JPH0675972B2 - Pattern drawing device - Google Patents

Abstract

PURPOSE:To describe onto a plurality of photosensitive substrates efficiently, to enable loading and unloading easily and to enable transfer to the next process smoothly, by performing the pattern description while employing a roll substrate cassette containing a description roll substrate wound into a roll film, thereby eliminating the necessity of prealignment for every description. CONSTITUTION:An unexposed description roll substrate 11 formed into a roll film is stored in a roll substrate cassette 12, then said roll substrate cassette 12 is mounted on a unidimensionally movable stage 13. Simultaneously with the motion of said stage 13, the description roll substrate 11 is raster scanned by means of a light spot so as to describe a pattern. When one frame pattern is described, one frame of the description roll substrate 11 is taken up by means of a take-up means 31. Since the prealignment work is required only one time for a single roll substrate cassete 12, the description can be performed quite efficiently.

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention relates to a pattern drawing apparatus for two-dimensionally scanning a light spot by raster scanning to draw a two-dimensional pattern,
Particularly, the present invention relates to a pattern drawing apparatus suitable for direct drawing on a flexible substrate or an artwork film substrate.

(Prior Art) Conventionally, a pattern drawing device as shown in FIG. 3 is known as a device for drawing a precise pattern on an artwork film for a printed circuit board by scanning and modulating a laser beam. The laser beam emitted from the laser light source 1 is intensity-modulated by the optical modulator 2, and the beam expander 3
After the beam width is expanded by, it is reflected and deflected by the rotating polygon mirror 4, focused by the fθ lens 5 and becomes an extremely small light spot through the reflecting mirror 6, and is placed on the one-dimensional moving stage 7. It is projected onto the sheet-shaped photosensitive substrate 8. The projected light spot is
Linear scanning is performed in the x direction while blinking by the action of the light modulator 2.

The photosensitive substrate 8 is fixed by a vacuum screw or the like by a feed screw 9 and a drive motor M onto a stage 7 which is one-dimensionally moved on a pedestal 10 in the y direction perpendicular to the main scanning direction x by the light spot. Therefore, the photosensitive substrate 8 is main-scanned in the x direction by an extremely small light spot by the laser light flux, and is sub-scanned in the y-direction by the movement of the stage 7, so that a two-dimensional pattern is drawn on the photosensitive substrate 8.

(Problems to be Solved by the Invention) In the heretofore known pattern drawing apparatus having the above-described configuration, the photosensitive substrate 8 placed on the stage 7 has a sheet shape, and one photosensitive substrate 8 When the drawing is completed, the photosensitive substrate 8 is removed from the stage and replaced with another unexposed photosensitive substrate. However, at the time of replacement, since the reflecting mirror 6 is provided on the photosensitive substrate 8,
The stage 7 must be largely moved to the right in FIG. 3, the photosensitive substrate 8 must be pulled out from directly below the reflecting mirror 6, and then replaced. Moreover, it is necessary to perform rough alignment (pre-alignment) of the position and direction of the unexposed substrate with respect to the stage 7 again each time it is exchanged, and it takes a lot of time when drawing on a plurality of exposed substrates, There was a problem that was inefficient.

The present invention solves the problems of the above-described conventional apparatus, efficiently draws a plurality of photosensitive substrates, and allows easy loading and unloading, and a pattern drawing that can be smoothly transferred to the next process. The purpose is to provide a device.

[Structure of Invention]

(Means for Solving the Problems) In order to achieve the above object, in the present invention, an unexposed drawing roll substrate (11) formed by being rolled into a roll film is housed and a large drawing is carried out. A roll substrate cassette (12) having an aperture, a one-dimensionally movable stage (13) that detachably supports the roll substrate cassette (12), and the roll substrate cassette mounted on the stage (13). A light spot projection optical system (15 to 21) for projecting a light spot for raster-scanning the drawing roll substrate (11) in (12) and a winding means for winding the drawn drawing roll substrate one by one. (31) is provided, and it is a technical point that the pattern can be continuously drawn.

