JPH0694363B2 - Glassy carbon molding - Google Patents
Glassy carbon moldingInfo
- Publication number
- JPH0694363B2 JPH0694363B2 JP61132670A JP13267086A JPH0694363B2 JP H0694363 B2 JPH0694363 B2 JP H0694363B2 JP 61132670 A JP61132670 A JP 61132670A JP 13267086 A JP13267086 A JP 13267086A JP H0694363 B2 JPH0694363 B2 JP H0694363B2
- Authority
- JP
- Japan
- Prior art keywords
- glassy carbon
- aggregate
- temperature
- vinyl chloride
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021397 glassy carbon Inorganic materials 0.000 title claims description 21
- 238000000465 moulding Methods 0.000 title description 4
- 239000011347 resin Substances 0.000 claims description 13
- 229920005989 resin Polymers 0.000 claims description 13
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 claims description 10
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 8
- 238000010304 firing Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 description 15
- 239000004417 polycarbonate Substances 0.000 description 13
- 239000000126 substance Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920000620 organic polymer Polymers 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229920003043 Cellulose fiber Polymers 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 ガラス状炭素は不浸透性、化学的安定性等を有している
ことからパツキン、ルツボ化学プラント、ガスケツト等
に応用されており、特に近年燃料電池のセパレーターの
素材としても注目されている。本発明はこのようなガラ
ス状炭素からなる成形品に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] Glassy carbon has been applied to packing, crucible chemical plants, gaskets and the like because it has impermeability, chemical stability, etc. It is also attracting attention as a material for fuel cell separators. The present invention relates to a molded article made of such glassy carbon.
フラン樹脂等の有機重合体を不活性雰囲気中で焼成して
得られるガラス状の炭素は耐熱性、強度、耐食性、ガス
の排吸着性および液体の不浸透性のいずれにも優れた素
材であり、前記の通り種々の成形品に応用されている
(特開昭59-21512号公報)。Glassy carbon obtained by firing an organic polymer such as furan resin in an inert atmosphere is a material excellent in heat resistance, strength, corrosion resistance, gas exhaust adsorption and liquid impermeability. As described above, it has been applied to various molded products (Japanese Patent Laid-Open No. 59-21512).
ガラス状炭素の強度をさらに高めるためにガラス状炭素
の中にアスベスト、石炭ウール、炭素繊維などの無機質
の繊維を配合したり、または、セルロース繊維などの有
機質の繊維を配合して後に焼成して無機質とする方法が
試みられている(特開昭61-83611号公報)。このような
繊維の配合によつて確かにガラス状炭素成形品の強度は
向上するが、繊維とガラス状炭素との密着性が問題であ
り、密着性不良に起因して、それらの界面で欠け、ひび
割れまたは剥離が発生したり、強度が低下したり、また
ガラスの非通過性が悪化するという欠点があつた。In order to further increase the strength of the glassy carbon, asbestos, coal wool, inorganic fibers such as carbon fibers are blended into the glassy carbon, or organic fibers such as cellulose fibers are blended and then fired. An inorganic method has been tried (Japanese Patent Laid-Open No. 61-83611). Although the strength of the glass-like carbon molded product is certainly improved by the blending of such fibers, the adhesion between the fibers and the glass-like carbon is a problem, and due to poor adhesion, the chips are missing at their interfaces. However, there are drawbacks such as cracking or peeling, lowering of strength, and deterioration of non-passability of glass.
この発明は上記のような欠点のないガラス状炭素成形品
を提供することを目的とする。The object of the present invention is to provide a glassy carbon molded article which does not have the above-mentioned drawbacks.
本発明者らは上記目的を達成するために種々検討を行な
つた結果、ガラス状炭素製造用の有機重合体を炭化して
得られた炭化物を骨材として用いると、ガラス状炭素と
骨材とが同一物質に由来するので、互に親和性があると
考えられ、前記のような密着性不良の問題が生じないで
あろうとの着想を得た。この発明は上記着想をもとにな
されたものである。As a result of various studies to achieve the above-mentioned objects, the present inventors have found that when a carbide obtained by carbonizing an organic polymer for producing glassy carbon is used as an aggregate, the glassy carbon and the aggregate are used. Since and are derived from the same substance, they are considered to have an affinity for each other, and the idea that the problem of poor adhesion as described above will not occur is obtained. The present invention is based on the above idea.
