JPH0678146B2 - Substrate holding device - Google Patents

Description

Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a substrate holding device, and in particular, an ultraviolet-sensitive dry film for forming a circuit is hot roll-pressed onto the surface of a substrate such as a copper clad laminate. The present invention relates to a device for automatically receiving and holding a laminated substrate formed in a clean room.

[Technical Background of the Invention and Problems Thereof] Generally, in a manufacturing process of a circuit board, an ultraviolet-sensitive dry film is attached to one surface or both surfaces of a copper clad laminate to form a circuit pattern.

And recently, in such a dry film attachment process,
An automatic laminator has been introduced in order to save labor, eliminate human causes and improve the yield of dry films.

However, in the process of receiving the laminated substrates, the operator manually receives them one by one and stores them in the substrate tray, which makes labor saving of the entire manufacturing line insufficient and the laminated substrate It has been a cause of dust and dirt adhering to the substrate surface.

In order to solve such a problem, the following apparatus or method for automatically receiving and holding a laminated substrate has been proposed.

i) A method of transferring the substrate 2 placed on the roller conveyor 1 and automatically conveyed as shown in FIG. 3 by using the suction pad 4 having the suction cup 3 attached to the back surface.

II) As shown in FIG. 4, the substrate 2 is scooped up on the comb-shaped operating rod 5 arranged on the transfer surface, and the operating rod 5 is rotated to a vertical state with the base end portion as an axis. A method of leaning the substrate 2 on the holding table 6.

III) As shown in FIG. 5, the substrate 2 is placed on the belt conveyor 8 with the locking claws 7 and lowered, and the lower end is inserted into the groove of the flat substrate tray 9 with the groove and the substrate is stored in a standing state. How to hold.

However, among these methods i) and II), in the method of receiving and holding a number of substrates 2 in a vertical or horizontal direction, the laminated substrate 2 on which the dry film is heat-roll-bonded does not generate heat even when it is received. Therefore, there is a problem that heat deterioration, scratches, unevenness, etc. occur on the photosensitive member of the dry film, the resolution is lowered, and a precise circuit pattern cannot be formed by baking.

In the method shown in III), the thickness before lamination is 0.6 mm.
When receiving the following extremely thin substrates, there is a problem that the performance of the laminated dry film is deteriorated because the substrates are deformed by their own weight and the adjacent substrates come into contact with each other as shown in FIG.

[Object of the Invention] The present invention has been made to solve these problems, and provides an apparatus for automatically receiving automatically conveyed substrates one by one and holding them so as not to contact each other. With the goal.

[Summary of the Invention] That is, a substrate holding device of the present invention includes a substrate holding plate that is horizontally arranged on a substrate carrying path and holds a substrate to be transported, and a plurality of gate-shaped metal rods on a flat plate at regular intervals. The substrate trays that are planted in parallel and the substrate holding plate that holds the substrate are erected upright and inserted between the gate-shaped metal rods of the substrate tray, leaving the substrate and returning only the substrate holding plate to its original position. A substrate holding plate transfer mechanism for
It is designed to automatically receive the sheets one by one and keep them apart from each other so that they do not contact each other.

Embodiments of the Invention Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective explanatory view showing an embodiment of the present invention.

In the figure, reference numeral 10 indicates a substrate tray for accommodating and holding a substrate, and this substrate tray 10 has a plurality of gate-shaped metal rods 12 on a flat plate 11 as shown in an enlarged view in FIG. A pair of metal rods 13 are installed in parallel at various intervals, and the legs are connected to each other and the substrate is placed.
The structure is such that is welded to the lower part of each gate-shaped metal rod so as to be orthogonal to these.

In addition, from the storage (not shown) of the substrate tray 10,
A plurality of pairs of chain conveyors 14a, 14b are arranged to be connected in the vertical direction and the horizontal direction.Furthermore, at the end portion of the horizontal chain conveyor 14b, a roller conveyor 15 is connected in a direction orthogonal to this. It is arranged. A pair of beam sensors 16 are arranged facing each other on both sides of the substrate insertion position on the roller conveyor 15.

Further, 2 is provided on the end portion of the roller conveyor 18 that conveys the substrate 17 that has been subjected to the processing such as dry film lamination.
A substrate holding plate 19 having a relatively large area is placed, and a sensor 20 is installed on the roller conveyor 18 closer to the tip than the substrate holding plate 19.

