JPH0689958B2 - Helium refrigerator - Google Patents
Helium refrigeratorInfo
- Publication number
- JPH0689958B2 JPH0689958B2 JP28137587A JP28137587A JPH0689958B2 JP H0689958 B2 JPH0689958 B2 JP H0689958B2 JP 28137587 A JP28137587 A JP 28137587A JP 28137587 A JP28137587 A JP 28137587A JP H0689958 B2 JPH0689958 B2 JP H0689958B2
- Authority
- JP
- Japan
- Prior art keywords
- helium gas
- pressure
- heat
- gas
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Separation By Low-Temperature Treatments (AREA)
- Motor Or Generator Cooling System (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、予冷されたヘリウムガスをジュールトムソン
膨張(等エンタルピー膨張)させて極低温を発生させる
ようにしたヘリウム冷凍機の改良に関するものである。Description: TECHNICAL FIELD The present invention relates to an improvement of a helium refrigerator in which precooled helium gas is subjected to Joule-Thomson expansion (isoenthalpy expansion) to generate cryogenic temperature. is there.
(従来の技術) 本出願人は、先に、この種のヘリウム冷凍機として、特
開昭62−116869号公報に開示されているものを提案して
いる。このものは、予冷冷凍機を構成するG−M型や改
良ソルベー型等の多段冷凍機において、これに内蔵する
膨張機で低温度に予冷した高圧のヘリウムガス自体をジ
ュールトムソン膨張させて、極低温を発生させるように
したものである。すなわち、その具体的構成は、G−M
型や改良ソルベー型等の多段冷凍機において、高段圧縮
機から供給された高圧のヘリウムガスを蓄冷器を内蔵し
た膨張機で膨張させ、その多くのヘリウムガスを再び高
段圧縮機に戻しつつ、この膨張作用によりその各ヒート
ステーションに低温を発生させて予冷するとともに、上
記膨張機の最低温部から導出される一部の低温高圧のヘ
リウムガスをJ−T弁で絞ってジュールトムソン膨張さ
せた後、冷却器に導いてその蒸発潜熱により冷却対象物
を冷却させ、その後に、冷却器から向流型の熱交換器及
び冷熱回収用の熱交換器を適して、J−T弁前のヘリウ
ムガスを冷却したり、膨張機のヒートステーションの予
冷に供して、低段圧縮機の吸入側に導いて再び高段圧縮
機の吸入側に戻すことを繰返すようにしたものである。(Prior Art) The present applicant has previously proposed, as this type of helium refrigerator, the one disclosed in JP-A-62-116869. This is a multi-stage refrigerator such as a GM type or an improved Solvay type that constitutes a pre-cooling refrigerator, in which a high pressure helium gas precooled to a low temperature by an expander incorporated therein is expanded by Joule-Thomson to obtain a pole. It is designed to generate a low temperature. That is, the specific configuration is GM
Type and improved solve type multi-stage refrigerators, the high-pressure helium gas supplied from the high-stage compressor is expanded by an expander with a built-in regenerator, and many helium gases are returned to the high-stage compressor again. This expansion action causes each heat station to generate a low temperature to be pre-cooled, and a part of the low-temperature high-pressure helium gas derived from the lowest temperature part of the expander is squeezed by the JT valve to be expanded by Joule-Thomson. After that, it is guided to a cooler to cool the object to be cooled by its latent heat of vaporization, and thereafter, a countercurrent type heat exchanger and a heat exchanger for recovering cold heat are applied from the cooler to the front of the JT valve. The helium gas is cooled or preheated in the heat station of the expander, guided to the suction side of the low-stage compressor, and returned to the suction side of the high-stage compressor again.
(発明が解決しようとする問題点) ところで、上記の如きヘリウム冷凍機においては、膨張
機内に流入したヘリウムガスを回転バルブの回転動作に
応じた開閉作動により通過及びその通過の阻止を交互に
行ってそのガスを断熱膨張させる構成としているが、上
記回転バルブの回転作動に伴う開閉作動に起因して、膨
張機の最低温部から導出されるヘリウムガスの圧力(つ
まりJ−T弁前ガス圧力)が変動して、負圧が発生する
ことになる。そのため、膨張機下端部のガス導出部に、
膨張機側への逆流を阻止する逆止弁を介設すると共に、
高圧ヘリウムガスの圧力脈動を緩和するバッファタンク
を設けている。(Problems to be solved by the invention) By the way, in the helium refrigerator as described above, passage and blocking of passage of the helium gas flowing into the expander are alternately performed by an opening / closing operation according to the rotating operation of the rotary valve. The gas is adiabatically expanded, but due to the opening / closing operation associated with the rotary operation of the rotary valve, the pressure of the helium gas derived from the lowest temperature part of the expander (that is, the gas pressure before the JT valve). ) Fluctuates and negative pressure is generated. Therefore, in the gas outlet part of the lower end of the expander,
A check valve is installed to prevent backflow to the expander side.
A buffer tank is provided to reduce the pressure pulsation of high-pressure helium gas.
しかるに、上記バッファタンクの容量が小さい場合に
は、上記ヘリウムガスのJ−T弁前圧力の変動を有効に
抑制できず、その結果、冷却器の温度も変動すると共
に、低段圧縮機の吸入側のガス圧力(J−Tリターン
圧)も大きく変動して、低段圧縮機の信頼性の低下を招
く懸念がある。However, when the capacity of the buffer tank is small, it is not possible to effectively suppress the fluctuation of the JT valve front pressure of the helium gas, and as a result, the temperature of the cooler also fluctuates and the suction of the low-stage compressor. The gas pressure on the side (J-T return pressure) may also fluctuate significantly, leading to a decrease in reliability of the low-stage compressor.
さりとて、バッファタンクの容量を大きくすると、極低
温部分の大きさが、逆止弁を要することとも相俟って大
型化し、回路構成が複雑になる欠点が生じる。On the other hand, if the capacity of the buffer tank is increased, the size of the cryogenic portion is increased in size together with the need for the check valve, and the circuit configuration becomes complicated.