すなわち、この発明は、塩化ビニル樹脂の熱分散生成物
と、塩化ビニル樹脂の熱分解生成物の炭化物からなる骨
材との配合物が焼成されてなるガラス状炭素成形品であ
って、前記熱分解生成物が焼成されたガラス状炭素と焼
成された前記骨材とが融和してなるガラス状炭素成形品
である。That is, the present invention is a glassy carbon molded article obtained by firing a mixture of a heat dispersion product of a vinyl chloride resin and an aggregate made of a carbide of a thermal decomposition product of the vinyl chloride resin, A glassy carbon molded product in which the decomposition product is a mixture of the baked glassy carbon and the baked aggregate.
以下、この発明についてさらに詳しく説明すると、この
発明で用いる有機重合体は塩化ビニル樹脂である。なぜ
なら、塩化ビニル樹脂は、他の有機重合体であるポリビ
ニルアルコール、油溶性フェノール樹脂、アルキルフェ
ノール樹脂、塩素化パラフィン、塩素化ポリプロピレ
ン、酢酸ビニル樹脂、ポリカーボネート等に比べて金属
不純物が少なく、また、得られたガラス状炭素成形品
は、前記密着性にも優れているので、特に用途が半導体
製造用部材である場合に好都合となるからである。Hereinafter, the present invention will be described in more detail. The organic polymer used in the present invention is a vinyl chloride resin. Because vinyl chloride resin has less metal impurities than other organic polymers such as polyvinyl alcohol, oil-soluble phenol resin, alkylphenol resin, chlorinated paraffin, chlorinated polypropylene, vinyl acetate resin, polycarbonate, etc. The glassy carbon molded article thus obtained is also excellent in the above-mentioned adhesiveness, which is advantageous particularly when the application is a member for semiconductor production.
塩化ビニル樹脂の熱分解は、その粒状品又は粉末を不活
性雰囲気下、例えばアルゴンガス中で200〜500℃で30分
以上加熱して行う。その際の望ましい温度・時間は、熱
分解生成物の炭素原子と水素原子の重量比(C/H)が10
〜25となるような条件であり、それはあらかじめ実験に
より定められておくのが良い。このようにして得られた
熱分解生成物はピッチ状物質(以下、PC物質という)で
あり、常温では固体である。The thermal decomposition of the vinyl chloride resin is performed by heating the granular product or powder in an inert atmosphere, for example, in argon gas at 200 to 500 ° C. for 30 minutes or more. The desirable temperature and time for this is that the weight ratio (C / H) of carbon and hydrogen atoms in the thermal decomposition product is 10
It is a condition such that it becomes ~ 25, and it is better to set it in advance by experiments. The thermal decomposition product thus obtained is a pitch-like substance (hereinafter referred to as PC substance) and is a solid at room temperature.
骨材は、前記PC物質の原料として用いた塩化ビニル樹脂
の炭化物である。ここで炭化物とは、完全に炭化したも
のに限られず、むしろ水素原子の一部が残っているもの
が前記密着性の点で好ましい。The aggregate is a carbide of the vinyl chloride resin used as the raw material of the PC substance. Here, the carbide is not limited to the one that is completely carbonized, but rather, one in which a part of hydrogen atoms remains is preferable from the viewpoint of the above-mentioned adhesion.
骨材を得るための熱分解の方法は前記PC物質を得る方法
と同じでよいが、加熱の温度は600℃以上、好ましくは8
00〜1000℃である。加熱の時間は1〜2時間でよい。The method of thermal decomposition for obtaining the aggregate may be the same as the method for obtaining the PC substance, but the heating temperature is 600 ° C. or higher, preferably 8
It is from 00 to 1000 ° C. The heating time may be 1 to 2 hours.
