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JPH0676971B2 - Circuit pattern inspection method - Google Patents
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JPH0676971B2 - Circuit pattern inspection method - Google Patents

Circuit pattern inspection method

Info

Publication number
JPH0676971B2
JPH0676971B2 JP13693889A JP13693889A JPH0676971B2 JP H0676971 B2 JPH0676971 B2 JP H0676971B2 JP 13693889 A JP13693889 A JP 13693889A JP 13693889 A JP13693889 A JP 13693889A JP H0676971 B2 JPH0676971 B2 JP H0676971B2
Authority
JP
Japan
Prior art keywords
circuit pattern
weight
wiring board
parts
epoxy resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13693889A
Other languages
Japanese (ja)
Other versions
JPH032547A (en
Inventor
伸仁 細木
甚昭 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13693889A priority Critical patent/JPH0676971B2/en
Publication of JPH032547A publication Critical patent/JPH032547A/en
Publication of JPH0676971B2 publication Critical patent/JPH0676971B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Epoxy Resins (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、絶縁基材中でエポキシ樹脂の硬化が完結した
絶縁基板とこの絶縁基板の上に形成された回路パターン
とから成るプリント配線板などの配線板の回路パターン
の検査法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a printed wiring board comprising an insulating substrate in which curing of an epoxy resin is completed in an insulating base material and a circuit pattern formed on the insulating substrate. It relates to a method for inspecting a circuit pattern of a wiring board such as.

〔従来の技術〕[Conventional technology]

従来よりエポキシ樹脂は、積層板用などの樹脂として多
用されている。かかる積層板から作られるプリント配線
板の回路パターンの検査方法として、従来はプローブに
よる直接導通法、金属顕微鏡を応用した金属導体回路パ
ターンの反射光による方法、あるいは軟X線による方法
などが知られているが、最近一層精度良く、高能率に検
査できる方法として、励起光に感応して蛍光を発光する
蛍光性を絶縁層に付与することにより、プリント配線板
を励起光に対して発光しない導体回路パターンの部分
と、導体回路パターンの回路間に露出し、励起光に対し
て発光する絶縁パターンの部分とに分け、これらの部分
の発光性の差異を利用して励起光を照射することにより
回路パターンの異常を正常な回路パターンとの比較で検
査する回路パターンの検査方法が試行されつつある。こ
の検査法の成否は当然のことながら絶縁層に付与する高
い発光性と、発光を強く励起する励起光の一体的な結合
に依存する。特に絶縁層に付与する発光性は,絶縁層の
層厚が薄いほど低く、また黒化処理した絶縁層を含むと
低下する性質があるのでこのような配線板では、絶縁層
に強烈に発光性を付与する必要がある。
BACKGROUND ART Epoxy resins have been widely used as resins for laminated boards and the like. As a method for inspecting a circuit pattern of a printed wiring board made of such a laminated board, a direct conduction method using a probe, a method using reflected light of a metal conductor circuit pattern to which a metallographic microscope is applied, a method using soft X-rays, and the like are conventionally known. However, recently, as a method that enables more accurate and highly efficient inspection, a printed wiring board that does not emit light in response to excitation light is provided by providing the insulating layer with fluorescence that emits fluorescence in response to excitation light. By dividing the circuit pattern part and the part of the insulating pattern exposed between the circuits of the conductor circuit pattern and emitting light with respect to the excitation light, and irradiating the excitation light by utilizing the difference in the light emitting property of these parts. A circuit pattern inspection method for inspecting an abnormal circuit pattern by comparing it with a normal circuit pattern is being tried. The success or failure of this inspection method naturally depends on the high light emitting property imparted to the insulating layer and the integral coupling of the excitation light that strongly excites the light emission. In particular, the light-emitting property imparted to the insulating layer is lower as the layer thickness of the insulating layer is thinner, and also decreases when the blackened insulating layer is included. Therefore, in such a wiring board, the insulating layer strongly emits light. Must be given.