(Work) An unexposed drawing roll substrate (11) formed in a roll film so that multiple patterns can be drawn continuously.
Are housed in a roll substrate cassette (12), the roll substrate cassette (12) is placed on a stage (13) which moves one-dimensionally, and the stage (13) is moved, and at the same time, an optical spot projection optical system (15). To 21), the drawing roll substrate (11) is raster-scanned by a light spot projected to draw a pattern. When a pattern for one frame is drawn through the drawing aperture (12B) of the drawing roll substrate cassette (12), the drawing roll substrate (11) is wound by the winding means (31). Then, while moving the stage (13) again, the unexposed surface of the drawing roll substrate (11) is raster-scanned by the light spot, and the pattern is repeatedly drawn.
When the whole drawing roll substrate (11) has been drawn, the roll substrate cassette (12) is removed from the stage (13), replaced with another roll substrate (12), and placed on the stage (13). As described above, a plurality of patterns are continuously drawn on the drawing roll substrate (11). At this time, since the pre-alignment work only needs to be performed once for each roll substrate cassette (12), the drawing can be performed extremely efficiently. Further, the roll substrate cassette (12) removed from the stage (13) can be transported to the next processing step as it is, which is also advantageous for transportation.

(Example) Next, the Example of this invention is described in detail based on an accompanying drawing.

FIG. 1 is a perspective view of a pattern drawing apparatus showing an embodiment of the present invention, and FIG. 2 is a view in the y direction showing a configuration of a roll substrate cassette and a stage portion in FIG. 1 which is an essential part of the present invention. FIG.

A roll containing a photosensitive substrate or an artwork film (hereinafter simply referred to as "roll substrate") 11 formed by laminating a dry film or applying a liquid resist and winding the roll film into a roll film. The substrate cassette 12 is mounted on a one-dimensional moving stage (hereinafter simply referred to as “stage”) 13 which will be described in detail later, as shown in FIGS. 1 and 2. In addition, a laser light source 15 is provided on a pedestal 14 that movably supports the stage 13.
Is provided, the laser light flux emitted from the laser light source 15 is turned upward by the prism 16A, and the light modulator (for example, an ultrasonic light modulator) 17, the prism 16B, and the beam expander 1 are provided.
It is projected via 8 onto a polygon mirror 19 that rotates at a constant speed. The laser light flux which is modulated by the light modulator 17, blinks, and is reflected / deflected by the polygon mirror 19 is condensed by the fθ lens 20 and is deflected downward by the mirror 21 which is long in the x direction, so that the roll substrate 11 is formed. It is projected vertically as a small light spot that blinks on top. This light spot scans the roll substrate 11 in the x direction at a constant speed according to the rotation of the polygon mirror 19. An optical system from the laser light source 15 to the mirror 21 constitutes a light spot projection optical system.

On the other hand, as shown in FIG. 2, the stage 13 is roughly classified into a stage main body 22 that is movable on a pedestal 14 in the y direction, and a θ rotary table 23 rotatably supported on the stage main body 22.
And a roll substrate table 24 supported on the θ-rotating table 23 so as to be able to move up and down, and an upper plate 25 fixed above the roll substrate table 24 and fixed to the stage body 22.

The stage body 23 is configured to move one-dimensionally in the y direction by rotating a feed screw 26 rotatably provided on the pedestal 14 with a drive motor 27. The θ rotation table 23 is finely rotated in a horizontal plane by a motor (not shown) provided on the stage body 22. Further, between the θ rotation table 23 and the roll substrate table 24, an actuator 28 such as a piston ring and an air cylinder, and an elevating guide 29 for guiding the roll substrate table 24 up and down are provided. The roll substrate table 25 can be finely moved up and down in the projection optical axis direction of the light spot. The upper surface of the roll substrate base 24 is formed so as to be perpendicular to the projection optical axis of the light spot and parallel to the moving direction (y direction) of the stage body 22.