本発明は斯かる点に鑑みてなされたものであり、その目
的は、高段圧縮機の吸入側のガス圧力(つまり膨張機の
最低温部から導出されるヘリウムガスの圧力)と低段圧
縮機の吸入側ガス圧力との圧力差を利用して、上記膨張
機の最低温部から導出されるヘリウムガスの圧力変動を
有効に抑制するようにすることにより、逆止弁やバッフ
ァタンクの設置を不要にしながら、ヘリウムガスのJ−
T弁前圧力を高圧で安定させて、冷却器での温度変動を
小さく抑制し、さらに低段圧縮機の吸入側のガス圧力の
変動をも有効に抑制して、低段圧縮機の信頼性の向上を
図ると共に、極低温部の大きさを小型化して、回路構成
を簡易にすることにある。The present invention has been made in view of these points, and an object thereof is to reduce the gas pressure on the suction side of a high-stage compressor (that is, the pressure of helium gas derived from the lowest temperature part of the expander) and the low-stage compression. Installation of check valves and buffer tanks by effectively suppressing the pressure fluctuation of helium gas derived from the lowest temperature part of the expander by utilizing the pressure difference with the gas pressure on the suction side of the machine. Helium gas J-
The pressure before the T valve is stabilized at a high pressure to suppress temperature fluctuations in the cooler to a small extent, and also effectively suppress fluctuations in the gas pressure on the suction side of the low-stage compressor to improve the reliability of the low-stage compressor. And the size of the cryogenic part is reduced to simplify the circuit configuration.
(問題点を解決するための手段) 上記の目的を達成するため、本発明の解決手段は、第1
図および第2図に示すように、高段圧縮機(2)から供
給された高圧のヘリウムガスを蓄冷器(8),(9)を
内蔵した膨張機(4)で回転バルブ(6)の回転動作に
応じて膨張させ、その多くのヘリウムガスを上記高段圧
縮機(2)に戻しつつ、その各ヒートステーション(1
0),(11)に低温を発生させるG−M型,改良ソルベ
ー型等の多段冷凍機(3)を設ける。そして、該多段冷
凍機(3)における膨張機(4)の最低温部から低温高
圧の一部のヘリウムガスを導出する構造とし、その導出
されたヘリウムガスをジュールトムソン膨張させるJ−
T弁(18)と、該J−T弁(18)で膨張した後のヘリウ
ムにより冷却対象物を冷却する冷却器(19)と、該冷却
器(19)からのヘリウムガスを上記J−T弁(18)で膨
張する前のヘリウムガスと熱交換させるJ−T熱交換器
(17)とを設ける。また、上記膨張機(4)のヒートス
テーション(10),(11)および/またはシリンダ部
(5a),(5b)に熱交換器(20)〜(23)を取り付け、
該熱交換器(20)〜(23)により上記熱交換器(17)か
らの低圧のヘリウムガスの持つ冷熱を回収するように構
成するとともに、常温まで昇温した低圧のヘリウムガス
を圧縮して再び上記高段圧縮機(2)の吸入側に導入さ
せる低段圧縮機(1)を設ける。さらに、上記膨張機
(4)で膨張した多くのヘリウムガスを高段圧縮機
(2)の吸入側に戻すガス戻り通路(14)と、上記冷熱
回収用の熱交換器(20)〜(23)からのヘリウムガスを
低段圧縮機(1)に戻すガス戻り通路(24)との間を、
絞り機構(27)を有するバイパス通路(26)で連通する
構成としたものである。(Means for Solving Problems) In order to achieve the above object, the solving means of the present invention is
As shown in the drawings and FIG. 2, the high-pressure helium gas supplied from the high-stage compressor (2) is supplied to the rotary valve (6) of the expander (4) containing the regenerators (8) and (9). Each heat station (1) is expanded while being expanded according to the rotating operation and returning a large amount of the helium gas to the high-stage compressor (2).
A multi-stage refrigerator (3) such as a GM type or an improved Solvay type that generates a low temperature is provided in 0) and (11). A part of the helium gas at low temperature and high pressure is led out from the lowest temperature part of the expander (4) in the multistage refrigerator (3), and the derived helium gas is expanded by Joule-Thomson J-
The T-valve (18), a cooler (19) for cooling an object to be cooled with helium expanded by the J-T valve (18), and helium gas from the cooler (19) are supplied to the J-T A JT heat exchanger (17) for exchanging heat with the helium gas before being expanded by the valve (18) is provided. Further, heat exchangers (20) to (23) are attached to the heat stations (10) and (11) and / or the cylinder parts (5a) and (5b) of the expander (4),
The heat exchangers (20) to (23) are configured to recover the cold heat of the low-pressure helium gas from the heat exchanger (17) and compress the low-pressure helium gas heated to room temperature. The low-stage compressor (1) introduced again to the suction side of the high-stage compressor (2) is provided. Further, a gas return passage (14) for returning a large amount of helium gas expanded in the expander (4) to the suction side of the high-stage compressor (2), and the heat exchangers (20) to (23) for recovering cold heat. ) From the gas return passage (24) for returning the helium gas from the) to the low-stage compressor (1),
The configuration is such that the bypass passage (26) having the throttle mechanism (27) communicates with each other.
