JPH0674983B2 - Surface resolver - Google Patents
Surface resolverInfo
- Publication number
- JPH0674983B2 JPH0674983B2 JP11803086A JP11803086A JPH0674983B2 JP H0674983 B2 JPH0674983 B2 JP H0674983B2 JP 11803086 A JP11803086 A JP 11803086A JP 11803086 A JP11803086 A JP 11803086A JP H0674983 B2 JPH0674983 B2 JP H0674983B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- mover
- stator
- detection
- resolver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、リニアモータ等に用いる格子状に歯切りした
強磁性体の固定子上を移動する可動子のX,Y平面におけ
る位置を検出するサーフェイスレゾルバに関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention detects the position in the X and Y planes of a mover that moves on a stator of a ferromagnetic material that is used in a linear motor or the like and is cut into a lattice shape. About the surface resolver.
（従来の技術） 従来、Ｘ−Ｙテーブルの位置を検出し移動子の位置を制
御するものとして、平行する左右一対のＸ軸ガイドの各
々にＸ軸駆動用のリニアモータを胯座させ、Ｘ軸ガイド
に併設したＸ軸位置検出用のポテンショメータにより移
動子のＸ軸位置を検出し、各々のＸ軸駆動用のリニアモ
ータにＸ軸ガイドに直交させたビーム状のＹ軸ガイドを
固定し、Ｙ軸ガイド上にＹ軸駆動用のリニアモータを胯
座させ、Ｙ軸ガイドに併設したポテンショメータにより
移動子のＹ軸位置を検出するものがある（例えば、特開
昭58−186364号公報）。(Prior Art) Conventionally, as a device for detecting the position of an XY table and controlling the position of a mover, a pair of left and right parallel X-axis guides are each provided with a linear motor for X-axis drive. The X-axis position of the mover is detected by a potentiometer for detecting the X-axis position provided alongside the axis guide, and a beam-shaped Y-axis guide orthogonal to the X-axis guide is fixed to each X-axis driving linear motor, There is one in which a linear motor for driving the Y-axis is seated on the Y-axis guide, and the Y-axis position of the mover is detected by a potentiometer provided in parallel with the Y-axis guide (for example, JP-A-58-186364).
（発明が解決しようとする問題点） ところが、ポテンシヨメータは耐久性に問題がある。ま
た、固定子の歯ピッチとポテンショメータの分解能の整
合性、ポテンショメータと歯の設置位置（平行度、真直
度と平面度）の調整が面倒であり、ポテンショメータを
１軸タイプのレゾルバに置き換えても同じ問題が生じ
る。(Problems to be Solved by the Invention) However, the potentiometer has a problem in durability. In addition, it is troublesome to adjust the tooth pitch of the stator and the resolution of the potentiometer, and to adjust the installation positions (parallelism, straightness, and flatness) of the potentiometer and the teeth, and it is the same even if the potentiometer is replaced with a 1-axis type resolver. The problem arises.
そこで、本発明は、固定子の歯ピッチと分解能の整合性
をとり、取付け位置の調整なしで耐久性の高いサーフェ
イスレゾルバを提供することを目的とする。Therefore, it is an object of the present invention to provide a surface resolver which has a matching tooth pitch of a stator and a resolution and has a high durability without adjusting a mounting position.
（問題点を解決するための手段） 所定ピッチλで千鳥格子状の凸起21を設けた強磁性体の
固定子２の表面に、空隙を介し対向させた強磁性体の可
動子コア11と、この可動子コア11の外周に巻回した集中
巻の励磁コイル12と、お互いに位相差をλ/4をもたせ
て、可動子コア11の空隙対向平面に貼付した１辺をλ/2
とする正方形の４相の検出コイルW11,W12,W21,W22でサ
ーフェイスレソルバを構成する。(Means for Solving the Problems) A mover core 11 made of a ferromagnetic material, which is opposed to the surface of a stator 2 made of a ferromagnetic material provided with staggered lattice-shaped protrusions 21 at a predetermined pitch λ with a gap. And the concentrated winding exciting coil 12 wound around the outer periphery of the mover core 11 and a phase difference of λ / 4 with each other, and one side of the mover core 11 pasted on the air gap facing plane is λ / 2.
