which the exhaust passage of the first stage pump is connected to the intake port of the second stage pump, the blade grooves on both side surfaces of the rotor of the first stage pump are used. An arcuate outer groove is provided on each of the divided surfaces, passing through a position close to the rotor peripheral surface and terminating at both ends away from the blade groove, and a circle is formed at a position closer to the rotor shaft on the inner side than each outer groove of each surface. An arc-shaped inner groove is provided, a communication groove that connects the inner groove to the rotor rotation direction front end of each outer groove is provided, and an oil supply path that opens to the inner surface of the cylinder end wall facing the inner groove is provided. An oil supply means for supplying oil is provided at the base end of the supply path.
内側溝に油供給手段及び油供給路により供給された油
は、ロータの回転と共に回転するから、遠心力が働き、
これによって連絡溝を通って外側溝の回転方向側端部に
入ることになる。外側溝はロータの回転方向の後端側で
終端しているから油が外側溝内に溜る傾向となるが、ロ
ータの側面とこれに対向するシリンダ室端壁内面との間
には隙間があるので、当然この隙間から油が出て行くこ
とになる。この状態において、外側溝内の油はシリンダ
室内面に接触していてロータの回転により回転方向後方
へ向う抵抗を受けて移動し、外側溝の回転方向後端側に
押しつけられる形で圧力が上昇する。従って、その圧力
によって外側溝内から前記隙間へ出る油は押し出される
ことになる。つまり外側溝がポンプのような作用をす
る。これによって隙間内の油は高密度となり、シール性
が向上する。この隙間内の油の高密度化作用は隙間が
０．１mm程度以下で認められる。Since the oil supplied to the inner groove by the oil supply means and the oil supply passage rotates with the rotation of the rotor, centrifugal force acts,
As a result, the end of the outer groove in the direction of rotation is passed through the connecting groove. Since the outer groove ends on the rear end side in the rotation direction of the rotor, oil tends to collect in the outer groove, but there is a gap between the side surface of the rotor and the inner surface of the cylinder chamber end wall facing this. So, of course, oil will come out from this gap. In this state, the oil in the outer groove is in contact with the inner surface of the cylinder chamber and moves due to the resistance toward the rear in the rotation direction due to the rotation of the rotor, and the pressure rises in the form of being pressed to the rear end side in the rotation direction of the outer groove. To do. Therefore, the oil that is discharged from the inside of the outer groove to the gap is pushed out by the pressure. That is, the outer groove acts like a pump. As a result, the oil in the gap has a high density and the sealing property is improved. The action of densifying the oil in the gap is recognized when the gap is about 0.1 mm or less.
この発明の１実施例を第１図及び第２図を用いて説明す
る。第１図において第３図と同等部分は同一図面符号で
示してその説明を省略する。第１図の第３図と異なる点
は、ロータ２の両側面に第２図に詳細を示すような溝を
設けた点と、第１段ポンプの排気通路８の途中にトラッ
プ部を設けて捕捉した油をロータ２の両側面の溝に供給
する油供給路を設けた点とである。One embodiment of the present invention will be described with reference to FIGS. 1 and 2. In FIG. 1, the same parts as those in FIG. 3 are designated by the same reference numerals and the description thereof will be omitted. 1 is different from FIG. 3 in that grooves are provided on both side surfaces of the rotor 2 as shown in detail in FIG. 2 and that a trap portion is provided in the exhaust passage 8 of the first stage pump. That is, an oil supply path is provided to supply the captured oil to the grooves on both sides of the rotor 2.
ロータ２の両側面の溝は、第２図(a)、(b)に示すよう
に、外側溝20、内側溝21、連絡溝22からなる。外側溝20
は、ロータ２の両側面に夫々現われる翼溝12、12によっ
て、第２図(a)に見られるように、上下に分断されてい
る上側部と下側部分の各々に設けられ、ロータ周面に近
い位置を通り両端が翼溝12から離れて終端した円弧状を
なしている。内側溝21は、各外側溝20より内側のロータ
の回転軸４に接近した位置に設けられ、両端が翼溝12、
12に達している円弧状のものである。図にロータ２の回
転方向を矢印23で示す。連絡溝22は、内側溝21を外側溝
20のロータ２の回転方向の前端部に接続するように設け
てある。これら各溝断面の大きさは、例えばロータ２の
外径が110mmのもので、各溝の幅が５mm、外側溝20の深
さが１mm、内側溝21の深さが５mm程度であり、連絡溝22
の深さは双方の溝底を継ぐように内側から外側へ徐々に
浅くなっている。The grooves on both side surfaces of the rotor 2 are composed of an outer groove 20, an inner groove 21, and a connecting groove 22, as shown in FIGS. 2 (a) and 2 (b). Outer groove 20
Are provided on each of the upper and lower parts, which are divided into upper and lower parts, as shown in FIG. 2 (a), by the blade grooves 12 appearing on both side surfaces of the rotor 2, respectively. Has a circular arc shape with both ends passing away from the blade groove 12 and ending. The inner groove 21 is provided at a position closer to the rotary shaft 4 of the rotor on the inner side of each outer groove 20, and both ends thereof have blade grooves 12,
It is a circular arc shape that reaches 12. The direction of rotation of the rotor 2 is indicated by the arrow 23 in the figure. The connecting groove 22 includes the inner groove 21 and the outer groove.