(作用) 以上の構成により、本発明では、高段圧縮機(2)から
供給された高圧のヘリウムガスは多段冷凍機(3)の膨
張機(4)で膨張した後、その多くが再びガス戻り通路
(14)を経て高段圧縮機(2)に戻りつつ、この膨張作
用で生じた冷熱でもって膨脹機(4)のヒートステーシ
ョン(10),(11)が冷却されて極低温が発生する。そ
して、この多段冷凍機(3)の膨張機(4)で低温度に
なった高圧のヘリウムガスの一部はその最低温部から膨
張機(4)外に導出されてJ−T熱交換器(17)に流入
し、その熱交換器(17)で冷却されたのちJ−T弁(1
8)に至る。該J−T弁(18)ではガスがジュールトム
ソン膨張して約4.2Kの気液混合状態のヘリウムとなり、
この気液混合状態のヘリウムは冷却器(19)に供給され
て液成分が蒸発し、その蒸発潜熱により冷却対象物が冷
却される。この冷却器(19)を出た低圧低温のヘリウム
ガスは上記J−T熱交換器(17)の2次側に流入して1
次側のヘリウムガスを冷却し、さらに上記膨張機(4)
のヒートステーション(10),(11)および/またはシ
リンダ部(5a),(5b)に取り付けられた熱交換器(2
0)〜(23)により冷熱を回収されて常温に戻る。しか
る後、この常温の低圧ガスはガス戻り通路(24)を経て
低段圧縮機(1)の吸入側に戻り、該低段圧縮機(1)
で圧縮されて多段冷凍機(3)の系内に戻り、その高段
圧縮機(2)に吸入され、再び圧縮されて上記膨張機
(4)に供給される。(Operation) With the above configuration, in the present invention, the high-pressure helium gas supplied from the high-stage compressor (2) is expanded by the expander (4) of the multi-stage refrigerator (3), and most of it is gas again. While returning to the high-stage compressor (2) via the return passage (14), the heat stations (10), (11) of the expander (4) are cooled by the cold heat generated by this expansion action, and an extremely low temperature is generated. To do. Then, a part of the high-pressure helium gas whose temperature has become low in the expander (4) of the multistage refrigerator (3) is led out of the expander (4) from the lowest temperature part thereof, and the JT heat exchanger. After flowing into (17) and being cooled by the heat exchanger (17), the JT valve (1
8). In the JT valve (18), the gas expands by Joule-Thomson into helium in a gas-liquid mixed state of about 4.2K,
The helium in the gas-liquid mixed state is supplied to the cooler (19) to evaporate the liquid component and the latent heat of evaporation cools the object to be cooled. The low-pressure low-temperature helium gas discharged from the cooler (19) flows into the secondary side of the JT heat exchanger (17) to
The helium gas on the secondary side is cooled, and the expander (4) is further installed.
Heat exchanger (2) attached to the heat station (10), (11) and / or the cylinder part (5a), (5b) of
Cold heat is recovered by (0) to (23) and returns to normal temperature. Then, the low-pressure gas at room temperature returns to the suction side of the low-stage compressor (1) through the gas return passage (24), and the low-stage compressor (1).
And is returned to the system of the multi-stage refrigerator (3), sucked into the high-stage compressor (2), compressed again, and supplied to the expander (4).
その場合、膨張機(4)内では、回転バルブ(6)の回
転動作の繰返しに伴い膨張機(4)のヘリウムガスには
圧力変動が生じるものの、その多くのヘリウムガス(高
段圧縮機(2)に戻るヘリウムガス)の一部がそのガス
戻り通路(14)からバイパス通路(26)を経て、絞り機
構(27)で絞られて減圧されつつ低段圧縮機(1)の吸
入側に流れるので、その圧力変動が有効に抑制されて、
膨張機(4)の最低温部から導出されるヘリウムガス圧
力(J−T弁前圧力)は圧力変動の極めて小さい圧力状
態となる。その結果、冷却器(19)での温度変動が極め
て少なくなって安定することになる。しかも、上記バイ
パス通路(26)の存在により、低段圧縮機(1)から吐
出されたヘリウムガスの多くが該バイパス通路(26)を
経て循環するので、その吸入ガス圧力も安定して、低段
圧縮機(1)の信頼性が向上することになる。しかも、
絞り機構(27)を有するバイパス通路(26)の付設のみ
でガス圧力の変動を有効に抑制できるので、逆止弁やバ
ッファタンクが不要となり、回路構成を簡易にできる。In that case, in the expander (4), although a pressure fluctuation occurs in the helium gas of the expander (4) as the rotary operation of the rotary valve (6) is repeated, a lot of the helium gas (high-stage compressor ( Part of the helium gas returning to 2) passes through the gas return passageway (14) through the bypass passageway (26), is throttled by the throttling mechanism (27) and is depressurized to the suction side of the low-stage compressor (1). Because it flows, the pressure fluctuation is effectively suppressed,
The helium gas pressure (JT valve front pressure) derived from the lowest temperature part of the expander (4) is in a pressure state where the pressure fluctuation is extremely small. As a result, the temperature fluctuation in the cooler (19) becomes extremely small and stable. Moreover, because of the presence of the bypass passage (26), most of the helium gas discharged from the low-stage compressor (1) circulates through the bypass passage (26), so that the suction gas pressure is stable and low. The reliability of the stage compressor (1) is improved. Moreover,
Since the fluctuation of the gas pressure can be effectively suppressed only by providing the bypass passage (26) having the throttle mechanism (27), the check valve and the buffer tank are unnecessary, and the circuit configuration can be simplified.