このようにして得られた固形物を粉砕等の方法で粒径を
整える。その形態は直径が50μm以下の球形または不定
形でよく、また、長径500μm以下の棒状または繊維状
でもよい。PC物質に対する骨材の最適配合量は骨材の粒
径、形状等により変るが、用いるPC物質の5倍(重量
比)を越えると不浸透性の点や、均一に成形することが
困難になるなどの点で問題が生じてくる。PC物質と骨材
との配合方法は両者の粉末を常温で混合するか、または
加熱ロールで混練する。成形はロールにより板状または
フイルム状にしたり、また押出成形機でカツプ状等に成
形することもできる。配合および成形時にPC物質に有機
溶剤を加えることによつて粘性を下げてもよい。また、
溶剤を加えてスラリー状にしてドクターブレード法によ
つて板状の成形体を得ることもできる。さらに前記スラ
リーを耐熱性の材料上に流延することもできる。前記溶
剤としては溶解性の点から脂肪族塩素糸の溶剤が好まし
い。The particle size of the solid thus obtained is adjusted by a method such as crushing. The shape may be spherical or amorphous with a diameter of 50 μm or less, and may be rod-like or fibrous with a major axis of 500 μm or less. The optimum amount of aggregate for PC substance varies depending on the particle size and shape of aggregate, but if it exceeds 5 times the weight of PC substance (weight ratio), it becomes impervious and difficult to form uniformly. There is a problem in that The mixing method of the PC substance and the aggregate is to mix both powders at room temperature or knead them with a heating roll. Molding can be performed by using a roll to form a plate or a film, or using an extruder to form a cup or the like. The viscosity may be reduced by adding an organic solvent to the PC material during compounding and molding. Also,
It is also possible to add a solvent to form a slurry and obtain a plate-shaped molded body by the doctor blade method. Further, the slurry can be cast on a heat resistant material. From the viewpoint of solubility, the solvent is preferably an aliphatic chlorine thread solvent.
溶剤を用いて成形した場合には下記焼成の前に比較的低
温(50〜100℃ていど)で乾燥させることが好ましい。In the case of molding using a solvent, it is preferable to dry at a relatively low temperature (50 to 100 ° C.) before firing as described below.
このようにして得られたフイルム、板、カツプ等の成形
体を焼成炉に入れて不活性雰囲気中で加熱することによ
つてガラス状炭素成形品を得る。加熱の条件は常温から
30℃までは5℃/分、300℃から550℃までは1℃/分、
550℃から最終加熱温度までは10℃/分ていどの昇温速
度で昇温し、最終加熱温度で2〜3時間保持してのち室
温まで放冷することが望ましい。昇温速度は製造する成
形品の厚さに関係があり、厚さが厚いほど昇温速度を小
さくする必要がある。最終昇温速度は1000〜1200℃が適
当である。なお、不酸化処理を行なう必要があれば前記
不活性雰囲気中での加熱の前に焼成炉において空気雰囲
気中で150〜350℃の温度で数時間加熱すればよい。The glass, carbon molded product is obtained by placing the molded product such as the film, plate or cup thus obtained in a firing furnace and heating it in an inert atmosphere. Heating conditions are from room temperature
5 ° C / min up to 30 ° C, 1 ° C / min from 300 ° C to 550 ° C,
It is desirable to raise the temperature from 550 ° C. to the final heating temperature at a heating rate of 10 ° C./minute, hold at the final heating temperature for 2 to 3 hours, and then cool to room temperature. The heating rate is related to the thickness of the molded product to be manufactured, and it is necessary to reduce the heating rate as the thickness increases. A final heating rate of 1000 to 1200 ° C is suitable. In addition, if it is necessary to perform the nonoxidizing treatment, it may be heated for several hours at a temperature of 150 to 350 ° C. in an air atmosphere in a firing furnace before the heating in the inert atmosphere.
以下、実施例により本発明を具体的に説明する。Hereinafter, the present invention will be specifically described with reference to examples.
