JPH0674909B2 - Gas cleaning method and apparatus - Google Patents
Gas cleaning method and apparatusInfo
- Publication number
- JPH0674909B2 JPH0674909B2 JP63156681A JP15668188A JPH0674909B2 JP H0674909 B2 JPH0674909 B2 JP H0674909B2 JP 63156681 A JP63156681 A JP 63156681A JP 15668188 A JP15668188 A JP 15668188A JP H0674909 B2 JPH0674909 B2 JP H0674909B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ultraviolet rays
- air
- filter
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 29
- 238000004140 cleaning Methods 0.000 title claims description 18
- 239000000463 material Substances 0.000 claims description 28
- 239000010419 fine particle Substances 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 17
- 244000005700 microbiome Species 0.000 description 12
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 230000003749 cleanliness Effects 0.000 description 7
- 230000001954 sterilising effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000004659 sterilization and disinfection Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 2
- 241000700605 Viruses Species 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000002070 germicidal effect Effects 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000497 Amalgam Inorganic materials 0.000 description 1
- 244000063299 Bacillus subtilis Species 0.000 description 1
- 235000014469 Bacillus subtilis Nutrition 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 244000061176 Nicotiana tabacum Species 0.000 description 1
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 230000004087 circulation Effects 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000012258 culturing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000813 microbial effect Effects 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Electrostatic Separation (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、 電子工業、薬品工業、食品工業、農林産業、医療、
精密機械工業等におけるクリーンルーム、クリーンブー
ス、クリーントンネル、クリーンベンチ、安全キヤビネ
ツト、無菌室、バスボツクス、無菌エアカーテン、クリ
ーンチユーブ等における空気、酸素、窒素等の気体の清
浄化方法。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an electronic industry, a pharmaceutical industry, a food industry, an agriculture and forestry industry, medical treatment,
Clean room, clean booth, clean tunnel, clean bench, safety cabinet, aseptic room, bath box, aseptic air curtain, cleaning method for gases such as oxygen, nitrogen, etc. in the precision machinery industry.
煙道排ガスや自動車排ガスの様な各種工業、産業か
ら排出される気体の清浄化方法。A method for cleaning gases emitted from various industries and industries such as flue gas and automobile exhaust gas.
家庭、事業所、病院等における空気清浄方法。 Air cleaning methods for homes, businesses, hospitals, etc.
並びに、,及び記載の方法を実施するための装
置。And an apparatus for performing the described method.
に関する。Regarding
〔従来の技術及びその問題点〕 従来の室内の空気清浄方法或いはその装置を大別する
と、 (1)機械的濾過方式(例えばHEPAフイルター) (2)静電的に微粒子の捕集を行なう高電圧による荷電
及び導電性フイルターによる濾過方式(例えばMESAフイ
ルター) があるが、これらの方式には夫々次のような欠点があつ
た。[Prior Art and Problems Thereof] The conventional indoor air cleaning methods or their devices are roughly classified into (1) a mechanical filtration method (for example, a HEPA filter), (2) electrostatic collection of fine particles. There are charging methods using voltage and filtration methods using a conductive filter (for example, MESA filter), but each of these methods has the following drawbacks.
即ち、機械的濾過方式においては、空気の清浄度(クラ
ス)をあげるためには目の細かいフイルターを使用する
必要があるが、この場合圧損が高く、また目づまりによ
る圧損の増加も著るしく、フイルターの寿命も短かく、
フイルターの維持、管理或いは交換が面倒であるばかり
でなく、フイルターの交換を行う場合、その間作業をス
トツプする必要があり、復帰までには長時間を要してお
り、生産能率が悪いという欠点があつた。That is, in the mechanical filtration method, it is necessary to use a fine filter to increase the air cleanliness (class), but in this case, the pressure loss is high, and the pressure loss due to clogging is also remarkable. , The life of the filter is short,
Not only is it difficult to maintain, manage, or replace the filter, but when replacing the filter, it is necessary to stop the work during that time, and it takes a long time to restore the product. Atsuta
また、空気の清浄度を上げる為に換気回数(フアンによ
る空気循環回数)を増加することも行われているが、こ
の場合動力費が高くつくという欠点があつた。Further, in order to improve the cleanliness of the air, the number of ventilations (the number of air circulations by a fan) is also increased, but in this case, there is a drawback that the power cost becomes high.
