JPH0679648B2 - Filter device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter device provided in communication with a space for handling contaminants therein, and more particularly to the structure of a filter device suitable for a leak test of a filter.

[Conventional technology]

The conventional device is configured as shown in Fig. 17 and Fig. 18 as an example, and handles harmful substances internally.
For safety, it is obliged to regularly check the performance of the exhaust side filter according to No. 49 etc.

The performance measurement of the filter 150 on the exhaust side of such a device is
As shown in FIG. 19, the filter inspection cover 120 is removed to form an inspection opening 113, and the particle detector 112 is installed by the measurer.
Hold a by hand and insert it into the space on the downstream side of the filter 150 through this opening 113, and
The scanning is performed on the surface 111 along the line. The measurement result is the particle number measuring device 1
Read the number displayed on 12.

To perform this measurement, a large amount of test particles are supplied to the space communicating with the upstream side 150b of the filter 150, and the filter 1 is determined by whether or not the particles are detected on the downstream surface 111 of the filter 150.
Check 50 for leaks by checking the filter
There must be an air flow through 150 from upstream 150b to downstream 150a. Such an air flow communicates with the downstream side 150a of the filter 150 and is connected to the exhaust fan 130 provided in the exhaust duct 132 during operation of the apparatus.
However, since the inspection opening 113 is formed on the downstream side 150a of the filter 150 at the time of measurement, the exhaust fan 130 sucks air from the opening 113,
A predetermined air flow cannot be formed in the filter 150.
Therefore, the airtight cover 121 is attached to the opening 101a on the front surface of the work chamber 101.
Attach airtightly around the opening 101a with screws 140, and blower 1
The outlet of 35 is connected to communicate with the working chamber 101 through the closed cover 121, and the particle generator 190 is connected to the inlet of the blower 135.
The large amount of particles 191 generated by the air are sucked in together with air and supplied into the working chamber 101 in a pressurized state, and the working space 1
The filter 150 provided in communication with 01 is connected to the upstream side 150b.
To form the air flow from the downstream side to the downstream side 150a.
Further, the downstream surface 111 of the filter 150 by the particle detecting means 112a.
The scanning of 1 must be performed over almost the entire downstream surface 111, but this work was performed in a hand-held state.

Incidentally, as a device related to this kind of device, there is, for example, JP-A-60-129539.

[Problems to be solved by the invention]

The above-mentioned prior art does not consider the point of improving the workability at the time of periodic inspection of the exhaust side filter, the blower 135 for measurement and the sealing cover 121 are required, and the sealing cover 121 is time-consuming to install airtightly. Blower 1
Since the particles for measurement are supplied via 35, it takes time and effort to connect the airtight cover 121 and the blower 135, and the shape of the airtight cover 121 differs depending on the shape of the device, and thus the airtight cover 121 is required for each shape. Since the amount of exhaust air varies depending on the device, it is necessary to change the air blowing capacity of the blower 130 for each device, which is time-consuming, and it is necessary to prepare a blower 135 whose capacity can be adjusted or a dedicated product for each exhaust air amount. There were problems such as being there. Further, since the working chamber 101 is pressurized, the measurement particles 191 adhere to the outlet side of the clean air supply filter 148, and the cleanliness inside the working chamber 101 decreases after the measurement. In addition, the Ministry of Education Notification No.
Except for the annual inspection specified in No. 49, the above-mentioned closed cover 121
Therefore, the blower 135 is stored, and there is a problem that a storage place for these is necessary. Furthermore, when borrowing these items for inspection, transportation costs, borrowing costs, etc. are required, which is uneconomical.

An object of the present invention is to provide a filter device that can easily measure the performance of a filter at the time of periodic inspection and can perform the measurement at the time of measurement without using a large-scale device.

[Means for solving problems]

The above-mentioned object is to provide a filter device which communicates with a space for handling contaminants inside and purifies air sucked from the space, and a maintenance space for storing the filter and for maintaining the filter downstream of the filter. A filter case provided with a glove provided so as to project into the maintenance space and a communication portion that communicates the inside and the outside of the maintenance space; and the maintenance space provided in the maintenance space and through the communication portion. And a particle detecting means configured to be connected to an externally installed measuring device.