〔発明が解決しょうとする課題〕[Problems to be solved by the invention]

したがって、この発明は、精度よく高効率に回路のパタ
ーンの検査を励起光により発光する蛍光でもって行うこ
とのできる新規な回路パターンの検査法に関し、具体的
には絶縁層に付与した高い蛍光性とこの蛍光性を強く励
起する特定の励起光の一体的な結合によって解決する点
にある。
Therefore, the present invention relates to a novel method for inspecting a circuit pattern, which can accurately and efficiently inspect a circuit pattern with fluorescence emitted by excitation light, and specifically, has a high fluorescence property imparted to an insulating layer. The point is that this fluorescence is solved by the integral coupling of specific excitation light that strongly excites the fluorescence.

〔課題を解決するための手段〕[Means for Solving the Problems]

本発明に係る絶縁基板の上に形成された回路パターンの
検査法は、 (イ)エポキシ樹脂、 (ロ)前記エポキシ樹脂100重量部に対して5〜20重量
部の範囲となる量で配合される次の一般式 (R1,R2は水素原子あるいは炭素数1〜4のアルキル
基)で示されるジアミノジフェニルメタン化合物、 (ハ)および、硬化促進剤を含有する樹脂組成物が基材
中で硬化が完結した絶縁基板とこの絶縁基板に形成され
た回路パターンとからなる配線板に350〜500nmの励起光
を照射することを特徴とするものである。
The method for inspecting a circuit pattern formed on an insulating substrate according to the present invention includes (i) an epoxy resin, and (b) an amount of 5 to 20 parts by weight based on 100 parts by weight of the epoxy resin. The following general formula A diaminodiphenylmethane compound represented by (R 1 and R 2 are hydrogen atoms or an alkyl group having 1 to 4 carbon atoms), (c), and a resin composition containing a curing accelerator, the curing of which has been completed in the base material. A wiring board composed of a substrate and a circuit pattern formed on the insulating substrate is irradiated with excitation light of 350 to 500 nm.

以下に、本発明を詳説する。本発明の回路パターンの検
査法に適用される配線板を構成する絶縁板は、エポキシ
樹脂とこのエポキシ樹脂100重量部に対して5〜20重量
部の範囲となる量で配合されたジアミノジフェニルメタ
ン化合物と硬化促進剤を含む樹脂組成物が基材中で硬化
が完結した絶縁基板に限定される。ここでエポキシ樹脂
としては、ビスフェノールA型エポキシ樹脂およびこれ
に難燃性を付与したハロゲン化ビスフェノールA型エポ
キシ樹脂、あるいは耐熱性を向上させるために混合させ
て用いられるノボラック型エポキシ樹脂およびこれに難
燃性を付与したハロゲン化ノボラック型エポキシ樹脂な
どが例示される。そしてこようなエポキシ樹脂100重量
部に対して配合されるジアミノジフェニルメタン化合物
を5〜20重量部に制限した理由は、下限の5重量部未満
の配合量では,励起光に対する蛍光性が弱く、上限の20
重量部を越えるとエポキシ樹脂の硬化速度が早く樹脂ワ
ニスでの使用が困難となるからである。このジアミノジ
フェニルメタン化合物は、この発明においては、エポキ
シ樹脂の硬化剤として選択的に採用された硬化剤であっ
て、かつ特定の波長に属する光に対して蛍光を発する蛍
光剤としての規模な作用を同時に有するものである。
The present invention will be described in detail below. The insulating board constituting the wiring board applied to the circuit pattern inspection method of the present invention is an epoxy resin and a diaminodiphenylmethane compound compounded in an amount of 5 to 20 parts by weight based on 100 parts by weight of the epoxy resin. The resin composition containing a curing accelerator is limited to an insulating substrate in which curing is completed in the base material. Here, as the epoxy resin, a bisphenol A-type epoxy resin and a halogenated bisphenol A-type epoxy resin in which flame retardancy is imparted to this, or a novolac-type epoxy resin which is used as a mixture for improving heat resistance and a difficult Illustrative are halogenated novolac type epoxy resins and the like that are imparted with flammability. The reason for limiting the amount of the diaminodiphenylmethane compound blended to 100 parts by weight of such an epoxy resin to 5 to 20 parts by weight is that the lower limit of less than 5 parts by weight causes weak fluorescence to excitation light and an upper limit. Of 20
This is because if the amount is more than parts by weight, the curing speed of the epoxy resin is high and it becomes difficult to use it in a resin varnish. In the present invention, this diaminodiphenylmethane compound is a curing agent that is selectively adopted as a curing agent for epoxy resins, and has a large-scale action as a fluorescent agent that emits fluorescence to light belonging to a specific wavelength. Have at the same time.

