JPH0694921B2 - Boiler control method and device - Google Patents
Boiler control method and deviceInfo
- Publication number
- JPH0694921B2 JPH0694921B2 JP25046489A JP25046489A JPH0694921B2 JP H0694921 B2 JPH0694921 B2 JP H0694921B2 JP 25046489 A JP25046489 A JP 25046489A JP 25046489 A JP25046489 A JP 25046489A JP H0694921 B2 JPH0694921 B2 JP H0694921B2
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- Prior art keywords
- flow rate
- deviation
- medium
- temperature
- heated
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Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は、複数の加熱炉を通過する各被加熱媒体を合わ
せてドラムに供給し、該ドラムから蒸気を発生させるボ
イラの制御方法及びその装置に関し、特に、各加熱炉に
供給する被加熱媒体の流量を調節して、各加熱炉を通過
する被加熱媒体の温度を制御し、ボイラの効率的な運転
を行なわせるようにしたボイラの制御方法とその装置に
関する。Description: TECHNICAL FIELD The present invention relates to a boiler control method for supplying a heating medium that passes through a plurality of heating furnaces together to a drum, and generating steam from the drum, and a method thereof. Regarding the apparatus, in particular, the flow rate of the medium to be heated supplied to each heating furnace is adjusted to control the temperature of the medium to be heated that passes through each heating furnace, and to efficiently operate the boiler. The present invention relates to a control method and its device.
[従来の技術] 石油精製,石油化学,製鉄,製紙あるいは原子力発電等
の各種プラントにおいては、投入エネルギの減少による
コストダウンを図るため、種々の熱回収手段を採用して
いる。例えば、石油精製プラントにあっては、加熱炉の
燃焼廃ガスが多いことから、複数の加熱炉の廃ガスより
熱回収を行ない蒸気を得るようにしたボイラが用いられ
ている。[Prior Art] In various plants such as oil refining, petrochemical, steelmaking, papermaking, and nuclear power generation, various heat recovery means are adopted in order to reduce costs by reducing input energy. For example, in an oil refining plant, there is a large amount of combustion exhaust gas from the heating furnace, so a boiler is used that recovers heat from the exhaust gas from a plurality of heating furnaces to obtain steam.
ところで、従来、複数の加熱炉から熱回収した被加熱媒
体によって蒸気を発生させるボイラにおいては、各被加
熱媒体の温度制御を第3図に示すような装置を用いて行
なっていた。By the way, conventionally, in a boiler in which steam is generated by a heated medium that has been heat-recovered from a plurality of heating furnaces, temperature control of each heated medium has been performed using an apparatus as shown in FIG.
すなわち、同図において、1は被加熱媒体(例えば、
水)の供給部、2a,2b,2cは被加熱媒体を加熱する加熱
炉、3は熱回収して高温状態にある被加熱媒体のドラム
であり、これらによってボイラを形成している。また、
11a,11b,11cは各加熱炉2a,2b,2cを通過する被加熱媒体
の入口側の流量計、12a,12b,12cは同じく流量調節弁、1
3a,13b,13cは同じく出口側の温度計、14はドラムのレベ
ル検出器、24は流量計11bとレベル検出器14の出力信号
の差に応じた信号を流量調節弁12bに出力する流量比較
器であり、これらにより制御装置を構成している。That is, in the figure, 1 is a medium to be heated (for example,
Water) supply parts 2a, 2b, 2c are heating furnaces for heating the medium to be heated, and 3 is a drum of the medium to be heated which is in a high temperature state after heat recovery, and these form a boiler. Also,
11a, 11b, 11c are flowmeters on the inlet side of the heating medium passing through the heating furnaces 2a, 2b, 2c, 12a, 12b, 12c are also flow rate control valves, 1
3a, 13b, 13c are thermometers on the outlet side, 14 is a drum level detector, 24 is a flow rate comparison that outputs a signal corresponding to the difference between the output signals of the flowmeter 11b and the level detector 14 to the flow rate control valve 12b. It is a container and constitutes a control device by these.
そして、このような装置を用いた、従来の温度制御は、
一基の加熱炉2bにおける供給系のみドラムレベルとカス
ケード制御させた流量調節により行ない、他の加熱炉2
a,2bの供給系は、操作員の設定にもとづいた流量調節に
より行なっていた。And the conventional temperature control using such a device is
Only the supply system in one heating furnace 2b is controlled by the drum level and the flow rate controlled by cascade control, and the other heating furnaces 2b
The supply system for a and 2b was controlled by adjusting the flow rate based on the operator's settings.