また、従来のフイルターによる方法は微粒子の除去だけ
を目的といているので、工業用クリーンルーム用として
は使用できるが、フイルターには必ずと言つてよい程ピ
ンホールがあり、汚染空気の一部がリークするため、バ
イオロジカルクリーンルームでの使用には限界があつ
た。In addition, the conventional filter method can be used as an industrial clean room because it is only intended to remove fine particles, but the filter has pin holes enough to say that some of the contaminated air leaks. Therefore, there is a limit to the use in the biological clean room.
また、静電的に微流子の捕集を行う方式においては、予
備荷電部に例えば15〜70kVという高電圧を必要とするた
め、装置が大型となり、また安全性、維持管理の面で問
題があつた。In addition, in the method of electrostatically collecting the fine flow particles, a high voltage of, for example, 15 to 70 kV is required in the pre-charging section, so the device becomes large and there is a problem in terms of safety and maintenance. I got it.
これらの問題点を解決するために本発明者は紫外線照射
による空気清浄方法を提案した(特開昭61−178050、特
願昭61−226792、特願昭61−293395、特願昭61−24427
5、特願昭61−293394)。In order to solve these problems, the present inventor has proposed an air cleaning method by ultraviolet irradiation (Japanese Patent Application Laid-Open No. 61-178050, Japanese Patent Application No. 61-226792, Japanese Patent Application No. 61-293395, Japanese Patent Application No. 61-24427).
5, Japanese Patent Application No. Sho 61-293394).
これらの方式を実用化するに際しては、適用分野、用途
に好適な運転条件(好適な紫外線照射条件)で実施する
必要がある。すなわち、これらの方式の実用運転におい
ては、実用性が向上し実用的により有利となる様行う必
要がある。In order to put these systems into practical use, it is necessary to carry them out under operating conditions (suitable UV irradiation conditions) suitable for the application field and application. That is, in the practical operation of these methods, it is necessary to improve the practicability and make it practically more advantageous.
実用性を増すには、微粒子への荷電と微生物類の殺菌
(滅菌)を同時に行うのが好ましい。In order to increase the practicality, it is preferable to simultaneously charge the fine particles and sterilize (sterilize) the microorganisms.
特に、微生物の存在が問題となるバイオテクノロジー分
野では重要である。In particular, it is important in the biotechnology field where the presence of microorganisms poses a problem.
本発明は、光電子放出材に紫外線照射を行ない放出され
た光電子で気体中の粒子を荷電した後該粒子を除去する
空気等の気体の清浄方法及び装置に関し、これらの課題
に対し紫外線として主たる波長が200〜350nmで線量とし
て5〜200mWs/cm2の範囲のものを用いることにより、微
粒子への荷電と微生物類の殺菌を同時に効果的に行うも
のである。The present invention relates to a method and an apparatus for cleaning a gas such as air in which a photoelectron emitting material is irradiated with ultraviolet rays to charge the particles in a gas with the emitted photoelectrons and then the particles are removed. Is used in a range of 5 to 200 mWs / cm 2 at a dose of 200 to 350 nm to effectively charge the fine particles and sterilize the microorganisms at the same time.
本発明は、 1.光電子放出材に紫外線を照射して光電子を放出せし
め、該光電子により気体中に含まれている微粒子を荷電
させた後荷電した微粒子を気体より除去する気体の清浄
方法において、紫外線として主たる波長が200〜360nmの
紫外線を照射することを特徴とする気体の清浄方法。The present invention is: 1. In a method for cleaning a gas, which comprises irradiating a photoelectron emitting material with ultraviolet rays to emit photoelectrons, charging the microparticles contained in a gas by the photoelectrons, and then removing the charged microparticles from the gas, A method for cleaning a gas, which comprises irradiating ultraviolet rays having a main wavelength of 200 to 360 nm as ultraviolet rays.