The substrate carrying roller conveyor 18 is arranged above and in parallel with the roller conveyor 15 for carrying the substrate tray 10, and the sensor 20 is provided with the substrate tray carrying roller conveyor 15.
It is located directly above the board insertion position. Further, a pair of chain conveyors 21 are hung vertically from the end of the board conveying roller conveyor 18 to the board insertion position of the board tray conveying roller conveyor 15, and on the surface including the belt of the chain conveyor 21. A plurality of substrate holding rollers 22 are horizontally provided.

Note that each of the above units is provided with a control mechanism 23 that controls operations such as forward movement and stoppage of the substrate tray transport roller conveyor 15 and the substrate transport roller conveyor 18 in response to signals from the beam sensor 16 and the sensor 20.

Next, the operation of the substrate holding device thus configured will be described.

First, the substrate tray 10 stored in the storage is sequentially conveyed by the chain conveyors 14a and 14b arranged in the vertical direction and the horizontal direction, and further conveyed by the roller conveyor 15 to a predetermined position.

When the tip of the substrate tray 10 blocks the beam of the beam sensor 16, a detection signal is output from this sensor unit to the control transport 23, the movement of the roller conveyor 15 is stopped, and the substrate tray 10 stays at this substrate insertion position. And wait.

On the other hand, the laminated substrate 17 is conveyed by the roller conveyor 18 and is automatically transferred onto the substrate holding plate 19 installed at the end of the roller conveyor 18. The transfer of the substrate 17 onto the substrate holding plate 19 is detected by the sensor 20, and a signal is output from this to the control mechanism 23. Then, the control mechanism 23 stops the traveling of the roller conveyor 18, and at the same time, the substrate holding plate
After 19 is rotated by 90 ° in the direction of arrow A, it is lowered along the belt surface of the chain conveyor 21 to just above the substrate tray 10 waiting at the substrate insertion position on the roller conveyor 15.

At this time, the substrate 17 reaches a position directly above the substrate tray 10 while being sandwiched between the substrate holding rollers 22 and placed on the substrate holding plate 19, and then, between the two gate-shaped metal rods 12 of the substrate tray 10. It is dropped and held vertically here.

When the substrate 17 is held at a predetermined position on the substrate tray 10, the roller conveyor 15 is actuated and the substrate tray 10 is advanced by one interval of the gate-shaped metal rod 12. The vacant substrate holding plate 19 rises along the chain conveyor 21 and returns to the original position on the roller conveyor 8 to stand by for receiving the next substrate.

By repeating the above operation, a large number of substrates 17 can be automatically received one by one without being deformed, and can be appropriately separated and held so as not to come into contact with each other. Therefore, even a thin substrate having a thickness of 0.17 to 5.0 mm can be received and held without deteriorating the characteristics, and the yield can be dramatically improved.

[Effects of the Invention] As is clear from the above description, according to the substrate holding apparatus of the present invention, it is possible to automatically receive and hold the substrates that have been subjected to the laminating process, etc. without contacting each other. Therefore, it is possible to prevent the occurrence of defects due to the attachment of dust or dirt to the surface of the substrate due to human causes, and it is possible to improve the yield of products.

Further, even in the case of a particularly thin substrate, it can be automatically received and held without causing deformation or deterioration of characteristics.

[Brief description of drawings]

FIG. 1 is a perspective explanatory view showing an embodiment of the substrate holding device of the present invention, FIG. 2 is an enlarged perspective view of a substrate tray used in the embodiment, and FIGS. FIG. 6 is a perspective view showing a method of receiving and holding a substrate, and FIG. 6 is a front view showing a state of receiving and holding a substrate by the method shown in FIG. 1,15,18 …… Roller conveyor 2,17 …… Substrate 4 …… Suction pad 5 …… Operation rod 9 …… Flat board tray 10 …… Substrate tray 12 …… Gate metal rod 14, 21 …… Chain Conveyor 16 …… Beam sensor 19 …… Substrate holding plate 20 …… Sensor 22 …… Substrate holding roller

Claims (1)

[Claims] 1. A substrate which is horizontally arranged on a substrate conveyance path is held, and the held substrate is made to stand upright between a chain conveyor and a substrate holding roller which are vertically arranged with respect to the substrate conveyance path. A substrate holding plate that sandwiches the substrate and moves up and down along the chain conveyor, and a plurality of gate-shaped metal rods that are arranged immediately below the chain conveyor and insert the substrate are parallel to each other on a flat plate at regular intervals. And a substrate holding plate transfer mechanism for returning only the substrate holding plate to the original position while leaving the substrate inserted between the gate-shaped metal rods of the substrate tray. A characteristic substrate holding device.