JPH0675284B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0675284B2 JPH0675284B2 JP12534485A JP12534485A JPH0675284B2 JP H0675284 B2 JPH0675284 B2 JP H0675284B2 JP 12534485 A JP12534485 A JP 12534485A JP 12534485 A JP12534485 A JP 12534485A JP H0675284 B2 JPH0675284 B2 JP H0675284B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- film
- layer
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 25
- 239000010409 thin film Substances 0.000 claims description 12
- 230000005294 ferromagnetic effect Effects 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 229920006254 polymer film Polymers 0.000 claims description 10
- 239000000314 lubricant Substances 0.000 claims description 8
- 239000010419 fine particle Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 description 10
- 235000019592 roughness Nutrition 0.000 description 7
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910018553 Ni—O Inorganic materials 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000008117 stearic acid Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910020634 Co Mg Inorganic materials 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910020647 Co-O Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020704 Co—O Inorganic materials 0.000 description 1
- 229910020517 Co—Ti Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は磁気記録媒体は、特に高分子フイルム上に強磁
性金属からなる磁気記録層を配したいわゆる金属薄膜型
磁気記録媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium, and more particularly to a so-called metal thin film type magnetic recording medium in which a magnetic recording layer made of a ferromagnetic metal is arranged on a polymer film.
従来の技術 従来、磁気記録層として広く実用に供されているもの
は、γ−Fe2O3,Coをドープしたγ−Fe2O3,CrO2,或い
はFe等の強磁性合金微小粉末磁性材料を塩化ビニル−酢
酸ビニル共重合体,スチレンブタンジエン共重合体,エ
ポキシ樹脂等の有機バインダ中に分散させて、高分子フ
イルム等の基板上に塗布,乾燥させた塗布型磁性層であ
る。近年高密度記録への要求の高まりと共に、スパッタ
リング,イオンプレーティング,湿式めっき法,電子ビ
ーム蒸着法等で形成した強磁性金属薄膜を磁気記録層と
する金属薄膜型が注目され実用化への努力が種々行われ
ている。しかしながら、これらは従来の塗布型のものに
比較して走行中にヘッドとの接触により、磁気記録層が
剥離したり、傷ついたりする欠点を有していた。Description of the Related Art Conventionally, what is subjected to widely used as a magnetic recording layer, γ-Fe 2 O 3, Co -doped γ-Fe 2 O 3, CrO 2, or ferromagnetic alloy fine powder magnetic such as Fe This is a coating type magnetic layer in which a material is dispersed in an organic binder such as a vinyl chloride-vinyl acetate copolymer, a styrene butanediene copolymer, an epoxy resin or the like, coated on a substrate such as a polymer film and dried. With the increasing demand for high-density recording in recent years, a metal thin film type using a ferromagnetic metal thin film formed by sputtering, ion plating, wet plating, electron beam evaporation, etc. as a magnetic recording layer has attracted attention, and efforts have been made toward its practical application. Has been done in various ways. However, these have the drawback that the magnetic recording layer is peeled off or damaged due to contact with the head during running, as compared with the conventional coating type.
第2図は従来の磁気記録媒体の拡大断面図である。FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium.
第2図に於て、1はポリエチレンテレフタレート等の高
分子フイルム、2は例えばCo-Ni-Oから成る斜め蒸着
膜、3は保護膜である。In FIG. 2, 1 is a polymer film such as polyethylene terephthalate, 2 is an obliquely evaporated film made of, for example, Co—Ni—O, and 3 is a protective film.
3の保護膜により上記した磁気記録層に起る破壊現象を
努力抑制することが考えられ、多くの提案が成されてい
る。It is considered that the protective film of No. 3 makes efforts to suppress the destruction phenomenon occurring in the magnetic recording layer, and many proposals have been made.
