JPH0682145B2 - Burn-in device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention relates to a burn-in apparatus for performing screening, aging or reliability test of a sample such as a semiconductor device in a test chamber, The present invention relates to an insertion mechanism for inserting a board on which a sample is mounted into a test chamber.

(Prior Art) In this type of burn-in device, the boards on which the sample is mounted are arranged in a plurality of upper and lower rows and inserted into the test chamber.
Each board is connected to a connector arranged in the test chamber. In order to automatically insert a substrate, a burn-in device is conventionally known which is provided with a substrate insertion mechanism as described in, for example, Japanese Patent Laid-Open No. 62-2176. This conventional insertion mechanism has a structure in which a plurality of arm bodies are fixed to a rotary shaft driven by a motor, and the respective board members are simultaneously pushed by the respective arm bodies.

(Problems to be Solved by the Invention) However, in the above-described conventional structure, since a plurality of substrates are pushed in at the same time, a large load is applied to the motor, which is a drive source, and a large amount of power is required. Moreover, since the arm body is fixed to the rotary shaft connected to the motor, even if there is a board or connector abnormality and there is a positional displacement between the two, the arm body continues to push in force, There was a problem that could cause damage.

The present invention is intended to solve such a problem, in that a large load is not applied to the drive source of the board insertion mechanism, and even if the board and the connector are misaligned, an excessive force is applied. It is an object of the present invention to provide a burn-in device that is free from damage and does not cause damage.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention accommodates a substrate on which a sample such as a semiconductor device is mounted, arranged in a plurality of stages and detachably housed. A test chamber, a connector arranged in the test chamber to which the substrate is detachably connected, and an insertion mechanism for inserting each substrate toward the inner part of the test chamber and connecting to the connector In the burn-in device, the insertion mechanism extends in the array direction of the plurality of substrates and is driven to rotate forward and backward by a drive source such as a motor, and a plurality of rotation shafts fixed to the respective rotation shafts corresponding to the respective substrates. And a plurality of arm bodies that are respectively stacked on the base bodies and rotatably supported by the rotation shafts and that push in the respective substrates in the inserting direction, respectively. An engaging member having a substantially spherical engaging portion is movably provided on one of the facing portions of the body and the arm member forming a pair with the base member and biased toward the other, and the engaging member is provided on the other side. Is provided with a receiving hole into which the engaging portion of the base member is detachably engaged, and the position of the engaging element or the receiving hole provided in the base body in the rotation direction of the rotation shaft corresponds to each of the substrates. The base bodies are deviated from each other.

(Operation) In the burn-in apparatus of the present invention, the substrates on which the sample is mounted are arranged in a plurality of stages in the test chamber, and at this time, the insertion mechanism inserts each substrate toward the inner part of the test chamber. Connect it to the connector. In the insertion mechanism, the rotary shaft is rotationally driven by the drive source, and the plurality of base bodies fixed to the rotary shaft also integrally rotate. While the engaging element provided on one of the base body and the facing portion of the arm body corresponding to the base body is not engaged with the receiving hole provided on the other side, only the base body rotates and the arm body rotates. However, when the engaging element reaches the position facing the receiving hole, the engaging portion of the engaging element biased toward the receiving hole is engaged with the receiving hole,
After that, the arm body rotates integrally with the base body, and the rotating arm body pushes the corresponding substrate in the insertion direction.
Since the positions of the engaging elements or the receiving holes provided in the base body in the rotational direction are deviated from each other in the respective base bodies, the engaging elements in the receiving holes of the respective base bodies and arm bodies corresponding to the respective substrates are arranged. The engagement times are offset, resulting in multiple substrates being pushed in lag with respect to each other. Also, when pushing of a certain board is completed, or when a certain board and the connector are misaligned and an excessive load is applied, the engaging portion with a substantially spherical engaging portion is disengaged from the receiving hole, and the arm is released. The body does not rotate, only the base body rotates.

(Embodiment) Hereinafter, a configuration of an embodiment of the burn-in device of the present invention will be described with reference to the drawings.

In FIG. 2 and FIG. 3, 11 is a test chamber, and this test chamber 11 is formed by being surrounded by a box-shaped heat insulating material 12 having an open front surface. A heat insulating door 14 is provided at the front opening 13 of the test chamber 11 so as to be openable and closable. A plurality of connectors 15 are arranged side by side in the up-down direction in the inner part on the rear side in the test chamber 11. Further, a pair of front and rear columns 16 are arranged on both left and right sides inside the test chamber 11. Then, on the facing surfaces of the left and right columns 16, a plurality of guide portions are arranged so as to face each other in the left-right direction and are arranged in the vertical direction.
17 are provided respectively, and these guide portions 17 have a substantially U-shaped cross section and extend in the front-rear direction.

