JPH0669544B2 - Anti-rebound device for rotary shaker - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary shake-off device in a resist coating device or a bonding device used in a manufacturing process of an optical disc used as a large-capacity information recording medium in the field of information equipment. The present invention relates to a bounce prevention device.

2. Description of the Related Art As shown in FIG. 4, a conventional bounce prevention device has an annular partition plate 16 made of wire mesh on the outer periphery of a rotated object 1 "rotated by a rotary table 3" by a shaft 18 in an outer frame 17. Was to be fixed to.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the above-mentioned device, not only does the bounce occur when the object 1 ″ to be rotated rotates at a high speed, but when the viscosity of the coating agent is high, the coating agent clogs in the mesh and the reverse Therefore, there is a problem in that the partition plate 16 made of wire mesh has to be frequently washed.

Therefore, the present invention provides a bounce prevention device which does not cause bounce even if the rotated object 1 ″ rotates at a high speed and is easy to maintain and manage.

Means for Solving the Problems To solve the above problems, in the present invention, a frustoconical anti-scattering frame at a position that surrounds the rotated object outer peripheral portion of the rotary shaker, and the anti-scattering frame, The bottom of the outer periphery is connected to the bottom of the truncated cone to store the coating agent, and the anti-scattering frame is rotated in the same direction at the same center as the rotated object.

With such a configuration, the coating agent applied to the surface of the rotated object becomes granular due to the centrifugal force due to the high speed rotation and scatters from the outer peripheral end surface of the rotated object. At this time, the speed of the scattered coating agent particles is large. The sag and the direction are a combination of a small velocity component acting in the radial direction of the rotated object due to the centrifugal force and a large velocity component acting in the tangential direction of the outer peripheral end face of the rotated object due to the rotation. However, since the velocity component in the radial direction is much smaller than the velocity component in the tangential direction, it appears that the velocity component in the radial direction is almost tangential.

In this way, the scattered coating material particles first collide with the slope of the frustoconical anti-scattering frame.According to the configuration of the anti-repelling device of the present invention, this anti-scattering frame also has the same center as the rotated object, Since they rotate in the same direction, the relative speed in the tangential direction between the scattered coating agent particles and the slope of the dispersion-preventing frame can be made extremely small. In particular, if the tangential velocity components of the rotation of the coating material particles and the slope portion of the anti-scattering frame on which the coating material particles collide are equal, that is, if the rotation speeds of both are the same, ignoring the resistance due to air, etc. The relative velocity in the tangential direction becomes zero. Therefore, the relative velocity when the coating material particles collide with the slope of the anti-scattering frame is only a small velocity component due to the centrifugal force acting in the radial direction of the rotated object. Therefore,
The collision speed of the coating agent particles on the anti-scattering frame can be extremely reduced.

Further, the impact force exerted on the coating material particles by this collision is sufficiently relaxed by the inclination of the slope of the scattering frame and the viscosity of the coating agent itself, and the coating particles will not be repelled even if they collide with the slopes. Adheres to the slope of.

Then, the adhered coating material particles travel along the slope due to the centrifugal force due to the rotational movement of the anti-scattering frame itself, and are constantly flown toward the outer peripheral direction. There is no end. Here, even if the coating agent particles that are not attached to the anti-scattering frame are generated and fall to the lower part of the anti-scattering frame, first, since the lower part of the anti-scattering frame is sealed, the dropped coating material particles are projected outside the anti-scattering frame. It does not collide with the inner wall of the swing-off device and cause a secondary bounce to contaminate the rotated object. In addition, if the upper part of the anti-scattering frame is sealed, the coating material particles protruding from the anti-scattering frame collide with the inner wall of the shake-off device and adhere to the outer surface of the anti-scattering frame even if they are repelled. It does not cause bounce.

As a result, according to the bounce prevention device having the above structure,
Since the speed at which the scattered coating material particles collide with the anti-scattering frame can be made extremely small, it is possible to prevent the occurrence of rebounding of the coating material particles even when the rotational speed of the rotated object is high. As a result, it is possible to obtain a work piece having a good surface condition without stains. Further, even when the viscosity of the coating agent is high, the coating agent that has been scattered and is no longer needed is smoothly discharged without clogging the inside of the apparatus, so that maintenance and management of the apparatus is easy.