It is provided so as to be connected to the front end portion of the rotor 2 in the rotational direction of 20. The cross section of each of these grooves is, for example, when the outer diameter of the rotor 2 is 110 mm, the width of each groove is 5 mm, the depth of the outer groove 20 is 1 mm, and the depth of the inner groove 21 is about 5 mm. Groove 22
Is gradually shallowed from the inner side to the outer side so as to join both groove bottoms.
トラップ部は、第１図に24で示すように、排気通路８の
途中に設けてあり、例えば網状物を介在させて排ガス中
の油滴を捕捉するように構成したものである。捕捉され
た油は下側の油溜25に溜る。その油溜25からロータ２の
両側面の内側溝21に対向するシリンダ室1aの壁面に達し
て開口した油供給路26を設けてある。As shown by 24 in FIG. 1, the trap portion is provided in the middle of the exhaust passage 8 and is configured to trap oil droplets in the exhaust gas by interposing, for example, a mesh. The trapped oil collects in the lower oil sump 25. An oil supply passage 26 is provided which opens from the oil reservoir 25 to the wall surface of the cylinder chamber 1a facing the inner grooves 21 on both side surfaces of the rotor 2.
このように構成された真空ポンプは、従来のものと同様
に使用されるが、ロータ２の側面の各溝20、21、22の存
在により、その内側溝21へ供給された油は、遠心力によ
り連絡溝22を通って外側溝20に至り、シリンダ室1aの端
壁面から抵抗を受けることにより加圧状態となり、ロー
タ２の側面とシリンダ室1aの端壁面との間の隙間ｃへ高
密度状態で送出される。従って良好なシール作用をな
す。このシール作用が良好であることにより、隙間ｃを
従来のこの種の真空ポンプにおける隙間の約２倍に形成
しても同程度のシール作用が得られる。例えば10-4Torr
オーダを確保するためには従来0.02mmの隙間を0.04mm
に、従来0.04mmの隙間を0.08mmにできる。従って、ロー
タ２、シリンダ室1aの加工精度及び組立精度を緩めるこ
とができ、製作が容易となる。The vacuum pump configured in this way is used in the same manner as the conventional one, but the presence of the grooves 20, 21, 22 on the side surface of the rotor 2 causes the oil supplied to the inner groove 21 to be subjected to centrifugal force. Reaches the outer groove 20 through the connecting groove 22, and receives a resistance from the end wall surface of the cylinder chamber 1a to be in a pressurized state, and a high density is produced in the gap c between the side surface of the rotor 2 and the end wall surface of the cylinder chamber 1a. Is sent in the state. Therefore, a good sealing action is achieved. Due to this good sealing action, even if the gap c is formed to be about twice as large as the gap in the conventional vacuum pump of this type, a similar sealing action can be obtained. For example 10 -4 Torr
In order to secure the order, a gap of 0.02mm was used for the past 0.04mm
In addition, the gap of 0.04mm can be reduced to 0.08mm. Therefore, the machining accuracy and the assembly accuracy of the rotor 2 and the cylinder chamber 1a can be relaxed, and the manufacture becomes easy.
上記実施例において、トラップ部で捕捉した油を油供給
路26を介して内側溝21に供給する構成としたが、場合に
よっては別の油供給手段例えば強制給油としてもよい。
要は、脱気された油を内側溝へ供給するような構成であ
ればよい。Although the oil trapped by the trap portion is supplied to the inner groove 21 via the oil supply passage 26 in the above embodiment, another oil supply means, for example, forced oil supply may be used depending on the case.
The point is that the degassed oil may be supplied to the inner groove.
この発明によれば、ロータ両側面に特定の溝を設けてそ
の外側溝からロータ両側面シリンダ室端壁面との間の隙
間へ油を押し出してその隙間を高密度の油でシールする
ようにしたから、到達真空度付近においても良好なシー
ル作用が得られ、10-4Torrオーダの真空度を得るように
する場合に、ロータ両側面とシリンダ室端壁面との間の
隙間を従来よりも大きくすることができて、回転翼形二
段油回転真空ポンプの製作が容易となる。According to the present invention, the specific grooves are provided on both sides of the rotor, and the oil is pushed out from the outer groove into the gap between the rotor both side surfaces and the cylinder chamber end wall surface, and the gap is sealed with the high density oil. Therefore, a good sealing effect is obtained even in the vicinity of the ultimate vacuum, and when obtaining a vacuum of the order of 10 -4 Torr, the gap between both side surfaces of the rotor and the wall surface of the cylinder chamber is larger than before. Therefore, the rotary vane type two-stage oil rotary vacuum pump can be easily manufactured.