Further, reference numeral 21 denotes a substrate, and the substrate 21 has a sample 22 such as a semiconductor device mounted on the upper surface thereof, and left and right side edge portions thereof are engaged with the left and right guide portions 17 so that the inside of the test chamber 11 is Are arranged in a plurality of upper and lower rows, and are removably housed, and the rear edge portion is detachably connected to the connector 15. A reinforcing material 23 is provided on the lower surface of the substrate 21.

Further, an insertion mechanism 26 for inserting the substrate 21 toward the inner part of the test chamber 11 and connecting it to the connector 15 is provided at the front part of the test chamber 11. on the other hand,
At the rear part of the test chamber 11, an extraction mechanism 27 for removing the board 21 forward and removing it from the connector 15 is provided.

Next, the structure of the insertion mechanism 26 will be described.

As shown in FIG. 3, a drive shaft 31 extending in the left-right direction is pivotally supported at the uppermost portion of the test chamber 11, and a gear 32 is fixed to one end of the drive shaft 31 protruding outside the test chamber 11. Has been done. Then, a gear 35 fixed to the output shaft 34 of the motor 33 as a drive source arranged outside the test chamber 11 which rotates in forward and reverse directions.
Are meshed with the gear 32. On the other hand, in front of the left and right front columns 16, rotary shafts 36 extending in the vertical direction are respectively supported, and bevel gears 37 are fixed to the upper ends of the rotary shafts 36, respectively. The bevel gears 38 fixed to the drive shaft 31 in opposite directions are meshed with the bevel gears 37 of the rotary shafts 36, respectively. Therefore, the both rotary shafts 36 are normally and reversely rotated in the opposite directions by the normal and reverse rotations of the drive shaft 31.

A plurality of base bodies 41 are fixed to the rotary shafts 36 below the plurality of guide portions 17, respectively. As shown in FIG. 1, the base body 41 has a cylindrical shape having a cut groove 42 on one side, and is fixed to the rotary shaft 36 by split tightening. That is, the rotary shaft 36 is penetrated into the base body 41, and the base body 41 is rotated by the bolt 43 penetrating the cut groove 42.
It is tightened to 36. By being fixed by split tightening, the fixing angle of the base body 41 with respect to the rotating shaft 36 can be freely adjusted.

Further, an arm body 45 is rotatably supported by a shaft portion 44 formed on the upper surface of the base body 41 so as to rotate about the central axis of the rotary shaft 36. The arm body 45 is prevented from coming off by a C ring 46 fitted on the upper portion of the shaft portion 44, and a spacer 47 is interposed between the C ring 46 and the arm body 45. A roller 48 that presses the substrate 21 rearward is pivotally attached to a tip end portion of the arm body 45 by a support shaft 49.

The base body 41 and the arm body 45 are equidistant from the central axis of the rotating shaft 36 and are spaced 120 ° apart from each other,
A plurality of through holes 51 and a plurality of receiving holes 52 are formed so as to penetrate therethrough. In each of the through holes 51, a spherical ball 53 as an engaging member having an outer surface as an engaging portion is fitted in an upper part so as to be vertically movable, and a push screw 54 is screwed in a lower part so as to be able to advance and retreat. And these push screws 54 and balls
The ball 53 is constantly urged upward by a spring 55 mounted between the ball 53 and the ball 53. The receiving hole 52 of the arm body 45
The ball 53 is engaged with the ball 53 so as to be engageable and disengageable from below, and has a smaller diameter than the ball 53.
The through hole 51 has almost the same diameter as the ball 53 and is slightly larger.

The positions of the balls 53 provided on the base body 41 in the rotation direction of the rotation shaft 36 are deviated from each other on the base bodies 41 corresponding to the substrates 21.
For example, in the five base bodies 41 on the right side in FIG. 3, the balls 53 of an arbitrary base body 41 are counterclockwise when viewed from above than the balls 53 of the base body 41 adjacent to the upper side of the base body 41. It is offset by 20 ° in the direction of rotation. In addition, the balls 53 of the base body 41 forming a pair on the left and right are in plane-symmetrical positions.

Further, as shown in FIG. 2, the left and right front columns 16 are provided.
A stopper 56 is fixed to the outer surface of the stopper 56, which comes into contact with the inner surface of the arm body 45 in a state of protruding forward.

Next, the structure of the removal mechanism 27 will be described.