硬化促進剤としては、ベンジルジメチルアミンのような
第3級アミン、2エチル4メチルイミダゾール(2E4M
Z)のようなイミダゾール類が用いられ、その配合割合
は前記エポキシ樹脂の100重量部に対して0.05〜1重量
部が適当である。以上の成分が基材中で架橋反応の促進
にともなって硬化した樹脂の固形分を与えるまでのプロ
セスに沿って説明すると、上記成分は溶媒中に溶解され
た樹脂ワニスに含有される。ここで溶媒としてはジメチ
ルホルムアミド(DMF)、メチルエチルケトン(MEK)、
アセトン、メチルセロソルブ、ジメチルアセトアミド、
ゾオキサンなどの単独又は、混合したものを樹脂の含有
率40〜80重量%、好ましくは55〜70重量%となる量で用
いることができる。そしてこのように調製された樹脂ワ
ニスを例えばガラスクロスの基材に含浸させた後、乾燥
によって触媒を蒸発させつつエポキシ樹脂の反応を進行
させ基材中の樹脂組成物を半硬化させてプリプレグとす
る。上記基材の種類は特に限定されない。通常はガラス
クロス等が用いられる。この他、石英繊維布等の無機繊
維布、ポリイミド樹脂繊維布等の高耐熱性有機繊維布等
でもよい。半硬化させる時の温度は140〜170℃で行うの
が好ましい。170℃を越えるとエポキシ樹脂の反応が進
み過ぎ、得られるプリプレグの層間接着力が低下し、絶
縁基板として吸水率などの性能低下の原因となる。この
ようにして得られたプリプレグを数枚重ねた上に銅、ニ
ッケル、アルミニウムなどの金属箔を重ねてこれを常用
される条件で熱圧成形することにより回路パターンを形
成できる金属箔張りの絶縁基板とし、次に回路形成法と
して一般に行われているサブトラクティブ法によって、
この金属箔にエッチングを施すと絶縁基板上に回路パタ
ーンが形成された配線板が得られる。従って絶縁基板上
は,回路パターンとこの回路パターンの回路間に露出す
る絶縁基板によって形成される絶縁パターンとに分けら
れる。なお、絶縁基板上にアディティブ法による方法で
回路パターンを形成した配線板もこの発明における配線
板として適用できる。
As a curing accelerator, a tertiary amine such as benzyldimethylamine, 2-ethyl-4-methylimidazole (2E4M
Imidazoles such as Z) are used, and the mixing ratio thereof is suitably 0.05 to 1 part by weight with respect to 100 parts by weight of the epoxy resin. Explaining along the process until the above components give the solid content of the cured resin as the crosslinking reaction is accelerated in the substrate, the above components are contained in the resin varnish dissolved in the solvent. Here, as the solvent, dimethylformamide (DMF), methyl ethyl ketone (MEK),
Acetone, methyl cellosolve, dimethyl acetamide,
A single or a mixture of zooxane and the like can be used in an amount such that the resin content is 40 to 80% by weight, preferably 55 to 70% by weight. Then, for example, after impregnating the resin varnish thus prepared into a glass cloth base material, the reaction of the epoxy resin is advanced while the catalyst is evaporated by drying to semi-cure the resin composition in the base material to form a prepreg. To do. The type of the base material is not particularly limited. Usually, glass cloth or the like is used. In addition, inorganic fiber cloth such as quartz fiber cloth, high heat resistant organic fiber cloth such as polyimide resin fiber cloth, and the like may be used. The temperature for semi-curing is preferably 140 to 170 ° C. If the temperature exceeds 170 ° C, the reaction of the epoxy resin will proceed too much, and the interlayer adhesive strength of the obtained prepreg will decrease, which will cause the performance of the insulating substrate such as water absorption to deteriorate. A metal foil-clad insulation that can form a circuit pattern by stacking several prepregs obtained in this way on top of metal foil of copper, nickel, aluminum, etc. and thermocompressing them under the usual conditions As a substrate, and then by a subtractive method that is generally used as a circuit forming method,
By etching this metal foil, a wiring board having a circuit pattern formed on an insulating substrate is obtained. Therefore, the insulating substrate is divided into a circuit pattern and an insulating pattern formed by the insulating substrate exposed between the circuits of the circuit pattern. A wiring board having a circuit pattern formed on an insulating substrate by an additive method can also be applied as the wiring board in the present invention.