Embodiment Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a vertical cross-sectional view of a bounce prevention device according to a first embodiment of the present invention. In FIG. 1, reference numeral 1 is a disk-shaped object to be rotated, and the coating material 2 is applied to the upper surface thereof.
Reference numeral 3 denotes a rotary table on which the rotated object 1 is mounted and which covers the back surface of the rotated object, and a drive shaft 4 which is joined to the lower part thereof.
It is rotated by a motor 6 fixed to the lower frame 5 via. Reference numeral 7 denotes a frustoconical frame that spreads downward and surrounds the periphery of the object 1 to be rotated and has an upper portion shielded, and a drive shaft 8
A motor 10 fixedly mounted on the upper frame 9 is rotated so that the linear velocity of the inclined surface portion where the coating material particles collide and the outer peripheral end surface of the rotated object become equal. Reference numeral 11 is a groove for the scattered coating agent, and the accumulated coating agent flows out from the outlet 12 and is discharged from the discharge port 13 to the outside of the apparatus.

Next, the operation of the configuration of this embodiment will be described. Due to the centrifugal force generated by the high-speed rotation, the coating material 2 on the surface of the rotated object 1 mounted on the rotating table 3 becomes granular and scatters from the outer peripheral end surface of the rotated object.

At this time, the scattering speed and the scattering direction of the coating agent particles are as follows. That is, the velocity is a combination of a small velocity component acting in the radial direction of the rotated object 1 due to the centrifugal force and a large velocity component acting in the tangential direction of the outer peripheral end surface of the rotated object 1 due to the rotational movement. Since the velocity component in the radial direction is much smaller than the velocity component in the tangential direction, the scattering direction looks like the tangential direction in appearance.

The coating material particles thus scattered first collide with the slope of the frustoconical anti-scattering frame 7, but in the present embodiment,
Since the anti-scattering frame 7 is rotated by the motor 10 in the same direction as the object 1 to be rotated, the speed at which the coating material particles collide with the slope of the anti-scattering frame 7 is made extremely small. be able to. Further, in this case, ignoring air resistance and the like, the anti-scattering frame 7 is arranged so that the rotation speed of the slope portion of the anti-scattering frame 7 on which the coating material particles collide becomes equal to the rotational speed of the outer peripheral end surface portion of the rotated object 1. Since the coating particles are rotated, the relative velocity between the coating material particles and the slope of the anti-scattering frame 7 at the time of collision is zero with respect to the velocity component in the tangential direction and only the small velocity component in the radial direction. Therefore, the anti-scattering frame 7 for the coating agent particles
The impact speed on the slope can be minimized. The impact force exerted on the coating agent particles by this collision is sufficiently relaxed by the inclination of the slope of the anti-scattering frame 7 and the viscosity of the coating agent itself. It adheres to the slope without rebounding.

Further, the adhered coating material particles continuously flow toward the outer peripheral direction due to the centrifugal force due to the rotational movement of the diffusion barrier itself, accumulate in the reservoir groove 11 and pass through the outlet 12 and the outlet 13. It is discharged to the outside of the device. Further, even if the coating material particles do not adhere to the slope of the anti-scattering frame 7 and fall to the lower part, the upper part of the anti-scattering frame 7 is sealed, so that the outer surface of the anti-scattering frame 7 is protected even if the coating material particles are repelled. It does not cause a secondary bounce.

As a result, according to the bounce preventive device having the above-described structure, the speed at which the scattered coating agent particles collide with the scattering frame 7 can be reduced to the minimum, so that even if the rotated object 1 rotates at high speed, It is possible to prevent the bounce,
It is possible to obtain a work piece having a good surface condition without stains. Further, even if the viscosity of the coating agent is high, the coating agent which has been scattered and is no longer needed is smoothly discharged to the outside of the apparatus without being clogged inside the apparatus, so that the apparatus can be easily maintained and managed.

Next, another embodiment of the present invention will be described.

FIG. 2 is a vertical cross-sectional view of a bounce prevention device in the second embodiment. In this embodiment, the turntable 3'is attached to the turntable 14 '.
, The anti-scattering frame 7'is attached to the upper part of the rotary plate 14, the anti-scattering frame 7'and the rotated object 1'are rotated in synchronization, and the lower part of the anti-scattering frame 7'is shielded. The structure is different from that of the first embodiment.