As shown in FIG. 2, support shafts 61 extending in the up-down direction are provided behind the left and right supporting columns 16 on the rear side, and these support shafts 61 support the arm bodies of the insertion mechanism 26. 45
A plurality of arm bodies 62 are rotatably supported at substantially the same height. A roller for pressing the substrate 21 forward is provided at the tip of each of the arm bodies 62.
63 is pivotally attached by a support shaft 64.

Further, adjacent to the rear side of each of the support shafts 61, a rotating shaft 65 extending in the up-down direction is axially supported. A plurality of eccentric cams 66 that press and swing the respective arm bodies 62 from the rear side are fixed to the rotary shafts 65.
Although not shown, the both rotary shafts 65 are connected to a motor different from the motor 33 via a bevel gear, a drive shaft and a gear in the same manner as the insertion mechanism 26. The motor is driven to rotate forward and backward.

Next, the operation of the above embodiment will be described.

When the insertion mechanism (26) and the removal mechanism (27) are all in the initial state, the plurality of substrates (21) on which the sample (22) is mounted are arranged in the test chamber (11) in a plurality of stages. That is, each substrate 21
Insert the left and right side edges of each of the two into the left and right guide portions 17, respectively.
In the initial state, each arm body 45, 62 is in the return position. That is, the arm body 45 of the insertion mechanism 26.
Is facing the front and is in contact with the stopper 56.
The arm body 62 of 27 faces inward in the left-right direction.

Next, the motor 33 of the insertion mechanism 26 is driven. This motor
The rotation of the output shaft 34 of 33 is transmitted to the rotary shaft 36 via the gears 35, 32, the drive shaft 31, and the bevel gears 37, 38, and these rotary shafts 36 rotate in opposite directions to each other and in the insertion direction. Each base body 41 also rotates integrally with the shaft 36.

Initially, the ball 53 and the receiving hole 52 are engaged only with the uppermost base body 41 and the arm body 45, but with the ball 53 and the receiving hole 52 thus engaged, Even if the maximum force is applied from the body 41 to the arm body 45 and the roller 48 of the arm body 45 is in contact with the substrate 21, the arm body 45 rotates integrally with the base body 41. Therefore, the uppermost left and right rollers 48 come into contact with the left and right side portions of the front edge of the uppermost substrate 21 and push the substrate 21 backward. As a result, the board 21 is connected to the connector 15.

When the pushing of the substrate 21 is completed, an excessive load is applied to the arm body 45, so that the ball 53 is disengaged from the receiving hole 52 and the coupling between the base body 41 and the arm body 45 is released. Only the base body 41 rotates without rotating.

On the other hand, in the lower base body 41 and the arm body 45,
Initially the ball 53 is not engaged in the receiving hole 52, so
At least when the roller 48 is in contact with the substrate 21,
Initially, only the base body 41 rotates, and the arm body 45 does not rotate. However, the ball 53
When reaches a position facing the receiving hole 52, the ball 53 urged toward the receiving hole 52 is engaged with the receiving hole 52, and thereafter, the arm body 45 rotates integrally with the base body 41, This arm body 45 pushes the corresponding substrate 21 backward.

In this way, the positions of the balls 53 in the upper and lower base bodies 41 are deviated by, for example, 20 °, so that the time in which the balls 53 are engaged with the receiving holes 52 in the base bodies 41 and the arm bodies 45 is deviated. For example, the upper and lower six-tiered substrates 21 are pushed in sequentially from top to bottom with a time difference. By distributing the pushing in this way, a large load is not applied to the motor 33 and the like, and the force required for one pushing is small, so that large power is not required.

When the board 21 is pushed in, the board 21 or the connector 15
Due to an abnormality such as
Even when an abnormally large load is applied, as in the case where is not inserted all the way, the ball 53 comes off the receiving hole 52, the arm body 45 does not rotate, and only the base body 41 rotates. Become. Therefore, since the force acting between them is weakened, an unreasonable force is not applied, an excessive load is not applied to the motor 33 and the like, and damage is not caused.

Note that FIG. 3 shows a state in which the upper two stages of the arm bodies 45 are oriented sideways and the other arm bodies 45 are oriented forward.

When all the boards 21 have been inserted, the motor 33 is rotated in the reverse direction to return the insertion mechanism 26 to the initial state.

Then, the heat insulation door 14 is closed.

Then, screening, aging, or reliability test of the sample 22 is performed in the test room 11.

Upon completion of this test, the other rotating shaft 65 of the removing mechanism 27 is rotated by another motor. Then, the eccentric cam 66 that rotates together with the rotary shaft 65 causes the removal mechanism.
The left and right arm bodies 62 of 27 rotate in opposite directions and forward, and the rollers 63 of these arm bodies 62 contact both left and right sides of the rear edge of the substrate 21 to push the substrates 21 forward simultaneously. As a result, the board 21 is detached from the connector 15.