実施例…有機重合体として、電気化学工業(株)製の塩
化ビニル樹脂「SS-110S」を用意した。石英ボートに樹
脂を入れ、窒素ガス雰囲気下390℃で90分熱分解してPC
物質を得た。このPC物質をボールミルで粉砕して平均粒
径2μmの粉末にした。得られたPC物質のC/H比(重量
比)をCHNコーダー(柳本(製)MT−3)で測定した所1
2.5であつた。Example: As an organic polymer, a vinyl chloride resin “SS-110S” manufactured by Denki Kagaku Kogyo Co., Ltd. was prepared. Put the resin in a quartz boat and pyrolyze for 90 minutes at 390 ° C in a nitrogen gas atmosphere to PC.
The substance was obtained. The PC material was crushed by a ball mill to obtain a powder having an average particle size of 2 μm. The C / H ratio (weight ratio) of the obtained PC substance was measured with a CHN coder (Yanagimoto MT-3).
It was 2.5.
いつぽう、前記PC物質の一部を窒素ガス雰囲気下800℃
で2時間焼成して炭化させ、ついでボールミルで粉砕し
て平均粒径2.2μmの粉末にしたものを骨材とした。前
記PC物質の粉末300gと前記骨材1000gを混合し、カレン
ダーロールによりロール温度200℃で加熱混練し、厚さ
5.3mmの薄板を作成した。At some time, a portion of the PC material was placed in a nitrogen gas atmosphere at 800 ° C.
The aggregate was made by firing for 2 hours for carbonization and then pulverizing with a ball mill to obtain a powder having an average particle size of 2.2 μm. 300 g of the powder of the PC substance and 1000 g of the aggregate are mixed, and the mixture is heated and kneaded with a calender roll at a roll temperature of 200 ° C.
A 5.3 mm thin plate was created.
得られた薄板を焼成炉に入れ、まず、空気雰囲気中で17
0℃の温度で5時間、ついで250℃で20時間加熱し、つい
で雰囲気をアルゴンガスで置換し、昇温を始めた。昇温
速度は温度が300℃までは5℃/min、温度が300〜550℃
の間は1℃/min、温度が550〜1200℃の間は10℃/minに
した。温度が1200℃に達したとき昇温を止め、3時間12
00℃の温度を保つたのち放冷した。Put the obtained thin plate in a baking furnace, and first, in an air atmosphere,
The mixture was heated at a temperature of 0 ° C. for 5 hours and then at 250 ° C. for 20 hours, and then the atmosphere was replaced with argon gas to start heating. The heating rate is 5 ℃ / min up to 300 ℃, 300-550 ℃
The temperature was set to 1 ° C / min during the period, and 10 ° C / min during the temperature range of 550 to 1200 ° C. When the temperature reaches 1200 ℃, stop the temperature rise for 3 hours 12
After keeping the temperature of 00 ° C, it was left to cool.
得られた厚さ5mmのガラス状炭素薄板より5枚の試験片
を作成し、それぞれビツカース硬度、通気率、曲げ強度
および弾性率の測定を行ない、そしてSEM観察を行なつ
た。これらの結果は表に示すとおり満足するべきもので
あつた。なお、これらの測定法はつぎの通りである。Five test pieces were prepared from the obtained glassy carbon thin plate having a thickness of 5 mm, and the Vickers hardness, the air permeability, the bending strength and the elastic modulus were measured, and the SEM observation was performed. These results were satisfactory as shown in the table. In addition, these measuring methods are as follows.
a)ビツカース硬度…明石製作所MVKタイプの装置を使
用した。a) Vitzkers hardness ... Akashi Seisakusho MVK type equipment was used.
b)通気率…試験片で2つに仕切られたチヤンバーの両
側を10-7torr以下の真空度にしたのち、片側に1気圧の
ヘリウムガスを流し、反対側の圧力上昇を測定すること
により行なつた。b) Ventilation rate ... After making the vacuum degree of 10 -7 torr or less on both sides of the chamber divided by the test piece, helium gas of 1 atm is flown to one side and the pressure rise on the other side is measured Done.
c)曲げ強度…JIS R7202に従つて測定した。c) Bending strength: Measured according to JIS R7202.
d)弾性率…JIS 7202に従つて測定した。d) Elastic modulus: Measured according to JIS 7202.
