JPH0680691B2 - Lead frame transfer device - Google Patents

Description

Description: FIELD OF THE INVENTION The present invention relates to a lead frame transfer device in a semiconductor assembly machine used for manufacturing semiconductor integrated circuits and the like.

BACKGROUND OF THE INVENTION As a conventional lead frame transfer device, for example, Japanese Patent Publication No. 55
The one disclosed in Japanese Patent No. 7944 is known. However, in this structure, the frame feed claw is inserted into the feed hole of the lead frame, and the claw is moved in the transport direction of the lead frame to transport the lead frame. For different types, it was necessary to change the position and shape of the feed pin each time, which made quality exchange difficult. Further, the lead frame is displaced due to rattle of the feed claw and the feed hole of the lead frame. Further, since the movement of the feed claw is performed by the cam, the cam must be replaced every time for qualities with different lead frame feed amounts, and from this point also, it is difficult to exchange the product type.

Further, in the above structure, the lead frame is provided with the frame feed claw moving mechanism below the guide frame. Therefore, for example, when such a lead frame transfer device is used for a die bonder, a wafer having a large number of vertically and horizontally divided dies. Is mounted on the wafer mount, and the dies are picked up one by one from the wafer mount and die bonded to the lead frame on the lead frame transfer device, the outer periphery of the wafer mount is the lead frame transfer device. Since it must be located on the side, in the case of Daihonda, the size of the entire device is increased.

[Object of the Invention] An object of the present invention is to easily deal with products having different positions and shapes of lead frame feed holes, to accurately transfer the lead frame, and when the lead frame is displaced. It is also an object of the present invention to provide a lead frame transfer device capable of correcting the positional deviation and further downsizing the entire device when used in a die bonder.

[Embodiment of the Invention] An embodiment of the present invention will be described below with reference to the drawings. 1 is a partial sectional plan view, FIG. 2 is a front view, FIG. 3 is a rear view, FIG. 4 is a left side view, FIG. 5 is a sectional view taken along line 5-5 of FIG. 1, and FIG. 6 is a sectional view taken along line 6-6 of FIG. 1, and FIG. 7 is 7- of FIG.
It is a 7 line sectional view. The main configuration includes a guide rail width adjusting mechanism, a lead frame pressing lid vertical moving mechanism, a claw moving mechanism, and a claw opening / closing mechanism.

Guide rail width adjusting mechanism (see FIGS. 1, 3, 5, and 6) Rise portions 10a and 10b are formed on the front and back sides of the board 10, and the rise portions 10a and 10b are formed. Screw members 12A and 12B are rotatably supported on the left and right sides at right angles to the feed direction of the lead frame 11. On the front side of the rising portion 10a, a lead frame mounting plate 13 and a lead frame side surface regulating plate 14 are fixed in parallel with the feed direction of the lead frame 11, and the lead frame mounting plate 13 and the lead frame side surface regulating plate are provided. 14 forms a guide rail 15 for guiding one side surface of the lead frame 11. In addition, the lead frame mounting plate
Spacers 16 are respectively arranged in the center and left and right (left and right are not shown) between 13 and the lead frame side surface regulating plate 14,
An upper claw and a lower claw, which will be described later, are arranged in the gap formed by the spacer 16. A guide rail 17 is provided on the screw members 12A and 12B in parallel with the guide rail 15.
Is threaded onto the guide rail 17 and the lead frame
A guide groove 17a for guiding the other side surface of 11 is formed. A guide rail driving motor 19 is fixed to the upper surface of the rising portion 10b via a support plate 18. A timing belt 24 is wound around idler rollers 22 and 23 between a pulley 20 fixed to the output shaft of the motor 19 and pulleys 21A and 21B fixed to one ends of the screw members 12A and 12B.

Therefore, when the motor 19 is rotated, the timing belt 24
The screw members 12A and 12B are rotated through the guide rail 17 and the guide rail 17 is driven in the arrow A direction. That is, since the guide rail 17 approaches or separates from the guide rail 15 depending on the rotation direction of the motor 19, the widths of the guide rails 15 and 17 can be freely adjusted.