(実施例) 以下、本発明の実施例を第1図および第2図に基づいて
説明する。(Embodiment) An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第1図は本発明の実施例におけるヘリウム冷凍機の全体
回路構成を示し、(1)は低圧のヘリウムガスを所定圧
力(例えば1気圧から10気圧)に圧縮する低段圧縮機、
(2)は該低段圧縮機(1)の吐出側に接続されて低段
圧縮機(1)から吐出された高圧のヘリウムガスを更に
高圧(例えば24気圧)に圧縮する高段圧縮機であって、
該高段圧縮機(2)から吐出された高圧のヘリウムガス
はクライオスタット(C)(低温槽)に装着されたG−
M型,改良ソルベー型等の多段冷凍機(3)の膨張機
(4)に供給される。該膨張機(4)は第2図に拡大詳
示するように、2段のシリンダ部(5a),(5b)を有す
るとともに、ヘリウムガスの高圧側入口(5c)および低
圧側出口(5d)が開口されたケーシング(5)と、該ケ
ーシング(5)内に設けられ、回転する毎に開弁してケ
ーシング(5)の高圧側入口(5c)から流入したヘリウ
ムガスを通過させて断熱膨張させる回転バルブ(6)
と、該バルブ(6)を駆動回転させるバルブモータ
(7)と、上記回転バルブ(6)の回転に応じたヘリウ
ムガスの断熱膨張により発生する冷熱それぞれ蓄える第
1および第2の蓄冷器(8),(9)とを備えている。
また、上記ケーシング(5)の高圧側入口側(5c)およ
び低圧側出口(5d)はそれぞれ、第1図に示す如く、上
記高段圧縮機(2)にガス供給通路(13)及びガス戻り
通路(14)を介してガスの循環可能に接続されており、
膨張機(4)で膨張したヘリウムガスの多くをガス戻り
通路(14)を介して高段圧縮機(2)の吸入側に戻しつ
つ、断熱膨張により発生する冷熱を第1及び第2の蓄冷
器(8),(9)に蓄えるようにしている。FIG. 1 shows the overall circuit configuration of a helium refrigerator in an embodiment of the present invention, (1) is a low-stage compressor that compresses low-pressure helium gas to a predetermined pressure (for example, 1 atm to 10 atm),
(2) is a high-stage compressor that is connected to the discharge side of the low-stage compressor (1) and compresses the high-pressure helium gas discharged from the low-stage compressor (1) to a higher pressure (for example, 24 atm). There
The high-pressure helium gas discharged from the high-stage compressor (2) was attached to the cryostat (C) (low temperature tank) G-
It is supplied to the expander (4) of the multi-stage refrigerator (3) such as M type and improved solvee type. The expander (4) has two stages of cylinder parts (5a) and (5b) as shown in enlarged detail in FIG. 2, and has a high pressure side inlet (5c) and a low pressure side outlet (5d) of helium gas. A casing (5) with an opening, and a helium gas that is provided in the casing (5) and opens at every rotation to allow the helium gas that has flowed in from the high pressure side inlet (5c) of the casing (5) to pass through and adiabatically expand Rotating valve (6)
And a valve motor (7) for driving and rotating the valve (6), and first and second regenerators (8) for respectively storing cold heat generated by adiabatic expansion of helium gas according to the rotation of the rotary valve (6). ) And (9).
Further, the high pressure side inlet side (5c) and the low pressure side outlet (5d) of the casing (5) are connected to the high pressure compressor (2) by a gas supply passage (13) and a gas return, respectively, as shown in FIG. Gas is circulated through the passage (14),
Most of the helium gas expanded in the expander (4) is returned to the suction side of the high-stage compressor (2) through the gas return passage (14), and the cold heat generated by adiabatic expansion is stored in the first and second cold storage. It is stored in the vessels (8) and (9).
また、ケーシング(5)のシリンダ部(5a),(5b)下
端にはそれぞれ上記第1および第2の蓄冷器(8),
(9)から冷熱を受ける第1および第2のヒートステー
ション(10),(11)が設けられており、第1および第
2の蓄冷器(8),(9)で蓄えられた冷熱により第1
および第2のヒートステーション(10),(11)を冷却
するように構成されている。尚、(5e),(5f)はそれ
ぞれヒートステーション(10),(11)の下端に一体に
設けられた輻射シールド部で、クライオスタット(C)
への膨張機(4)の装着時にその装着部を通してクライ
オスタット(C)に熱が侵入するのを遮断するものであ
る。Further, at the lower ends of the cylinder parts (5a), (5b) of the casing (5), the first and second regenerators (8),
First and second heat stations (10) and (11) for receiving cold heat from (9) are provided, and the cold heat stored in the first and second regenerators (8) and (9) causes 1
And the second heat stations (10), (11). In addition, (5e) and (5f) are radiation shield parts integrally provided at the lower ends of the heat stations (10) and (11), respectively, and are a cryostat (C).
When the expander (4) is attached to the heat exchanger, heat is prevented from entering the cryostat (C) through the attachment portion.
上記膨張機(4)におけるケーシング(5)の第2ヒー
トステーション(11)には膨張機(4)の最低温部から
ヘリウムガスの一部をケーシング(5)外に導出するた
めのガス導出部(12)が設けられ、該ガス導出部(12)
には、通常のコリンズ型,積層型等の向流型の熱交換器
よりなるJ−T熱交換器(17)の1次側(17a)を介し
てJ−T弁(18)が接続され、さらに該J−T弁(18)
には冷却器(19)が接続されており、膨張機(4)の最
低温部からのヘリウムガスをJ−T熱交換器(17)を介
してJ−T弁(18)に導き、J−T弁(18)でジュール
トムソン膨張(等エンタルピー膨張)させて1気圧,4.2
Kの気液混合状態のヘリウムとするとともに、その気液
混合状態のヘリウムを冷却器(19)へ供給し、ヘリウム
の液成分の蒸発潜熱により4.2Kの温度レベルを保ってク
ライオスタット(C)内の冷却対象物を冷却するように
構成されている。In the second heat station (11) of the casing (5) of the expander (4), a gas lead-out portion for leading out a part of the helium gas from the lowest temperature portion of the expander (4) to the outside of the casing (5). (12) is provided, and the gas outlet (12)
A JT valve (18) is connected to the JT valve (18) via a primary side (17a) of a JT heat exchanger (17), which is an ordinary countercurrent type heat exchanger such as Collins type and laminated type. , And the JT valve (18)
A cooler (19) is connected to the JT valve (18) via the JT heat exchanger (17) to introduce the helium gas from the lowest temperature part of the expander (4) to the JT valve (18). -Joule Thomson expansion (isoenthalpic expansion) with T valve (18), 1 atmosphere, 4.2
The helium in the gas-liquid mixed state of K is supplied, and the helium in the gas-liquid mixed state is supplied to the cooler (19), and the temperature level of 4.2 K is maintained by the latent heat of vaporization of the liquid component of helium to keep the temperature inside the cryostat (C). Is configured to cool the object to be cooled.
さらに、上記冷却器(19)は上記J−T熱交換器(17)
の2次側(17b)に接続されており、J−T熱交換器(1
7)において冷却器(19)からの低温低圧のヘリウムガ
スをJ−T弁(18)で膨張する前の1次側(17a)を通
るヘリウムガスと熱交換させてそのガスを冷却するよう
になされている。Further, the cooler (19) is the JT heat exchanger (17).
Is connected to the secondary side (17b) of the JT heat exchanger (1
In 7), the low temperature and low pressure helium gas from the cooler (19) is heat-exchanged with the helium gas passing through the primary side (17a) before being expanded by the JT valve (18) to cool the gas. Has been done.