2.紫外線量が5〜200mWs/cm2、好ましくは5〜40mWs/cm
2の範囲内である特許請求の範囲第1項記載の気体の清
浄方法。2. The amount of ultraviolet rays is 5-200mWs / cm 2 , preferably 5-40mWs / cm
The method for cleaning gas according to claim 1, which is within the range of 2 .
3.気体の吸入口から排出口までの気体の流路上に、光電
子放出材に主たる波長が200〜360nmの紫外線を、5〜20
0mWs/cm2の線量で照射する光電子放出部及び荷電粒子捕
集部を設けてなる気体の清浄装置。3. In the gas flow path from the gas inlet to the gas outlet, ultraviolet rays with a wavelength of 200 to 360 nm, which is the main wavelength of the photoelectron emitting material, are exposed to 5 to 20 nm.
A gas cleaning device provided with a photoelectron emission unit and a charged particle collection unit for irradiation with a dose of 0 mWs / cm 2 .
である。Is.
以下、図面に基いて本発明を説明する。The present invention will be described below with reference to the drawings.
第1図は、バイオロジカルクリーンルームにおけるクリ
ーンベンチ併用方式、即ち、作業領域内の一部だけを高
清浄度にした方式の概略図を示すものである。FIG. 1 is a schematic diagram of a clean bench combined system in a biological clean room, that is, a system in which only a part of the work area is highly clean.
第2図は、紫外線照射による光電子放出部の実施例を示
す概略図である。FIG. 2 is a schematic view showing an embodiment of a photoelectron emitting portion by ultraviolet irradiation.
クリーンルーム1内には、配管2から導入される外気の
粗粒子をブレフイルタ3で濾過した後、クリーンルーム
1の空気取出し口4から取り出された循環空気と共にフ
アン5を介して空気調和装置6にて温度及び湿度を調節
した後、HEPAフイルター7により微粒子を除去した空気
が循環供給されており、清浄度(クラス)10,000程度に
保持されている。In the clean room 1, after the coarse particles of the outside air introduced from the pipe 2 are filtered by the ble filter 3, the temperature of the air in the air conditioner 6 is adjusted through the fan 5 together with the circulating air taken out from the air outlet 4 of the clean room 1. After adjusting the temperature and humidity, the air from which fine particles have been removed by the HEPA filter 7 is circulated and supplied, and the cleanliness (class) is maintained at about 10,000.
一方、クリーンルーム1内のフアン及び電圧供給部材
8、光電子放出材上への紫外線照射部9、フイルター10
を設けたクリーンベンチ11内の作業台13上は、高清浄度
(クラス10)の無菌雰囲気に保持される。On the other hand, the fan and the voltage supply member 8 in the clean room 1, the ultraviolet irradiation unit 9 on the photoelectron emitting material, the filter 10
The workbench 13 in the clean bench 11 provided with is maintained in a sterile atmosphere of high cleanliness (class 10).
即ち、クリーンベンチ11においては、クリーンルーム1
内の清浄度(クラス)10,000程度の空気がフアン8のフ
アンにより吸引され、光電子放出部材上へ紫外線を照射
することにより発生した光電子により空気中の微粒子は
荷電されると共に、紫外線エネルギによりウイルス、バ
クテリヤ、酵母、かび等の微生物が殺菌された後、フイ
ルター10で荷電された微粒子を除去することにより、作
業台13上は高清浄度に保持される。That is, in the clean bench 11, the clean room 1
Air with a cleanliness (class) of about 10,000 inside is sucked by the fan of the fan 8 and the fine particles in the air are charged by the photoelectrons generated by irradiating the photoelectron emitting member with ultraviolet rays, and at the same time, the ultraviolet energy causes a virus, After the microorganisms such as bacteria, yeasts and molds are sterilized, the charged fine particles are removed by the filter 10, so that the workbench 13 is maintained at a high cleanliness.
紫外線照射による光電子放出部は、その概略図が第2図
に示されている如く、主として電極20、光電子放出材2
1、紫外線ランプ22からなり、電極20と光電子放出材21
との間にフアン及び電圧供給部8から電圧を負荷し、又
光電子放出材21に紫外線の照射を行い、電極20と光電子
放出材21の間に空気50を通すことにより、空気50中の微
粒子が効率良く荷電される。As shown in FIG. 2, a schematic view of the photoelectron emitting portion irradiated with ultraviolet rays is mainly shown in FIG.