According to a preferred embodiment, the maintenance space includes guide means for the particle detection means downstream of the filter, and the particle detection means is movably provided along the guide means.

[Action]

The filter purifies the air by removing the contaminants from the air within the space that handles the contaminants.

The filter case stores the filter and has a maintenance space on the downstream side of the filter so that the filter can be inspected from the downstream side. The communication part provided in the filter case enables connection between the particle detection means provided in the maintenance space and the measuring device installed outside the maintenance space, and the glove isolates the inside and outside of the maintenance space from the maintenance space. It allows the particle detection means to be scanned in space along the downstream face of the filter. As a result, it is possible to prevent air outside the filter case from flowing into the maintenance space, make it possible to perform measurements under normal operating conditions, and operate the particle detection means through gloves, and measure the filter performance during regular inspections. Workability is improved.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS.

A first embodiment of the present invention will be described with reference to FIGS.

In the present embodiment, the filter case 2 has a working chamber 1 which is a space for handling contaminants therein and is formed below the filtering case 2, and the working chamber 1 and the maintenance space 24 for the filter 50 are isolated above the working chamber 1. The partition wall 1a is provided, and the suction port provided in the partition wall 1a
A filter 50 is placed on the upper part of 1b. The filter 50 is airtightly fixed to the partition wall 1a by packing (not shown), fixing metal fittings (not shown) or the like. Downstream of filter 50
The maintenance space 24 provided in 50a is provided with a filter inspection cover 20 that is airtightly fastened with a screw 40 in a filter replacement opening 24a on the front side thereof, and the ceiling surface communicates the inside and outside of the maintenance space. A communication part 26 is provided. In the present embodiment, the filter inspection cover 20 is made of a transparent material such as a glass plate or an acrylic plate, and the gloves 22 having airtightness provided so as to project into the maintenance space 24 are attached. A tubular detection port 10 which is a particle detection means is provided in the maintenance space 24, and the detection port 10 is connected via a communication portion 26 to a particle measuring device 12 provided outside the maintenance space. Also,
An exhaust duct 32 is connected to the ceiling surface of the maintenance space 24, an exhaust fan 30 is provided in the exhaust duct, and the maintenance space 24,
Air in the working chamber 1 is sucked through the filter 50.

In this embodiment, when measuring the performance of the filter 50, the exhaust fan 30 is operated in the same manner as in normal use, and the glove 22 provided on the filter inspection cover 20 is put in the maintenance space by the operator. Grab the detection port 10 in 24 and filter
The downstream surface 11 of 50 is scanned and the number of particles is measured by the particle measuring device 12 to check the presence or absence of leak. Usually particle counter 12
Is a light-scattering particle counter that sucks in air, converts the number of particles in the air into the number of pulses of scattered light, and counts it. A flexible tube 10a is used. In this embodiment, even at the time of measurement, the exhaust fan 30 can be operated in the same manner as in a normal use state, so that an air flow can be formed in the filter 50 from the upstream side 50b to the downstream side 50a, and a blower for pressurization and a working chamber The cover of the opening can be dispensed with, and the particle generator 90 can be installed in the opening 1c of the working chamber 1 to measure particles for measurement.
91 can be fed to the filter 50 via the working chamber 1. The particle generator 90 normally generates DOP particles having a particle size of about 0.3 to 0.5 μm.

As a result, it is possible to omit the work of attaching the sealing cover to the opening 1c of the working chamber 1 and the work of connecting the blower for pressurization when the performance of the filter 50 is measured. Further, since the measurement can be performed through the globe 22, the work of removing the filter inspection cover 20 can be omitted. Further, since the filter inspection cover 20 is transparent, the measurement can be performed while confirming the position of the detection port 10. A second embodiment of the present invention will be described with reference to FIGS.