[発明が解決しようとする課題] 上述した従来の温度制御によると、次のような問題があ
った。[Problems to be Solved by the Invention] The conventional temperature control described above has the following problems.
一基は、ボイラのドラムレベルとのカスケード制御の
ための、他の加熱炉の影響を受け、対応する加熱炉負荷
に適合した被加熱媒体の供給を行なえず、被加熱媒体の
温度に大きなばらつきを生じるとともに、その温度も飽
和温度に達しないことがしばしばある。One is affected by other heating furnaces for the cascade control with the drum level of the boiler, and cannot supply the heated medium suitable for the corresponding heating furnace load, resulting in large variations in the temperature of the heated medium. And often does not reach saturation temperature.
他の二基は、操作員の判断による制御のため、加熱炉
負荷に適合して正確かつ迅速な流量調節を行なえず、熱
回収率が低くい。Since the other two units are controlled by the operator's judgment, they cannot adjust the flow rate accurately and quickly in accordance with the heating furnace load, and the heat recovery rate is low.
被加熱媒体の流量調節はステップ応答であり、被加熱
媒体の加熱状態を確認しながら行なうため、調節に多大
の時間を要する。The adjustment of the flow rate of the medium to be heated is a step response and is performed while checking the heating state of the medium to be heated, so that it takes a lot of time for the adjustment.
本発明は上記の問題点にかんがみてなされたもので、複
数の加熱炉の各供給系に、各加熱炉の負荷に適合した流
量だけ被加熱媒体を自動的に供給することにより、人手
を要さず、熱回収を効率的に行なえるようにしたボイラ
の制御方法とその装置の提供を目的とする。The present invention has been made in view of the above problems, and requires manual labor by automatically supplying a medium to be heated to each supply system of a plurality of heating furnaces at a flow rate suitable for the load of each heating furnace. In other words, it is an object of the present invention to provide a boiler control method and an apparatus therefor capable of efficiently recovering heat.
[課題を解決するための手段] 上記目的を達成するため、複数の各加熱炉を通過する各
被加熱媒体を合わせてドラムに供給し、該ドラムから蒸
気を発生させるボイラの本発明制御方法は、上記ボイラ
ドラムの目標値レベルと現在値レベルの偏差を検出し、
かつ、前記複数の被加熱媒体の加重平均温度を算出し、
この加重平均温度と上記各被加熱媒体温度との偏差をそ
れぞれ求め、これら各被加熱媒体の温度偏差と上記レベ
ル偏差とをそれぞれ加減して各被加熱媒体の目標流量を
求め、これら各目標流量と各被加熱媒体の現在流量との
偏差を求めるとともに、この偏差に応じて各被加熱媒体
の流量を調節することにより行なう。[Means for Solving the Problems] In order to achieve the above-mentioned object, the present invention control method for a boiler, in which each medium to be heated passing through a plurality of heating furnaces is supplied to a drum together and steam is generated from the drum, , Detecting the deviation between the target value level and the current value level of the boiler drum,
And, calculating the weighted average temperature of the plurality of heated medium,
The deviation between the weighted average temperature and the temperature of each heated medium is obtained, and the temperature deviation of each heated medium and the level deviation are adjusted to obtain the target flow rate of each heated medium. And the current flow rate of each medium to be heated are obtained, and the flow rate of each medium to be heated is adjusted in accordance with the difference.