本発明における以上の絶縁基板とこの絶縁基板の上に形
成された回路パターンからなる配線板は波長が350〜500
nmの光に対して特に蛍光を発する性質を利用するもので
ある。すなわち、回路パターンの回路間に形成される絶
縁パターンが350〜500nmの励起光に対して著しい蛍光性
を示す反面、回路パターンは蛍光性を示さない性質を利
用して回路パターンの異常を正常な回路パターンとの比
較において判別できるものである。特に絶縁層の蛍光性
は,絶縁層の層厚が薄いほど低く、また黒化処理した絶
縁層を含むと低下する性質があるので、例えば0.2mm以
下の絶縁基板あるいは黒化処理した絶縁基板を有する配
線板の回路パターンの検査において、絶縁層の蛍光強度
を高めることは極めて有用である。以下、具体的な実施
例を挙げる。
The wiring board comprising the above insulating substrate and the circuit pattern formed on this insulating substrate in the present invention has a wavelength of 350 to 500.
It utilizes the property of emitting fluorescence especially to the light of nm. That is, while the insulating pattern formed between the circuits of the circuit pattern exhibits remarkable fluorescence with respect to the excitation light of 350 to 500 nm, the circuit pattern utilizes the property of not exhibiting fluorescence to normalize the abnormality of the circuit pattern. It can be determined by comparison with the circuit pattern. In particular, the fluorescent property of the insulating layer is lower as the thickness of the insulating layer is thinner, and it also tends to decrease when a blackened insulating layer is included. Therefore, for example, an insulating substrate of 0.2 mm or less or a blackened insulating substrate is used. In the inspection of the circuit pattern of the wiring board, it is extremely useful to increase the fluorescence intensity of the insulating layer. Specific examples will be given below.

〔実施例〕〔Example〕

実施例 1 エポキシ樹脂として、ブロム化エポキシ樹脂(東都化成
社、YDB−500、エポキシ当量 500)を100重量部、前記
のジアミノジフェニルメタン化合物でR1とR2がエチル基
の3、3′−ジエチル−4、4′−ジアミノジフェニル
メタンを20重量部、硬化促進剤として2E4MZを0.1重量
部、そして溶媒としてMEKとDMFの等量混合液を上記の樹
脂含有率が65重量%となるように添加して樹脂ワニスと
し、この樹脂ワニスを0.1mmのガラスクロスに含浸乾燥
してプリプレクを得た。そしてこのプリプレの両面に、
厚さ18μmの銅箔を配し、これを金属プレートに挟んで
成形圧50kg/cm2、温度170℃で100分間熱圧成形し、この
銅箔にエッチングを施して絶縁基板上に回路パターンと
この回路パターンの回路間に絶縁基板が露出した絶縁パ
ターンを有する配線板とした。この配線板に分光蛍光光
度計を使い350〜500nmの励起光を照射し、その時現れた
蛍光強度の最大値を蛍光強度として第1表に示した。ま
た、300mm×500mmのこの配線板に442nmの励起光による
蛍光式パターン検査装置を適用し、回路パターンの導体
幅、導体間隔、断線、ショート、ピンホール、銅残り、
銅欠けについて検査した結果、蛍光式パターン検査装置
で異常箇所と検出した回路パターンを再度、顕微鏡で観
察し、その結果、回路パターンに異常なしと確認できた
個数、すなわち、蛍光式パターン検査装置が誤って検出
した個数を検査精度としてその結果も第1表に示した。
Example 1 As an epoxy resin, 100 parts by weight of a brominated epoxy resin (Toto Kasei Co., Ltd., YDB-500, epoxy equivalent 500) was used, and 3,3'-diethyl in which R 1 and R 2 were ethyl groups in the above diaminodiphenylmethane compound. -4,4'-diaminodiphenylmethane (20 parts by weight), 2E4MZ as a curing accelerator (0.1 parts by weight), and an equivalent amount of MEK and DMF as a solvent were added to the above resin content of 65% by weight. To obtain a resin varnish, which was impregnated with 0.1 mm glass cloth and dried to obtain a prepreg. And on both sides of this prepre,
A copper foil with a thickness of 18 μm is placed, sandwiched between metal plates and thermoformed under a molding pressure of 50 kg / cm 2 and a temperature of 170 ° C. for 100 minutes, and the copper foil is etched to form a circuit pattern on an insulating substrate. A wiring board having an insulating pattern in which the insulating substrate was exposed between the circuits of this circuit pattern was obtained. This wiring board was irradiated with excitation light of 350 to 500 nm using a spectrofluorometer, and the maximum value of the fluorescence intensity that appeared at that time is shown in Table 1. In addition, applying a fluorescent pattern inspection device using excitation light of 442 nm to this 300 mm × 500 mm wiring board, conductor width of the circuit pattern, conductor interval, disconnection, short circuit, pinhole, copper remaining,
As a result of inspecting for copper deficiency, the circuit pattern detected as an abnormal portion by the fluorescent pattern inspection device was observed again with a microscope, and as a result, the number of circuit patterns confirmed to be normal, that is, the fluorescent pattern inspection device The results are also shown in Table 1 with the number of erroneous detections as the inspection accuracy.