1, consisting of an ultraviolet lamp 22, an electrode 20 and a photoelectron emitting material 21
A voltage is applied from the fan and the voltage supply unit 8 to the photoelectron emission material 21, ultraviolet rays are applied to the photoelectron emission material 21, and air 50 is passed between the electrode 20 and the photoelectron emission material 21. Are efficiently charged.
電極20と光電子放出材21の距離は、装置の形状にもよる
が、一般的には2〜20cmが好ましく、特に3〜10cmが好
ましい。The distance between the electrode 20 and the photoelectron emitting material 21 depends on the shape of the device, but is generally preferably 2 to 20 cm, and particularly preferably 3 to 10 cm.
電極20の材料と、その構造は通常の荷電装置に使用され
ているものでよい。通常タングステンが用いられてい
る。第2図中、符号23は粗フイルタ、符号24は静電フイ
ルターである。The material of the electrode 20 and its structure may be those used in conventional charging devices. Tungsten is usually used. In FIG. 2, reference numeral 23 is a coarse filter and reference numeral 24 is an electrostatic filter.
次に光電子放出材21は、紫外線照射により光電子を放出
するものであれば何れでも良く、光電的な仕事関数の小
さいもの程好ましい。効果や経済性の面から、Ba,Sr,C
a,Y,Gd,La,Ce,Nd,Th,Pr,Be,Zr,Fe,Ni,Zn,Cu,Ag,Pt,Cd,P
b,Al,C,Mg,Au,In,Bi,Nb,Si,Ti,Ta,Sn,Pのいずれか又は
これらの化合物又は合金が好ましく、これらは単独で又
は二種以上を複合して用いられる。複合材としては、ア
マルガムの如く物理的な複合材も用いうる。Next, the photoelectron emitting material 21 may be any material as long as it emits photoelectrons upon irradiation with ultraviolet rays, and a material having a smaller photoelectric work function is preferable. Ba, Sr, C in terms of effect and economy
a, Y, Gd, La, Ce, Nd, Th, Pr, Be, Zr, Fe, Ni, Zn, Cu, Ag, Pt, Cd, P
b, Al, C, Mg, Au, In, Bi, Nb, Si, Ti, Ta, Sn, P or any of these compounds or alloys are preferable, and these are used alone or in combination of two or more kinds. To be As the composite material, a physical composite material such as amalgam can also be used.
例えば、化合物としては酸化物、ほう化物、炭化物があ
り、酸化物にはBaO,SrO,CaO,Y2O6,Gd2O3,Nd2O3,ThO2,Fe
2O3,ZnO,CuO,Ag2O,PtO,PbO,Al2O3,MgO,In2O3,BiO,NbO,B
eOなどがあり、またほう化物にはYB6,GdB6,NaB6,CeB6,P
rB6,ZrB2などがあり、さらに炭化物としてはZrC,TaC,Ti
C,NbCなどがある。For example, the oxide as a compound, boride, there are carbides, BaO in the oxide, SrO, CaO, Y 2 O 6, Gd 2 O 3, Nd 2 O 3, ThO 2, Fe
2 O 3 , ZnO, CuO, Ag 2 O, PtO, PbO, Al 2 O 3 , MgO, In 2 O 3 , BiO, NbO, B
eO, etc., and borides include YB 6 ,, GdB 6 ,, NaB 6 ,, CeB 6 ,, P
rB 6 , ZrB 2, etc., and further carbides such as ZrC, TaC, Ti
C, NbC, etc.
また、合金としては#銅、青銅、リン青銅、AgとMgとの
合金(Mgが2〜20wt%)、CuとBeとの合金(Beが1〜10
wt%)及びBaとAlとの合金を用いることができ、上記Ag
とMgとの合金、CuとBeとの合金及びBaとAlとの合金が好
ましい。酸化物としては金属を空気中で加熱したり、或
いは薬品で酸化することにより、金属板の表面のみを酸
化物としたものを用いてもよい。As the alloy, # copper, bronze, phosphor bronze, an alloy of Ag and Mg (Mg is 2 to 20 wt%), an alloy of Cu and Be (Be is 1 to 10).
wt%) and an alloy of Ba and Al can be used.
