JPH0694085B2 - Machine tool equipment - Google Patents
Machine tool equipmentInfo
- Publication number
- JPH0694085B2 JPH0694085B2 JP59254571A JP25457184A JPH0694085B2 JP H0694085 B2 JPH0694085 B2 JP H0694085B2 JP 59254571 A JP59254571 A JP 59254571A JP 25457184 A JP25457184 A JP 25457184A JP H0694085 B2 JPH0694085 B2 JP H0694085B2
- Authority
- JP
- Japan
- Prior art keywords
- machine tool
- main shaft
- bearing
- silicon nitride
- spindle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/015—Frames, beds, pillars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Machine Tool Units (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は機械加工に広く使用される工作機械のうち、特
に高精度の加工が要求される場合の使用に適した工作機
械装置に関するものである。Description: TECHNICAL FIELD The present invention relates to a machine tool device suitable for use in machine tools widely used for machining, particularly when high precision machining is required. is there.
従来の旋盤をはじめとする工作機械には加工精度を高め
るため主要部を石材又はコンクリートで構成したものも
あるが、それらの主要部品自体を高精度に仕上げること
が難しく、また欠けや割れなどが発生し易いなど強度が
小さいという難点があった。そのため、鉄鋼材料を主体
とした金属材を使用しているのが一般的である。There are some machine tools such as conventional lathes whose main parts are made of stone or concrete in order to improve the machining accuracy, but it is difficult to finish the main parts themselves with high accuracy, and chipping or cracking occurs. There was a drawback that the strength was low, such as easy occurrence. Therefore, it is common to use a metal material mainly composed of a steel material.
ところが、金属材で構成した工作機械では、金属の有す
る比較的大きな熱膨張係数(鉄鋼材で11〜13×10-6/℃
程度)の影響を受ける。その結果、サブミクロン単位
(1μm以下)の超精密加工が要求されるような場合、
工作機械装置全体を温度、湿度等がきびしく制御された
環境下において稼動させるか、あるいは加工稼動を行う
前に充分な暖機運転をするとともに工作機械を安定した
条件にて運転稼動させるための特別な構造、装置を付加
する必要があるなど、高価な工作機械を、極めて限られ
た運転条件下においてのみしか使用することができない
といった不都合があり、かつ安定した高品質、高精度の
被加工物を得ることが困難であった。However, with machine tools made of metal materials, the relatively large coefficient of thermal expansion of metals (11 to 13 × 10 -6 / ° C for steel materials)
Affected). As a result, when sub-micron unit (1μm or less) ultra-precision processing is required,
A special tool for operating the entire machine tool equipment in an environment where the temperature and humidity are tightly controlled, or for warming up the machine tool before starting the machining operation and for operating the machine tool under stable conditions. It is necessary to add various structures and devices, and there is the inconvenience that expensive machine tools can be used only under extremely limited operating conditions, and stable, high-quality, high-precision workpieces. Was difficult to obtain.
一方、これに対して、近年の科学技術の発展、とりわけ
エレクトロニクス関連技術の発達に伴い、各種光学機
器、精密測定機器、電化製品、光通信機器及び各種機械
装置等は、小型化とともに極度に高精度化がはかられつ
つあり、特に精度、品質、耐久性などの大幅な向上をめ
ざした製品の製作過程において使用される各種部品の精
度向上に対する要望は年々高まり、サブミクロン単位の
加工精度を要求される例が数多くみられるようになって
きた。On the other hand, with the recent development of science and technology, especially electronics-related technology, various optical instruments, precision measuring instruments, electrical appliances, optical communication equipment, and various mechanical devices have become extremely high with miniaturization. Precision is being sought, and there is a growing demand year after year for the precision of various parts used in the manufacturing process of products, with the aim of significantly improving precision, quality, and durability. There are many demanded examples.