また、上記制御方法を実施するためのボイラ制御装置
は、上記ボイラドラムの目標値レベルと現在値レベルの
偏差を検出するレベル検出器、前記複数の加熱炉を通過
する被加熱媒体の加重平均温度を算出する平均温度演算
器、この平均温度演算器からの信号と、各被加熱媒体の
温度検出器からの信号とを比較して両者の温度偏差を求
める温度比較器、各温度比較器からの偏差信号と、上記
レベル検出器からの偏差信号を加減して各被加熱媒体の
目標流量を求める信号加減器、各信号加減器で求めた目
標流量と、各被加熱媒体の現在流量を比較して両者の流
量偏差を求める流量比較器、各流量比較器からの偏差信
号に応じて各被加熱媒体の流量を調節する流量調節弁と
で構成してある。Further, the boiler control device for carrying out the control method is a level detector for detecting a deviation between a target value level and a current value level of the boiler drum, a weighted average temperature of a heated medium passing through the plurality of heating furnaces. The average temperature calculator for calculating the temperature difference, the signal from this average temperature calculator and the signal from the temperature detector of each medium to be heated are compared to obtain the temperature deviation between them, The deviation signal and the deviation signal from the level detector are added and subtracted to obtain the target flow rate of each medium to be heated.The signal flow adjuster, the target flow rate obtained by each signal subtractor and the current flow rate of each medium to be heated are compared. And a flow rate control valve that adjusts the flow rate of each medium to be heated according to the deviation signal from each flow rate comparator.
[作用] 本発明のボイラ制御方法とその装置によれば、複数の加
熱炉の各加熱炉負荷に適合した流量だけ各供給系へ被加
熱媒体を供給することが可能となり、各供給系の被加熱
媒体の温度を平均化し、かつ飽和温度もしくは、飽和温
度に近づけることができる。[Operation] According to the boiler control method and the apparatus thereof of the present invention, it becomes possible to supply the medium to be heated to each supply system at a flow rate suitable for each heating furnace load of the plurality of heating furnaces, and the target system of each supply system can be supplied. It is possible to average the temperature of the heating medium and bring it to or close to the saturation temperature.
[実施例] 以下、本発明の実施例について説明する。[Examples] Examples of the present invention will be described below.
まず、第1図にもとづいて制御装置の実施例について説
明する。First, an embodiment of the control device will be described with reference to FIG.
同図において、被加熱媒体供給部1,複数の加熱炉2a,2b,
2c、ボイラドラム3、流量計11a,11b,11c、流量調節弁1
2a,12b,12c、温度計13a,13b,13c、レベル検出器14は従
来のものと同じである。なお、本発明における被加熱媒
体としては、水,アンモニア,フロン等を用いることが
でき、特に水を用いることが好ましい。また、加熱炉2
a,2b,2cとしては、廃ガス回収加熱炉,燃焼炉等を挙げ
ることができる。In the figure, the heating medium supply unit 1, a plurality of heating furnaces 2a, 2b,
2c, boiler drum 3, flow meters 11a, 11b, 11c, flow control valve 1
2a, 12b, 12c, thermometers 13a, 13b, 13c, and level detector 14 are the same as conventional ones. As the medium to be heated in the present invention, water, ammonia, chlorofluorocarbon, etc. can be used, and water is particularly preferable. Also, heating furnace 2
Examples of a, 2b and 2c include a waste gas recovery heating furnace and a combustion furnace.
また、同図において、15は平均温度演算器であり、各供
給系の加熱炉2a,2b,2cを通過してきた各被加熱媒体の加
重平均温度を算出する。加重平均温度の算出は、各供給
系を通過する被加熱媒体の流量と温度を、それぞれの流
量計11a,11b,11cと、温度計13a,13b,13cで検出し、これ
らのデータにもとづいて行なう。すなわち、各供給系を
通過する被加熱媒体の流量をA,B,C、また、温度をTa,T
b,Tcとすると、 で求めることができる。Further, in the figure, reference numeral 15 denotes an average temperature calculator, which calculates a weighted average temperature of each heated medium that has passed through the heating furnaces 2a, 2b, 2c of each supply system. The weighted average temperature is calculated by detecting the flow rate and temperature of the heated medium passing through each supply system with respective flow meters 11a, 11b, 11c and thermometers 13a, 13b, 13c, and based on these data. To do. That is, the flow rate of the heated medium passing through each supply system is A, B, C, and the temperature is Ta, T.
If b and Tc, Can be found at.
16a,16b,16cは各供給系における温度比較器であり、各
温度計13a,13b,13cにおいて検出した現在の温度と、平
均温度演算器15において算出した温度との偏差をそれぞ
れ求める。Reference numerals 16a, 16b, 16c are temperature comparators in each supply system, and find the deviation between the current temperature detected by each thermometer 13a, 13b, 13c and the temperature calculated by the average temperature calculator 15, respectively.