The surface resolver is composed of square four-phase detection coils W11, W12, W21, W22.
（作用） 励磁コイルを交流励磁すると、その磁界により固定子２
の表面に設けた凸起21に同極性の磁極が誘起される。凸
起21に対向する検出コイルの各々には、電気角でπ/2づ
つずれた誘導電圧が生じる。(Operation) When the exciting coil is excited by an alternating current, the stator 2 is driven by the magnetic field.
Magnetic poles of the same polarity are induced in the protrusions 21 provided on the surface of the. In each of the detection coils facing the protrusion 21, an induced voltage shifted by π / 2 in electrical angle is generated.
（実施例） 第１図は、本発明の実施例を示す斜視図、第２図は検出
コイルのパターンを示す平面図である。(Embodiment) FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a plan view showing a pattern of a detection coil.
所定ピッチλで千鳥格子状に凸起21と凹部22を設けた強
磁性体の固定子２の表面に、一定の空隙を介し可動子１
を対向・支持させてある。The mover 1 is provided on the surface of a ferromagnetic stator 2 having protrusions 21 and recesses 22 arranged in a zigzag pattern at a predetermined pitch λ with a certain gap.
Are opposed and supported.
可動子１は、可動子コア11、可動子コア11の側面に巻回
した集中巻の励磁コイル12と空隙側に貼付した４相の検
出コイルW11,W12,W21,W22よりなる。The mover 1 is composed of a mover core 11, a concentrated winding excitation coil 12 wound around the side surface of the mover core 11, and four-phase detection coils W11, W12, W21, W22 attached to the gap side.
なお、可動子コア11はブロック状であっても積層コアで
もよい。The mover core 11 may have a block shape or a laminated core.
検出コイルW11は、凸起21のピッチλ/2を一辺とする正
方形のパターン、すなはち、凸起21と検出コイルは対象
形としてある。The detection coil W11 has a square pattern whose one side is the pitch λ / 2 of the protrusions 21, that is, the protrusion 21 and the detection coil are symmetrical.
各検出コイルW11,W12,W21,W22の配置は各々の位相差を
λ/4づつずらしてある。The arrangement of the detection coils W11, W12, W21, W22 is such that the respective phase differences are shifted by λ / 4.
検出コイルのパターンは、平面度を出しやすいプリント
コイルが望ましいが、銅線でもよい。The pattern of the detection coil is preferably a printed coil that easily provides flatness, but may be a copper wire.
例示コイル12を交流励磁すると、その作る磁界により凸
起21に同極性の磁極が誘起される。When the exemplified coil 12 is excited by alternating current, a magnetic field created by the excited coil 12 induces magnetic poles of the same polarity in the protrusion 21.
このとき、検出コイルW11,W12,W21,W22には、お互いが
λ/4（電気角でπ/2）の位相差をもつので、下記のよう
な誘導電圧が生じる。At this time, since the detection coils W11, W12, W21, W22 have a phase difference of λ / 4 (π / 2 in electrical angle) with each other, the following induced voltage is generated.
説明を簡単にするため、検出コイルW11が凸起21に重な
った場合を考える。To simplify the explanation, consider a case where the detection coil W11 overlaps the protrusion 21.
W11の誘導電圧e11は、 e11＝Ｅ＊COSθＸ＊COSθＹ W12の誘導電圧e12は、 e12＝Ｅ＊COSθＸ＊SINθＹ W21の誘導電圧e21は、 e21＝Ｅ＊SINθＸ＊COSθＹ W22の誘導電圧e22は、 e22＝Ｅ＊SINθＸ＊SINθＹ となる。The induced voltage e11 of W11 is e11 = E * COSθ X * COSθ Y W12 The induced voltage e12 is e12 = E * COSθ X * SINθ Y W21 The induced voltage e21 is e21 = E * SINθ X * COSθ Y W22 The induced voltage e22 is e22 = E * SINθ X * SINθ Y.
ここで、 Ｅは誘導電圧の基準波高値、 θＸ＝π/2＊X/λ θＹ＝π/2＊Y/λ ただし、ＸはＸ方向の移動距離、ＹはＹ方向の移動距
離、λは固定子の表面に設けた凸起のピッチである。Here, E is the reference peak value of the induced voltage, θ X = π / 2 * X / λ θ Y = π / 2 * Y / λ where X is the moving distance in the X direction, Y is the moving distance in the Y direction, λ is the pitch of the protrusions provided on the surface of the stator.