また、上記膨張機(4)におけるケーシング(5)に
は、そのシリンダ部(5a),(5b)の外周にそれぞれ例
えばガス配管を巻き付けて半田付けしてなる第1および
第2シリンダ部熱交換器(20),(21)と、第1および
第2のヒートステーション(10),(11)の外周にそれ
ぞれ上記シリンダ部熱交換器(20),(21)と同様の構
造の第1および第2のヒートステーション熱交換器(2
2),(23)とが取り付けられ、上記両シリンダ部熱交
換器(20),(21)は上記第1のヒートステーション熱
交換器(22)を介して直列に接続され、上記第2のヒー
トステーション熱交換器(23)の流入側は上記J−T熱
交換器(17)の2次側(17b)に接続され、一方、上記
第1のシリンダ部熱交換器(20)の流出側はガス戻り通
路(24)を介して上記低段圧縮機(1)の吸入側に接続
されており、J−T熱交換器(17)の2次側(17b)を
通過した後の低圧のヘリウムガスを順に第2のヒートス
テーション熱交換器(23)、第2のシリンダ部熱交換器
(21)、第1のヒートステーション熱交換器(22)およ
び第1のシリンダ部熱交換器(20)に流通せしめて、そ
の低圧ヘリウムガスの持つ冷熱を回収するとともに、最
終の第1のシリンダ部熱交換器(20)から流出した約1
気圧のヘリウムガスを低段圧縮機(1)に吸入させて圧
縮し、それを高段圧縮機(2)に供給するようになされ
ている。よって、多段冷凍機(3)の膨張機(4)から
導出されたヘリウムガスをJ−T熱交換器(17)で冷却
したのちJ−T弁(18)でジュールトムソン膨張させて
冷却器(19)に送り、その後、冷却器(19)から各熱交
換器(20)〜(23)を通してその熱交換器(20)〜(2
3)により常温まで昇温させ、その常温の低圧ヘリウム
ガスを低段圧縮機(1)に送ってその圧縮機(1)によ
り再び多段冷凍機(3)の高段圧縮機(2)に戻すよう
にしたJ−T回路(25)が構成されている。Further, in the casing (5) of the expander (4), first and second heat exchange cylinders are formed by winding, for example, gas pipes around the outer peripheries of the cylinders (5a), (5b) and soldering. The first and second heat exchangers (20) and (21) and the first and second heat stations (10) and (11) have the same structure as the cylinder heat exchangers (20) and (21), respectively. Second heat station heat exchanger (2
2) and (23) are attached, the both cylinder part heat exchangers (20) and (21) are connected in series via the first heat station heat exchanger (22), and the second heat exchanger The inflow side of the heat station heat exchanger (23) is connected to the secondary side (17b) of the JT heat exchanger (17), while the outflow side of the first cylinder heat exchanger (20). Is connected to the suction side of the low-stage compressor (1) through the gas return passage (24), and has a low pressure after passing through the secondary side (17b) of the JT heat exchanger (17). Helium gas is supplied in order to the second heat station heat exchanger (23), the second cylinder part heat exchanger (21), the first heat station heat exchanger (22), and the first cylinder part heat exchanger (20). ) To recover the cold heat of the low-pressure helium gas, and to cool the final first cylinder heat exchanger (2 0) leaked from about 1
Helium gas at atmospheric pressure is sucked into the low-stage compressor (1), compressed, and supplied to the high-stage compressor (2). Therefore, the helium gas derived from the expander (4) of the multi-stage refrigerator (3) is cooled by the JT heat exchanger (17) and then expanded by Joule-Thomson by the JT valve (18) to cool the cooler ( 19), and then from the cooler (19) through the heat exchangers (20) to (23) to the heat exchangers (20) to (2).
The temperature is raised to room temperature by 3), the low-pressure helium gas at room temperature is sent to the low-stage compressor (1), and the compressor (1) returns it to the high-stage compressor (2) of the multistage refrigerator (3) again. The JT circuit (25) thus configured is configured.
而して、上記膨張機(4)の低圧側出口(5d)から出る
ヘリウムガスを高段圧縮機(2)の吸入側に戻すガス戻
り通路(14)と、冷熱回収用の熱交換器(20)〜(21)
のうち下流側に位置する第1シリンダ部熱交換器(20)
から低段圧縮機(1)の吸入側にヘリウムガスを戻すガ
ス戻り通路(24)との間は、バイパス通路(26)で連通
接続されており、該バイパス通路(26)の途中には、絞
り機構としてのキャピラリチューブ(27)が介設されて
いる。A gas return passage (14) for returning the helium gas discharged from the low-pressure side outlet (5d) of the expander (4) to the suction side of the high-stage compressor (2), and a heat exchanger for cold heat recovery ( 20) ~ (21)
First heat exchanger (20) located on the downstream side of the cylinder
From the low-stage compressor (1) to the gas return passage (24) for returning the helium gas to the suction side of the low-stage compressor (1) by a bypass passage (26), and in the middle of the bypass passage (26), A capillary tube (27) as a throttle mechanism is provided.
したがって、上記実施例においては、高段及び低段の2
台の圧縮機(1),(2)が起動されて冷凍機が定常運
転になると、高段圧縮機(2)からガス供給通路(13)
を介して供給された高圧のヘリウムガスが多段冷凍機
(3)の膨張機(4)で膨張し、このガスの膨張により
発生した冷熱は蓄冷器(8),(9)に蓄えられる。ま
た、膨張機(4)のケーシング(5)外周に取り付けた
熱交換器(20)〜(23)を介して低段圧縮機(1)に戻
る低温低圧のヘリウムガスにより膨張機(4)が冷却さ
れ、これらの冷却作用により、膨張機(4)の第1のヒ
ートステーション(10)が約77Kの温度レベルに、また
第2のヒートステーション(11)が約15Kの温度レベル
にそれぞれ保たれる。而して、膨脹機(4)で膨張した
後のヘリウムガスは、G−M又はソルベーサイクルの特
徴により多く(90〜99%)が蓄冷器(8),(9)から
ガス戻り通路(14)を介して上記高段圧縮機(2)の吸
入側に戻り、該圧縮機(2)で再圧縮されて膨張機
(4)に供給される。Therefore, in the above embodiment, the high stage and the low stage
When the compressors (1) and (2) of the stage are started and the refrigerator is in a steady operation, the gas supply passage (13) from the high-stage compressor (2)
High-pressure helium gas supplied via the expander is expanded in the expander (4) of the multistage refrigerator (3), and the cold heat generated by the expansion of this gas is stored in the regenerators (8) and (9). Further, the expander (4) is driven by the low-temperature low-pressure helium gas that returns to the low-stage compressor (1) via the heat exchangers (20) to (23) attached to the outer periphery of the casing (5) of the expander (4). After being cooled, these cooling effects keep the first heat station (10) of the expander (4) at a temperature level of about 77K and the second heat station (11) at a temperature level of about 15K. Be done. Therefore, the helium gas expanded by the expander (4) is mostly (90 to 99%) from the regenerators (8) and (9) due to the characteristics of the GM or the solve cycle, and the gas return passage (14 ) To the suction side of the high-stage compressor (2), re-compressed by the compressor (2) and supplied to the expander (4).