Alloys of Mg with Mg, alloys of Cu with Be and alloys of Ba with Al are preferred. As the oxide, a metal plate whose surface is made oxide by heating the metal in air or oxidizing it with a chemical may be used.
さらに他の方法としては使用前に加熱し、表面に酸化物
層を形成して長期にわたつて安定な酸化層を得ることも
できる。この例としてはMgとAgとの合金を水蒸気中で30
0〜400℃の温度の条件下でその表面に酸化物薄膜を形成
させることができ、この酸化物薄膜は長期間にわたつて
安定なものである。As another method, it is possible to heat before use to form an oxide layer on the surface and obtain a stable oxide layer over a long period of time. An example of this is an alloy of Mg and Ag in steam
An oxide thin film can be formed on the surface of the oxide film at a temperature of 0 to 400 ° C, and the oxide thin film is stable over a long period of time.
これらの材料の使用形状は、板状、プリーツ状、網状等
何れの形状でもよいが、紫外線の照射面積及び空気との
接触面積の大きな形状のものが好ましく、このような観
点からは網状のものが好ましい。The shape of these materials to be used may be any shape such as a plate shape, a pleat shape, and a mesh shape, but a shape having a large irradiation area of ultraviolet rays and a contact area with air is preferable, and from such a viewpoint, a mesh shape. Is preferred.
光電子放出材の使用の形状及びその表面の形状は装置の
形状、構造あるいは希望する効率等により異なり、装置
の規模、形状、効果、光電子放出材の種類、経済性等に
より適宜決めることが出来る。尚、光電子放出材の表面
の形状は本発明者が別に提案している。The shape of the photoelectron emitting material used and the shape of the surface thereof differ depending on the shape, structure or desired efficiency of the device, and can be appropriately determined depending on the scale, shape, effect of the device, type of photoelectron emitting material, economical efficiency and the like. The present inventor has separately proposed the shape of the surface of the photoelectron emitting material.
印加する電圧は、0.1〜10kV、好ましくは0.1〜5kV、よ
り好ましくは0.1〜3kVであるが、該電圧は装置の形状、
使用する電極或いは光電子放出材の材質、構造等により
異なる。The applied voltage is 0.1 to 10 kV, preferably 0.1 to 5 kV, and more preferably 0.1 to 3 kV.
It depends on the material, structure, etc. of the electrode or photoelectron emitting material used.
紫外線は、その照射により光電子放出材が光電子を放出
し、同時にウイルス、バクテリヤ、酵母、カビ等の微生
物類の殺菌(滅菌)作用を有するものであれば良いが本
発明者は、この様な紫外線を種々検討したところ、次の
結果を見い出した。The ultraviolet ray may be any one as long as the photoelectron emitting material emits photoelectrons upon irradiation thereof, and at the same time has a sterilizing (sterilizing) action on microorganisms such as viruses, bacteria, yeasts, molds, etc. As a result of various studies, the following results were found.
すなわち、紫外線の主たる波長として200〜360nm、好ま
しくは240〜280nmを用いると、微粒子への荷電作用と微
生物類の殺菌作用が同時に効果的に起きるので実用上好
都合である。That is, when the main wavelength of ultraviolet rays is 200 to 360 nm, preferably 240 to 280 nm, it is practically convenient because the charging action to the fine particles and the bactericidal action of the microorganisms occur simultaneously at the same time.
紫外線の(平均照射)線量は、5〜200mWs/cm2、好まし
くは5〜40mWs/cm2で実用上効果的である。The ultraviolet (average irradiation) dose is 5 to 200 mWs / cm 2 , preferably 5 to 40 mWs / cm 2, which is practically effective.