実施例 2 実施例1で用いた3、3′−ジエチル−4、4′−ジア
ミノジフェニルメタン14重量部とし、さらにジシアンジ
アミド0.6重量部を配合した以外は実施例1と同様に実
施し第1表の結果を得た。
Example 2 The procedure of Example 1 was repeated except that 14 parts by weight of 3,3′-diethyl-4,4′-diaminodiphenylmethane used in Example 1 and 0.6 part by weight of dicyandiamide were added. I got the result.

実施例 3 実施例1で用いた3、3′−ジエチル−4、4′−ジア
ミノジフェニルメタン5重量部とし、ジシアンジアミド
1.8重量部を配合した以外は実施例1と同様に実施し第
1表の結果を得た。
Example 3 5 parts by weight of 3,3′-diethyl-4,4′-diaminodiphenylmethane used in Example 1 was used, and dicyandiamide was used.
The same procedure as in Example 1 was carried out except that 1.8 parts by weight was blended, and the results shown in Table 1 were obtained.

比較例1 実施例1で用いた3、3′−ジエチル−4、4′−ジア
ミノジフェニルメタンを配合せず、ジシアンジアミド2.
5重量部を配合した以外は実施例1と同様に実施し第1
表の結果を得た。
Comparative Example 1 Without adding 3,3′-diethyl-4,4′-diaminodiphenylmethane used in Example 1, dicyandiamide 2.
Example 1 was repeated except that 5 parts by weight was blended.
The results in the table were obtained.

第1表から明らかな通り、実施例1乃至3による本発明
の実施例によると、蛍光強度が増大しその結果、具体的
には絶縁層に付与した高い蛍光性を強く励起することが
でき、この性質を利用した検査の精度も向上できるので
ある。
As is clear from Table 1, according to the examples of the present invention according to Examples 1 to 3, the fluorescence intensity is increased, and as a result, specifically, the high fluorescence imparted to the insulating layer can be strongly excited, The accuracy of the inspection utilizing this property can also be improved.

実施例 4 実施例1におけるプリプレグを硬化した絶縁基板とこの
絶縁基板上に回路形成された回路パターンとを、黒化処
理した0.5mmの内層プリント配線板の両面に実施例1で
得たプリプレグを配し、さらにその外側両面に18μmの
銅箔を配してこれを金属プレートに挟んで実施例1の熱
圧条件で積層成形し、さらにエッチングを施して絶縁基
板上に回路パターンを得、実施例1と同様に蛍光強度と
回路パターンの検査を行った。これらの結果を第2表に
示した。
Example 4 The prepreg obtained in Example 1 was applied to both surfaces of a 0.5 mm inner layer printed wiring board which was blackened with an insulating substrate obtained by curing the prepreg in Example 1 and a circuit pattern formed on the insulating substrate. Then, a copper foil of 18 μm is further placed on both outer sides of the foil, and the foil is sandwiched between metal plates to be laminated and molded under the heat and pressure conditions of Example 1, and further subjected to etching to obtain a circuit pattern on an insulating substrate. The fluorescence intensity and the circuit pattern were inspected in the same manner as in Example 1. The results are shown in Table 2.