17a,17b,17cは各供給系における信号加減器であり、各
温度比較器13a,13b,13cからの偏差信号と、レベル検出
器14からの偏差信号を加減算して、各加熱炉2a,2b,2cに
供給する被加熱媒体の目標流量を求める。17a, 17b, 17c is a signal adjuster in each supply system, the deviation signal from each temperature comparator 13a, 13b, 13c, and the deviation signal from the level detector 14 is added and subtracted, each heating furnace 2a, 2b , 2c to obtain the target flow rate of the heated medium.
18a,18b,18cは各供給系における流量比較器であり、各
信号加減器17a,17b,17cからの目標流量信号と、各加熱
炉2a,2b,2cに実際に供給されている被加熱媒体の流量を
比較し、その偏差に応じた信号を各供給系の流量調節弁
12a,12b,12cに出力する。各流量調節弁12a,12b,12cは、
上記出力に応じて開閉動作を行なう。18a, 18b, 18c is a flow rate comparator in each supply system, the target flow rate signal from each signal regulator 17a, 17b, 17c, and the heating medium actually supplied to each heating furnace 2a, 2b, 2c Flow rate of each supply system by comparing the flow rate of each
Output to 12a, 12b, 12c. Each flow control valve 12a, 12b, 12c,
The opening / closing operation is performed according to the output.
次に、上述したボイラ制御装置例を使用して行なう本発
明制御方法の実施例を説明する。Next, an embodiment of the control method of the present invention, which is performed by using the above-described boiler control device, will be described.
ボイラドラムの目標レベルと現在レベルの偏差を、レ
ベル検出器14によって求める。The level detector 14 calculates the deviation between the target level and the current level of the boiler drum.
各温度計13a,13b,13cからの各加熱炉2a,2b,2cの出口
側における被加熱媒体の温度を平均温度演算器15に刻々
入力し、これら被加熱媒体の加重平均温度を算出する。The temperature of the medium to be heated on the outlet side of each heating furnace 2a, 2b, 2c from each thermometer 13a, 13b, 13c is input to the average temperature calculator 15 every moment, and the weighted average temperature of these mediums to be heated is calculated.
平均温度演算器15で求めた加重平均温度と、各加熱炉
2a,2b,2cを通過してきた各被加熱媒体の現在温度とを各
温度比較器16a,16b,16cで比較し、各供給系における被
加熱媒体の温度差を求める。Weighted average temperature calculated by average temperature calculator 15 and each heating furnace
The current temperature of each heated medium that has passed through 2a, 2b, 2c is compared with each temperature comparator 16a, 16b, 16c to obtain the temperature difference of the heated medium in each supply system.
各温度比較器16a,16b,16cで求めた温度の偏差信号
と、上記のレベルの偏差信号を各信号加減器17a,17b,17
cで加減算し、各加熱炉2a,2b,2cの負荷に適合した被加
熱媒体の流量、すなわち各供給系における被加熱媒体の
目標流量を求める。The temperature deviation signal obtained by each temperature comparator 16a, 16b, 16c and the deviation signal at the above-mentioned level are applied to each signal adder / subtractor 17a, 17b, 17
c is added and subtracted to obtain the flow rate of the medium to be heated that matches the load of each heating furnace 2a, 2b, 2c, that is, the target flow rate of the medium to be heated in each supply system.
各信号加減器17a,17b,17cで求めた被加熱媒体の目標
流量と、各流量計11a,11b,11cで検出した被加熱媒体の
現在流量とを比較し、各供給系における被加熱媒体の流
量偏差を求める。The target flow rate of the heated medium obtained by each signal regulator 17a, 17b, 17c and the current flow rate of the heated medium detected by each flow meter 11a, 11b, 11c are compared, and the heating medium in each supply system is Calculate the flow deviation.
各信号加減器17a,17b,17cで求めた被加熱媒体の流量
偏差に応じて各流量調節弁12a,12b,12cを作動させ、各
供給系の加熱炉2a,2b,2cに流れる流量を調節する。Operate each flow rate control valve 12a, 12b, 12c according to the flow rate deviation of the medium to be heated obtained by each signal regulator 17a, 17b, 17c, and adjust the flow rate to the heating furnaces 2a, 2b, 2c of each supply system. To do.