そして、上記膨張機(4)での膨張により最低温度(約
15K)になった低温高圧のヘリウムガスの残り(1〜10
%)が第2ヒートステーション(11)のガス導出部(1
2)から導出され、その導出ガスはJ−T熱交換器(1
7)の1次側(17a)に入り、その2次側(17b)を通る
リターンヘリウムガスと熱交換されて冷却される。この
J−T熱交換器(17)を通過した高圧のヘリウムガスは
J−T弁(18)で絞られてジュールトムソン膨張し、1
気圧、4.2Kの気液混合状態のヘリウムとなって冷却器
(19)に至り、この冷却器(19)でヘリウムにおける液
成分が蒸発してその潜熱がクライオスタット(C)内の
冷却対象物の冷却に利用される。Then, due to the expansion in the expander (4), the minimum temperature (about
The rest of the low-temperature high-pressure helium gas (15K) (1-10
%) Is the gas outlet (1) of the second heat station (11)
2), which is discharged from the JT heat exchanger (1
It enters into the primary side (17a) of 7) and is heat-exchanged with the return helium gas passing through its secondary side (17b) to be cooled. The high-pressure helium gas that has passed through the JT heat exchanger (17) is throttled by the JT valve (18) and expanded by Joule-Thomson to 1
It becomes helium in a gas-liquid mixed state of atmospheric pressure and 4.2K, and reaches the cooler (19), where the liquid component in helium is evaporated and its latent heat is the object to be cooled in the cryostat (C). Used for cooling.
しかる後、上記冷却器(19)を出た低圧の飽和ヘリウム
ガスは上記J−T熱交換器(17)の2次側(17b)に入
って1次側(17a)の高圧ヘリウムガスを冷却する。次
いで、ガスは膨張機(4)のケーシング(5)に取り付
けられた第2のヒートステーション熱交換器(23)、第
2のシリンダ部熱交換器(21)、第1のヒートステーシ
ョン熱交換器(22)および第1のシリンダ部熱交換器
(20)を順に通過して、それら熱交換器(20)〜(23)
で冷熱を回収された後、ガス戻り通路(24)を介して低
段圧縮機(1)に吸入されて該低段圧縮機(1)で所定
圧力に圧縮され、その高圧ガスは上記膨張機(4)から
ガス戻り通路(14)を経て戻るヘリウムガスと共に高段
圧縮機(2)でさらに高圧に圧縮されたのち上記膨張機
(4)に供給される。以後、上記と同様のサイクルが繰
り返されて連続運転が行われる。After that, the low-pressure saturated helium gas discharged from the cooler (19) enters the secondary side (17b) of the JT heat exchanger (17) to cool the high-pressure helium gas on the primary side (17a). To do. Next, the gas is the second heat station heat exchanger (23) attached to the casing (5) of the expander (4), the second cylinder part heat exchanger (21), and the first heat station heat exchanger. (22) and the first cylinder part heat exchanger (20) in order, and those heat exchangers (20) to (23)
After the cold heat is recovered by the low-pressure compressor (1) via the gas return passage (24), the low-temperature compressor (1) compresses the cold heat to a predetermined pressure, and the high-pressure gas is expanded by the expander. The helium gas returned from (4) via the gas return passageway (14) is further compressed to a higher pressure by the high-stage compressor (2) and then supplied to the expander (4). After that, the same cycle as described above is repeated to perform continuous operation.
その際、膨張機(4)では、ヘリウムガスを断熱膨張さ
せる回転バルブ(6)の回転動作(開閉動作)の繰返し
に伴い、膨張した後のヘリウムガスには圧力変動が生じ
るものの、このヘリウムガスは、高圧力な状態ほどその
多くが高段圧縮機(2)に戻る過程で、ガス戻り通路
(14)からバイパス通路(26)を経て、該バイパス通路
(26)中のキャピラリチューブ(27)で絞られて減圧さ
れつつガス戻り通路(24)に至り、該ガス戻り通路(2
4)から低段圧縮機(1)の吸入側に戻るので、その圧
力変動が有効に抑制される。その結果、膨張機(4)の
ガス導出部(12)からJ−T熱交換器(17)の一次側
(17a)に入る低温高圧のヘリウムガスの圧力(J−T
弁前圧力)は、圧力変動の十分に抑制された状態になる
と共に、この圧力変動の抑制に伴い、冷却器(19)での
温度も安定することになる。しかも、上記バイパス通路
(26)の存在により、低段圧縮機(1)から吐出された
ヘリウムガスの多くが該バイパス通路(26)を経て循環
するので、ガス戻り通路(24)のガス圧力が安定して、
低段圧縮機(1)のガス吸入圧力が効果的に安定し、低
段圧縮機(1)の信頼性が向上することになる。また、
上記J−T弁前圧力の変動をキャピラリチューブ(27)
を有するバイパス通路(26)でもって有効に抑制してい
るので、J−T熱交換器(17)周りの極低温部に逆止弁
やバッファタンクの設置が不要となり、その分回路構成
を簡易にできる。At this time, in the expander (4), the pressure of the expanded helium gas fluctuates as the rotary valve (6) that adiabatically expands the helium gas repeatedly rotates (opens and closes). In a process in which a higher pressure is returned to the high-stage compressor (2), most of the gas passes through the gas return passageway (14) through the bypass passageway (26), and then the capillary tube (27) in the bypass passageway (26). While reaching the gas return passageway (24) while being reduced in pressure by the
Since it returns to the suction side of the low-stage compressor (1) from 4), the pressure fluctuation is effectively suppressed. As a result, the pressure (J-T) of the low-temperature high-pressure helium gas that enters the primary side (17a) of the JT heat exchanger (17) from the gas outlet (12) of the expander (4).