第３図は、本発明の第２の実施例を示す検出コイルのパ
ターンである。FIG. 3 is a pattern of the detection coil showing the second embodiment of the present invention.
実施例の正方形の検出コイルW11,W12,W21,W22を、２個
対角位置に配置し各々を接続し、１個のコイルにしてあ
る。この各々のコイルW11a,W12a,W21a,W22aをお互いが
λ/4の位相差をもたせて配置する。Two square detection coils W11, W12, W21, W22 of the embodiment are arranged diagonally and connected to each other to form one coil. The coils W11a, W12a, W21a, W22a are arranged with a phase difference of λ / 4 with each other.
このように構成することにより、誘導電圧が高くなり検
出精度が向上する。With this configuration, the induced voltage is increased and the detection accuracy is improved.
（発明の効果） 1.固定子の凸起と検出コイルの形状が対象であるので、
凸起のピッチと検出コイルの分解能が整合する。(Effect of the invention) 1. Since the protrusion of the stator and the shape of the detection coil are the targets,
The pitch of the protrusions and the resolution of the detection coil match.
2.検出コイルのパターンをプリントコイル等精度の出し
やすいものにしてあるので調整は最小限ですむ。2. The pattern of the detection coil is a printed coil that is easy to obtain accuracy, so the adjustment is minimal.
第１図は、本発明の実施例を示す斜視図、 第２図は、検出コイルのパターンを示す平面図、 第３図は、本発明の第２の実施例を示す検出コイイルの
パターンを示す平面図、 符号の説明 １は可動子、11は可動子コア、12は励磁コイル、２は固
定子、21は凸起、22は凹部、W11,W12,W21,W22,W11a,W12
a,W21a,W22aは検出コイル。FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a plan view showing a pattern of a detection coil, and FIG. 3 is a pattern of a detection coil showing a second embodiment of the present invention. Plane view, reference numeral 1 is a mover, 11 is a mover core, 12 is an exciting coil, 2 is a stator, 21 is a protrusion, 22 is a recess, W11, W12, W21, W22, W11a, W12
a, W21a, W22a are detection coils.
Claims (1)
強磁性体の固定子の表面と、空隙を介し対向させた、強
磁性体の可動子コアと、この可動子コアの外周に巻回し
た励磁コイルと、お互いに位相差をλ/4をもたせて、可
動子コアの空隙対向平面に貼付した１辺をλ/2とする正
方形の４相の検出コイルよりなることを特徴とするサー
フェイスレソルバ。1. A mover core made of a ferromagnetic material, which is opposed to a surface of a stator made of a ferromagnetic material having protrusions at a predetermined pitch λ in a zigzag pattern, with a gap therebetween, and It consists of an excitation coil wound around the outer circumference and a square four-phase detection coil that has a phase difference of λ / 4 and is attached to the air gap facing plane of the mover core with one side being λ / 2. A characteristic surface resolver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11803086A JPH0674983B2 (en) | 1986-05-22 | 1986-05-22 | Surface resolver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11803086A JPH0674983B2 (en) | 1986-05-22 | 1986-05-22 | Surface resolver |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62274215A JPS62274215A (en) | 1987-11-28 |
| JPH0674983B2 true JPH0674983B2 (en) | 1994-09-21 |
Family
ID=14726319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11803086A Expired - Lifetime JPH0674983B2 (en) | 1986-05-22 | 1986-05-22 | Surface resolver |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0674983B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4476717B2 (en) | 2004-06-30 | 2010-06-09 | オークマ株式会社 | Electromagnetic induction type position sensor |
| JP4840727B2 (en) * | 2006-08-04 | 2011-12-21 | 横河電機株式会社 | Planar positioning device |
| JP2012159495A (en) * | 2011-01-10 | 2012-08-23 | Aisan Ind Co Ltd | Position sensor |
-
1986
- 1986-05-22 JP JP11803086A patent/JPH0674983B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62274215A (en) | 1987-11-28 |
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