In this way, since the widths of the guide rails 15 and 17 can be freely adjusted only by controlling the rotation amount of the motor 19 with respect to the change in the width of the lead frame 11, the quality can be easily exchanged.
When the lead frame 11 is transferred by the action of a claw moving mechanism and a claw opening / closing mechanism which will be described later, the distance between the guide rails 15 and 17 is 0.
The lead frame 11 can be accurately positioned in the width direction by widening the lead frame 11 by about 1 to 0.3 mm and controlling the motor 19 after the transfer to narrow the space between the guide rails 15 and 17.

In the present embodiment, the case where only one guide rail 17 is driven has been described, but the screw members 12A, 1
2B is formed with left and right threads, for example, one guide rail 15 is screwed into the left-hand thread part and the other guide rail 17 is fitted into the right-hand thread part.
May be screwed together. According to this structure, the guide rails 15 are formed by the rotation of the screw members 12A and 12B.
17 are driven toward or away from each other, and both 15 and 17
The width between can be changed. In addition, this embodiment uses two screw members 12
Although the guide rail 17 is moved in parallel by using A and 12B, a guide member may be provided so that the guide rail 17 moves in parallel and the guide rail 17 may be moved in parallel by a single screw member.

Claw moving mechanism (see FIGS. 1, 2, 4, 6, and 7) On the upper surface of the rising portion 10a of the substrate 10, side plates 30A are provided on both left and right sides.
30B is a support plate 31A, 31 facing the side plate 30A, 30B on the center side.
B extends and is fixed above the guide rails 15 and 17, respectively. A loader-side claw moving mechanism is attached to the side plate 30A and the support plate 31A, and an unloader-side claw moving mechanism is attached to the side plate 30B and the support plate 31B. here,
Since the pawl moving mechanisms on the loader side and the unloader side are configured substantially symmetrically, the same members are denoted by the same numbers, the loader side is described by adding the symbol A to the numbers, and the unloader side is described by the numbers. Only the reference numeral B is shown in the figure, and the description is omitted.

A pawl feed screw member 32A is rotatably supported in parallel with the guide rails 15 and 17 on the side plate 30A and the support plate 31A.
A pawl feed motor 33A is fixed to the side plate 30A, and a timing belt 36A is wound around a pulley 34A fixed to the output shaft of the motor 33A and a pulley 35A fixed to one end of the screw member 32A. ing. In addition, 37A shows a tension roller.

A female screw member 38A is screwed into the screw member 32A, and the female screw member 38A is attached to the four holding portions 39a, 3a of the claw holder 39A.
9b39c, 39d is sandwiched, and the claw holder 39A is a holding portion 39a, 39b39c, which is swingable about an eccentric shaft 52A described later.
39d is fitted in the female screw member 38A. Claw holder 39A
Is slidably fitted into a guide shaft 40A, which will be described later, arranged parallel to the screw member 32A.

An upper claw lever 41A is rotatably supported on the claw holder 39A about a pin 42A, an upper claw 43A is fixed to one end of the upper claw lever 41A, and a lower claw 44A is attached to the claw holder 39A. Is fixed. The claw tip of the upper claw 43A extends from above between the lead frame mounting plate 13 and the lead frame side surface regulating plate 14, and the claw tip of the lower claw 44A the lead frame mounting plate 13 and the lead frame side surface regulating plate 14. The claws 43A and 44B are arranged so as to be opposed to each other, and extend from below between them.

Therefore, when the motor 33A rotates forward, the pulley 34A and the belt
The screw member 32A rotates via the 36A and the pulley 35A. As a result, the female screw member 38A moves to the right in FIG. A claw holder 39A is inserted into the female screw member 38A so as to be held between the claw holder 39A and the claw holder 39A.
Since the upper claw lever 41A having the upper claw 43A is rotatably provided on the A and the lower claw 44A is fixed to the claw holder 39A, when the female screw member 38A is moved to the right as described above, the upper claw is moved. Four
3A and lower claw 44A also move. Conversely, when the motor 33A reversely rotates, the female screw member 38A moves leftward, and the upper claw 43A and the lower claw 44A both move leftward.