The pre-valve pressure) is in a state where the pressure fluctuation is sufficiently suppressed, and the temperature in the cooler (19) is also stabilized as the pressure fluctuation is suppressed. Moreover, due to the presence of the bypass passage (26), most of the helium gas discharged from the low-stage compressor (1) circulates through the bypass passage (26), so that the gas pressure in the gas return passage (24) is reduced. Stable,
The gas suction pressure of the low-stage compressor (1) is effectively stabilized, and the reliability of the low-stage compressor (1) is improved. Also,
Capillary tube (27) for the fluctuation of the JT valve front pressure
Since it is effectively suppressed by the bypass passage (26) that has the structure, it is not necessary to install a check valve or a buffer tank in the cryogenic area around the JT heat exchanger (17), and the circuit configuration is simplified accordingly. You can
また、多段冷凍機(3)における膨張機(4)のケーシ
ング(5)外周に熱交換器(20)〜(23)を取り付け
て、ジュールトムソン膨張した後の低圧ヘリウムガスの
持つ冷熱を回収し、それを膨張機(4)でのヘリウムガ
スの冷却に利用しているので、向流型のJ−T熱交換器
の必要数を低減でき、ヘリウム冷凍機を極めてコンパク
トで低コストなものとすることができる。尚、上記の如
く多段冷凍機(3)の膨張機(4)に熱交換器(20)〜
(23)が取り付けられているので、熱交換器の効率が若
干低下する傾向がある。しかし、反面、壁面を通じての
熱伝導ロス、シャトルロス、ポンピングロス等による侵
入熱を低減できるので、熱交換器の効率低下を補う結果
となる。以上のことから、例えば赤外線センサ用、ジョ
セフソン素子用等、常温部からの侵入熱の割合が比較的
大きくて4.2Kの温度レベルの負荷が少ない(0.5W程度)
冷却対象物を冷却する場合に有利である。Further, the heat exchangers (20) to (23) are attached to the outer periphery of the casing (5) of the expander (4) in the multistage refrigerator (3) to recover the cold heat of the low pressure helium gas after Joule-Thomson expansion. Since it is used for cooling the helium gas in the expander (4), it is possible to reduce the required number of countercurrent type JT heat exchangers, making the helium refrigerator extremely compact and low cost. can do. As described above, the heat exchanger (20) to the expander (4) of the multi-stage refrigerator (3)
Since (23) is attached, the efficiency of the heat exchanger tends to decrease slightly. However, on the other hand, the invasion heat due to heat conduction loss, shuttle loss, pumping loss, etc. through the wall surface can be reduced, which results in compensating for the decrease in efficiency of the heat exchanger. From the above, for example, for infrared sensors, Josephson elements, etc., the ratio of heat entering from the room temperature is relatively large and the load at the 4.2K temperature level is small (about 0.5W).
This is advantageous when cooling an object to be cooled.
さらに、多段冷凍機(3)にJ−T回路(25)が一体に
組み込まれて装置構造がコンパクト化されているため、
クライオスタット(C)への装着時に膨張機(4)のケ
ーシング(5)の輻射シールド部(5e),(5f)の面積
が従来のものに比べて小さくて済み、その分、輻射シー
ルド性能を向上させることができる。Furthermore, since the JT circuit (25) is integrated into the multi-stage refrigerator (3) to make the device structure compact,
When mounted on the cryostat (C), the area of the radiation shield parts (5e), (5f) of the casing (5) of the expander (4) can be smaller than that of the conventional one, and the radiation shield performance is improved accordingly. Can be made.
尚、上記実施例では、バイパス通路(26)に絞り機構と
してキャピラリチューブ(27)を介設したが、その他、
絞り機構を流量制御弁で構成してもよいのは勿論であ
る。In the above embodiment, the bypass tube (26) is provided with the capillary tube (27) as a throttle mechanism.
Of course, the throttle mechanism may be configured by a flow control valve.
また、上記実施例では、膨張機(4)のケーシング
(5)外周にシリンダ部熱交換器(20),(21)および
ヒートステーション熱交換器(22),(23))の双方を
取り付けたが、それら熱交換器(20),(21)および
(22),(23)のいずれか一方を省いてもよい。Moreover, in the said Example, both the cylinder part heat exchangers (20) and (21) and the heat station heat exchangers (22) and (23)) were attached to the outer periphery of the casing (5) of the expander (4). However, any one of the heat exchangers (20), (21) and (22), (23) may be omitted.