The present embodiment is an example in which the present invention is applied to a bag-in / back-out type in which the filter 50 is attached and detached. When the risk of the substance handled in the working chamber 1 is high, the filter 50 can be replaced through the airtight bag 80 that is airtightly attached to the filter replacement opening 24a of the maintenance space 24 by the O-ring 41. To do. In the present embodiment, the glove 22 is hermetically connected to the bag 80, and at the time of measurement, the measurer puts his / her hand on the glove 22 and grasps the detection port 10 to scan the downstream surface 11 of the filter 50. The method of supplying the measurement particles 91 and the like are the same as in the first embodiment. In the present embodiment, the communication section 26 is provided on the front side of the maintenance space 24, and the tube 10a of the particle measuring instrument 12 is detachably connected thereto. During normal operation, the bag 80 is folded and positioned near the opening 24a so as not to obstruct the air flow to the exhaust duct 32, and the cover 23 is fixed to the outside by the screw 40. In this embodiment, since the tube 10a is detachably attached to the communication portion 26, it is desirable that the communication portion 26 be configured to be closed when the tube 10a is removed, and a manual cock (not shown). No.) or, as an example, the valve 26b is normally driven by the force of the spring 26a as shown in FIGS.
The valve 26b may be configured to be opened by the force when the tube is closed and the tip of the tube 10a is inserted. In the figure, 26c is a pin for rotatably supporting the valve 26b, and 26d.
Is an airtight packing, and 26e is a mounting flange. The spring 26a is set so that the valve 26b does not open due to the pressure difference between the inside and the outside of the maintenance space 24 during normal operation. Also,
Stopper 10b so that it stops at the prescribed insertion position in tube 10a.
May be provided. In this case, since the cover 23 does not need airtightness, it can be easily attached.

A third embodiment of the present invention is shown in FIGS. In this embodiment, clean air is supplied into the work chamber 1 and
The present invention is applied to a cleaning workbench that purifies and exhausts the internal air.

In this embodiment, a partition wall 44 surrounding the work chamber 1 is provided in the filter case 42, a filter 48 for supplying clean air into the work chamber 1 is placed above the work chamber 1, and above the work chamber 1. An air blower 31 that supplies air to the filter 48 is mounted. A duct space 42c is formed between the lower surface of the work chamber 1 and the lower surface of the filter case 42, and between the back surface of the work chamber 1 and the back surface of the filter case 42. A partition wall 42a is provided on the upper part of the filter case 42 to separate the space in which the work chamber 1, the filter 48, and the fan 31 are stored from the maintenance space 24 of the filter 50 for purifying exhaust gas. A filter 50 is placed on an upper portion of the suction port 42b provided in the partition wall 42a, and the filter 50 is airtightly fixed to the partition wall 42a by packing (not shown), fixing metal fittings (not shown), or the like. The upstream side 50b of the filter 50 communicates with the working chamber 1 via the duct space 42c. The filter replacement opening 24a formed on the front side of the maintenance space 24 is provided with a filter inspection cover 20 that is airtightly fastened with a screw 40, and the inspection cover 20 is attached with a globe 22 and a communication portion 26. . Inspection cover
20 is formed of a transparent material such as a glass plate or an acrylic plate. Inside the maintenance space 24, the detection port 10 connected to the communication part 26
Is provided. An exhaust duct 32 is connected to the ceiling surface of the maintenance space 24, and an exhaust fan 30 is provided in the exhaust duct. In this embodiment, when the performance of the filter 50 is measured, the exhaust fan 30 and the blower 31 are the same as in normal operation.
The particle generator 90 from the opening 1c on the front side of the working room 1.
The particles 91 generated by are supplied into the working chamber 1.

The measurer puts his / her hand on the glove 22 and grabs the detection port 10,
The particle counter 12 that scans the downstream surface 11 along the downstream side 50a of the filter 50 and is connected to the detection port 10 via the tube 10a.
To measure the number of particles. In this embodiment as well, as in the first embodiment, the airtight cover and the pressure blower are unnecessary. Further, in the present embodiment, the filter 43 remains in the working space 1 even during the measurement.
And because clean air is supplied by the blower 31,
The particles 91 supplied from the particle generator 90 are in the duct space 42.
Since the particles 91 flow into the working chamber 1 and the working chamber 1 is not filled with the particles 91, the outlet surface 48a of the filter 48 can be prevented from being contaminated.