紫外線量は、多い方が微粒子の荷電と微生物類の殺菌に
効果的であるが経済的に問題がある(照射コストが高く
なる)。従つて、紫外線量は適用分野、装置形状、規
模、効果、経済性等で適宜決める必要がある。例えば、
バイオテクノロジー分野で使用されるクリーンベンチの
如く、かなりの高清浄を要する装置の場合は、多めの線
量を必要とするが、病院等の待合室用の空気清浄器の場
合は10〜30mWs/cm2(比較的弱い線量)で良い。A larger amount of ultraviolet rays is more effective for charging fine particles and sterilizing microorganisms, but is economically problematic (increased irradiation cost). Therefore, it is necessary to appropriately determine the amount of ultraviolet rays depending on the application field, device shape, scale, effect, economical efficiency and the like. For example,
A large amount of dose is required for a device that requires considerably high cleanliness, such as a clean bench used in the biotechnology field, but 10-30 mWs / cm 2 for an air purifier for a waiting room such as a hospital. (Relatively weak dose) is acceptable.
紫外線源は、上述の波長、線量を有するものであれば何
れでも良い。通常、水銀ランプ、特に殺菌ランプ、低圧
ランプ、中圧ランプが効果、簡便性から好ましい。The ultraviolet ray source may be any one as long as it has the above wavelength and dose. Usually, a mercury lamp, particularly a sterilization lamp, a low-pressure lamp, and a medium-pressure lamp are preferable because of their effect and simplicity.
第2図に示す具体例においては紫外線量は40mWs/cm2の
殺菌ランプを用いたものである。In the specific example shown in FIG. 2, a germicidal lamp having an ultraviolet ray amount of 40 mWs / cm 2 is used.
死滅した生物を含む荷電された微粒子はフイルター10,2
4で捕集される。Charged particulates containing dead organisms are filtered 10,2
Captured at 4.
荷電された粒子の捕集器は、何れでも良い。The charged particle collector may be any collector.
通常の荷電装置における集じん板(集じん電極)や静電
フイルター方式が一般的であるが、スチールウール電極
としたような捕集部自体が電極を構成する構造のものも
有効である。A dust collecting plate (dust collecting electrode) or an electrostatic filter system in a normal charging device is generally used, but a structure in which the collecting portion itself constitutes an electrode such as a steel wool electrode is also effective.
又、本発明者がすでに提案したイオン交換フイルターを
用いて捕集する方法も有効である。Further, the method of collecting by using the ion exchange filter, which the present inventor has already proposed, is also effective.
捕集は、これらの捕集方法を単独で、又はこれらの方法
を2種類以上組合せて適宜用いることが出来る。For collection, these collection methods can be used alone, or two or more kinds of these methods can be combined and appropriately used.
これらの捕集方法のうち好ましい方式としてはフイルタ
ー方式例えばイオン交換フイルター(アニオン交換フイ
ルター、カチオン交換フイルター)方式、静電フイルタ
ーを用いる方式が高効率で、かつ確実に荷電微粒子の捕
集を行なうことができるので好都合である。Among these collection methods, a preferable method is a filter method, for example, an ion exchange filter (anion exchange filter, cation exchange filter) method or a method using an electrostatic filter, which is highly efficient and surely collects charged fine particles. This is convenient because it can be done.
フイルター方式は取り扱いが容易であることや、性能、
経済性の点で有効であるが、一定期間使用すると目詰ま
りを生ずるので、必要に応じカートリツジ構造とし、圧
力損失の検出により交換するようにすることにより長期
間にわたつて安定した運転が可能となる。The filter system is easy to handle,
Although it is effective from an economical point of view, it will be clogged when used for a certain period of time.Therefore, if necessary, adopt a cartridge structure and replace it when pressure loss is detected to enable stable operation over a long period of time. Become.
尚、本実施例における光電子放出材21及び紫外線ランプ
22の位置は、空気流に対して平行の位置であるが、空気
流に対して直角の位置あるいは、平行と直角の間の任意
の位置においてもよい、又紫外線ランプをクリーンベン
チの気流の外側に設置しても良い。Incidentally, the photoelectron emitting material 21 and the ultraviolet lamp in this embodiment
The position of 22 is parallel to the air flow, but it may be at a position perpendicular to the air flow or at any position between the parallel and right angles. It may be installed in.
又、光電子放出材21からの光電子放出は、本発明者がす
でに提案した様に、反射面を利用して行なうことも出来
る。Further, the photoelectron emission from the photoelectron emission material 21 can also be performed by utilizing the reflecting surface, as already proposed by the present inventor.