On the outer periphery of the upper surface of the roll board stand 24, the roll board cassette 12
Is provided with a stepped portion 24a that detachably supports the roll substrate cassette 12 on the roll substrate table 24 by fitting the opening 12A formed on the back side of the roll substrate cassette 12 into the stepped portion 24a. And the direction is regulated and it is placed. Further, when the roll substrate cassette 12 is placed on the roll substrate table 24, the upper surface 24b of the roll substrate table 24 contacts the back surface of the roll substrate 11 in the roll substrate cassette 12 and vacuum-chuck the roll substrate 11. Thus, the flatness of the roll substrate 11 is kept good.

On the surface of the roll substrate cassette 12 (upper surface in FIG. 2),
A drawing aperture 12B is provided, and an upper plate 25 located above the drawing aperture 12B is provided with an escape hole 12C through which at least three positioning pins 30 projecting from the lower surface pass. In addition, the roll board cassette 12
A take-up motor 31 for taking up the roll substrate 11 is provided on the take-up side of the so that the roll substrate 11 passes through the drawing aperture 12B by a fixed amount (for one frame) by the drive of the motor 31. The size of one frame that can be drawn at a time is determined by the drawing aperture 12B. Further, the roll substrate 11 rises together with the roll substrate stand 24 and comes into contact with the lower end surface of the positioning pin 30, so that the photosensitive surface (upper surface) of the roll substrate 11 coincides with the focal plane of the fθ lens 20, and on the photosensitive surface. The light spot projected by the fθ lens 20 is formed into an image. The upper plate 25 is a support post 22A provided on the stage body 22.
It has a window 25A supported by (see FIG. 1) and through which laser light projected through the mirror 21 passes, and the positioning pin 30 is planted in the outer peripheral frame portion of the window 25A.

Since the pattern drawing apparatus shown in FIGS. 1 and 2 is configured as described above, the actuator 28 is operated to lower the roll substrate stand 24 to the lowermost position, and then the unexposed roll substrate 11 is stored. The roll substrate cassette 12 thus prepared is placed on the roll substrate table 24. In this case, when the rear surface opening 12A of the roll substrate cassette 12 is fitted into the step portion 24a of the roll substrate table 24, the roll substrate 11 contacts the upper surface 24b of the roll substrate table 24 and is fixed to the upper surface 24b by vacuum suction. It
Next, the θ rotation table 23 is finely rotated to perform pre-alignment in which the longitudinal direction of the drawing aperture 12B of the roll substrate cassette 12 matches the moving direction (y direction) of the stage body 22. When the pre-alignment of the roll substrate 11 is completed, the actuator 28 is operated to raise the roll substrate stand 24, and the roll substrate is brought into contact with the lower ends of the positioning pins 30 planted in the upper plate 25. The upper surface (photosensitive surface) of is aligned with the focal plane of the fθ lens 26. Next, while rotating the polygon mirror 19, the drive motor 27 is rotated to feed the stage 13 in the y direction, and the roll substrate 11 is driven by the light spot of the laser light flux projected via the fθ lens 20.
Is raster-scanned, and a predetermined pattern is drawn by the laser light flux that is blink-modulated by the light modulator 17. When the drawing of one frame corresponding to the roll substrate aperture 12B of the roll substrate cassette 12 is completed, the left end of the roll substrate aperture 12B in FIG. 1 reaches the vicinity of the light spot projection position, and the light spot is the optical modulator. Extinguished by 17.

When the drawing of one frame is completed, the actuator 28 is operated to slightly lower the roll board base 24, at the same time, the vacuum suction of the roll board 11 is released, and the winding motor is wound.
31 is driven to wind the roll substrate 11 by one frame. Further, the roll substrate 11 is again vacuum-adsorbed, and the upper plate 25
The second substrate is raised together with the roll substrate stand 24 until it comes into contact with the positioning pins 30, and the pattern drawing of the second frame is performed. in this case,
The roll substrate cassette 12 may be moved together with the stage 13 in the direction opposite to the y direction to return to the position shown in FIG. 1, and drawing may be performed again as in the previous time, but raster scanning is also performed with the light spot in the returning direction. As a result, the pattern drawing of the second frame can be performed. In either case, the pre-alignment of the roll substrate 11 has already been completed, and the deviation in the direction due to winding is extremely small, so that drawing can be performed without performing pre-alignment again.