上述のごとく、各種部品の加工精度がより一層高いもの
が要求されるに伴い従来の旋盤などにおける金属製の主
軸台を用いたものでは運転時の主軸の回転運動により軸
受との摺動部に発生する熱のため、主軸台枠、主軸、前
部軸受、後部軸受、スラスト座等の温度上昇をもたらす
結果、これら主軸台枠、主軸などが熱膨張して各構成部
材に微少な寸法変化が生じたり、部材間のクリアランス
が微妙に変化をするため、主軸の回転精度に悪影響を及
ぼし、その結果、主軸の先端に着装された被加工物の精
度が低下することとなる。As mentioned above, as the machining accuracy of various parts is required to be even higher, in the conventional lathes that use a metal headstock, the sliding motion between the bearing and the bearing is affected by the rotational movement of the main spindle during operation. Due to the heat generated, the temperature of the headstock, spindle, front bearings, rear bearings, thrust seats, etc. rises, resulting in thermal expansion of these headstocks, spindles, etc., resulting in slight dimensional changes in each component. This occurs or the clearance between the members slightly changes, which adversely affects the rotation accuracy of the spindle, and as a result, the accuracy of the workpiece attached to the tip of the spindle decreases.
さらに、稼動運転を一時中断した場合も主軸台の冷却に
際して、各部材間に収縮差が生じるため、一時運転中止
後、再稼動する時にも被加工物の精度変化が生じ易く、
1μ以下の超精密級の精度が要求される加工には、極め
て不都合であり、しかも、高精度の加工が困難であると
いう欠点があり、従来の金属材料にかわる材料としてセ
ラミック材料が注目されていたが、工作機械の主構成要
素である各種の部品については、それらに要求される諸
特性を満足させ得るセラミック材が特定できず、それゆ
え、今日までセラミック製の工作機械構成用部品は未完
成の状況にあった。Further, even when the operation operation is temporarily interrupted, a difference in contraction occurs between the respective members when the headstock is cooled, so that the accuracy change of the work piece is likely to occur even when the operation is restarted after the temporary operation is stopped,
There is a drawback in that machining that requires ultra-precision accuracy of 1 μm or less is extremely inconvenient, and high-precision machining is difficult, and ceramic materials are drawing attention as materials that replace conventional metal materials. However, for the various components that are the main components of machine tools, it has not been possible to specify a ceramic material that can satisfy the various properties required for them, and therefore, up to now, there are no component parts for machine tools made of ceramics. The situation was complete.
本発明者らは上記事情に鑑みて、工作機械における主軸
台を成す主軸、前、後部軸受、スラスト座、主軸台枠等
のうち、少なくとも主軸及び軸受を窒化珪素セラミック
材でもって形成することにより、きびしく制御された稼
動環境条件、高価な制御機器や複雑な構造のものを用い
ることなく、簡単な構造で暖機運転時間が短く、かつ従
来の金属製主軸台を備えた工作機械では実現が困難であ
った超精密加工を行うことを可能とする。In view of the above circumstances, the inventors of the present invention form at least a spindle and a bearing of a spindle forming a headstock in a machine tool, a front bearing, a rear bearing, a thrust seat, and a headstock frame with a silicon nitride ceramic material. It is possible to realize with a machine tool equipped with a conventional metal headstock, with a simple structure and a short warm-up time, without using tightly controlled operating environment conditions, expensive control equipment and complicated structures. This makes it possible to perform difficult ultra-precision machining.
次に本発明に係る工作機械装置を旋盤を例にとり以下、
詳細に説明する。Next, taking a machine tool device according to the present invention as an example of a lathe,
The details will be described.