A fourth embodiment of the present invention is shown in FIG.

In the present embodiment, the present invention is applied to a filter box installed in an exhaust duct from a work room 1 that handles harmful substances. In this embodiment, an exhaust duct 47 is connected to the work chamber 1. The exhaust duct 47 is connected to the duct 32 via a filter box in which the filter 50 is stored in the filter case 45. The exhaust duct 32 has an exhaust fan 30 inside.
Is provided to suck the air in the working chamber 1 through the filter 50. A partition 45a is provided inside the filter case 45, and a filter is provided above the suction port 45b formed in the partition 45a.
50 is airtightly fixed by packing (not shown), fixing metal fittings (not shown), or the like. A maintenance space 24 is formed on the downstream side 50a of the filter 50, a filter replacement opening 24a is provided on the front surface of the maintenance space 24, and the filter inspection cover 20 is airtightly fastened to the opening 24a by a screw 40. It The globe 22 and the communication section 26 are attached to the inspection cover 20, and the detection port 10 is connected to the maintenance space 24 side of the communication section 26. Exhaust duct with exhaust fan 30 on the ceiling surface of the maintenance space 24
32 is connected. Also in this embodiment, the measurement can be performed in the same state as in the normal operation as in the other embodiments, and the measurement work is greatly simplified.

In performing the scanning on the scanning surface 11 at the time of measurement in the above examples, usually the positioning of the measurement position of the detection port 10 is performed visually, and the measurement port is held by the measurer by hand for a predetermined time at the measurement position. The number of particles is measured, and this operation is sequentially performed for a predetermined number of measurement points set on the scanning surface 11. However, in this type of device, the exhaust gas purification filter 50 is usually provided above the working chamber, and the bottom of the working chamber 1 is normally set to the height of a desk (about 800 mm) with respect to the bottom. The measurement surface 11 is about 2 m high from the bottom surface. for that reason,
The measurer will carry out the measurement work on the table, visually position the measurement position, and detect the detection port at the measurement position.
It is dangerous to maintain the workability because of poor workability and unstable posture in some cases. In particular, a particle counter such as a light-scattering type requires a holding time of several tens of seconds to one minute for the detection opening for measurement. Therefore, it is very difficult for a measurer to hold the detection opening 10 at a predetermined position during this period. Concentration is required and the fatigue of the measurer is great.

In order to improve workability at the time of measurement and reduce fatigue of the measurer, in the above embodiment, the measuring surface 11 is provided with the guide means for the detection port 10 as shown in FIGS. 11 to 16. May be.

11 and 12 are a perspective view and a plan view showing a first example of the guide means, respectively.

In this example, a guide frame 60 is provided as a guide means on the measurement surface of the filter 50. The guide frame 60 is provided with a plurality of guide plates 61 alternately inside the rectangular outer frame 60a, and between the outer frame 60a and the guide plate 61, or in a groove-shaped space 60b formed between the guide plates 61. It is configured so that the detection port 10 can be moved along it.

FIG. 13 is a perspective view showing a second example of the guiding means. In this example, a guide plate 62 having a notch 62a formed at one end is fixed inside a rectangular outer frame 60a so that the notches are alternately positioned on the left and right.

In this example, the detection port 10 is provided with a disk-shaped stopper 10c, and the diameter of the stopper 10c is set to be larger than the width of the outer frame 60a and the guide plate 62 and the guide groove 60b formed between the guide plates 62. The dimension of the detection port 10 projecting from the stopper 10c is set to be smaller than the cut depth of the notch 62a.

In this example, the guide frame can be made strong, and the scanning of the detection port 10 becomes easier. FIG. 14 is a plan view showing a third example of the guide means.

In this example, a guide plate 63 formed in a spiral shape is provided inside the rectangular outer frame 60a, and the guide groove 60b is formed in a spiral shape.