Claw opening / closing mechanism (see FIGS. 1, 2, 4, 6, and 7) Like this claw moving mechanism, this claw opening / closing mechanism is configured so that the loader side and the unloader side are substantially symmetrical. Therefore, the same members are denoted by the same numerals, the loader side is described by adding the reference numeral A to the description, and the unloader side is illustrated by adding the reference numeral B, and the description thereof is omitted.

Both ends of the guide shaft 40A are fixed to the claw opening / closing operation plates 50A and 51A, and the claw opening / closing operation plates 50A and 51A include the side plate 30A and the support plate 3.
It is rotatably supported by an eccentric shaft 52A attached to 1A. A connecting plate 53A is fixed to one side of the opening / closing operation plates 50A and 51A, and an operation shaft 54A is fixed to the other side. A pin 56A, to which a bearing 55A is rotatably attached, is fixed to the other end of the upper claw lever 41A so as to correspond to the operating shaft 54A. Spring hooks 57A and 58A are fixed to the hook holder 39A and the upper hook lever 41A, respectively.
A spring 59A is hooked on A and 58A, and the bearing 55A is urged so as to come into contact with the operating shaft 54A.

A cam follower support plate 61A, on which a cam follower 60A is rotatably supported, is fixed to the connecting plate 53A, and the connecting plate 53 so that the cam follower 60A abuts a cam 62A described later.
The spring hook 63A fixed to A and the spring hook 64A hooked to the support plate 31A are biased by a spring 65A. A cam shaft 66A is rotatably supported on the side plate 30A. The cam 62A is fixed to one end inside the cam shaft 66A, and a pulley 67A is fixed to the other end outside the cam shaft 66A. A motor 68A is fixed to the side plate 30A, and the pulley 69A fixed to the output shaft of the motor 68A and the pulley 68A are fixed.
Timing belt 70A is hung around 67A. In addition, 71A shows a tension roller.

Here, the profile of the cam 62A is such that when the cam 62A rotates 180 degrees from the state where the upper claw 43A and the lower claw 44A are closed as shown in FIG. 6, the cam follower 60A rises by the biasing force of the spring 65A, and When the cam 62A rotates 180 degrees, the cam follower 60A is formed so as to be pushed downward, contrary to the above.

Therefore, the motor 68A rotates from the state of FIG. 6 and the cam 62A
Rotates 180 degrees and the cam follower 60A rises, the pawl opening / closing operation plate 50 passes through the cam follower support plate 61A and the support plate 53A.
A and 51A are rotated counterclockwise in FIG. 6 with the eccentric shaft 52A as a fulcrum. As a result, the pawl holder 39A also rotates counterclockwise about the eccentric shaft 52A, and the lower pawl 44A moves downward and opens. Further, the operating shaft 54A is lowered by the pawl opening / closing operating plates 50A, 51A, the upper pawl lever 41A is pushed down around the pin 42A and pivots counterclockwise, and the upper pawl 43A rises and opens. When the motor 68A further rotates from this state and the cam 62A rotates 180 degrees, the operation reverse to the above occurs and the upper claw 43
A, lower claw 44A closes.

Lead frame retainer lid vertical movement mechanism (see FIGS. 1, 2, 3, and 5) A lead frame mounting table 80 for supporting the bonding portion of the lead frame 11 is fixed at substantially the center of the substrate 10. ing. A lead frame pressing lid 81 having a bonding window 81a is formed above the lead frame mounting table 80. The lead frame pressing lid 81 is a vertical moving plate.
It is fixed at 82. A vertical U-shaped movable guide plate 83 having a vertical groove is fixed to the vertical moving plate 82, and the vertical groove of the movable guide plate 83 has a vertical side surface fixed to the support plate 31A. It is vertically inserted in 84. Further, on the side surface of the vertical moving plate 82, a protruding portion 82a extending above a cam 86 fixed to one end of a rotating shaft 85 rotatably supported by the supporting plate 31A is provided. The protruding portion 82a of the vertical moving plate 82 is pressed against the cam 86 so that the supporting plate 3
0A and the spring hooks 87 and 88 provided on the vertical moving plate 82, respectively.
Spring 89 is hung on. A pulley 90 is fixed to the other end of the rotary shaft 85, and the pulley 90 and the support plate 31A are
A timing belt 93 is stretched around a pulley 92 fixed to the output shaft of a motor 91 fixed to.