第2図において、1は旋盤の基体を成す架台で、この架
台1の上部にはベッド2が載置され、該ベッド2上に
は、セラミック材で形成された主軸3を支承する同じく
セラミック材で形成された主軸台4が累着等の固定手段
でもって固定されており、かかる主軸3はVベルト5を
介して下方部に設置された主軸駆動用のモータ6により
回転するように連結されている。また、前記主軸3の先
端に支持される不図示の被加工物はベッド2の上面にて
左右、前後に稼動自在に設置されたサドル7及びスライ
ダ8上に固定された刃物台(図示せず)に具備した刃物
でもって任意の形状に切削加工されるようになってい
る。In FIG. 2, reference numeral 1 denotes a base forming a base of a lathe, and a bed 2 is placed on the top of the base 1, and a ceramic material supporting a spindle 3 made of a ceramic material is also mounted on the bed 2. The spindle headstock 4 formed in 1. is fixed by fixing means such as accumulating, and the spindle 3 is connected via a V belt 5 so as to rotate by a spindle driving motor 6 installed in the lower portion. ing. A work piece (not shown) supported by the tip of the main shaft 3 is a tool rest (not shown) fixed on a saddle 7 and a slider 8 movably installed on the upper surface of the bed 2 so as to be movable left and right and front and back. ), It is designed to be cut into an arbitrary shape with a blade.
このうち、主軸台4において、被加工物を支持する主軸
3は第3図にて示すごとく、一方が後部軸受41により、
他方が前部軸受42によって支承され、カップリングCを
介し、プーリPに係合したVベルト5より駆動力が伝達
される。なお、主軸3に回転中作用する軸方向の推力は
前部スラスト座43、後部スラスト座44でもって規制され
るようになっており、また、前部軸受42と主軸台4、前
部スラスト座43及び後部スラスト座44は主軸3と図示し
ない別途の金具によって固定されている。Of these, in the headstock 4, the spindle 3 that supports the workpiece is, as shown in FIG.
The other end is supported by the front bearing 42, and the driving force is transmitted from the V belt 5 engaged with the pulley P via the coupling C. The axial thrust acting on the spindle 3 during rotation is regulated by the front thrust seat 43 and the rear thrust seat 44, and the front bearing 42, the headstock 4, and the front thrust seat are also regulated. 43 and the rear thrust seat 44 are fixed to the main shaft 3 by a separate metal fitting (not shown).
また、前部軸受42、後部軸受43の内径及びこれら軸受に
よって支承される部位の主軸3の外径は組合せ時の加工
精度をミクロン単位の高精度に仕上げることは極めて困
難であり、しかも、長期にわたる使用によって生ずる微
小な摩耗によってクリアランスが増大し、回転精度に狂
いが生じるといった問題が発生する。このように一旦生
じた摩耗によるクリアランスを調整によって修正するこ
とはセラミック製の主軸3、軸受41、42では不可能であ
ることから、第3図及び第4図に示したように主軸3に
テーパ面A、Bを形成しておき、これらテーパ面にA、
Bをそれぞれ前部軸受42、後部軸受41に形成したテーパ
面で受けることにより主軸3を常に最小、最適のクリア
ランスにて高精度で支承することができる。さらに作用
する軸方向の推力は前部スラスト座43、後部スラスト座
44でもって規制されるようになっており、また前部軸受
42と主軸台4、前部スラスト座43及び後部スラスト座44
は主軸3と図示しない別途の金具によって固定されてい
る。In addition, it is extremely difficult to finish the machining accuracy of the combination of the inner diameters of the front bearing 42 and the rear bearing 43 and the outer diameter of the main shaft 3 supported by these bearings to a high precision of a micron unit. There is a problem that the clearance increases due to the minute wear caused by the continuous use, and the rotation accuracy is disturbed. Since it is impossible for the ceramic main shaft 3 and the bearings 41 and 42 to correct the clearance due to the wear that has once occurred, the main shaft 3 is tapered as shown in FIGS. 3 and 4. Surfaces A and B are formed in advance, and A and B are formed on these tapered surfaces.
Since B is received by the tapered surfaces formed on the front bearing 42 and the rear bearing 41, respectively, the main shaft 3 can be supported with high precision at a minimum and optimum clearance. The axial thrust that acts further is the front thrust seat 43 and the rear thrust seat.
44, and the front bearing
42, headstock 4, front thrust seat 43, and rear thrust seat 44
Are fixed to the main shaft 3 by a separate metal fitting (not shown).