The operation of the second embodiment will be described with reference to FIG. FIG. 3 is an enlarged sectional view near the outer diameter end face of the rotated object 1'of the second embodiment. In FIG. 3, the outer peripheral end face of the 1 _'A point to be rotating object 1', 7 _'A point is ramp portion of Bochi frame coating agent particles collide. Also 'to be rotating object 1' Bochiwaku 7 in the case of rotating in synchronization with the gap C between the inclined surface portion 7 _'A point _A point and Bochi frame' outer peripheral end face 1 'of the rotated object 1 It is possible to bring the linear velocities of these two points close to the same value by making the value extremely small. Therefore, when the gap C is made extremely small, the relative velocity at which the coating agent particles collide with the point 7 _A ′ on the slope of the anti-scattering frame can be limited to only a small velocity component acting in the radial direction by the centrifugal force. . Therefore, bounce can be prevented by the same action as that of the first embodiment. Also, the anti-scattering frame 7 '
Even if the coating agent particles that do not adhere to the screen are generated and fall to the lower part of the anti-scattering frame 7 ′, the lower part of the anti-scattering frame 7 ′ is sealed by the rotary plate 14, so the dropped coating agent particles are There is no possibility of jumping out to the outside and colliding with the inner wall of the swing-off device, causing secondary bounce and contaminating the rotated object.

Further, according to the structure of the second embodiment, it is not necessary to use two motors as in the first embodiment, and only one motor is required. Therefore, the structure of the device can be simplified.

In addition, in the first and second embodiments, the anti-scattering frames 7, 7 ′ have a truncated conical shape that expands downward, but the same effect can be obtained by using a conical shape that expands upward. Further, in the first and second embodiments, the case where the coating material 2,2 'is applied on the upper surface of the rotated object 1,1' has been described, but the coating agent is applied between the superimposed rotated objects. The same effect can be obtained even if

EFFECTS OF THE INVENTION As described above, according to the present invention, a frustoconical anti-scattering frame that surrounds the outer peripheral portion of the object to be coated with the coating agent and has a reservoir groove from the lower outer periphery to the bottom surface is provided in the same direction as the object to be rotated. By rotating the coating material particles, the relative speed between the scattered coating material particles and the slope of the diffusion preventive frame is reduced to prevent rebound even if the coating material particles collide with the slope, and to prevent the surface condition A good work piece can be obtained. Further, the upper and lower parts of the diffusion preventive frame, or either one of them is shielded to prevent secondary rebound.

Further, in the present invention, even if the scattered coating agent adheres to the anti-scattering frame, the coating agent is smoothly discharged to the outside of the apparatus due to the centrifugal force due to the rotational movement of the anti-scattering frame itself, without being accumulated in the middle. Even with a highly viscous coating agent, it is not necessary to clean and replace the device as frequently as in the conventional example, and maintenance of the device is easy.

Further, since the relative speed is very small, there is no possibility of bounce even if the gap between the scattering frame and the rotated object is considerably reduced, so that the size of the entire apparatus can be reduced.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a bounce prevention device of a rotary shake-off device according to a first embodiment of the present invention, and FIG. 2 is a vertical sectional view of a bounce preventive device of a rotary shake-off device according to a second embodiment of the present invention. FIG. 3 is a partial cross-sectional detailed view thereof, and FIG. 4 is a perspective view of a conventional bounce prevention device. 1,1 ', 1 "... Rotated object, 2,2' ... Coating agent, 3,3 ',
3 ″ …… Turning table, 4,4 ′ …… Drive shaft, 6,6 ′ …… Motor,
7,7 '... Anti-scattering frame, 11,11' ... Reservoir groove.

Claims (2)

[Claims] 1. A rotary table (3) for fixing an object to be rotated (1) on a rotary table (3) of a motor (6) and covering the rear surface side.
And a substantially frustoconical anti-scattering frame (7) surrounding the rotated object (1), and the anti-scattering frame (7) and the rotated object (1) are rotated in the same direction about the same center. And a conical truncated cone connected to the outer peripheral lower part of the anti-scattering frame (7), with both or one of the upper part and the lower part of the anti-scattering frame (7) being a closed structure. It is characterized in that a reservoir groove (11) for accumulating the coating agent is provided over the bottom surface portion, and the reservoir groove is provided with an outlet (12) for discharging the coating agent in the reservoir groove (11) to the outside when the rotation is stopped. Anti-rebound device for the rotary swing-off device. 2. A motor (6) for rotating a rotated object (1).
Equipped with a motor (10) on the top of the scattering frame (7) coaxially with
The anti-bounce device of the rotary shake-off device according to claim 1, characterized in that both motors (6, 10) are rotationally controlled in synchronization with the same rotational direction.