これにより、各供給系の加熱炉2a,2b,2cへ、加熱炉の負
荷に適合した流量の被加熱媒体を供給できる。この結
果、各加熱炉2a,2b,2cからドラム3へ供給される被加熱
媒体の温度を飽和温度に近い状態で平均化できる。As a result, the medium to be heated can be supplied to the heating furnaces 2a, 2b, 2c of each supply system at a flow rate suitable for the load of the heating furnace. As a result, the temperature of the medium to be heated supplied from each heating furnace 2a, 2b, 2c to the drum 3 can be averaged in a state close to the saturation temperature.
第2図は、本制御方法によって得られた、被加熱媒体の
温度変化を示し、第4図に上記従来例によって得られた
被加熱媒体の温度変化を示す。FIG. 2 shows the temperature change of the heated medium obtained by this control method, and FIG. 4 shows the temperature change of the heated medium obtained by the conventional example.
第2及び4図に示すグラフは、加熱炉2a,2b,2c三基の燃
料ガス使用量を70〜120(NKm3/日)、ボイラドラム圧力
を21(Kg/cm2・G)、被加熱媒体として低純水を用いた
ときのものである。The graphs shown in Figs. 2 and 4 show that the fuel gas consumption of the three heating furnaces 2a, 2b, 2c is 70 to 120 (NKm 3 / day), the boiler drum pressure is 21 (Kg / cm 2 · G), This is when low pure water was used as the heating medium.
この結果、従来に比べて本発明は、給水温度のばらつき
が15℃から3℃となり、かつ給水温度が平均213℃から
約220℃となり、しかもボイラドラム圧力下での飽和状
態に達した。As a result, in the present invention, the variation of the feed water temperature was changed from 15 ° C. to 3 ° C., the average feed water temperature was changed from 213 ° C. to about 220 ° C., and the saturated state under the boiler drum pressure was reached.
なお、蒸気発生量は、同じ燃料ガス使用量に対し約2ton
/hr増えた。これは従来の平均蒸気発生量の約10%アッ
プであった。The amount of steam generated is about 2 tons for the same amount of fuel gas used.
/ hr increased. This was about 10% higher than the conventional average steam generation rate.
[発明の効果] 以上のように本発明のボイラ制御方法によれば、各加熱
炉の負荷に適合した流量だけ被加熱媒体を自動的に供給
することにより、人手を要さず、熱回収を効率的に行な
うことができる。[Effects of the Invention] As described above, according to the boiler control method of the present invention, heat is automatically recovered by automatically supplying the medium to be heated at a flow rate suitable for the load of each heating furnace, so that heat recovery is possible. It can be done efficiently.
また、本発明のボイラ制御装置によれば、上記制御方法
を確実に実施できる。Further, according to the boiler control device of the present invention, the above control method can be reliably implemented.
第1図は本発明ボイラ制御装置の一実施例を示すブロッ
ク図、第2図は本発明ボイラ制御方法の一実施例による
制御結果を示すグラフ、第3図は従来装置を示すブロッ
ク図、第4図は従来例制御方法による制御結果を示すグ
ラフである。 1:被加熱媒体供給部 2a,2b,2c:加熱炉 3:ボイラドラム 11a,11b,11c:流量計 12a,12b,12c:流量調節弁 13a,13b,13c:温度計 14:レベル検出器 15:平均温度演算器 16a,16b,16c:温度比較器 17a,17b,17c:信号加減器 18a,18b,18c:流量比較器。FIG. 1 is a block diagram showing an embodiment of a boiler control device of the present invention, FIG. 2 is a graph showing a control result by an embodiment of the boiler control method of the present invention, and FIG. 3 is a block diagram showing a conventional device. FIG. 4 is a graph showing the control result by the conventional control method. 1: Heated medium supply part 2a, 2b, 2c: Heating furnace 3: Boiler drum 11a, 11b, 11c: Flow meter 12a, 12b, 12c: Flow control valve 13a, 13b, 13c: Thermometer 14: Level detector 15 : Average temperature calculator 16a, 16b, 16c: Temperature comparator 17a, 17b, 17c: Signal adjuster 18a, 18b, 18c: Flow comparator.