叙上のごとく、構成された装置において、主軸3、該主
軸3を支承する前部軸受42、後部軸受41、主軸台4、前
部スラスト座43、後部スラスト座44などをセラミック材
で形成するが、ここで、本発明工作機械装置の構成部品
を形成するセラミック材には概ね次のような特性を併せ
もつものが要求される。In the device configured as described above, the main shaft 3, the front bearing 42 that supports the main shaft 3, the rear bearing 41, the headstock 4, the front thrust seat 43, the rear thrust seat 44, etc. are formed of a ceramic material. However, the ceramic material forming the constituent parts of the machine tool device of the present invention is required to have a combination of the following characteristics.
機械的強度が大きいこと。High mechanical strength.
耐摩耗性が大きいこと。Great wear resistance.
熱膨張係数が小さく、かつ適性であること。The coefficient of thermal expansion is small and suitable.
金属との組合せ、結合が容易で、かつ適切に行いうる
こと。It should be easy to combine and bond with metal and be able to perform it properly.
振動に対する影響を受け難いこと。Not susceptible to vibration.
などがあるが、このような諸特性をもったセラミック材
の開発、選定には困難を極めたが、本発明者らにより、
従来から存在する多くのセラミック材のうち、窒化珪素
セラミック材が工作機械の主要素を成す主軸、軸受等の
構成に最も適していることを知見した。しかも窒化珪素
セラミック材のうちでも、特に熱膨張係数が3〜5×10
-6/℃の範囲にあり、酸化イットリウム(Y2O3)又は酸
化マグネシウム(MgO)等を主成分とした焼結助剤を添
加後、焼結した窒化珪素セラミックで、常温における曲
げ強度が50kg/mm2(JISによる3点曲げ試験)以上の強
度をもったものが必要である。However, although it was extremely difficult to develop and select a ceramic material having these characteristics, the present inventors
It has been found that, out of many ceramic materials that have existed in the past, a silicon nitride ceramic material is most suitable for the configuration of the main shaft, bearing, etc. that form the main element of a machine tool. Moreover, among the silicon nitride ceramic materials, the coefficient of thermal expansion is particularly 3 to 5 × 10.
It is in the range of -6 / ° C. It is a silicon nitride ceramic that is sintered after adding a sintering aid whose main component is yttrium oxide (Y 2 O 3 ) or magnesium oxide (MgO). It is necessary to have a strength of 50 kg / mm 2 (JIS 3-point bending test) or more.
次に各種セラミック材の微細結晶構造とそれらの特性に
ついて説明する。Next, the fine crystal structures of various ceramic materials and their characteristics will be described.
第1図(A)は、窒化珪素セラミックの結晶構造を模式
的に示し、この結晶粒は針状もしくは長柱状の微細構造
となっており、粒界層としてガラス層が存在し、このた
め後述する他のセラミック材よりも高靭性をもってい
る。FIG. 1 (A) schematically shows the crystal structure of a silicon nitride ceramic, and the crystal grains have a needle-like or long columnar fine structure, and a glass layer exists as a grain boundary layer. It has higher toughness than other ceramic materials.
一方、酸化物系セラミック材料のうち、代表的なアルミ
ナセラミック材の結晶構造は同図(B)に示す如く各結
晶の粒径は平均10μmと比較的大きな結晶組織を成して
おり、そのため常温での曲げ強度は約30kg/mm2で、強度
が足らないばかりでなく、熱膨張係数が6〜8×10-6/
℃と大きく、工作機械の主要部である主軸及び軸受等の
構成材としては不適である。しかし、アルミナセラミッ
ク材は大型品の製造に適しており、かつ主軸を構成する
窒化珪素セラミック材と、主軸台関連部品を構成する金
属製のフランジ、リテーナ等の各種付属品との中間的熱
膨張係数をもつことなどから軸や軸受を保持する主軸台
枠の形成には最も適した材料であった。On the other hand, of the oxide-based ceramic materials, the typical alumina ceramic material has a relatively large crystal structure with an average grain size of 10 μm, as shown in FIG. The bending strength at 30 kg / mm 2 is not only insufficient, but the coefficient of thermal expansion is 6-8 × 10 -6 /
It is as large as ℃ and is unsuitable as a component such as the main shaft and bearing which are the main parts of machine tools. However, alumina ceramic materials are suitable for the production of large-sized products, and the intermediate thermal expansion between the silicon nitride ceramic materials that make up the spindle and various accessories such as metal flanges and retainers that make up the headstock related parts. Since it has a coefficient, it was the most suitable material for forming the spindle stock that holds the shaft and bearings.