When the drawing of the number of frames of all films is completed as described above, the stage 13 is moved to the left in FIG. 2 to pull out the roll substrate cassette 12 from the lower part of the mirror 21, and then the roll substrate stand 24 At the same time, the roll board cassette 12 is lowered to the lowest position. Next, the vacuum suction of the roll substrate 11 is released, the roll substrate cassette 12 is removed from the roll substrate stand 24, and the roll substrate cassette 12 is replaced with another roll substrate cassette 12 for drawing.

In the above embodiment, the winding motor 31 was provided directly on the roll substrate cassette 12 as the winding means for the drawing roll substrate 11, but the winding substrate 31 is provided with the winding motor. When the cassette 12 is placed on the roll substrate table 24, the winding shaft of the roll substrate cassette 12 may be coupled to the winding motor via a coupling. Further, when the drawing roll substrate 11 has a uniform thickness and only the drawing roll substrate having a constant thickness is always used, an actuator for moving the roll substrate table 24 up and down is used.
28 and the upper plate 25 are unnecessary, and the roll substrate base 24 may be directly fixed on the θ rotary table 23.

〔The invention's effect〕

As described above, according to the present invention, since the pattern drawing is performed using the roll substrate cassette in which the drawing roll substrate wound in the form of a roll film is stored, it is not necessary to perform the pre-alignment for each drawing. Therefore, the work time can be shortened, and the cassettes can be transported, so that it is possible to automate a large number of patterns and to unmanned.

Since it is not necessary to replace the drawing photosensitive substrate for each drawing, it is possible to draw not only when the stage moves forward but also when the stage moves backward. Therefore, there is an advantage that drawing can be performed very efficiently.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a longitudinal cross-section in the y direction of a roll substrate cassette and a stage portion supporting the roll substrate cassette constituting the essential part of the embodiment shown in FIG. FIG. 3 is a perspective view showing a schematic configuration of a conventional device. (Explanation of symbols for main parts) 11 …… Roll substrate for drawing, 12 …… Roll substrate cassette,
13 …… Stage, 14 …… Stand 15 …… Laser light source (optical spot projection optical system) 16A, 16B …… Prism (optical spot projection optical system) 17 …… Optical modulator (optical spot projection optical system) 18 …… Beam expander (optical spot projection optical system) 19 …… Polygon mirror (optical spot projection optical system) 20 …… fθ lens (optical spot projection optical system) 21 …… Mirror (optical spot projection optical system) 31 …… Winding Motor (winding means)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location 8403-2C B41J 3/00 F

Claims (3)

[Claims] 1. A roll substrate cassette that accommodates an unexposed drawing roll substrate formed by being wound into a roll film and has a large drawing aperture, and a one-dimensional support for detachably supporting the roll substrate cassette. A movable stage, a light spot projection optical system for projecting a light spot for raster-scanning the roll substrate in the roll substrate cassette mounted on the stage, and a drawn drawing roll substrate A pattern drawing device comprising: a winding unit that winds each one. 2. The stage comprises a stage main body (22) capable of one-dimensional movement, a θ rotation table (23) rotatably supported by the stage main body (22), and the roll substrate cassette (12). A roll substrate table (24) which is detachably supported and capable of vacuum-sucking the roll substrate (11), and an actuator (28) which moves the roll substrate table up and down on the θ rotary table (23). The pattern drawing device according to claim 1, wherein the pattern drawing device comprises: 3. The pattern according to claim 1 or 2, wherein the winding means is a winding motor (31) provided in the roll substrate cassette (12). Drawing device.