(発明の効果) 以上説明したように、本発明のヘリウム冷凍機によれ
ば、G−M型,改良ソルベー型等の多段冷凍機における
膨張機内の回転バルブの開閉作動に伴う膨張後のヘリウ
ムガス圧力の圧力変動を、低段圧縮機および高段圧縮機
の各吸入側を互いに連通接続する絞り機構付きのバイパ
ス回路でもって有効に抑制したので、ヘリウムガスのJ
−T弁前圧力の変動を有効に抑制して、冷却器内の温度
を安定させることができると共に、低段圧縮機吸入側の
ガス圧力を安定させて、低段圧縮機の信頼性の向上を図
ることができる。しかも、絞り機構付きのバイパス通路
によりJ−T弁前圧力の変動を抑制する構成であるの
で、極低温部分に設置する逆止弁やバッファタンクを不
要にでき、回路構成の簡素化を図ることができる。(Effects of the Invention) As described above, according to the helium refrigerator of the present invention, the helium gas after expansion accompanying the opening / closing operation of the rotary valve in the expander in a multistage refrigerator such as a GM type or an improved Solvay type. Since the pressure fluctuation of the pressure was effectively suppressed by the bypass circuit with the throttling mechanism that connects the intake sides of the low-stage compressor and the high-stage compressor to each other, the J
-It is possible to stabilize the temperature inside the cooler by effectively suppressing the fluctuation of the pressure before the T valve, and stabilize the gas pressure on the suction side of the low-stage compressor to improve the reliability of the low-stage compressor. Can be achieved. Moreover, since the bypass passage with the throttling mechanism suppresses fluctuations in the JT valve front pressure, a check valve and a buffer tank installed in a cryogenic portion can be eliminated, and the circuit structure can be simplified. You can
図面は本発明の実施例を示し、第1図はヘリウム冷凍機
の全体構成図、第2図は多段冷凍機における膨張機の縦
断面図である。 (1)……低段圧縮機、(2)……高段圧縮機、(3)
……多段冷凍機、(4)……膨張機、(5a),(5b)…
…シリンダ部、(6)……回転バルブ、(8),(9)
……蓄冷器、(10),(11)……ヒートステーション、
(17)……J−T熱交換器、(18)……J−T弁、(1
9)……冷却器、(20),(21)……シリンダ部熱交換
器、(22),(23)……ヒートステーション熱交換器、
(25)……J−T回路、(26)……バイパス通路、(2
7)……キャピラリチューブ。The drawings show an embodiment of the present invention, FIG. 1 is an overall configuration diagram of a helium refrigerator, and FIG. 2 is a vertical sectional view of an expander in a multistage refrigerator. (1) …… Low-stage compressor, (2) …… High-stage compressor, (3)
…… Multi-stage refrigerator, (4) …… Expander, (5a), (5b)…
… Cylinder, (6) …… Rotary valve, (8), (9)
…… Regenerator, (10), (11) …… Heat station,
(17) …… JT heat exchanger, (18) …… JT valve, (1
9) …… Cooler, (20), (21) …… Cylinder heat exchanger, (22), (23) …… Heat station heat exchanger,
(25) …… JT circuit, (26) …… Bypass passage, (2
7) …… Capillary tube.
Claims (1)
リウムガスを蓄冷器(8),(9)を内蔵した膨張機
(4)で回転バルブ(6)の回転動作に応じて膨張さ
せ、その多くのヘリウムガスを上記高段圧縮機(2)に
戻しつつ、その各ヒートステーション(10),(11)に
低温を発生させるG−M型,改良ソルベー型等の多段冷
凍機(3)を備えるとともに、該多段冷凍機(3)にお
ける膨張機(4)の最低温部から導出された残りの低温
高圧のヘリウムガスをジュールトムソン膨張させるJ−
T弁(18)と、該J−T弁(18)で膨張した後のヘリウ
ムにより冷却対象物を冷却する冷却器(19)と、該冷却
器(19)からのヘリウムガスを上記J−T弁(18)で膨
張する前のヘリウムガスと熱交換させるJ−T熱交換器
(17)と、上記膨張機(4)のヒートステーション(1
0),(11)および/またはシリンダ部(5a),(5b)
に取り付けられ、上記J−T熱交換器(17)からの低圧
ヘリウムガスの持つ冷熱を回収する熱交換器(20)〜
(23)と、常温まで昇温した低圧ヘリウムガスを圧縮
し、再び上記高段圧縮機(2)の吸入側にガスを導入さ
せる低段圧縮機(1)とを備え、上記膨張機(4)で膨
張した多くのヘリウムガスを高段圧縮機(2)の吸入側
に戻すガス戻り通路(14)と、上記冷熱回収用の熱交換
器(20)〜(23)からのヘリウムガスを低段圧縮機
(1)に戻すガス戻り通路(24)との間は、絞り機構
(27)を有するバイパス通路(26)で連通されているこ
とを特徴とするヘリウム冷凍機。1. A high-pressure helium gas supplied from a high-stage compressor (2) is expanded by a expander (4) containing regenerators (8), (9) according to a rotary operation of a rotary valve (6). A multi-stage refrigerator such as a GM type or an improved solvee type that expands and returns a large amount of the helium gas to the high-stage compressor (2) while generating low temperatures in the heat stations (10) and (11). J- which comprises (3) and expands the remaining low-temperature high-pressure helium gas derived from the lowest temperature part of the expander (4) in the multistage refrigerator (3) by Joule-Thomson expansion
The T-valve (18), a cooler (19) for cooling an object to be cooled with helium expanded by the J-T valve (18), and helium gas from the cooler (19) are supplied to the J-T A JT heat exchanger (17) for exchanging heat with the helium gas before expansion with the valve (18), and a heat station (1 for the expander (4).
0), (11) and / or cylinder part (5a), (5b)
Attached to the heat exchanger (20) for recovering the cold heat of the low-pressure helium gas from the JT heat exchanger (17).
(23) and a low-stage compressor (1) for compressing the low-pressure helium gas heated to room temperature and introducing the gas into the suction side of the high-stage compressor (2) again. ), A large amount of helium gas expanded in the high-stage compressor (2) is returned to the suction side of the high-pressure compressor (2), and the helium gas from the heat exchangers (20) to (23) for cold heat recovery is reduced. A helium refrigerator characterized in that a bypass passage (26) having a throttle mechanism (27) communicates with the gas return passage (24) returning to the stage compressor (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28137587A JPH0689958B2 (en) | 1987-11-06 | 1987-11-06 | Helium refrigerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28137587A JPH0689958B2 (en) | 1987-11-06 | 1987-11-06 | Helium refrigerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01123953A JPH01123953A (en) | 1989-05-16 |
| JPH0689958B2 true JPH0689958B2 (en) | 1994-11-14 |
Family
ID=17638253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28137587A Expired - Lifetime JPH0689958B2 (en) | 1987-11-06 | 1987-11-06 | Helium refrigerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0689958B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007006280A (en) | 2005-06-24 | 2007-01-11 | Sony Corp | Multi-channel sound reproduction system |
-
1987
- 1987-11-06 JP JP28137587A patent/JPH0689958B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01123953A (en) | 1989-05-16 |
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