また、炭化珪素セラミック材は同図(C)にて示すよう
に結晶粒径が3〜7μm程度のものが一般的であり、焼
結度も高く、高密度の焼結体が得られ、常温における曲
げ強度も約50kg/mm2と比較的大きく、かつ摺動特性も優
れている反面、靭性に乏しく、機械的な衝撃に対する耐
性が小さいため、軸、軸受を構成するセラミック材とし
ては好適なものとは言えない。Further, as shown in FIG. 2C, the silicon carbide ceramic material generally has a crystal grain size of about 3 to 7 μm, has a high degree of sintering, and can obtain a high-density sintered body at room temperature. The flexural strength at about 50 kg / mm 2 is relatively large, and the sliding characteristics are excellent, but it has poor toughness and low resistance to mechanical shock, so it is suitable as a ceramic material for shafts and bearings. Not a thing.
さらに、ジルコニアセラミック材の結晶構造を第1図
(D)にて示すように、このジルコニアセラミック材は
微細な結晶構造を成し、焼結度も高く、高密度の焼結体
となっている。また部分安定化ジルコニアと呼ばれてい
るセラミック材は結晶粒径が0.2〜1.0μ程度であり、常
温における曲げ強度も約80kg/mm2以上と大きいものの、
工作機械の主要部を構成する場合の重要項目である熱膨
張係数が8〜11×10-6/℃と金属材の熱膨張係数に近い
ため、温度上昇に伴う寸法変化が生じ易く、軸や軸受を
構成する材料としては不適当である。Further, as shown in FIG. 1 (D), the crystal structure of the zirconia ceramic material, this zirconia ceramic material has a fine crystal structure, has a high degree of sintering, and is a high-density sintered body. . Also, although the ceramic material called partially stabilized zirconia has a crystal grain size of about 0.2 to 1.0 μ and a bending strength at room temperature of about 80 kg / mm 2 or more,
The coefficient of thermal expansion, which is an important item when configuring the main part of a machine tool, is close to the coefficient of thermal expansion of metal materials, which is 8 to 11 × 10 -6 / ° C. It is unsuitable as a material for the bearing.
また、精度が1μ以下の、いわゆるサブミクロン単位の
超精密加工を行う工作機械を構成するセラミック材とし
ては各種振動からの影響を受け難いことも必要不可欠な
条件であり、その一つとして振動に対する減衰性が重要
なファクターとなる。そこで、代表的なセラミック材で
あるアルミナ、窒化珪素、炭化珪素、サーメット及び比
較材としての鉄鋼材の振動に対する各減衰率を直径20mm
×長さ20mmの棒状サンプルを用い比較解析をした。試験
方法はハンマーにてサンプルに衝撃を与え、サンプルに
あらかじめ取付けたセンサーによりサンプル中に伝わる
衝撃波の減衰率を測定・比較解析を行った結果を第1表
に示す。It is also an essential condition that a ceramic material that constitutes a machine tool that performs so-called sub-micron precision machining with an accuracy of 1 μ or less is not easily affected by various vibrations. Damping is an important factor. Therefore, the typical damping factors for vibration of alumina, silicon nitride, silicon carbide, cermet, and steel materials used as comparative materials are 20 mm in diameter.
