JPH0677980B2 - Bonding method of precious metal foil to substrate - Google Patents
Bonding method of precious metal foil to substrateInfo
- Publication number
- JPH0677980B2 JPH0677980B2 JP14973487A JP14973487A JPH0677980B2 JP H0677980 B2 JPH0677980 B2 JP H0677980B2 JP 14973487 A JP14973487 A JP 14973487A JP 14973487 A JP14973487 A JP 14973487A JP H0677980 B2 JPH0677980 B2 JP H0677980B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- metal foil
- tin
- layer
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Laminated Bodies (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント配線板用の基板に対する貴金属箔の
圧着方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for crimping a precious metal foil onto a substrate for a printed wiring board.
(従来の技術と問題点) 従来、プリント配線板用の基板、例えばガラスエポキシ
やセラミックなどから成る基板に、貴金属箔例えばAu-A
g-Pt合金箔を接合するには、接着シートにより圧着して
いた。(Conventional Technology and Problems) Conventionally, a printed wiring board substrate, for example, a substrate made of glass epoxy or ceramic, is provided with a noble metal foil such as Au-A.
To bond the g-Pt alloy foil, it was pressure bonded with an adhesive sheet.
然し乍ら、この方法では接着シートと貴金属箔の密着性
が悪く接合強度が低く、剥離する恐れがあって信頼性に
欠けるという問題点があった。However, this method has a problem in that the adhesiveness between the adhesive sheet and the precious metal foil is poor, the bonding strength is low, there is a risk of peeling, and the reliability is poor.
(発明の目的) 本発明は、上記問題点を解決すべくなされたもので、貴
金属箔の密着性を向上し、接合強度を高くできる基板へ
の貴金属箔の圧着方法を提供することを目的とするもの
である。(Object of the Invention) The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for pressure-bonding a noble metal foil to a substrate, which can improve the adhesion of the noble metal foil and increase the bonding strength. To do.
(問題点を解決するための手段) 上記問題点を解決するための本発明による基板への貴金
属箔の圧着方法は、上層が貴金属中間層がすず又はすず
合金、下層が銅又は銅合金から成る箔の中間層の一部を
上層の貴金属に熱拡散して拡散層を形成し、次いでこの
拡散層以外の中間層と下層を酸にて溶解し、得られた貴
金属箔を拡散層側で接着シートを用いて基板へ圧着する
ことを特徴とするものである。(Means for Solving Problems) In the method for pressure-bonding a noble metal foil to a substrate according to the present invention for solving the above problems, an upper layer is a noble metal intermediate layer made of tin or tin alloy, and a lower layer is made of copper or copper alloy. A part of the intermediate layer of the foil is thermally diffused into the precious metal of the upper layer to form a diffusion layer, and then the intermediate layer and lower layer other than this diffusion layer are dissolved with acid, and the obtained precious metal foil is bonded on the diffusion layer side. It is characterized in that the sheet is used and pressure-bonded to the substrate.
(作用) 上記のように本発明の基板への貴金属箔の圧着方法は、
すず又はすず合金の一部を貴金属箔に熱拡散し、残りの
すず又はすず合金をエッチングしてすず又はすず合金の
拡散層を露出することにより粗面が得られるためこの拡
散層表面の粗さが接着シートとなじみ、接着シートに食
い込んで、接着シートを介しての基板との密着力が向上
し、貴金属箔と基板との接合強度が高くなる。(Operation) As described above, the method for pressure-bonding the noble metal foil to the substrate of the present invention is
Roughness of the surface of this diffusion layer because a rough surface is obtained by thermally diffusing a part of tin or tin alloy into the precious metal foil and etching the remaining tin or tin alloy to expose the diffusion layer of tin or tin alloy. Becomes compatible with the adhesive sheet and digs into the adhesive sheet, and the adhesive force between the adhesive sheet and the substrate is improved, and the bonding strength between the precious metal foil and the substrate is increased.
下層を設けると、すず又はすず合金の一部を貴金属箔に
熱拡散させる際に、拡散層による粗面を均一にする効果
があり、圧着によるものでは圧力を均一に作用させ、加
熱によるものでは材料の熱容量が増え均一に加温される
という効果がある。When a lower layer is provided, it has the effect of making the rough surface of the diffusion layer uniform when thermally diffusing part of the tin or tin alloy into the noble metal foil. This has the effect of increasing the heat capacity of the material and heating it uniformly.