第１図はこの発明の１実施例の概略の構成を示す縦断正
面図、第２図は同実施例の主要部を示し（ａ）は第１段
ポンプのロータの側面拡大図、（ｂ）は同ロータの部分
縦断正面図、第３図は従来の回転翼形二段油回転真空ポ
ンプを示す縦断正面図である。 １・・・・ポンプケーシング、1a、1b・・・・シリン
ダ室、２、３・・・・ロータ、４・・・・回転軸、５・
・・・第１段ポンプの吸気口、６・・・・第１段ポンプ
の排気口、７・・・・第２段ポンプの吸気口、８・・・
・通路、９・・・・第２段ポンプの排気口、11、12・・
・・回転翼、13、14・・・・翼溝、15・・・・オイルポ
ンプ、16、17・・・・油回路、20・・・・外側溝、21・
・・・内側溝、22・・・・連絡溝、23・・・・ロータ回
転方向矢印、24・・・・トラップ部、25・・・・油溜、
ｃ・・・・隙間。FIG. 1 is a vertical sectional front view showing a schematic configuration of one embodiment of the present invention, FIG. 2 shows a main part of the same embodiment, (a) is an enlarged side view of a rotor of a first stage pump, (b). Is a partial vertical sectional front view of the same rotor, and FIG. 3 is a vertical sectional front view showing a conventional rotary vane type two-stage oil rotary vacuum pump. 1 ... ・ Pump casing, 1a, 1b ・ ・ ・ ・ Cylinder chamber, 2, 3 ・ ・ ・ ・ Rotor, 4 ・ ・ ・ ・ Rotary shaft, 5 ・
... inlet of first stage pump, 6 ... exhaust port of first stage pump, 7 ... intake port of second stage pump, 8 ...
・ Passage, 9 ・ ・ ・ ・ Exhaust port of second stage pump, 11, 12 ・ ・
..Rotary blades, 13, 14 .... Blade grooves, 15 ... Oil pumps, 16, 17 ... Oil circuits, 20 ... Outer grooves, 21
... Inner groove, 22 ... Communication groove, 23 ... Rotor rotation direction arrow, 24 ... Trap part, 25 ... Oil sump,
c ... gap.
Claims (1)
吸気口に接続してなる回転翼形二段油回転真空ポンプに
おいて、第１段ポンプのロータの両側面の翼溝で分断さ
れた各面に夫々ロータ周面に近い位置を通り両端が翼溝
から離れて終端した円弧状の外側溝を設け、前記各面の
各外側溝より内側のロータ軸に接近した位置に円弧状の
内側溝を設け、その内側溝を前記各外側溝のロータ回転
方向前端部に連通する連絡溝を設け、前記内側溝の対向
するシリンダ端壁内面に先端が開口する油供給路を設
け、その油供給路の基端部に油を供給する油供給手段を
設けたことを特徴とする回転翼形二段油回転真空ポン
プ。1. A rotary vane type two-stage oil rotary vacuum pump in which an exhaust passage of a first-stage pump is connected to an intake port of a second-stage pump, wherein the rotor of the first-stage pump is divided by blade grooves on both sides of the rotor. Each surface is provided with an arcuate outer groove that passes through a position close to the rotor peripheral surface and ends at both ends apart from the blade groove, and is arcuate at a position closer to the rotor shaft than each outer groove on each surface. Inner groove is provided, a communication groove that connects the inner groove to the rotor rotation direction front end portion of each outer groove is provided, and an oil supply path having a tip opening is provided on the inner surface of the cylinder end wall facing the inner groove. A rotary vane type two-stage oil rotary vacuum pump, characterized in that an oil supply means for supplying oil is provided at a base end portion of the oil supply path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099089A JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099089A JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0337394A JPH0337394A (en) | 1991-02-18 |
| JPH066948B2 true JPH066948B2 (en) | 1994-01-26 |
Family
ID=15915077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17099089A Expired - Lifetime JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH066948B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009046810A1 (en) * | 2007-10-02 | 2009-04-16 | Ixetic Hückeswagen Gmbh | Vacuum pump, particularly a vane pump |
| GB2475254B (en) * | 2009-11-11 | 2016-02-10 | Edwards Ltd | Vacuum pump |
-
1989
- 1989-06-30 JP JP17099089A patent/JPH066948B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337394A (en) | 1991-02-18 |
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