FIG. 15 is a plan view showing a fourth example of the guiding means. In this example, a plurality of fixing holes 82b of the detection port 10 are provided in a disc-shaped guide plate 82 rotatably supported by a fulcrum 82a, and scanning is performed by rotating the guide plate 82. is there. The plurality of fixing holes 82b are provided at positions having different radii, and the detection ports 10 are sequentially replaced so that measurement can be performed at most points on the filter surface.
If the guide plate 82 is supported at three or more points on the circumference, the measurement can be performed even at the center.
The guide plate 82 is formed of a wire mesh, an expanded metal, a perforated plate or the like that does not obstruct the air flow.

FIG. 16 is a plan view showing a fifth example of the guiding means.

In this example, a slit-shaped groove 82c is provided in a disk-shaped guide plate 82 that is rotatably supported by a fulcrum 82a, and the detection port 10 is linearly moved along this groove. Is.
The linear movement of the detection port 10 is determined by the motor 73 fixed to the guide plate 82.
And connected to it and threaded to convert rotational movement into linear movement. The conversion axis 72 is used. Further information board 82
Is configured to be rotated by a motor 71 provided on the filter case side and a transmission device 70 connected to the motor 71 and transmitting its rotation to a guide plate 82.

As the transmission device 70, a gear, a roller, a belt, or the like is used.

According to this example, the measurement can be automated. By providing the guide means for the detection port 10 as described above, the measurement work is facilitated and the fatigue of the measurer is reduced.

In the above embodiments, the detection port 10 that communicates with the light-scattering type particle counter as a particle detecting means and sucks air.
However, a particle sensor using a semiconductor may be used.

〔The invention's effect〕

According to the present invention, it is possible to obtain a filter device capable of easily measuring the performance of a filter at the time of periodic inspection.

[Brief description of drawings]

1 and 2 are respectively a side sectional view showing a structure of a filter device according to a first embodiment of the present invention and a perspective view of a filter inspection cover, and FIGS. 3 to 7 are respectively a second embodiment of the present invention. FIG. 3 is a side sectional view showing the configuration of the filter device, FIG. 4 is a perspective view of the bag, FIG. 5 is a perspective view of the filter inspection cover, and FIG. 6 is a side sectional view showing an example of the communicating portion. FIG. 7 is a side sectional view showing a state in which a tube is connected to the communicating portion of FIG. 6, and FIGS. 8 and 9 are side sectional views showing the structure of a filter device according to a third embodiment of the present invention. FIG. 10 is a perspective view of the filter inspection cover, FIG. 10 is a side sectional view showing the configuration of the filter device according to the fourth embodiment of the present invention,
11 and 12 are respectively a perspective view and a plan view showing a first example of the guide means, FIG. 13 is a perspective view showing a second example of the guide means, and FIG. 14 is a third view of the guide means. Plan view showing an example,
FIG. 15 is a plan view showing a fourth example of the guiding means, FIG. 16 is a plan view showing a fifth example of the guiding means, FIGS. 17 and 18 are front views showing the construction of a conventional device, respectively. FIG. 19 is a side view showing a state of particle measurement for filter inspection in a conventional device. 1: Space that handles pollutants inside, 2, 42, 45: Filter case,
10: Particle detection means, 12: Measuring instrument, 22: Gloves, 24: Maintenance space,
26: communication part, 50: filter.

Claims (2)

[Claims] 1. A filter for communicating with a space for handling pollutants inside thereof, for purifying air sucked from the space, and a maintenance space for storing the filter, the maintenance space being provided downstream of the filter, A filter case including a glove provided so as to project into the maintenance space and a communication portion that communicates the inside and the outside of the maintenance space, and the outside of the maintenance space provided in the maintenance space via the communication portion. And a particle detector configured to be connected to a measuring device installed in the filter device. 2. The maintenance space is provided with guide means for the particle detection means on the downstream side of the filter, and the particle detection means is movably provided along the guide means. The filter device according to claim 1.