例えば特開昭52-153707号,特開昭53-88704号,特開昭5
9-171026号の公報〕 発明が解決しようとする問題点 しかしながら第2図のような構成では、使用される磁気
ヘッドがフェライトから合金ヘッドに移行し、使用され
る環境条件が広範囲になると、静電ノイズがランダムに
発生し、信号対雑音比が瞬時的に低下することがみら
れ、高密度磁気記録での信頼性がなくなるという問題点
を有していた。For example, JP-A-52-153707, JP-A-53-88704, JP-A-5
9-171026] Problems to be Solved by the Invention However, in the configuration as shown in FIG. 2, when the magnetic head used shifts from ferrite to alloy head and the environmental conditions used become wide, Electric noise is randomly generated, the signal-to-noise ratio is momentarily lowered, and there is a problem that reliability in high density magnetic recording is lost.
本発明は上記問題点に鑑み、信頼性の向上をはかった強
磁性金属薄膜を有する磁気記録媒体を提供するものであ
る。In view of the above problems, the present invention provides a magnetic recording medium having a ferromagnetic metal thin film with improved reliability.
問題点を解決するための手段 上記問題点を解決するため本発明の磁気記録媒体は、微
粒子で形成された粗さの異なる表面を有する高分子フイ
ルムの粗さの小さい方の面に強磁性金属薄膜を配し、も
う一方の面にSiOx(x=1.2〜1.7)と滑剤層の2層を配
した構成を具えたものである。Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention has a ferromagnetic film on the surface of the polymer film having a surface with different roughness formed of fine particles and having a smaller roughness. It arranged thin film, in which comprises a structure arranged two layers of SiO x (x = 1.2~1.7) and lubricant layer on the other surface.
作用 本発明は上記した構成により、磁気ヘッドと摺接しない
側の面で発生する電荷が、SiOxの半導層により適当に分
散安定に放電するので、異常な放電による静電ノイズを
誘起しないので、信号対雑音比(S/Nと記す)がパルス
的に低下することになるし、滑剤の作用により、摩擦帯
電量も低くできるので、相乗効果で優れたS/Nを安定に
得、高密度磁気記録での信号誤り率を極めて小さくでき
信頼性が向上するものである。Effect According to the present invention, the electric charge generated on the surface which does not come into sliding contact with the magnetic head is appropriately and stably discharged by the SiO x semiconducting layer, so that electrostatic noise due to abnormal discharge is not induced. Therefore, the signal-to-noise ratio (denoted as S / N) will be reduced in a pulsed manner, and the frictional charge can be reduced by the action of the lubricant, so a superior S / N can be stably obtained with a synergistic effect. The signal error rate in high density magnetic recording can be made extremely small and the reliability is improved.
実施例 以下、本発明の実施例の磁気記録媒体について図面を参
照しながら説明する。EXAMPLES Hereinafter, magnetic recording media according to examples of the present invention will be described with reference to the drawings.
第1図は本発明の実施例の磁気記録媒体の拡大断面図で
ある。FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention.
第1図に於て4は微粒子で形成された表面粗さの異なる
2つの面をもつ高分子フィルムで、厚み12μmで、ポリ
エチレンテレフタレート中に重合残渣からなる内在粒子
或いは、外部より加えたシリカなどの不活性粒子を含む
もので、共押し出し法にて得たもので、表面粗さは触針
式粗さ計にて測定した結果、平均粗さ(Ra)で0.003μ
mと0.029μmである。0.003μmの面を仮にA面と呼
び、0.029μmの面をB面と呼ぶ。In FIG. 1, 4 is a polymer film formed of fine particles and having two surfaces with different surface roughnesses, which has a thickness of 12 μm, and is composed of intrinsic particles consisting of a polymerization residue in polyethylene terephthalate or silica added from the outside. Inactive particles are obtained by the co-extrusion method, and the surface roughness is 0.003μ as the average roughness (Ra) measured by a stylus type roughness meter.
m and 0.029 μm. The 0.003 μm surface is tentatively called the A surface, and the 0.029 μm surface is called the B surface.