× A comparative analysis was performed using a rod-shaped sample having a length of 20 mm. The test method is as follows: Table 1 shows the results of the impact rate of the shock wave transmitted through the sample measured and compared with the sensor attached to the sample in advance by impacting the sample with a hammer.
この表から明らかなように比較したセラミック材料4種
ならびに鉄鋼材料1種計5種のうち、窒化珪素、ならび
に窒化珪素が振動に対する減衰能が大きく、とりわけ窒
化珪素が最もすぐれていることが判る。このことは機械
加工中に生ずるびびり振動に対して窒化珪素製主軸及び
軸受がきわめて有効であることを示している。As is clear from this table, among the four types of ceramic materials and five types of iron and steel materials for comparison, a total of five types, silicon nitride and silicon nitride have a large damping ability against vibration, and it is understood that silicon nitride is the most excellent. This indicates that the silicon nitride main shaft and bearing are extremely effective against chatter vibrations generated during machining.
また主軸及び軸受に使用される最適のセラミック材料評
価のため潤滑油使用時の摺動特性比較試験を実施した。In addition, a sliding characteristic comparison test was carried out when a lubricating oil was used in order to evaluate the optimum ceramic material used for the spindle and bearing.
評価方法としては、直径30mm、厚さ8mmの円環状の試験
片を用い、2ヶの試験片の一方を固定、他方を回転運動
を起こさせた状態にて押圧し、摺動摩耗の比較評価を実
施した。固定片並びに回転片の摩耗体積及び摩耗係数を
測定し、それぞれの試験片について摩耗体積(Vmm)、
押圧荷重(P kg)、すべり走行距離(L mm)より定義される比摩耗量
(V/P×L)を算出、更に総合評価値(固定片の比摩耗
量×摩耗係数×回転片の比摩耗量)にて比較評価を行っ
た。その評価結果を第2表に示す。As an evaluation method, an annular test piece with a diameter of 30 mm and a thickness of 8 mm was used, and one of the two test pieces was fixed and the other was pressed in a rotational motion state, and a comparative evaluation of sliding wear was performed. Was carried out. The wear volume and wear coefficient of the fixed piece and the rotating piece were measured, and the wear volume (Vmm) for each test piece,
Pressing load (P kg) and the specific wear amount (V / P x L) defined by the slip travel distance (L mm), and further into the comprehensive evaluation value (specific wear amount of fixed piece x wear coefficient x specific wear amount of rotating piece) Comparative evaluation was performed. The evaluation results are shown in Table 2.
窒化珪素、炭化珪素、サーメットはアルミナに比べて摺
動特性については格段の優位差がみとめられ、前記3種
の中でも窒化珪素が最もすぐれていた。炭化珪素、サー
メットについては摺動特性も比較的優れていることから
耐摩耗部品としての候補材料として考え得るが、工作機
械の主軸及び軸受の如く機械的強度、靭性、摺動特性並
びに大型部品製造等の難易度等全般的に考慮した場合、
窒化珪素が最もすぐれていることが判明した。Silicon nitride, silicon carbide, and cermet showed a marked difference in sliding characteristics compared to alumina, and silicon nitride was the best among the above three types. Silicon carbide and cermet can be considered as candidate materials for wear resistant parts because they have relatively excellent sliding characteristics, but mechanical strength, toughness, sliding characteristics and manufacturing of large parts such as spindles and bearings of machine tools. When considering the overall difficulty level, etc.,
It turned out that silicon nitride is the best.
さらに窒化珪素材でも製法により、その結晶組織及び特
性に相違があり、種々の窒化珪素材料の比較試験を行
い、工作機械用として適用可能な窒化珪素材は下記の特
性を具備することが必要であることを見い出した。Further, even silicon nitride materials have different crystal structures and characteristics depending on the manufacturing method. A comparative test of various silicon nitride materials is performed, and it is necessary that the silicon nitride material applicable for machine tools has the following characteristics. I found something.
結晶組織が針状もしくは長柱状であること。The crystal structure should be needle-like or long columnar.