又、本実施例では、電場において、光電子放出材に紫外
線照射しているが、電場がない場合でも実施し得る。こ
れらは、装置の形状、規模、種類、形状、適用分野、電
極の種類、形状、効果、経済性等で適宜決めることが出
来る。Further, in this embodiment, the photoelectron emitting material is irradiated with ultraviolet rays in the electric field, but it can be carried out even when there is no electric field. These can be appropriately determined depending on the shape, scale, kind, shape, application field, kind, shape, effect, economical efficiency, etc. of the device.
第3図は、病院用空気清浄器の例を示すものである。FIG. 3 shows an example of a hospital air purifier.
符号5001は入口空気、230は粗フイルタ、100はフアン、
200は電極、210は格子状光電子放出材、220は殺菌ラン
プ(30mWs/cm2)、240は静電フイルタ、5002は出口の清
浄化された空気を示す。Reference numeral 500 1 is inlet air, 230 is a coarse filter, 100 is a fan,
Reference numeral 200 is an electrode, 210 is a lattice-shaped photoelectron emitting material, 220 is a germicidal lamp (30 mWs / cm 2 ), 240 is an electrostatic filter, and 500 2 is the cleaned air at the outlet.
夫々の作用は、上述の如くである。The operation of each is as described above.
実施例 第3図に示した形状の空気清浄器を用いて試験を行つ
た。ただし、紫外線ランプ;水銀ランプ,30W(主な波
長254nm)又は高圧ランプ,30W(主な波長300〜600n
m) 電子放出材;黄銅に金メッキしたもの,10cm×20cm 電場電圧;1kV,荷電微粒子捕集フイルタ;静電フイルタ 発生微粒子は煙草の煙(平均粒径0.3〜0.4μm)を用
い、適宜希釈し20/minで送気して、入口(粗フイルタ
後方)及び出口(静電フイルタ後方)で粒子測定器を用
い濃度を測定した。Example A test was conducted using an air purifier having the shape shown in FIG. However, ultraviolet lamp; mercury lamp, 30W (main wavelength 254nm) or high pressure lamp, 30W (main wavelength 300 ~ 600n)
m) Electron emission material: brass plated with gold, 10cm x 20cm electric field voltage: 1kV, charged particle collection filter; electrostatic filter The generated particles are appropriately diluted with tobacco smoke (average particle size 0.3 to 0.4μm). Air was fed at 20 / min, and the concentration was measured at the inlet (behind the coarse filter) and the outlet (behind the electrostatic filter) using a particle measuring instrument.
又、発生微生物は、レイ菌又は枯草菌をネブライザで発
生させ微粒子と同様に流路に供給して入口及び出口(静
電フイルタ前方)で試料空気の採取を微生物測定用アン
ダセンサンプラで行い、培養して微生物濃度を測定し
た。尚、紫外線ランプの紫外線量は2,8,40mWs/cm2であ
る。In addition, as for the microorganisms generated, Leybacterium or Bacillus subtilis is generated by a nebulizer and is supplied to the flow path in the same manner as fine particles, and sample air is collected at the inlet and outlet (in front of the electrostatic filter) with an under-sensor sampler for microorganisms After culturing, the microbial concentration was measured. The amount of ultraviolet rays of the ultraviolet lamp is 2,8,40 mWs / cm 2 .
結果を第1表に示す。The results are shown in Table 1.
〔発明の効果〕 紫外線波長が200〜360nmの紫外線を用いることによ
り、 i.微粒子への荷電と微生物類の殺菌が同時に効果的に起
こる。 [Advantages of the Invention] By using ultraviolet rays having an ultraviolet wavelength of 200 to 360 nm, i. Charging of fine particles and sterilization of microorganisms simultaneously occur effectively.