A面を0.04Torrのアルゴン雰囲気で、13.56MHzの高周波
電界を印加することで誘起した高周波グロー放電処理し
てCo-Cr(Cr:20.3wt%)を斜め蒸着して、厚み0.16μ
m、保磁力1460(Oe)角形比0.89の強磁性金属薄膜5を
配した。High frequency glow discharge induced by applying high frequency electric field of 13.56MHz to A surface in argon atmosphere of 0.04 Torr, Co-Cr (Cr: 20.3wt%) was obliquely deposited, and thickness was 0.16μ.
m, a coercive force of 1460 (Oe), and a ferromagnetic metal thin film 5 having a squareness ratio of 0.89.
B面には、高周波スパッタリング法でSiOx膜6を配し
た。A SiO x film 6 was arranged on the B surface by a high frequency sputtering method.
高周波は13.56MHzを用い、純度4−ナインのシリコンを
ターゲットにして、ArとO2の混合気体をArとO2の混合比
率1:10から1:1まで、ArとO2のトータルの圧力を0.1Torr
から0.01Torrの範囲で調節して、SiOx膜を0.25μm形成
した。High frequency with 13.56 MHz, and a silicon purity 4 Nine to target, Ar and a mixed gas of O 2 from the mixing ratio 1:10 Ar and O 2 1: 1 to, Ar and O 2 of the total pressure To 0.1 Torr
To 0.01 Torr to form a SiO x film of 0.25 μm.
ここでxは1.2から1.7の範囲が、硬さと半導電的性質の
両面から適切である。Here, x is appropriately in the range of 1.2 to 1.7 from the viewpoint of both hardness and semiconducting property.
この上に、滑剤としてステアリン酸を真空蒸着し、約40
Åの滑剤層7を配した。On this, vacuum-deposited stearic acid as a lubricant, about 40
The lubricant layer 7 of Å was arranged.
これを8mm幅にスリットして、PCM録音再生時のパルス的
にS/Nが低下する時間の累積時間を測定した。比較テー
プとして市販の8mmビデオ用の合金塗布形テープ(MPテ
ープ)を用いた。This was slit into a width of 8 mm, and the cumulative time of pulse-like S / N lowering during PCM recording and playback was measured. A commercially available alloy coated tape (MP tape) for 8 mm video was used as a comparative tape.
使用したテープの長さは90分長で、90分に対して、S/N
が6dB以上低下した時間の累積で示した。The length of the tape used is 90 minutes, and for 90 minutes, S / N
Is shown as the cumulative time when the value drops by 6 dB or more.
記録ビット長は0.35μmでトラックピッチは16μmであ
る。The recording bit length is 0.35 μm and the track pitch is 16 μm.
以上のように本実施例によれば、微粒子で形成された粗
さの異なる表面を有する高分子フイルムの粗さの小さい
面に強磁性金属薄膜を配し、もう一方の面にSiOx(x=
1.2〜1.7)層と滑剤層の2層を配することで、特に湿度
の低い環境で頻発する静電気によるノイズに基づくS/N
のパルス的低下は、PCM録音再生に於ても全く問題のな
い水準に保つことができ、強磁性金属薄膜のもつ高密度
磁気記録再生での高いS/Nの特長を十分生かせるもので
ある。 As described above, according to the present embodiment, the ferromagnetic metal thin film is arranged on the surface of the polymer film having the surface of different roughness formed of the fine particles, which has a small roughness, and the other surface is covered with SiO x (x =
1.2 to 1.7) layer and lubricant layer are arranged, so that S / N based on noise due to static electricity that frequently occurs especially in low humidity environment
The pulse-like decrease of P can be maintained at a level that does not cause any problem even in PCM recording / reproduction, and the characteristics of high S / N in high-density magnetic recording / reproduction of ferromagnetic metal thin film can be fully utilized.