比較例 骨材としてイビデン株式会社製の黒鉛T−6P(密度1.90
g/cm3)をボールミルにより平均粒径2.2μmに粉砕した
ものを用いたほかは実施例と同一方法、同一条件で5枚
の試験片を作成し、それぞれ実施例と同じくビツカース
硬度、通気率、曲げ強度および弾性率の測定を行ない,S
EM観察を行なつた。これらの結果は表に示すとおりであ
る。Comparative Example Graphite T-6P manufactured by Ibiden Co., Ltd. (density 1.90 as an aggregate)
g / cm 3 ) was crushed with a ball mill to an average particle size of 2.2 μm, and 5 test pieces were prepared under the same conditions and conditions as in the example. , Bending strength and elastic modulus are measured, S
EM observation was performed. The results are shown in the table.
実施例に比べ第1にビツカース強度が低く、その値のバ
ラツキが大きい。第2にガスの非透過性が劣つている。
さらに、曲げ強度および弾性率が小さい。これらの欠点
は骨材とガラス状炭素との密着性不良に起因するものと
考えられる。First, the Vickers strength is lower than that of the examples, and the variation in the value is large. Second, the gas impermeability is poor.
Furthermore, the bending strength and elastic modulus are small. It is considered that these defects are due to poor adhesion between the aggregate and glassy carbon.
〔発明の効果〕 本発明のガラス状炭素成形品は、ガラス状炭素製造用の
塩化ビニル樹脂を炭化して得られた炭化物を骨材として
用いることにより、骨材とガラス状炭素との密着性が改
善される結果、成形品各部の硬度が安定して高くなり、
曲げ強度および弾性率も高くなる。また、ガスの非透過
性が向上する。 [Effects of the Invention] The glassy carbon molded article of the present invention uses the carbide obtained by carbonizing a vinyl chloride resin for producing glassy carbon as an aggregate to improve the adhesion between the aggregate and the glassy carbon. As a result, the hardness of each part of the molded product is stably increased,
Bending strength and elastic modulus are also increased. In addition, gas impermeability is improved.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭54−41913(JP,A) 特開 昭54−26292(JP,A) ─────────────────────────────────────────────────── --Continued from the front page (56) References JP-A-54-41913 (JP, A) JP-A-54-26292 (JP, A)
Claims (1)
ニル樹脂の熱分解生成物の炭化物からなる骨材との配合
物が焼成されてなるガラス状炭素成形品であって、前記
熱分解生成物が焼成されたガラス状炭素と焼成された前
記骨材とが融和してなるガラス状炭素成形品。1. A glassy carbon molded article obtained by firing a mixture of a thermal decomposition product of a vinyl chloride resin and an aggregate made of a carbide of the thermal decomposition product of a vinyl chloride resin, wherein the thermal decomposition is performed. A glassy carbon molded product in which the product is calcined glassy carbon and the calcined aggregate is integrated.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61132670A JPH0694363B2 (en) | 1986-06-10 | 1986-06-10 | Glassy carbon molding |
| US07/048,754 US4816338A (en) | 1986-06-10 | 1987-05-12 | Glassy carbon-coated article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61132670A JPH0694363B2 (en) | 1986-06-10 | 1986-06-10 | Glassy carbon molding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62292610A JPS62292610A (en) | 1987-12-19 |
| JPH0694363B2 true JPH0694363B2 (en) | 1994-11-24 |
Family
ID=15086750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61132670A Expired - Lifetime JPH0694363B2 (en) | 1986-06-10 | 1986-06-10 | Glassy carbon molding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694363B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426292A (en) * | 1977-07-30 | 1979-02-27 | Osaka Soda Co Ltd | Carbonaceous film |
| JPS5441913A (en) * | 1977-09-09 | 1979-04-03 | Kanebo Ltd | Carbonncarbon composite material and method of making same |
-
1986
- 1986-06-10 JP JP61132670A patent/JPH0694363B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62292610A (en) | 1987-12-19 |
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