熱膨張係数が3.0〜5.0×10-6/℃であること。The coefficient of thermal expansion should be 3.0 to 5.0 × 10 -6 / ° C.
室温における曲げ強度が50kg/mm2(JIS 1601−1981に
よる3点曲げ法)以上であること。The bending strength at room temperature shall be 50kg / mm 2 (3-point bending method according to JIS 1601-1981) or more.
材料の靭性を表す破壊靭性値(KIC)が5.0(IND法)
以上であること。Fracture toughness value (KIC), which represents the toughness of a material, is 5.0 (IND method)
That is all.
材料の強度のバラツキを表すワイブル係数(m)が12
以上であること。Weibull coefficient (m), which represents the variation in material strength, is 12
That is all.
気孔率が0.1%以下であること。Porosity is less than 0.1%.
材料の弾性を表すヤング率(E)が3.0×106kg/cm2以
上であり、かつボアソン比(μ)が0.25以上であるこ
と。そして、これらの特性を有する窒化珪素材は、アル
ミナの製造方法と同様で、窒化珪素に焼結助剤としてY2
O3等の希土類元素の酸化物やアルミナを混ぜ、ボールミ
ルで粉砕して一次原料を作製する。そして、この一次原
料をプレス機に充填してプレスした後、焼成温度を1700
〜1800℃程度とし、2〜3時間程度焼成することで得る
ことができる。Young's modulus (E) representing the elasticity of the material is 3.0 × 10 6 kg / cm 2 or more, and Poisson's ratio (μ) is 0.25 or more. The silicon nitride material having these characteristics is the same as the method for producing alumina, and Y 2 as a sintering aid is added to silicon nitride.
An oxide of a rare earth element such as O 3 and alumina are mixed and crushed by a ball mill to prepare a primary raw material. Then, after filling and pressing this primary raw material in a pressing machine, the firing temperature was set to 1700.
It can be obtained by firing at about 1800 ° C for about 2 to 3 hours.
叙上の如き特性を持たせた窒化珪素材が工作機械部品用
セラミック材として最適であることが判明した。すなわ
ち工作機械用部品として使用する際の機械的衝撃、振動
に対する減衰法、耐摩耗、摺動特性並びに発熱時の寸法
変化を極小におさえる等の効果を有効に発揮する。It has been found that a silicon nitride material having the above-mentioned characteristics is optimal as a ceramic material for machine tool parts. That is, it effectively exerts effects such as a mechanical shock and a damping method against vibration when used as a machine tool part, wear resistance, sliding characteristics, and minimizing dimensional changes during heat generation.
叙上のように本発明によれば、主軸、前部軸受、後部軸
受、主軸台、前部スラスト座、後部スラスト座などのう
ち少なくとも主軸、前部及び後部軸受を前述のセラミッ
ク材のうち低熱膨張係数をもった窒化珪素セラミック材
で構成したことから、軸受とのクリアランスを安定的に
最小、最適値に保持することが可能であり、また回転駆
動力をカップリングを介して主軸後方から伝達する構造
としていることからセラミック製の主軸に過大な曲げ応
力を発生させることがない。As described above, according to the present invention, at least the main shaft, the front bearing, the rear bearing, the headstock, the front thrust seat, the rear thrust seat, and the like have at least a main shaft, a front bearing, and a rear bearing that have a low heat resistance among the above-mentioned ceramic materials. Since it is made of a silicon nitride ceramic material with an expansion coefficient, the clearance with the bearing can be stably maintained at the minimum and optimum values, and the rotational driving force is transmitted from the rear of the main shaft via the coupling. Due to this structure, excessive bending stress is not generated on the ceramic spindle.
このように特別な構造を施すことなく安定した高精度の
回転が得られる。Thus, stable and highly accurate rotation can be obtained without applying a special structure.