紫外線波長200〜360nmの紫外線を5〜200mWs/cm2の
線量で用いることにより、 i.実用上効果的に、微粒子の荷電と微生物類の殺菌が同
時に起こる。By using ultraviolet rays having an ultraviolet wavelength of 200 to 360 nm at a dose of 5 to 200 mWs / cm 2 , i. Practically effectively, the charging of fine particles and the sterilization of microorganisms occur simultaneously.
ii.殺菌クリーン気体が簡便に得られ、実用性が向上す
る。ii. A sterilizing clean gas can be easily obtained and its practicality is improved.
iii.バイオテクノロジー分野の如く微生物の存在が特に
影響を及ぼす分野に対して実用上有効な気体清浄装置を
提供出来る。iii. It is possible to provide a gas cleaning device that is practically effective in fields such as the biotechnology field where the presence of microorganisms particularly affects.
第1図及び第2図はバイオロジカルクリーンルームのク
リーンベンチ併用方式の本発明の気体の清浄方法及びそ
の装置を説明するための図面、第3図は本発明を適用し
た病院用空気清浄装置の1例を示す図面である。 1……クリーンルーム、6……空気調和装置、8……フ
アン及び電圧供給部、9……紫外線照射部、10……フイ
ルター、11……クリーンベンチ、13……作業台、20,200
……電極、100……フアン、21,210……光電子放出材、2
2,220……紫外線ランプ、24,240……静電フイルターFIG. 1 and FIG. 2 are drawings for explaining the gas cleaning method and apparatus of the present invention, which is used in combination with a clean bench in a biological clean room, and FIG. 3 is a hospital air cleaning apparatus to which the present invention is applied. It is drawing which shows an example. 1 ... Clean room, 6 ... Air conditioner, 8 ... Fan and voltage supply unit, 9 ... UV irradiation unit, 10 ... Filter, 11 ... Clean bench, 13 ... Workbench, 20,200
...... Electrode, 100 …… Juan, 21,210 …… Photoemissive material, 2
2,220 …… UV lamp, 24,240 …… Electrostatic filter
Claims (3)
放出せしめ、該光電子により気体中に含まれている微粒
子を荷電させた後荷電した微粒子を気体より除去する気
体の清浄方法において、紫外線として主たる波長が200
〜360nmの紫外線を照射することを特徴とする気体の清
浄方法。1. A method for cleaning a gas, wherein a photoelectron emitting material is irradiated with ultraviolet rays to emit photoelectrons, the fine particles contained in a gas are charged by the photoelectrons, and then the charged fine particles are removed from the gas. As the main wavelength is 200
A method for cleaning a gas, which comprises irradiating ultraviolet rays of ~ 360 nm.
〜40mWs/cm2の範囲内である特許請求の範囲第1項記載
の気体の清浄方法。2. The amount of ultraviolet rays is 5 to 200 mWs / cm 2 , preferably 5
The method for cleaning gas according to claim 1, wherein the gas is in the range of -40 mWs / cm 2 .
上に、光電子放出材に主たる波長が200〜360nmの紫外線
を、5〜200mWs/cm2の線量で照射する光電子放出部及び
荷電粒子捕集部を設けてなる気体の清浄装置。3. A photoelectron emission unit for irradiating a photoelectron emission material with ultraviolet rays having a main wavelength of 200 to 360 nm at a dose of 5 to 200 mWs / cm 2 on a flow path of gas from a gas intake port to a discharge port, and charging. A gas cleaning device provided with a particle trap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63156681A JPH0674909B2 (en) | 1988-06-27 | 1988-06-27 | Gas cleaning method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63156681A JPH0674909B2 (en) | 1988-06-27 | 1988-06-27 | Gas cleaning method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH028639A JPH028639A (en) | 1990-01-12 |
| JPH0674909B2 true JPH0674909B2 (en) | 1994-09-21 |
Family
ID=15632999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63156681A Expired - Lifetime JPH0674909B2 (en) | 1988-06-27 | 1988-06-27 | Gas cleaning method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0674909B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5060805A (en) * | 1989-06-20 | 1991-10-29 | Ebara Research Co., Ltd. | Photoelectron emitting member |
| US5154733A (en) * | 1990-03-06 | 1992-10-13 | Ebara Research Co., Ltd. | Photoelectron emitting member and method of electrically charging fine particles with photoelectrons |
-
1988
- 1988-06-27 JP JP63156681A patent/JPH0674909B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH028639A (en) | 1990-01-12 |
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