FIG. 5 shows a state in which the lead frame pressing cover 81 is lowered and the lead frame 11 is pressed against the lead frame mounting table 80.
When the motor 91 rotates from this state and the rotary shaft 85 rotates 180 degrees via the timing belt 93, the vertical moving plate 82 is raised by the cam 86 along the fixed guide plate 84, and the lead frame pressing lid 81 Is raised. Furthermore, the rotating shaft 85
When rotated 180 degrees, the lead frame retainer lid 81
Descends to the state shown in FIG.

Next, the operation will be described. First, before starting, the width between the guide rails 15 and 17 is adjusted. This adjustment is performed by the motor 19 as described in the item of the guide rail width adjustment mechanism.
By rotating. Also, before starting, upper claw 43A and lower claw 4
4A is in the closed state, the upper claw 43B and the lower claw 44B are in the open state, and the lead frame pressing lid 81 is in the raised state. When the engine is started from this state, the lead frame 11 is supplied from a loader (not shown), and the tip of the lead frame 11 comes into contact with the closed upper claw 43A and the lower claw 44A to be positioned.

Then, the pawl opening / closing mechanism on the loader side operates. That is, the motor 68
When A rotates and the cam 62A rotates 180 degrees, the upper claw 43A and the lower claw 44A open as described in the section of the claw opening / closing mechanism. After that, the claw moving mechanism operates. That is, when the motor 33A rotates in the forward direction, the upper claw 43A and the lower claw 44A move to the left (loader side) of the lead frame 11 as described in the section of the claw moving mechanism.
Move by device. Next, the pawl opening / closing mechanism is actuated again, and when the cam 68A is further rotated 180 degrees by the motor 68A, the upper pawl 43A and the lower pawl 44A are closed, and the upper pawl 43A and the lower pawl 44A prevent the lead frame 11 from moving. It is pinched. Next, when the motor 33A of the pawl moving mechanism again rotates in the reverse direction, the upper pawl 43A and the lower pawl 44A move rightward, that is, one device of the lead frame 11 toward the unloader side. As a result, the lead frame 11 is sent toward the lead frame mounting table 80.

By repeating this operation in sequence, the first device portion of the lead frame 11 is the bonding window of the lead frame pressing lid 81.
The bonding pattern of the lead frame 11 is detected by a television camera (not shown) provided above the 81a. As a result of the detection, if the lead frame 11 is displaced in the feed direction, the correction amount is calculated by the arithmetic unit,
The claw opening / closing mechanism and the claw moving mechanism are activated, and the upper claw 43A and the lower claw 44A
The motor 33A rotates while the lead frame 11 is sandwiched by, and the lead frame 11 is moved by the correction amount. Here, when the lead frame 11 is displaced, the motor 33A may not be rotated, and a bonding device (not shown) may be controlled according to the correction amount during bonding.

Next, the guide rail width adjusting mechanism is activated to remove the gap between the guide rails 15 and 17 and the lead frame 11 as described in the guide rail width adjusting mechanism section.
11 width directions are positioned. Then, the lead frame retainer lid vertical movement mechanism operates, and when the motor 91 rotates 180 degrees as described in the lead frame retainer lid vertical movement mechanism section, the lead frame retainer lid 81 descends and the lead frame retainer lid 81 moves downward.
11 is pressed against the lead frame mounting table 80. In this state, through the window 81a of the lead frame pressing lid 81, a lead device is bonded to the lead frame 11 by a bonding device (not shown), or the lead frame 11 and the lead frame 11 are bonded to each other by wire bonding.