熱拡散の具体例として実施例では圧接としたが、本発明
を限定するものではなく、この他、シーム溶接、抵抗溶
接や加熱による処理など、上層の貴金属箔と中層のすず
又はすず合金との間に拡散層を生じさせることを広義に
とらえ熱拡散としたものであり、拡散層には合金による
ものや、化合物の生成によるものなどを含んでいる。Although pressure contact was used in the examples as a specific example of thermal diffusion, the present invention is not limited thereto.In addition, seam welding, resistance welding, heat treatment, etc., between the upper layer precious metal foil and the middle layer tin or tin alloy. This is a method of thermal diffusion in which a diffusion layer is generated in a broad sense, and the diffusion layer includes an alloy, a compound, and the like.
また熱拡散は、圧接の後、加熱処理するなど二重に行っ
てもよい。Further, the thermal diffusion may be performed twice, such as by heat treatment after pressure contact.
下層を銀よりも卑な金属又は銀よりも卑な金属の合金と
した理由は、銀以外の貴金属を上層とした場合、上層を
溶解せずに下層を溶解しうる最も強力な酸が硝酸であ
り、硝酸で溶解可能な金属の限界が銀であるからであ
る。The reason why the lower layer is a metal less base than silver or an alloy of a metal less base than silver is that when a noble metal other than silver is used as the upper layer, nitric acid is the most powerful acid that can dissolve the lower layer without dissolving the upper layer. This is because the limit of the metal that can be dissolved in nitric acid is silver.
銀を上層に用いた場合は、銀よりも卑な材料からなる下
層を硝酸以外の酸で溶かせば良い。When silver is used as the upper layer, the lower layer made of a material less base than silver may be dissolved with an acid other than nitric acid.
下層に用いる材料は、銀、銀合金の他に、銅、銅合金、
FeやNiをベースとしたものなどがあり、前記の「圧力が
均一にかかる」「熱容量が大きい」などの利点があるも
のが良く、銀や銅からなるもののように熱の伝導性が良
くすずとも拡散層を作るものは特に良い。The material used for the lower layer is silver, silver alloy, copper, copper alloy,
Some of them are based on Fe or Ni, and those with advantages such as "uniform pressure" and "large heat capacity" are good, and those with good heat conductivity, such as those made of silver or copper, have good tin conductivity. In particular, the one that makes the diffusion layer is particularly good.
(実施例) 本発明による基板への貴金属箔の圧着方法の一実施例を
説明すると、先ず幅40mm、長さ200mm、厚さ35μmのAu-
Ag-Pt合金箔に、片面にすずを2〜3μ被覆した厚さ0.3
mm、幅40mm、長さ200mmの銅板をすず面にて圧接してAu-
Ag-Pt合金とすずの拡散層が形成された。上層が貴金
属、中間層がすず、下層が銅から成る板として次いでHN
O3と水の1:1の混合液にて銅箔及び拡散層以外のすずを
溶解除去した。然る後Au-Ag-Pt合金箔を拡散層側で接着
シートにより幅250mm、長さ500mm、厚さ1.6mmのガラス
エポキシ基板へ圧着した。(Embodiment) An embodiment of a method for pressure-bonding a noble metal foil to a substrate according to the present invention will be described. First, a width 40 mm, a length 200 mm, and a thickness 35 μm of Au-
Ag-Pt alloy foil with tin coated on one side by 2-3μ, thickness 0.3
mm-width 40 mm-length 200 mm copper plate is pressure-welded on the tin surface and Au-
A diffusion layer of Ag-Pt alloy and tin was formed. HN as a plate with upper layer of precious metal, middle layer of tin, and lower layer of copper
The tin other than the copper foil and the diffusion layer was dissolved and removed with a mixed solution of O 3 and water at a ratio of 1: 1. After that, the Au-Ag-Pt alloy foil was pressure-bonded to the glass epoxy substrate having a width of 250 mm, a length of 500 mm and a thickness of 1.6 mm on the diffusion layer side with an adhesive sheet.
一方、具体的な従来例を説明すると、前記実施例と同一
寸法のAu-Ag-Pt合金箔を、そのまま接着シートより前記
実施例と同一寸法のガラスエポキシ基板へ圧着した。On the other hand, to describe a specific conventional example, an Au-Ag-Pt alloy foil having the same size as that of the above-mentioned embodiment was directly pressed from the adhesive sheet to a glass epoxy substrate having the same size as that of the above-mentioned embodiment.
なお、本実施例及び従来例においてはAu-Ag-Pt合金箔と
してAu70%、Ag10%、Pt5%、Cu14%、Ni1%から成るも
の用いた。またガラスエポキシ基材としてJISG-10材、
接着シートとしてエポキシ樹脂と化学繊維からなるプリ
プレグ(商標)を使用した。In this example and the conventional example, Au-Ag-Pt alloy foil composed of Au70%, Ag10%, Pt5%, Cu14% and Ni1% was used. JIS G-10 material as glass epoxy base material,
A prepreg (trademark) composed of an epoxy resin and a chemical fiber was used as an adhesive sheet.