When the board 21 is detached from the connector 15, the motor is reversely rotated to return the extraction mechanism 27 to the initial state.

Further, the heat insulating door 14 is opened, and the substrate 21 is pulled out from the guide portion 17 in the test chamber 11.

In the above embodiment, the position of the ball 53 is shifted by 20 ° between the upper and lower base bodies 41, but the angle of shift may be 30 ° or 40 ° depending on the number of substrates 21. For example, if it is set to 30 °, and the distance between the balls 53 is 120 °,
4 positions can be taken.

Further, in the above embodiment, the ball is placed at a position that divides the circumference into three equal parts.
Although 53 and the receiving hole 52 are provided, the ball 53 and the receiving hole 52
The arrangement of is not limited to that.

Further, the positions of the balls 53 of each base body 41 do not have to be sequentially shifted from top to bottom as in the above-mentioned embodiment, but may be displaced from each other as a whole.

Furthermore, even if the plurality of substrates 21 are divided into a plurality of groups, the positions of the balls 53 in the base body 41 corresponding to one group are in the same phase, and the positions of the balls 53 in the base body 41 are deviated between the groups. Good. For example, if there are four substrates 21 in one group and six groups 21 are provided, a total of 24 substrates 21 can be inserted.

Further, in the above embodiment, the base body 41 is provided with the ball 53,
Although the receiving hole 52 is provided in the arm body 45, conversely, the receiving hole may be provided in the base body and the ball may be provided in the arm body.

Further, in the above embodiment, the ball 53 is used as the engaging element, but the engaging element may be a substantially hemispherical shape in which the engaging portion with the receiving hole 52 is spherical.

[Effects of the Invention] According to the present invention, the insertion mechanism for inserting each board and connecting it to the connector is fixed to the rotating shaft driven by a drive source such as a motor, and the rotating shaft corresponding to each board. A plurality of base bodies and a plurality of arm bodies that are superposed on the base bodies and are rotatably supported by rotation shafts and press the respective substrates, respectively, and each pair of base bodies and each arm An engaging member having a substantially spherical engaging portion is urged toward the other on one side of the body, and a receiving hole at which the engaging portion of the engaging element is removably engaged is provided on the other side of the base. Since the position of the engaging element or the receiving hole provided in the body in the rotation direction of the rotation axis is deviated from each other in each base body corresponding to each substrate, the engaging element of the base body and the arm body and the receiving hole engage with each other. Each arm body is attached to each substrate By deviating the pushing times from each other, it is possible to reduce the load applied to the drive source and the like, and it is possible to drive with a small amount of power, and even if there is a positional deviation between the board and the connector, this can cause When an excessive load is applied, the engaging element is disengaged from the receiving hole and the connection between the base body and the arm body is released, so that it is possible to prevent an excessive force from being applied and prevent damage.

[Brief description of drawings]

FIG. 1 (a) is a plan view of a base body and an arm body showing an embodiment of the burn-in device of the present invention, FIG. 1 (b) is a sectional view of the base body and the arm body, and FIG. 1 (c). Is a bottom view of the same base body and arm body, FIG. 2 is a horizontal sectional view of the same as above, and FIG. 3 is a front view in which a part of the same is cut away. 11 …… Test room, 15 …… Connector, 21 …… Board, 22 …… Sample, 26 …… Insertion mechanism, 33 …… Motor as drive source,
36 …… Rotary axis, 41 …… Base body, 45 …… Arm body, 52…
… Receiving hole, 53 …… Ball as an engaging element.

Claims (1)

[Claims] 1. A test chamber in which a substrate on which a sample is mounted is arranged in a plurality of stages and is removably accommodated, a connector which is arranged in the test chamber and to which the substrate is detachably connected, and An insertion mechanism for inserting the board toward the inner part of the test chamber and connecting it to the connector, wherein the insertion mechanism extends in the arrangement direction of the plurality of boards and is driven to rotate in the forward and reverse directions by a drive source. A plurality of base bodies fixed to the rotary shafts corresponding to the respective substrates, and superposed on the base bodies and rotatably supported by the rotary shafts, the respective substrates in the insertion direction. A plurality of arm bodies to be pushed in, and movably an engaging element having a substantially spherical engaging portion on one of the base bodies and one of the facing portions of the arm bodies forming a pair with the base body. When it is urged toward On the other hand, a receiving hole into which the engaging portion of the engaging element is detachably engaged is provided, and the position of the engaging element or the receiving hole provided in the base body in the rotation direction of the rotating shaft is A burn-in device in which each base body corresponding to each substrate is displaced from each other.