After the bonding is completed, the motor 91 of the lead frame pressing lid vertical movement mechanism rotates 180 degrees again, and the lead frame pressing lid 8
1 rises. When the pawl opening / closing motive and the pawl moving mechanism are operated, the lead frame 11 is sandwiched between the upper pawl 43A and the lower pawl 44A, and the next bonding portion of the lead frame 11 is fed below the bonding window 81a. Bonding is done after performing the action. When the lead frame 11 is sent to the unloader side in this manner, the upper and lower pawls 43B and 44B of the pawl opening / closing mechanism and the pawl moving mechanism shown on the right side in FIGS. 1 and 2 are described above. Upper nail
The same operation as the operation of 43A and the lower claw 44A is performed, and the lead frame 11 that has been bonded is stored in an unloader (not shown). By repeating such an operation, the lead frames 11 are sequentially transferred.

Incidentally, in the above embodiment, the upper claw 43A, 43B and the lower claw 44
The case where A and 44B both open and close has been explained, but the upper claw 43
Only one of A and 43B and the lower claws 44A and 44B may be opened and closed, and the other may be fixed, for example, only the upper claws 43A and 43B may be opened and closed, and the lower claws 44A and 44B may be fixed. The upper and lower claws 43A and 43B and the lower claws 44A and 44B are opened and closed by the motor 68A, but may be opened and closed by a solenoid, an air cylinder or the like.

[Effects of the Invention] As is clear from the above description, according to the present invention, the lead frame is sandwiched between the upper claw and the lower claw to be fed, so that the lead frame can be irrespective of the position and shape of the feed hole of the lead frame. Can be sent. Further, since the feed of the lead frame can be controlled by the rotation amount of the motor, the feed amount can be arbitrarily set and the positional deviation of the lead frame can be easily corrected. Since the claw opening / closing driving means, the claw holding member and the claw moving mechanism are provided above the guide rail,
When used in a die bonder, almost half of the wafer mount for mounting a wafer can be located below the lead frame transfer device, and in the case of a die bonder, the entire device is downsized.

[Brief description of drawings]

FIG. 1 is a partial sectional plan view showing an embodiment of the present invention, and FIG.
The figure is a front view, FIG. 3 is a rear view, FIG. 4 is a left side view, and FIG.
5 is a sectional view taken along line 5-5 of FIG. 1, and FIG. 6 is 6-6 of FIG.
FIG. 7 is a sectional view taken along line 7-7 of FIG. 11 ... Lead frame, 15, 17 ... Guide rail, 32A, 32B ... Screw member, 33A, 33B ... Motor, 34A, 34B 35A, 35B ... Pulley, 36A, 36B ... Timing belt, 38A, 38B ... … Female screw member, 39A, 39B …… Claw holder, 40A, 40B …… Guide shaft, 41A, 41B …… Top claw lever, 42A, 42B …… Pin, 43A, 43B …… Top claw, 44A, 44B …… Lower claw, 50A, 50B, 51A, 51B …… Claw opening / closing actuating plate, 52A, 52B …… Eccentric shaft, 54A, 54B …… Actuating shaft, 62A, 62B …… Cam, 66A, 66B …… Cam shaft, 67A, 67B …… Pulley, 68A, 68B …… Motor, 69A, 69B …… Pulley, 70A, 70B …… Timing pulley.

Claims (2)

[Claims] 1. A pair of guide rails arranged opposite to each other in parallel to guide a lead frame, an upper claw member extending between the guide rails from above the guide rail, and facing the upper claw member. A lower claw member that is disposed below the guide rail and extends between the guide rails, an upper claw lever to which the upper claw member is fixed, the upper claw lever is rotatably supported, and the lower claw member is Fixed nail holder,
A pawl opening / closing operation plate that is rotatably supported and that rotates the upper pawl lever so as to open and close the upper pawl member and the lower pawl member, and also rotates integrally with the pawl holder, and the pawl opening / closing operation plate. And a pawl moving mechanism for moving the pawl holder along the guide rail. The pawl opening / closing drive unit, the pawl holder and the pawl moving mechanism are provided above the guide rail. And a lead frame transfer device. 2. The claw moving mechanism comprises a female screw member for holding the claw holder, a screw member screwed to the female screw member, and a motor for rotating the screw member. The lead frame transfer device described.