なお本実施例において高分子フイルムはポリエチレンテ
レフタレートとしたが、ポリアミド,ポリスルフォン,
ポリフエニレンサルファイド,ポリカーボネート,ポリ
イミド等でもよく、A面の粗さは、Raで0.001μmから
0.01μm、B面粗さは、Raで0.02から0.2μmであれば
良い。In this example, the polymer film was polyethylene terephthalate, but polyamide, polysulfone,
Polyphenylene sulfide, polycarbonate, polyimide, etc. may be used, and the roughness of A side is from 0.001 μm in Ra.
0.01 μm, and the B surface roughness may be Ra from 0.02 to 0.2 μm.
強磁性金属薄膜はCo-Crの斜め蒸着膜としたが、垂直蒸
着膜,垂直スパッタ膜であってもよく、軟磁性層との積
層でもよい。Although the ferromagnetic metal thin film is a Co—Cr oblique vapor deposition film, it may be a vertical vapor deposition film, a vertical sputtering film, or a stack with a soft magnetic layer.
又、材料としては、Co-Fe,Co-Ni,Co-Ti,Co-O,Co-Mg,Co-
V,Co-W,Co-Ta,Co-Mo,Co-Ni-Cr,Co-Ni-O等でもよい。Also, as the material, Co-Fe, Co-Ni, Co-Ti, Co-O, Co-Mg, Co-
V, Co-W, Co-Ta, Co-Mo, Co-Ni-Cr, Co-Ni-O, etc. may be used.
SiOx薄膜は、高周波スパッタリング法で形成したが、反
応性蒸着法でもよく、膜厚は0.15μmから1.0μmまで
であればよい。Although the SiO x thin film was formed by the high frequency sputtering method, it may be formed by the reactive vapor deposition method, and the film thickness may be 0.15 μm to 1.0 μm.
滑剤としてはステアリン酸を用い、真空蒸着法により形
成したが、溶液塗布法,グロー重合法などで形成した、
脂肪酸,脂肪酸エステル,脂肪酸アミド,弗素アルコー
ル,炭化水素系重合膜などいずれでもよい。Stearic acid was used as a lubricant and was formed by a vacuum deposition method, but was formed by a solution coating method, a glow polymerization method, or the like.
Any of fatty acids, fatty acid esters, fatty acid amides, fluoroalcohols, hydrocarbon polymer films, etc. may be used.
発明の効果 以上のように本実施例によれば、静電気によるパルス的
なS/N低下のない、高密度磁気記録媒体を得るといった
すぐれた効果を得ることができる。EFFECTS OF THE INVENTION As described above, according to this embodiment, excellent effects such as obtaining a high-density magnetic recording medium without a pulse-like S / N reduction due to static electricity can be obtained.
第1図は本発明の一実施例に係る磁気記録媒体の拡大断
面図、第2図は従来の磁気記録媒体の拡大断面図であ
る。 4……高分子フィルム、5……強磁性金属薄膜、6……
SiOx層、7……滑剤層。FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 4 ... Polymer film, 5 ... Ferromagnetic metal thin film, 6 ...
SiO x layer, 7 ... Lubricant layer.
Claims (1)
する高分子フイルムし粗さの小さい面に強磁性金属薄膜
を配し、もう一方の面にSiOx層(x=1.2〜1.7)と滑剤
層の2層を配して成ることを特徴とする磁気記録媒体。1. A polymer film formed of fine particles having a surface with different roughness, a ferromagnetic metal thin film is arranged on a surface having a small roughness, and a SiOx layer (x = 1.2 to 1.7) is formed on the other surface. A magnetic recording medium comprising two layers of a lubricant layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12534485A JPH0675284B2 (en) | 1985-06-10 | 1985-06-10 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12534485A JPH0675284B2 (en) | 1985-06-10 | 1985-06-10 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284825A JPS61284825A (en) | 1986-12-15 |
| JPH0675284B2 true JPH0675284B2 (en) | 1994-09-21 |
Family
ID=14907791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12534485A Expired - Lifetime JPH0675284B2 (en) | 1985-06-10 | 1985-06-10 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0675284B2 (en) |
-
1985
- 1985-06-10 JP JP12534485A patent/JPH0675284B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284825A (en) | 1986-12-15 |
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