さらに前部、後部軸受間で駆動力を伝達する方法にくら
べ上記実施例によれば駆動力は中心軸の延長線上で与え
られるため安定した回転を与えることができる結果、特
別な稼動環境や長い暖機運転を要せず、超精密級の加工
精度をもった工作機械装置をもたらすことができる。Further, according to the above-mentioned embodiment, the driving force is applied on the extension line of the central axis as compared with the method of transmitting the driving force between the front and rear bearings, so that stable rotation can be given, resulting in a special operating environment and a long operating time. It is possible to provide a machine tool device that does not require warm-up operation and has ultra-precision machining accuracy.
第1図は本発明工作機械装置の主要部を構成する窒化珪
素セラミック材と他のセラミック材の結晶状態の例を示
す模式図、第2図は本発明による工作機械装置の実施例
としての旋盤の側面図、第3図は第2図における主軸台
4のみの縦断面図、第4図は同じく第1図における主軸
台4のみの他の実施例の縦断面図である。 1:架台、2:ベッド 3:主軸、4:主軸台 7:サドル、8:スライダFIG. 1 is a schematic view showing an example of a crystal state of a silicon nitride ceramic material and another ceramic material which constitute a main part of the machine tool device of the present invention, and FIG. 2 is a lathe as an embodiment of the machine tool device of the present invention. FIG. 3 is a vertical sectional view of only the headstock 4 in FIG. 2, and FIG. 4 is a vertical sectional view of another embodiment of the headstock 4 only in FIG. 1: Frame, 2: Bed 3: Spindle, 4: Spindle base 7: Saddle, 8: Slider
Claims (1)
盤などの工作機械において、少なくとも被加工物を加工
する側の主軸の端部にテーパ面を形成し、該テーパ面に
対応した軸受で支承するとともに、主軸、主軸台、軸受
のうち少なくとも主軸全体及び軸受を、針状または長柱
状の結晶組織を有し、気孔率が0.1%以下、熱膨張係数
が3.0〜5.0×10-6/℃で、且つ対数減衰率が2.40×10-2
以上の窒化珪素質セラミックスで構成したことを特徴と
する工作機械装置。1. In a machine tool such as a lathe having a main shaft supported by bearings arranged at both ends, a taper surface is formed at least at the end of the main shaft on which a workpiece is machined, and a bearing corresponding to the taper surface is formed. In addition to supporting the main shaft, headstock, and bearing, at least the entire main shaft and bearing have a needle-like or columnar crystal structure, a porosity of 0.1% or less, and a thermal expansion coefficient of 3.0 to 5.0 × 10 -6. / ° C and logarithmic decay rate 2.40 × 10 -2
A machine tool device comprising the above silicon nitride ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59254571A JPH0694085B2 (en) | 1984-11-30 | 1984-11-30 | Machine tool equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59254571A JPH0694085B2 (en) | 1984-11-30 | 1984-11-30 | Machine tool equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61131840A JPS61131840A (en) | 1986-06-19 |
| JPH0694085B2 true JPH0694085B2 (en) | 1994-11-24 |
Family
ID=17266892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59254571A Expired - Fee Related JPH0694085B2 (en) | 1984-11-30 | 1984-11-30 | Machine tool equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694085B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE9419220U1 (en) * | 1994-12-01 | 1995-03-02 | Alfred H. Schütte GmbH & Co. KG, 51105 Köln | Headstock for lathes |
| JPH10277803A (en) * | 1997-03-28 | 1998-10-20 | Sodick Co Ltd | Spindle and spindle device of machine tool |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51133649A (en) * | 1975-05-16 | 1976-11-19 | Toyohiko Naono | Sliding mechanism |
| JPS5641876A (en) * | 1979-09-07 | 1981-04-18 | Tokyo Shibaura Electric Co | Manufacture of ceramic sintered body |
| JPS56139848A (en) * | 1980-03-27 | 1981-10-31 | Makino Milling Mach Co Ltd | Spindle device for machine tool |
-
1984
- 1984-11-30 JP JP59254571A patent/JPH0694085B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61131840A (en) | 1986-06-19 |
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