このようにしてガラスエポキシ基板へ圧着した実施例及
び従来例のAu-Ag-Pt合金箔の接合強度を測定した処、従
来例のものは平均72g/cm2しかなかったのに対し、実施
例のものは平均146g/cm2もあって著しく接合強度が高か
った。これはひとえにすずの拡散層を形成することによ
って得られる粗面を利用してAu-Ag-Pt合金箔を基板に圧
着した為に接着シートとの密着性が向上したからに他な
らない。In this way, the bonding strength of the Au-Ag-Pt alloy foil of the example and the conventional example pressure-bonded to the glass epoxy substrate was measured, whereas the conventional example had an average of only 72 g / cm 2 , whereas the example The average of 146 g / cm 2 was extremely high, and the bonding strength was extremely high. This is due to the fact that the Au-Ag-Pt alloy foil was pressure-bonded to the substrate by utilizing the rough surface obtained by forming the tin diffusion layer, so that the adhesion with the adhesive sheet was improved.
尚、上記実施例はAu-Ag-Pt箔をガラスエポキシ基板に圧
着する場合であるが、これに限定されるものではなく、
他の貴金属箔全てが対象となるものであり、また基板も
セラミックス基板、樹脂製フレキシブル基板等であって
も良いものである。In the above example, the Au-Ag-Pt foil is pressure bonded to the glass epoxy substrate, but the invention is not limited to this.
All other precious metal foils are applicable, and the substrate may be a ceramic substrate, a resin flexible substrate, or the like.
(発明の効果) 以上の説明で判るように本発明の基板への貴金属箔の圧
着方法は、すず又はすず合金の拡散層を形成することに
よって得られる粗面を利用して貴金属箔を基板へ圧着す
るので、接着シートとの密着性が向上し、接合強度が高
くなるという優れた効果がある。(Effects of the Invention) As can be seen from the above description, the method of pressure-bonding a noble metal foil to a substrate of the present invention utilizes the rough surface obtained by forming a diffusion layer of tin or tin alloy to form a noble metal foil on the substrate. Since pressure bonding is performed, there is an excellent effect that the adhesiveness with the adhesive sheet is improved and the bonding strength is increased.
Claims (1)
金、下層が銀より卑な金属又は銀より卑な金属の合金か
らなる板又は箔の中間層の一部を上層の貴金属に熱拡散
して拡散層を形成し、次いでこの拡散層以外の中間層と
下層を酸にて溶解し、得られた貴金属箔を拡散層側で接
着シートにより基板へ圧着することを特徴とする基板へ
の貴金属箔の圧着方法。1. A part of an intermediate layer of a plate or foil in which an upper layer is a noble metal, an intermediate layer is tin or a tin alloy, and a lower layer is a metal less base than silver or an alloy less base than silver is thermally diffused to a noble metal above. To form a diffusion layer, and then the intermediate layer and the lower layer other than this diffusion layer are dissolved with an acid, and the obtained precious metal foil is pressure-bonded to the substrate with an adhesive sheet on the diffusion layer side. Pressure bonding method for precious metal foil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14973487A JPH0677980B2 (en) | 1987-06-16 | 1987-06-16 | Bonding method of precious metal foil to substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14973487A JPH0677980B2 (en) | 1987-06-16 | 1987-06-16 | Bonding method of precious metal foil to substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63312830A JPS63312830A (en) | 1988-12-21 |
| JPH0677980B2 true JPH0677980B2 (en) | 1994-10-05 |
Family
ID=15481645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14973487A Expired - Lifetime JPH0677980B2 (en) | 1987-06-16 | 1987-06-16 | Bonding method of precious metal foil to substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0677980B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4223887A1 (en) * | 1992-07-21 | 1994-01-27 | Basf Ag | Process for producing a polymer / metal or polymer / semiconductor composite |
| US7029761B2 (en) * | 2003-04-30 | 2006-04-18 | Mec Company Ltd. | Bonding layer for bonding resin on copper surface |
| US7156904B2 (en) * | 2003-04-30 | 2007-01-02 | Mec Company Ltd. | Bonding layer forming solution, method of producing copper-to-resin bonding layer using the solution, and layered product obtained thereby |
-
1987
- 1987-06-16 JP JP14973487A patent/JPH0677980B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63312830A (en) | 1988-12-21 |
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