実施例5 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを実施例2の内層プリント配線板とプリプレグ
に変えた以外は実施例4と同様に実施し、これらの結果
を第2表に示した。
Example 5 Example 4 was repeated except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were replaced with the inner layer printed wiring board and prepreg of Example 2, and the results were obtained as a second example. Shown in the table.

実施例6 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを実施例3の内層プリント配線板とプリプレグ
に変えた以外は実施例4と同様に実施し、これらの結果
を第2表に示した。
Example 6 Example 6 was repeated except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were replaced with the inner layer printed wiring board and prepreg of Example 3, and the results were obtained as a second example. Shown in the table.

比較例2 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを比較例1の内層プリント配線板とプリプレグ
に変えた以外は実施例4と同様に実施し、これらの結果
を第2表に示した。
Comparative Example 2 The procedure of Example 4 was repeated except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were replaced with the inner layer printed wiring board and prepreg of Comparative Example 1, and the results obtained were Shown in the table.

第2表から明らかな通り、実施例4乃至6による本発明
の実施例によると、蛍光強度が増大しその結果、具体的
には絶縁層に付与した高い蛍光性を強く励起することが
でき、この性質を利用した検査の精度も向上できるので
ある。
As is clear from Table 2, according to the examples of the present invention according to Examples 4 to 6, the fluorescence intensity is increased, and as a result, specifically, the high fluorescence imparted to the insulating layer can be strongly excited, The accuracy of the inspection utilizing this property can also be improved.

〔発明の効果〕〔The invention's effect〕

以上のとおり、本発明は絶縁層に付与した高い蛍光性と
この蛍光性を強く励起する特定の励起光の一体的な結合
によって、回路パターンの検査を励起光により発光する
蛍光でもって精度よく高効率に行うことのできるのであ
る。
As described above, the present invention is an accurate combination of the high fluorescence given to the insulating layer and the specific excitation light that strongly excites this fluorescence, and the circuit pattern inspection with the fluorescence emitted by the excitation light with high accuracy. It can be done efficiently.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】(イ)エポキシ樹脂、 (ロ)前記エポキシ樹脂100重量部に対して5〜20重量
部の範囲となる量で配合される次の一般式 (R1,R2は水素原子あるいは炭素数1〜4のアルキル
基)で示されるジアミノジフェニルメタン化合物、 (ハ)および、硬化促進剤を含有する樹脂組成物が基材
中で硬化が完結した絶縁基板とこの絶縁基板に形成され
た回路パターンとからなる配線板に350〜500nmの励起光
を照射することを特徴とする回路パターンの検査法。
1. An epoxy resin; (b) The following general formula, which is blended in an amount in the range of 5 to 20 parts by weight with respect to 100 parts by weight of the epoxy resin. A diaminodiphenylmethane compound represented by (R 1 and R 2 are hydrogen atoms or an alkyl group having 1 to 4 carbon atoms), (c), and a resin composition containing a curing accelerator, the curing of which has been completed in the base material. A circuit pattern inspection method comprising irradiating a wiring board composed of a substrate and a circuit pattern formed on the insulating substrate with excitation light of 350 to 500 nm.
JP13693889A 1989-05-30 1989-05-30 Circuit pattern inspection method Expired - Fee Related JPH0676971B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13693889A JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13693889A JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Publications (2)

Publication Number Publication Date
JPH032547A JPH032547A (en) 1991-01-08
JPH0676971B2 true JPH0676971B2 (en) 1994-09-28

Family

ID=15187052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13693889A Expired - Fee Related JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Country Status (1)

Country Link
JP (1) JPH0676971B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3695407B2 (en) * 2002-02-25 2005-09-14 ソニーケミカル株式会社 Nondestructive inspection method for curing level of cured product of curable adhesive composition and method for manufacturing electronic device
JP4807183B2 (en) * 2006-08-24 2011-11-02 住友電気工業株式会社 Mounting product inspection method and inspection device

Also Published As

Publication number Publication date
JPH032547A (en) 1991-01-08

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