Claims (3)
合わせてドラムに供給し、該ドラムから蒸気を発生させ
るボイラの制御方法において、 上記ボイラドラムの目標値レベルと現在値レベルの偏差
を検出し、 かつ、前記複数の被加熱媒体の加重平均温度を算出し、
この加重平均温度と上記各被加熱媒体温度との偏差をそ
れぞれ求め、 これら各被加熱媒体の温度偏差と上記レベル偏差とをそ
れぞれ加減して各被加熱媒体の目標流量を求め、 さらに、各被加熱媒体の各目標流量と現在流量との偏差
を求めるとともに、この偏差に応じて各被加熱媒体の流
量を調節することを特徴としたボイラ制御方法。Claim: What is claimed is: 1. A method for controlling a boiler in which heating mediums passing through a plurality of heating furnaces are combined and supplied to a drum, and steam is generated from the drum, wherein a target value level and a current value level of the boiler drum are controlled. Detecting the deviation, and calculating the weighted average temperature of the plurality of heated media,
The deviation between the weighted average temperature and the temperature of each heated medium is obtained, and the temperature deviation of each heated medium and the level deviation are respectively adjusted to obtain the target flow rate of each heated medium. A boiler control method characterized in that a deviation between each target flow rate of a heating medium and a current flow rate is obtained, and the flow rate of each heating medium is adjusted according to the deviation.
わせてボイラに供給し、該ボラムから蒸気を発生させる
ボイラの制御装置において、 上記ボイラドラムの目標値レベルと現在値レベルの偏差
を検出するレベル検出器、 前記複数の加熱炉を通過する被加熱媒体の加重平均温度
を算出する平均温度演算器、 この平均温度演算器からの信号と、各被加熱媒体の温度
検出器からの信号とを比較して両者の温度偏差を求める
温度比較器、 各温度比較器からの偏差信号と、上記レベル検出器から
の偏差信号を加減して各被加熱媒体の目標流量を求める
信号加減器、 各信号加減器で求めた目標流量と、各被加熱媒体の現在
流量を比較して両者の流量偏差を求める流量比較器、 各流量比較器からの偏差信号に応じて各被加熱媒体の流
量を調節する流量調節弁、 とからなることを特徴とするボイラ制御装置。2. A controller for a boiler that supplies heated media passing through a plurality of heating furnaces together to a boiler to generate steam from the boiler, wherein a deviation between a target value level and a current value level of the boiler drum is provided. A level detector for detecting the average temperature calculator for calculating the weighted average temperature of the heated medium passing through the plurality of heating furnaces, a signal from the average temperature calculator, and a temperature detector for each heated medium. A temperature comparator that compares the signals with each other to determine the temperature deviation between them, and a signal adjuster that calculates the target flow rate of each medium to be heated by adjusting the deviation signal from each temperature comparator and the deviation signal from the level detector. , The target flow rate obtained by each signal adjuster and the current flow rate of each heated medium are compared to obtain the flow rate deviation between the two, the flow rate of each heated medium according to the deviation signal from each flow rate comparator Flow to adjust Regulating valve, boiler control device characterized by comprising the city.
徴とした請求項2記載のボイラ制御装置。3. The boiler control device according to claim 2, wherein the heating furnace is a waste gas recovery heating furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25046489A JPH0694921B2 (en) | 1989-09-28 | 1989-09-28 | Boiler control method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25046489A JPH0694921B2 (en) | 1989-09-28 | 1989-09-28 | Boiler control method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03113201A JPH03113201A (en) | 1991-05-14 |
| JPH0694921B2 true JPH0694921B2 (en) | 1994-11-24 |
Family
ID=17208262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25046489A Expired - Lifetime JPH0694921B2 (en) | 1989-09-28 | 1989-09-28 | Boiler control method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694921B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4312220A1 (en) | 2022-07-28 | 2024-01-31 | Jeol Ltd. | Sample analyzing apparatus and method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6693287B2 (en) * | 2016-06-15 | 2020-05-13 | 三浦工業株式会社 | Steam heating system |
| CN111967532B (en) * | 2020-09-02 | 2024-11-08 | 深圳市佳运通电子有限公司 | Oilfield heating furnace abnormality detection method and system and related equipment |
-
1989
- 1989-09-28 JP JP25046489A patent/JPH0694921B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4312220A1 (en) | 2022-07-28 | 2024-01-31 | Jeol Ltd. | Sample analyzing apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03113201A (en) | 1991-05-14 |
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